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A novel in-line type frequency detector based on MEMS membrane for X-band application 基于MEMS薄膜的新型x波段直列式频率检测器
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688135
Zhenxiang Yi, X. Liao
In this paper, a novel in-line type frequency detector is proposed based on MEMS Membrane for X-band application. In the design, a MEMS membrane stands above the signal line of the CPW transmission line and acts as a coupling capacitance. A certain percentage of the input power, as a function of frequency, is coupled to the microwave power sensor. Finally, the frequency of the incident RF signal is deduced by measuring the output thermovoltage of the power sensor based on Seebeck effect. The incident power is not dissipated completely and the proposed design can achieve inline frequency detection. The inline type power sensor is designed, modeled and fabricated by GaAs MMIC process. The measured return loss is less than -13dB and the insertion loss is close to 1.3dB over 8-12GHz. The RF frequency measurement shows the output thermovoltage increases with the frequency. However, the poor frequency performance of the power sensor leads to the deviation of the measurement and theory.
本文提出了一种基于MEMS薄膜的新型x波段直列式频率检测器。在本设计中,MEMS膜位于CPW传输线的信号线上方,作为耦合电容。输入功率的一定百分比,作为频率的函数,耦合到微波功率传感器。最后,基于塞贝克效应,通过测量功率传感器的输出热电压,推导出入射射频信号的频率。入射功率不完全耗散,可以实现在线频率检测。采用GaAs - MMIC工艺设计、建模并制作了内联式功率传感器。在8-12GHz范围内,回波损耗小于-13dB,插入损耗接近1.3dB。射频频率测量显示输出热电压随频率增加而增加。然而,功率传感器的频率性能较差,导致了测量与理论的偏差。
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引用次数: 0
A CMOS platform for the integration of heterogeneous arrays of carbon nanotubes and graphene chemiresistors 一种集成碳纳米管和石墨烯化学电阻器异质阵列的CMOS平台
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688367
Samuel MacNaughton, S. Sonkusale
We propose a “CMOS for nanoassembly” method to assemble carbon nanotubes and graphene on CMOS chip for gas sensing application. CNT's and graphene have been demonstrated as extremely sensitive chemiresistors for a wide range of analytes. The upper metal layers of the CMOS chip contain sixty electrodes of both planar and three-dimensional geometries. Each electrode is addressable through on chip circuitry. The electrodes are fully exposed by post-process dry etching. Chemiresistive assemblies of nanoscale single wall carbon nanotubes (SWNTs) and reduced graphene oxide (rGO) flakes are assembled onto the exposed electrodes by controlled dielectrophoresis (DEP), which is the motion of a polarizable particle in a dielectric medium. The utility of the platform is shown for gas sensing. To the best of our knowledge, this is the first time functional graphene and carbon nanotubes sensor elements have been integrated onto a single CMOS chip. Previous results indicate that the expansion of the chip to include other chemiresistive nanomaterials is entirely feasible.
我们提出了一种“用于纳米组装的CMOS”方法,将碳纳米管和石墨烯组装在CMOS芯片上,用于气敏应用。碳纳米管和石墨烯已被证明是非常敏感的化学电阻器,适用于各种分析物。CMOS芯片的上层金属层包含60个平面和三维几何形状的电极。每个电极都可以通过片上电路寻址。电极通过后处理干蚀刻完全暴露。纳米级单壁碳纳米管(SWNTs)和还原氧化石墨烯(rGO)薄片的化学抗性组装通过控制介电电泳(DEP)组装到暴露的电极上,这是一种极化粒子在介电介质中的运动。该平台用于气体传感。据我们所知,这是第一次将功能石墨烯和碳纳米管传感器元件集成到单个CMOS芯片上。先前的结果表明,扩展芯片以包含其他化学阻性纳米材料是完全可行的。
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引用次数: 0
Implantable SiC based RF antenna biosensor for continuous glucose monitoring 用于连续血糖监测的可植入SiC射频天线生物传感器
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688379
S. Afroz, S. Thomas, G. Mumcu, S. Saddow
A continuous glucose sensor employing radio frequency (RF) signals has been developed using the biocompatible material Silicon Carbide (SiC). Unlike biosensors that require direct contact with interstitial fluids to trigger chemical reactions to operate, this biocompatible SiC sensor doesn't require a direct interface. The sensing mechanism is based upon a shift in resonant frequency as a function of change in glucose levels which electrically manifests itself as a change in blood permittivity and conductivity. For invivo applications the antenna sensor needs to operate inside the body environment, and it has been determined that the best operational location of this biocompatible SiC biosensor is within fatty tissue in close proximity to blood vessels. To test the sensor as a function of glucose level, measurements using synthetic body fluid (SBF), which is electrically equivalent to blood plasma, and pig blood were performed. Changes in sensor performance to varying glucose levels were measured and a shift in resonant frequency to lower values observed with increasing glucose level. In-vitro sensor performance demonstrated that the sensor showed a dose dependent response to glucose concentration from 120 mg/dl to 530 mg/dl. A shift of 40 MHz and 26 MHz for blood mimicking liquid and pig blood was observed corresponding to 97 KHz and 67 KHz shift per 1 mg/dl change in blood glucose.
