Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688244
F. Souchon, B. Reig, C. Dieppedale, H. Sibuet, B. Blampey, J. Duchamp
Massive integration of RF-MEMS switches is still jeopardized due to reliability issues. To overcome this challenge, this contribution presents a novel electrostatically-actuated MEMS switch. This novel switch integrates a new design: on the one hand a dielectric free actuator on order to reduce drastically the dielectric charging; and on the other hand a symmetrical stacking of the silicon nitride suspended bridge in order to have a switch behavior insensitive to thermal stresses. In addition to that, the process flow has been totally reviewed so as to better control the different gap heights and also reduce contact surface contamination. Among others, thermal oxidations and wet etchings processes are used to fabricate the lower parts of the switch, and amorphous silicon is used as sacrificial layer. Finally, these major evolutions have allowed to demonstrate remarkable results in terms of process capability, microwave performances and lifetime.
{"title":"A robust and reliable RF-MEMS switch fabricated thanks to an original dielectric free design and an innovative process flow","authors":"F. Souchon, B. Reig, C. Dieppedale, H. Sibuet, B. Blampey, J. Duchamp","doi":"10.1109/ICSENS.2013.6688244","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688244","url":null,"abstract":"Massive integration of RF-MEMS switches is still jeopardized due to reliability issues. To overcome this challenge, this contribution presents a novel electrostatically-actuated MEMS switch. This novel switch integrates a new design: on the one hand a dielectric free actuator on order to reduce drastically the dielectric charging; and on the other hand a symmetrical stacking of the silicon nitride suspended bridge in order to have a switch behavior insensitive to thermal stresses. In addition to that, the process flow has been totally reviewed so as to better control the different gap heights and also reduce contact surface contamination. Among others, thermal oxidations and wet etchings processes are used to fabricate the lower parts of the switch, and amorphous silicon is used as sacrificial layer. Finally, these major evolutions have allowed to demonstrate remarkable results in terms of process capability, microwave performances and lifetime.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"199 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115884994","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688229
A. Mignani, L. Ciaccheri, A. Mencaglia, J. Xing, X. Yang, W. Sun, L. Yuan
The detection and quantification of hogwash oil in soybean oils by means of absorption spectroscopy is presented. Three types of soybean oils were adulterated with different concentrations of hogwash oil. The spectra were measured in the visible band using a white LED and a low-cost spectrometer. Then, the visible spectra were sliced into two bands for modeling a simple setup made of two LEDs only, and the best LED couple was experimented. The successful results indicate potentials for implementing a smartphone-compatible device for a quick assessment of soybean oil quality.
{"title":"Detection of hogwash oil in Chinese soybean oils using dual-band absorption measurements","authors":"A. Mignani, L. Ciaccheri, A. Mencaglia, J. Xing, X. Yang, W. Sun, L. Yuan","doi":"10.1109/ICSENS.2013.6688229","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688229","url":null,"abstract":"The detection and quantification of hogwash oil in soybean oils by means of absorption spectroscopy is presented. Three types of soybean oils were adulterated with different concentrations of hogwash oil. The spectra were measured in the visible band using a white LED and a low-cost spectrometer. Then, the visible spectra were sliced into two bands for modeling a simple setup made of two LEDs only, and the best LED couple was experimented. The successful results indicate potentials for implementing a smartphone-compatible device for a quick assessment of soybean oil quality.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124332957","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688420
A. Roy, T. K. Bhattacharyya
Microelectromechanical systems (MEMS)-based vibratory structures have become popular due to their simple fabrication processes, high quality factors, low loss and high sensitivity. Applications of such devices as sensors require a proper understanding of their operational characteristics in various regimes. This work is a study of the dynamics of an electrostatically actuated MEMS doubly-clamped beam under superharmonic excitation from a qualitative point of view whereby the nonlinear dynamic response of such devices can be analyzed to some extent. Here, we report some phenomena which we have come across during our measurements of the MEMS device under consideration and attempt to explain our findings through some intuitive analysis.
{"title":"Symmetry breaking oscillations in electrostatic MEMS under superharmonic excitation","authors":"A. Roy, T. K. Bhattacharyya","doi":"10.1109/ICSENS.2013.6688420","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688420","url":null,"abstract":"Microelectromechanical systems (MEMS)-based vibratory structures have become popular due to their simple fabrication processes, high quality factors, low loss and high sensitivity. Applications of such devices as sensors require a proper understanding of their operational characteristics in various regimes. This work is a study of the dynamics of an electrostatically actuated MEMS doubly-clamped beam under superharmonic excitation from a qualitative point of view whereby the nonlinear dynamic response of such devices can be analyzed to some extent. Here, we report some phenomena which we have come across during our measurements of the MEMS device under consideration and attempt to explain our findings through some intuitive analysis.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114568601","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688260
W. W. Lee, J. Cabibihan, N. Thakor
In this work, a tactile sensing system is built for pattern recognition using spiking neurons. Tactile information is acquired using a fabric based binary tactile sensor array and converted into spatiotemporal spiking patterns that mimic mechanoreceptors in the skin. Through physical experiments, we show that the spike patterns efficiently represent information such as local curvature of objects in contact, which are easily distinguished using a supervised spike-timing based learning algorithm. High classification accuracy (>99%) and fast convergence rate (tens of epochs) of the classifier indicates good separation between different stimuli using the spatiotemporal spike representation.
