Junjie Wang, Fei Zhang, M. Pu, Ling Liu, Shilin Luo, Ping Gao, Xiangang Luo
We report a lightweight metasurface with wide field of view (FOV), which can calculate incident angle by the focus of the sun for navigation. The solar altitude angle and solar azimuth angle for navigation can be resolved with converting the coordinate system to connect the sun with the focus. The designed metasurface overcomes bulky devices and bad weather owing to the fact that the metasurface operates at short-wavelength infrared band (SWIR) that penetrates smoke and fog.
{"title":"Tracking the sun's direction with a wide-angle metasurface for navigation","authors":"Junjie Wang, Fei Zhang, M. Pu, Ling Liu, Shilin Luo, Ping Gao, Xiangang Luo","doi":"10.1117/12.2604698","DOIUrl":"https://doi.org/10.1117/12.2604698","url":null,"abstract":"We report a lightweight metasurface with wide field of view (FOV), which can calculate incident angle by the focus of the sun for navigation. The solar altitude angle and solar azimuth angle for navigation can be resolved with converting the coordinate system to connect the sun with the focus. The designed metasurface overcomes bulky devices and bad weather owing to the fact that the metasurface operates at short-wavelength infrared band (SWIR) that penetrates smoke and fog.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122862904","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Silicon aspherical optics are of widely used these years with the development of the improvement of optical manufacturing and testing technologies. Single point diamond turning for silicon aspherical optics can obtain high surface precision. However, the surface microscopic quality is difficult to reach the ideal specification, caused by the limitation of material characteristics. An experimental study on the combined manufacturing technology of single point diamond turning and polishing has been carried out and proposed in this paper. The optimum turning parameters of the main factors affecting the micro-nano quality of silicon diamond turning surface, such as cutting depth, spindle speed and feeding speed, were obtained by orthogonal experiments. After polishing, the surface roughness was reduced from 5.35 nm to 1.16 nm. Meanwhile, the PSD was improved obviously. The combined manufacturing technology can be applied for high precision silicon aspherical optics.
{"title":"Study on combined manufacturing technology for high precision silicon aspherical optics","authors":"Bin Xuan, Peng Wang, Kun Yang","doi":"10.1117/12.2604550","DOIUrl":"https://doi.org/10.1117/12.2604550","url":null,"abstract":"Silicon aspherical optics are of widely used these years with the development of the improvement of optical manufacturing and testing technologies. Single point diamond turning for silicon aspherical optics can obtain high surface precision. However, the surface microscopic quality is difficult to reach the ideal specification, caused by the limitation of material characteristics. An experimental study on the combined manufacturing technology of single point diamond turning and polishing has been carried out and proposed in this paper. The optimum turning parameters of the main factors affecting the micro-nano quality of silicon diamond turning surface, such as cutting depth, spindle speed and feeding speed, were obtained by orthogonal experiments. After polishing, the surface roughness was reduced from 5.35 nm to 1.16 nm. Meanwhile, the PSD was improved obviously. The combined manufacturing technology can be applied for high precision silicon aspherical optics.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"83 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123997250","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
As a precision instrument of wavelength magnitude, interferometer plays an important role in the production of optical lenses, and it is an important instrument for optical profile detection. Based on the polarization Twyman-Green interferometer, the experimental device of surface detection is built. By analyzing the problems in the experimental process, the following improvements are made on the original basis: firstly, when using the dual optical path system to collect fringes, it is found that the interference of air has a great impact on the image quality, so we refer to the principle of Fizeau interference, In order to improve the anti-interference ability of the whole system, the double optical path structure of the Twyman-Green interferometer is combined into a common optical path structure. Secondly, because the detection aperture and surface type will be greatly limited by the standard mirror, so based on the previous research of the research group, this design designs a large F number and long focal length standard mirror for the detection of different lenses, especially the convex mirror. Finally, in order to improve the contrast of interference fringes, a plane mirror film with suitable transmittance and reflectance ratio is designed by using optical coating software to improve the contrast of interference fringes.