利用生物相容性材料碳化硅(SiC)开发了一种采用射频(RF)信号的连续葡萄糖传感器。不像生物传感器需要直接接触间质液体来触发化学反应来操作,这种生物相容性SiC传感器不需要直接接口。传感机制是基于共振频率的变化,作为葡萄糖水平变化的函数,这在电上表现为血液介电常数和电导率的变化。对于体内应用,天线传感器需要在体内环境中工作,并且已经确定这种生物相容性SiC生物传感器的最佳工作位置是在靠近血管的脂肪组织中。为了测试传感器作为葡萄糖水平的函数,使用合成体液(SBF)和猪血进行测量,其电等效于血浆。测量了不同葡萄糖水平下传感器性能的变化,并观察到随着葡萄糖水平的增加,谐振频率向较低值移动。体外传感器性能表明,传感器对葡萄糖浓度在120 mg/dl到530 mg/dl之间表现出剂量依赖性。模拟血液液体和猪血的位移分别为40 MHz和26 MHz,对应于每1 mg/dl血糖变化97 KHz和67 KHz的位移。
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引用次数: 26
BioArgo: A global scale chemical sensor network to observe carbon, oxygen, and nitrogen cycles in the ocean BioArgo:一个全球规模的化学传感器网络,用于观察海洋中的碳、氧和氮循环
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688480
K. Johnson
This talk will focus on the development and operation of a global scale, chemical sensor network that is distributed throughout the world's ocean. The daily, seasonal and interannual changes in the concentrations of inorganic carbon, pH, dissolved oxygen and nitrate that are driven by photosynthesis and respiration are basic tracers of ocean metabolism. This metabolism has a fundamental control on the earth's climate, as production of organic matter in the surface ocean acts to lower atmospheric carbon dioxide by about 200 ppm. It is possible that these rates of elemental cycling will change in the future as the surface ocean warms [1]. However, there are no existing observing systems that allow ocean metabolism to be observed directly at a global scale. In particular, sampling chemistry from ships does not work because of the expense and remoteness of most of the ocean. At the global scale, ocean productivity can only be sensed indirectly from satellite ocean color observations. Global scale sensor networks using robotic platforms equipped with chemical sensors are required to directly observe ocean metabolism [2]. The Argo network (http://www.argo.ucsd.edu), which is used to monitor the heat content of the ocean, is a model for such a system. There are >3000 Argo profiling floats throughout the ocean. They rise from 2000 m depth at 5 to 10 day intervals measuring temperature and salinity during the ascent and then transmit the data to low earth orbit communications networks. This cycle is repeated for the 5 year life of each float. The BioArgo system is now working to build a complementary network equipped with pH, oxygen, nitrate and biooptical sensors [3]. More than 200 profiling floats with oxygen and >40 floats with nitrate are now operating from the Arctic to the Antarctic in all of the major ocean basins (http://argo.jcommops.org/maps.html, scroll right to the Bio map). These sensors have demonstrated exceptional stability and precision over time periods now reaching four years [4-7]. Experimental pH sensors are now operating on profiling floats with a precision and stability near 0.001 pH over an annual cycle. These results demonstrate the feasibility of establishing a global chemical sensor network. This talk will review the methods used to develop chemical sensors with multi-year stability and the development of a global observing system.