{"title":"Bio-mimetic strategies for tactile sensing","authors":"W. W. Lee, J. Cabibihan, N. Thakor","doi":"10.1109/ICSENS.2013.6688260","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688260","url":null,"abstract":"In this work, a tactile sensing system is built for pattern recognition using spiking neurons. Tactile information is acquired using a fabric based binary tactile sensor array and converted into spatiotemporal spiking patterns that mimic mechanoreceptors in the skin. Through physical experiments, we show that the spike patterns efficiently represent information such as local curvature of objects in contact, which are easily distinguished using a supervised spike-timing based learning algorithm. High classification accuracy (>99%) and fast convergence rate (tens of epochs) of the classifier indicates good separation between different stimuli using the spatiotemporal spike representation.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"57 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117306076","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688286
C. Sander, R. Raz, P. Ruther, O. Paul, T. Kaufmann, M. Cornils, M. Vecchi
We present a novel CMOS-integrated, vertical Hall sensor (VHS) with optimized symmetry for the measurement of in-plane magnetic field components. Due to the junction field effect, conventional five-contact VHS (5CVHS) suffer from considerable offsets caused by their inherent electrical asymmetry under contact permutations. The novel device achieves a higher degree of symmetry by the appropriate connection of four identical three-contact elements. As a result, with a bias voltage of 3.5 V and after current switching a mean residual offset of 2.5 μV with a standard deviation of 33.8 μV is achieved among 45 samples on an 8-inch wafer. This represents an improvement by a factor of more than 4 over 5CVHS fabricated on the same wafer. In addition, the power consumption is reduced by 47%.
{"title":"Fully symmetric vertical hall devices in CMOS technology","authors":"C. Sander, R. Raz, P. Ruther, O. Paul, T. Kaufmann, M. Cornils, M. Vecchi","doi":"10.1109/ICSENS.2013.6688286","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688286","url":null,"abstract":"We present a novel CMOS-integrated, vertical Hall sensor (VHS) with optimized symmetry for the measurement of in-plane magnetic field components. Due to the junction field effect, conventional five-contact VHS (5CVHS) suffer from considerable offsets caused by their inherent electrical asymmetry under contact permutations. The novel device achieves a higher degree of symmetry by the appropriate connection of four identical three-contact elements. As a result, with a bias voltage of 3.5 V and after current switching a mean residual offset of 2.5 μV with a standard deviation of 33.8 μV is achieved among 45 samples on an 8-inch wafer. This represents an improvement by a factor of more than 4 over 5CVHS fabricated on the same wafer. In addition, the power consumption is reduced by 47%.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117327910","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688500
Tracie A. Severson, D. Paley
This paper presents a distributed, consensus-based approach to optimize radar resource management for ballistic missile surveillance and tracking. Each radar determines their preferred radar-to-target assignment by balancing radar loading and minimizing total radar usage. A unique global radar-to-target assignment that is robust to resource estimation error is generated by a distributed consensus algorithm. Performance is validated via Monte Carlo simulations.
{"title":"Distributed multi-target search and track assignment using consensus-based coordination","authors":"Tracie A. Severson, D. Paley","doi":"10.1109/ICSENS.2013.6688500","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688500","url":null,"abstract":"This paper presents a distributed, consensus-based approach to optimize radar resource management for ballistic missile surveillance and tracking. Each radar determines their preferred radar-to-target assignment by balancing radar loading and minimizing total radar usage. A unique global radar-to-target assignment that is robust to resource estimation error is generated by a distributed consensus algorithm. Performance is validated via Monte Carlo simulations.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123678812","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688136
A. Sahu, F. Saleheen, V. Oleksyuk, Yi Chen, Chang-Hee Won
In this paper, we developed and tested both a tactile as well as a hyperspectral imaging sensor, which exploit the physiological and mechanical changes that occur in malignant tumors. The use of both modalities (tactile and hyperspectral) increases the accuracy of identifying malignant tumors. Spontaneous mammary tumors in dogs were used to test our sensors. The sensitivity and specificity of the fused tactile and hyperspectral data is 67% and 83%, respectively. These imaging sensors will not only decrease the need for unnecessary surgery, but it will also facilitate and jump-start the development of a tactile and hyperspectral imaging sensor for human clinical use because of the similarities between human and canine breast cancer.