{"title":"Design of interferometer system with common optical path structure","authors":"Zhiqiang Lin, Yuting Wu, D. Lian, Min Wang","doi":"10.1117/12.2603958","DOIUrl":"https://doi.org/10.1117/12.2603958","url":null,"abstract":"As a precision instrument of wavelength magnitude, interferometer plays an important role in the production of optical lenses, and it is an important instrument for optical profile detection. Based on the polarization Twyman-Green interferometer, the experimental device of surface detection is built. By analyzing the problems in the experimental process, the following improvements are made on the original basis: firstly, when using the dual optical path system to collect fringes, it is found that the interference of air has a great impact on the image quality, so we refer to the principle of Fizeau interference, In order to improve the anti-interference ability of the whole system, the double optical path structure of the Twyman-Green interferometer is combined into a common optical path structure. Secondly, because the detection aperture and surface type will be greatly limited by the standard mirror, so based on the previous research of the research group, this design designs a large F number and long focal length standard mirror for the detection of different lenses, especially the convex mirror. Finally, in order to improve the contrast of interference fringes, a plane mirror film with suitable transmittance and reflectance ratio is designed by using optical coating software to improve the contrast of interference fringes.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"64 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124234599","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Photonic integrated circuits (PICs) as potential candidate to overcome the “von Neumann bottleneck” of current electronic technologies beyond Moore’s law gain increasing applications in fields of optical communication, data exchange and highperformance interconnect networks etc. Currently, elementary active devices such as photonic switches and modulators play essential roles in light-flow control of optical interconnection network, but suffer from high static power consumption because of volatile control and large footprint that is hard to integrate. In this trend, optical phase change materials (OPCMs) based active devices emerge as promising solutions due to advantages of large optical contrast between the amorphous and crystalline states, optically or electrically switchable and non-volatile control, easy to integration etc. In this paper, we propose a non-volatile O-PCMs photonic switch by integrating a thin film of germanium antimony telluride (GST) alloy on top of a micro-ring resonator. As confirmed by our analytical and computational results, upon an amorphous-to-crystalline phase change, two output ports of the O-PCM microring switch exhibit gigantic transmission contrast with a ratio up to highest 47:1. Further, the O-PCM based photonic switch also demonstrates extremely low extinction ration to 13.58 dB and 14.40 dB for both output ports from 1.5 μm to 1.6 μm.
{"title":"Nonvolatile silicon photonic 1×2 switch by integrating the phase change chalcogenide into microring network","authors":"Ziyang Ye, Ruirui Song, Shaolin Zhou","doi":"10.1117/12.2603934","DOIUrl":"https://doi.org/10.1117/12.2603934","url":null,"abstract":"Photonic integrated circuits (PICs) as potential candidate to overcome the “von Neumann bottleneck” of current electronic technologies beyond Moore’s law gain increasing applications in fields of optical communication, data exchange and highperformance interconnect networks etc. Currently, elementary active devices such as photonic switches and modulators play essential roles in light-flow control of optical interconnection network, but suffer from high static power consumption because of volatile control and large footprint that is hard to integrate. In this trend, optical phase change materials (OPCMs) based active devices emerge as promising solutions due to advantages of large optical contrast between the amorphous and crystalline states, optically or electrically switchable and non-volatile control, easy to integration etc. In this paper, we propose a non-volatile O-PCMs photonic switch by integrating a thin film of germanium antimony telluride (GST) alloy on top of a micro-ring resonator. As confirmed by our analytical and computational results, upon an amorphous-to-crystalline phase change, two output ports of the O-PCM microring switch exhibit gigantic transmission contrast with a ratio up to highest 47:1. Further, the O-PCM based photonic switch also demonstrates extremely low extinction ration to 13.58 dB and 14.40 dB for both output ports from 1.5 μm to 1.6 μm.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127837146","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
F. bai, Xiaohua Zhang, Jun Kong, Xiao-juan Gao, Yongxiang Xu
A method based on the local gradient direction information is proposed to locate the center of circular fringe. The new method is developed which based on the idea that the normal directions of any point on the circular fringe are always pointing towards the center. Besides, the local gradient direction of fringe is related to the normal line of fringe. We deduce theoretically the principle of local gradient direction estimation. Then a new circular fringe center location algorithm is developed with the help of digital image processing technology and statistical ideas. The simulation results show that new method can locate accurately the center of different types of circular fringes with less or without filtering. It also holds good robustness and can meet the requirements of actual engineering application.
{"title":"Circular fringe center location based on local gradient direction estimation","authors":"F. bai, Xiaohua Zhang, Jun Kong, Xiao-juan Gao, Yongxiang Xu","doi":"10.1117/12.2604827","DOIUrl":"https://doi.org/10.1117/12.2604827","url":null,"abstract":"A method based on the local gradient direction information is proposed to locate the center of circular fringe. The new method is developed which based on the idea that the normal directions of any point on the circular fringe are always pointing towards the center. Besides, the local gradient direction of fringe is related to the normal line of fringe. We deduce theoretically the principle of local gradient direction estimation. Then a new circular fringe center location algorithm is developed with the help of digital image processing technology and statistical ideas. The simulation results show that new method can locate accurately the center of different types of circular fringes with less or without filtering. It also holds good robustness and can meet the requirements of actual engineering application.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"12071 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129171357","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In this paper, a kind of photo-alignment materials of liquid crystal with nano-structured is introduced. The samples differ in optical anisotropy, which are subjected to different pre-bake temperatures and different exposure energy. The optical anisotropy are predicted by Secondary fitting analysis. The rationality of the fitting equation was verified by AFM test on the material surface.