本讲座将集中讨论分布在全球海洋的化学传感器网络的发展和运作。由光合作用和呼吸作用驱动的无机碳、pH、溶解氧和硝酸盐浓度的日、季、年际变化是海洋代谢的基本示踪剂。这种新陈代谢对地球气候具有根本的控制作用,因为海洋表层有机物的产生可以将大气中的二氧化碳含量降低约200ppm。随着海洋表面变暖,这些元素循环速率在未来有可能发生变化[1]。然而,目前还没有能够在全球范围内直接观测海洋代谢的现有观测系统。特别是,由于大部分海洋的昂贵和偏远,从船上取样化学物质是行不通的。在全球范围内,海洋生产力只能通过卫星海洋颜色观测间接地感知。要直接观测海洋代谢,需要使用配备化学传感器的机器人平台的全球尺度传感器网络[2]。用于监测海洋热含量的Argo网络(http://www.argo.ucsd.edu)就是这样一个系统的模型。在整个海洋中有超过3000个Argo剖面浮标。它们每隔5至10天从2000米的深度上升,在上升过程中测量温度和盐度,然后将数据传输到近地轨道通信网络。这个循环在每个浮子的5年寿命中重复进行。BioArgo系统目前正致力于建立一个配备pH值、氧气、硝酸盐和生物光学传感器的互补网络[3]。目前,从北极到南极的所有主要海洋盆地(http://argo.jcommops.org/maps.html,向右滚动到生物地图),有200多艘携带氧气的分析浮标和40多艘携带硝酸盐的分析浮标在运行。这些传感器在四年的时间周期内表现出卓越的稳定性和精度[4-7]。实验pH传感器现在在剖面浮子上运行,在一年的周期内精度和稳定性接近0.001 pH。这些结果证明了建立全球化学传感器网络的可行性。本讲座将回顾用于开发具有多年稳定性的化学传感器的方法和全球观测系统的发展。
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引用次数: 2
Terahertz detection of Bacillus thuringiensis spores in DiPel® DiPel®中苏云金芽孢杆菌孢子的太赫兹检测
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688413
L. Viveros, Weidong Zhang, E. Brown
Frequency domain terahertz (THz) spectroscopy was used to study DiPel® PRO DF, a commercial insecticide containing 54% Bacillus thuringiensis subsp. kurstaki. The mixture contains Bt spores as well as Bt protein toxins. Microscopic imaging revealed that DiPel® is composed of millimeter scale coarse particles and SEM photos indicate Bt spores are in these particles. The substantial attenuation from transmission measurements suggested strong signal scattering since the dimensions of particles (~1 mm-400 μm) are close to the THz wavelengths (~750-250 μm). Alternatively, periscope reflection measurements were carried out and a 917 GHz absorbance signature was observed. This is explained by the Mie theory that a portion of absorption is accompanied with scattering. Resonant absorption can be excited as long as internal vibration exists within particles. Therefore, absorption can be detected by the reflectivity measurements. To prove this hypothesis, Bt spores were separated from the large DiPel® coarse particles and their presence was again confirmed with microscopy. A transmission scan of the extracted spore samples was then repeated. The 917 GHz absorbance signature was present and consistent with transmissions on culture-grown, freshly harvested Bt spore samples.