{"title":"Tactile and hyperspectral imaging sensors for mammary tumor characterization","authors":"A. Sahu, F. Saleheen, V. Oleksyuk, Yi Chen, Chang-Hee Won","doi":"10.1109/ICSENS.2013.6688136","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688136","url":null,"abstract":"In this paper, we developed and tested both a tactile as well as a hyperspectral imaging sensor, which exploit the physiological and mechanical changes that occur in malignant tumors. The use of both modalities (tactile and hyperspectral) increases the accuracy of identifying malignant tumors. Spontaneous mammary tumors in dogs were used to test our sensors. The sensitivity and specificity of the fused tactile and hyperspectral data is 67% and 83%, respectively. These imaging sensors will not only decrease the need for unnecessary surgery, but it will also facilitate and jump-start the development of a tactile and hyperspectral imaging sensor for human clinical use because of the similarities between human and canine breast cancer.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"35 14","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120823620","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688566
Sarab F. Al Rubeaai, B. K. Singh, Mehmmood A. Abd, K. Tepe
This paper presents a novel 3D real-time geographical routing protocol (3DRTGP) for wireless sensor networks (WSNs). It provides a unique adaptive packet forwarding region (PFR) selection algorithm based on network density. 3DRTGP controls the number of forwarding nodes to reduce collision in the network, which in turn, enables it to meet real-time application requirements, i.e., packet delivery within a specified deadline. In order to make 3DRTGP viable, we provide a solution for void node problem (VNP) in 3D deployment. The performance evaluation through simulation shows significant improvements in end-to-end delay and missratio over similar 3D geographical routing protocols.
{"title":"Region based three dimensional real-timel routing protocol for wireless sensor networks","authors":"Sarab F. Al Rubeaai, B. K. Singh, Mehmmood A. Abd, K. Tepe","doi":"10.1109/ICSENS.2013.6688566","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688566","url":null,"abstract":"This paper presents a novel 3D real-time geographical routing protocol (3DRTGP) for wireless sensor networks (WSNs). It provides a unique adaptive packet forwarding region (PFR) selection algorithm based on network density. 3DRTGP controls the number of forwarding nodes to reduce collision in the network, which in turn, enables it to meet real-time application requirements, i.e., packet delivery within a specified deadline. In order to make 3DRTGP viable, we provide a solution for void node problem (VNP) in 3D deployment. The performance evaluation through simulation shows significant improvements in end-to-end delay and missratio over similar 3D geographical routing protocols.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"144 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124016944","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688190
Jae-Sung Lee, Sang-Won Lee, H. Jeong, Sung-woo Lim, Eun-Yoon Jang, N. Yoon, D. Kwon, Shin-Won Kang
We have developed an optical gas sensor for detection of volatile organic compounds (VOCs) gases. The side-polished optical fiber coupled with the polymer planar waveguide (PWG) which has high sensitive to change refractive index. The PWG was fabricated by coating the solvatochromic dye with a polyvinyl pyrrolidone (PVP). The fabricated gas sensor system was tested with five-types of VOCs gases. The different polarities of the VOC gases cause changes in the effective refractive index of the sensing membrane owing to evanescent field coupling. According to the results, the proposed gas sensor showed high sensitivity.
{"title":"Volatile organic compounds optical fiber gas sensor based on evanescentl field coupling and solvatochromism","authors":"Jae-Sung Lee, Sang-Won Lee, H. Jeong, Sung-woo Lim, Eun-Yoon Jang, N. Yoon, D. Kwon, Shin-Won Kang","doi":"10.1109/ICSENS.2013.6688190","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688190","url":null,"abstract":"We have developed an optical gas sensor for detection of volatile organic compounds (VOCs) gases. The side-polished optical fiber coupled with the polymer planar waveguide (PWG) which has high sensitive to change refractive index. The PWG was fabricated by coating the solvatochromic dye with a polyvinyl pyrrolidone (PVP). The fabricated gas sensor system was tested with five-types of VOCs gases. The different polarities of the VOC gases cause changes in the effective refractive index of the sensing membrane owing to evanescent field coupling. According to the results, the proposed gas sensor showed high sensitivity.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125894831","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-12-19DOI: 10.1109/ICSENS.2013.6688608
H. Jayamohan, Y. Smith, B. Gale, M. Misra, S. Mohanty
A sensor using platinum functionalized titania nanotubes for the detection of Trichloroethylene (TCE) in water samples has been developed. The titania nanotubes were synthesized using an electrochemical anodization technique and platinum was photocatalytically deposited on the nanotubes. The sensor exhibits a good response to TCE concentrations in the range of 10 to 1000 ppm.
{"title":"Platinum functionalized titania nanotube array sensor for detection of Trichloroethylene in water","authors":"H. Jayamohan, Y. Smith, B. Gale, M. Misra, S. Mohanty","doi":"10.1109/ICSENS.2013.6688608","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688608","url":null,"abstract":"A sensor using platinum functionalized titania nanotubes for the detection of Trichloroethylene (TCE) in water samples has been developed. The titania nanotubes were synthesized using an electrochemical anodization technique and platinum was photocatalytically deposited on the nanotubes. The sensor exhibits a good response to TCE concentrations in the range of 10 to 1000 ppm.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124740068","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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