{"title":"Research on photo-alignment process of liquid crystal","authors":"Yingru Hu, Ming-hui Gao, Wei Zhao, Qinyi Duan, Shuanghong Wu, Chao Tang, Zitong Hua","doi":"10.1117/12.2604829","DOIUrl":"https://doi.org/10.1117/12.2604829","url":null,"abstract":"In this paper, a kind of photo-alignment materials of liquid crystal with nano-structured is introduced. The samples differ in optical anisotropy, which are subjected to different pre-bake temperatures and different exposure energy. The optical anisotropy are predicted by Secondary fitting analysis. The rationality of the fitting equation was verified by AFM test on the material surface.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129398507","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The Southern Spectroscopic Survey Telescope (SSST) is a planned multi-wavelength sky survey telescope. The main scientific instrument of the telescope is an astronomical spectrometer. In this paper, we present a feasible optic system design based on wide-field Cassegrain corrector configuration for the telescope and related multi-object and fiber-fed spectrograph (MOFFS) system. The latest telescope design has a large field of view (FOV) of 2.6°×2.6° with its image spot size less than 0.3 arcsec in diameter for its full FOV in 80% encircled energy with the atmospheric dispersion effect taken into consideration. The MOFFS system based on the Volume Phase Holographic Gratings (VPHG) has an RMS radius of less than 12μm from center to edge of the fiber slit and the working band from 360nm to 1100nm while having the VPHG diameters less than 120mm. The camera group lens exhibited a transmittance higher than 88% at the whole working waveband.
{"title":"Optical system design for the 6.5m Southern Spectroscopic Survey Telescope and related multi-object fiber-fed spectrophotometer","authors":"Hao Tan, Yuefan Shan, Donglin Ma","doi":"10.1117/12.2604291","DOIUrl":"https://doi.org/10.1117/12.2604291","url":null,"abstract":"The Southern Spectroscopic Survey Telescope (SSST) is a planned multi-wavelength sky survey telescope. The main scientific instrument of the telescope is an astronomical spectrometer. In this paper, we present a feasible optic system design based on wide-field Cassegrain corrector configuration for the telescope and related multi-object and fiber-fed spectrograph (MOFFS) system. The latest telescope design has a large field of view (FOV) of 2.6°×2.6° with its image spot size less than 0.3 arcsec in diameter for its full FOV in 80% encircled energy with the atmospheric dispersion effect taken into consideration. The MOFFS system based on the Volume Phase Holographic Gratings (VPHG) has an RMS radius of less than 12μm from center to edge of the fiber slit and the working band from 360nm to 1100nm while having the VPHG diameters less than 120mm. The camera group lens exhibited a transmittance higher than 88% at the whole working waveband.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115914440","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In the testing of optical surfaces with large aperture or large aperture angle, sub-aperture stitching technology has been developed for a long time, while most testing analysis is for the rotationally symmetrical surface. In view of a cylindrical surface sub-aperture stitching algorithm based on discrete phase data, by using Legendre polynomials to fit the wave surface, numerical simulation and analysis for several main influencing factors have been carried out. For instance, a bicubic interpolation method has been used for non-numerical point in a discrete phase and fuzzy points in overlapping areas during the process of stitching sub-apertures, on account of its accuracy and calculation time. By considering alignment error, random noise, position error, especially rotation error in non-rotationally symmetrical cylindrical surface testing, we stimulate 9 sub-aperture phase data from a measured phase data to analyze the correction coefficient which determines the percentage of error correction in stitching algorithm. While the correction coefficient is approaching 1, the stitching result is most likely overcorrected. In order to achieve the best error correction, the correction coefficient should be set at around 0.6. Furthermore, combined with chaos particle swarm optimization, we reduce the possibility of the algorithm falling into the local optimum, and improve the accuracy of stitching.