频率域太赫兹(THz)光谱研究了含有54%苏云金芽孢杆菌亚种的商用杀虫剂DiPel®PRO DF。kurstaki。这种混合物含有Bt孢子和Bt蛋白毒素。显微成像显示DiPel®是由毫米级的粗颗粒组成,扫描电镜照片显示这些颗粒中有Bt孢子。透射测量的大量衰减表明,由于粒子的尺寸(~1 mm-400 μm)接近太赫兹波长(~750-250 μm),因此信号散射很强。另外,潜望镜反射测量和917 GHz吸光度特征被观察到。这可以用米氏理论来解释,即一部分吸收伴随着散射。只要粒子内部存在振动,就能激发共振吸收。因此,吸收可以通过反射率测量来检测。为了证明这一假设,从大的DiPel®粗颗粒中分离出Bt孢子,并用显微镜再次证实了它们的存在。然后重复对提取的孢子样本进行透射扫描。917 GHz的吸光度特征与培养、新鲜收获的Bt孢子样品的传输一致。
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引用次数: 0
A surface micromachined MEMS capacitive microphone with back-plate supporting pillars 一种带有背板支撑柱的表面微机械MEMS电容式传声器
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688399
C. Je, Jaewoo Lee, Woo-Seok Yang, Jong-Kee Kwon
We present a new surface micromachined MEMS capacitive microphone with improved frequency response and high sensitivity. The proposed MEMS microphone has a top back-plate with a bottom sensing membrane and the back-plate is supported by supporting pillars which are anchored to the bottom of the deep back chamber. The back-plate supporting pillars increase the stiffness of the back-plate and prevent deformation. A present surface micromachined MEMS capacitive microphone is fabricated using fully CMOS compatible processes. It has a thin metal membrane of 500 μm diameter, a sensing air gap of 2.5 μm and seven back-plate supporting pillars. A 100 μm deep back chamber is formed by xenon difluoride dry etching of silicon substrate. As a result, the proposed microphone shows a flat frequency response and high open-circuit sensitivity. It shows a measured zero-bias capacitance of 1.0 pF and a pull-in voltage of 11.0 V, and an open-circuit sensitivity of 10.37 mV/Pa on a DC bias of 6.0 V.
我们提出了一种新的表面微机械MEMS电容式传声器,它具有改进的频率响应和高灵敏度。所提出的MEMS麦克风具有顶部背板和底部传感膜,背板由锚定在深后腔底部的支撑柱支撑。背板支撑柱增加了背板的刚度,防止变形。采用完全兼容CMOS的工艺制备了一种表面微机械MEMS电容式传声器。它具有直径500 μm的金属薄膜,2.5 μm的传感气隙和7根背板支撑柱。采用二氟化氙对硅衬底进行干法刻蚀,形成了100 μm深的后腔。结果表明,该麦克风具有平坦的频率响应和高的开路灵敏度。在直流偏置6.0 V时,该器件的零偏置电容为1.0 pF,上拉电压为11.0 V,开路灵敏度为10.37 mV/Pa。
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引用次数: 6
Coverage estimation in heterogenous floorplan visual sensor networks 异质平面视觉传感器网络的覆盖估计
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688426
A. Attar, Shantia Yarahmadian, S. Samavi
The issue of Coverage in visual sensor networks (VSNs) has attracted considerable attention due to sensors directional sensing characteristic. It answers the question that how well the target field is monitored by a network of sensors with video/image capturing capability. In floorplan scenario the network is to monitor a plane parallel to the sensors' deployment plane. For large scale applications in which the sensors' deployment is done by dropping sensors, random sensors' placement and orientation according to their respective distribution is a practical assumption. Although some studies exist on the coverage problem of floorplan VSNs, none of them has derived an analytical expression for stochastic coverage based on both the sensors and the network related parameters, which is the main contribution of this paper. We consider the heterogeneous sensing model, where sensors need not have an identical sensing capability. The proposed mathematical frame work is validated by simulation results.
由于传感器的方向感知特性,覆盖问题在视觉传感器网络中备受关注。它回答了一个具有视频/图像捕获能力的传感器网络如何很好地监控目标领域的问题。在平面方案中,网络监控的平面与传感器的部署平面平行。对于大规模应用中传感器的部署是通过放置传感器来完成的,根据传感器各自的分布随机放置和定向是一种实用的假设。虽然已有一些关于平面vns的覆盖问题的研究,但都没有推导出基于传感器和网络相关参数的随机覆盖的解析表达式,这是本文的主要贡献。我们考虑异构传感模型,其中传感器不需要具有相同的传感能力。仿真结果验证了所提出的数学框架。
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引用次数: 2
Parametric amplification in a micro Coriolis mass flow sensor: Reduction of power dissipation without loss of sensitivity 微科氏质量流量传感器的参数放大:降低功耗而不损失灵敏度
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688538
J. Groenesteijn, H. Droogendijk, R. Wiegerink, T. Lammerink, J. C. Lotters, R. Sanders, G. Krijnen
We report on the application of parametric amplification to a micro Coriolis mass flow sensor to reduce the system's power dissipation while retaining sensitivity to flow. By reducing this power dissipation, less heat will be transferred to the fluid and channel, potentially resulting in more temperature-stable flow measurements. We show experimentally that parametric amplification can be used to either greatly reduce power dissipation without loss of flow sensitivity, or to increase the overall sensitivity without increased power dissipation.
我们报道了将参数放大技术应用于微型科氏质量流量传感器,以降低系统的功耗,同时保持对流量的灵敏度。通过减少功率耗散,传递到流体和通道的热量将减少,从而有可能实现更稳定的温度流动测量。我们通过实验证明,参数放大可以在不损失流量灵敏度的情况下大大降低功耗,或者在不增加功耗的情况下提高总体灵敏度。
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引用次数: 2
Design and implementation of a self-calibrating, compact micro strip sensor for in-situ dielectric spectroscopy and data transmission 一种用于现场介电光谱和数据传输的自校准紧凑型微带传感器的设计与实现
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688570
Gunjan Pandey, Ratnesh Kumar, R. Weber
A compact, on-board, self-calibrating, micro strip sensor is presented. The sensor can make accurate multi-frequency measurements of complex permittivity in real time and transmit this information wirelessly by using the same sensor as a micro strip patch antenna. Such multi-frequency measurements in a multi-phase mixture like soil are used to estimate the concentration of individual constituents like bulk-soil, water, and various nutrients in soil. The sensor architecture comprises of a programmable phase locked loop (PLL) which sweeps through the frequency band of 3-40 MHz. The signal generated by the PLL is allowed to reflect from the micro strip patch which is surrounded by the dielectric medium under test (such as soil or food). The amplitude and phase of incident and reflected signals are captured and impedance due to the surrounding dielectric mixture is calculated. This impedance value is used to estimate the dielectric constant by mapping the input impedance of the micro strip sensor to different surrounding dielectric constant values. The sensor has an inbuilt self-calibrating mechanism which makes it useful for remote, underground and hand held applications.
提出了一种紧凑的板载自校准微带传感器。该传感器可以实时精确地对复杂介电常数进行多频测量,并通过与微带贴片天线相同的传感器进行无线传输。在像土壤这样的多相混合物中,这种多频率测量被用来估计土壤中大块土壤、水和各种营养物质等单个成分的浓度。传感器结构包括一个可编程锁相环(PLL),扫描频率为3-40 MHz。锁相环产生的信号被允许从被测介质(如土壤或食物)包围的微带贴片反射。捕获入射和反射信号的振幅和相位,并计算由周围介质混合引起的阻抗。该阻抗值通过将微带传感器的输入阻抗映射到周围不同的介电常数值来估计介电常数。该传感器有一个内置的自校准机构,使其对远程,地下和手持应用非常有用。
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引用次数: 11
SiC gas sensor arrays for extreme environments 用于极端环境的SiC气体传感器阵列
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688186
S. Roy, B. Furnival, N. Wood, K. Vassilevski, N. Wright, A. Horsfall, C. J. O'Malley
For the first time SiC-based gas sensor arrays have been demonstrated, which are capable of discriminating gas species under harsh environments. The structures utilise either a TiO2 or HfO2 dielectric layer and a Pt or Pd catalytic contact. We show that the defects in the dielectric dominate the response to hydrogen and oxygen, resulting in array behaviour, without the need for large numbers of catalytic metals. Simple multiple linear regression techniques can be used with the array to provide a real time prediction of the gas contents of a mixture.
首次证明了基于sic的气体传感器阵列能够在恶劣环境下识别气体种类。该结构利用TiO2或HfO2介电层和Pt或Pd催化接触。我们表明,电介质中的缺陷主导了对氢和氧的响应,导致阵列行为,而不需要大量的催化金属。简单的多元线性回归技术可以与阵列一起使用,以提供混合物气体含量的实时预测。
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引用次数: 2
期刊
2013 IEEE SENSORS
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