{"title":"Research of sub-aperture stitching algorithm for error correction in aspheric surface testing","authors":"Wei Yan, Pei-ji Guo, Xi Chen, Yuting Xu","doi":"10.1117/12.2603929","DOIUrl":"https://doi.org/10.1117/12.2603929","url":null,"abstract":"In the testing of optical surfaces with large aperture or large aperture angle, sub-aperture stitching technology has been developed for a long time, while most testing analysis is for the rotationally symmetrical surface. In view of a cylindrical surface sub-aperture stitching algorithm based on discrete phase data, by using Legendre polynomials to fit the wave surface, numerical simulation and analysis for several main influencing factors have been carried out. For instance, a bicubic interpolation method has been used for non-numerical point in a discrete phase and fuzzy points in overlapping areas during the process of stitching sub-apertures, on account of its accuracy and calculation time. By considering alignment error, random noise, position error, especially rotation error in non-rotationally symmetrical cylindrical surface testing, we stimulate 9 sub-aperture phase data from a measured phase data to analyze the correction coefficient which determines the percentage of error correction in stitching algorithm. While the correction coefficient is approaching 1, the stitching result is most likely overcorrected. In order to achieve the best error correction, the correction coefficient should be set at around 0.6. Furthermore, combined with chaos particle swarm optimization, we reduce the possibility of the algorithm falling into the local optimum, and improve the accuracy of stitching.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"406 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115586865","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Achieving high power conversion efficiency (PCE) without compromising device stability is an essential trade-off for commercializing organic solar cells (OSCs). In this study, a novel organic-inorganic hybrid material of tin oxide (SnO2) nanoparticles (NPs) and perylene diimide derivative (PDINO) is introduced as the electron transport layer (ETL) to improve both the device performance and the device stability of non-fullerene OSCs. Compared with the pristine SnO2 NP ETL-based device, not only the PCE of the PM6:IT-4F OSC with SnO2:PDINO as ETL is efficiently improved from 11.3 % to 12.7 %, but the shelf life of the SnO2:PDINO ETL based device is also extended. After being stored in ambient condition without encapsulation for 360 h, the PCE of the modified ETL-based OSC still retains 80 % of its original value. The incorporation of PDINO dopant can provide more favorable interfacial properties between the ETL and the active layer as well as reduced surface defects of SnO2 NP ETL, thus contributing to charge transport efficiency, suppressing molecular recombination, and protecting the active layer from degradation.
{"title":"Utilization of perylene diimide derivative doped tin oxide as an electron transport layer for performance enhancement of non-fullerene organic solar cell","authors":"Tianyu Kong, Pu Fan, Genjie Yang, Junsheng Yu","doi":"10.1117/12.2603957","DOIUrl":"https://doi.org/10.1117/12.2603957","url":null,"abstract":"Achieving high power conversion efficiency (PCE) without compromising device stability is an essential trade-off for commercializing organic solar cells (OSCs). In this study, a novel organic-inorganic hybrid material of tin oxide (SnO2) nanoparticles (NPs) and perylene diimide derivative (PDINO) is introduced as the electron transport layer (ETL) to improve both the device performance and the device stability of non-fullerene OSCs. Compared with the pristine SnO2 NP ETL-based device, not only the PCE of the PM6:IT-4F OSC with SnO2:PDINO as ETL is efficiently improved from 11.3 % to 12.7 %, but the shelf life of the SnO2:PDINO ETL based device is also extended. After being stored in ambient condition without encapsulation for 360 h, the PCE of the modified ETL-based OSC still retains 80 % of its original value. The incorporation of PDINO dopant can provide more favorable interfacial properties between the ETL and the active layer as well as reduced surface defects of SnO2 NP ETL, thus contributing to charge transport efficiency, suppressing molecular recombination, and protecting the active layer from degradation.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115101470","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In phase-shifting interferometry, phase unwrapping is an important algorithm for obtaining actual detection data. In general, fringe contrast is approximated to reduce the difficulty of operation. However, in the actual white light interference detection, the fringe contrast will vary with the change of the optical path difference as the wavelength is more abundant. In this paper, the three-step phase-shifting algorithm is taken as an example to derive the phase expression of the white light interference fringe contrast without approximation processing. A hemisphere with a radius of 10μm and an irregular object with a size of less than 6μm are applied to topography reconstruction. Compared with the topography reconstruction error of the three-step phase-shifting algorithm before and after the correction, it has proved that the three-step phase-shifting algorithm after the correction can increase the reconstruction accuracy by about two times, which provides a theoretical method to improve the reconstruction accuracy of the phase-shifting algorithm.
{"title":"Correction of wavelength error of white-light interference phase-shifting algorithm","authors":"Yuqin Wang, Rongzhu Zhang","doi":"10.1117/12.2604867","DOIUrl":"https://doi.org/10.1117/12.2604867","url":null,"abstract":"In phase-shifting interferometry, phase unwrapping is an important algorithm for obtaining actual detection data. In general, fringe contrast is approximated to reduce the difficulty of operation. However, in the actual white light interference detection, the fringe contrast will vary with the change of the optical path difference as the wavelength is more abundant. In this paper, the three-step phase-shifting algorithm is taken as an example to derive the phase expression of the white light interference fringe contrast without approximation processing. A hemisphere with a radius of 10μm and an irregular object with a size of less than 6μm are applied to topography reconstruction. Compared with the topography reconstruction error of the three-step phase-shifting algorithm before and after the correction, it has proved that the three-step phase-shifting algorithm after the correction can increase the reconstruction accuracy by about two times, which provides a theoretical method to improve the reconstruction accuracy of the phase-shifting algorithm.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126711492","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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