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2013 IEEE SENSORS最新文献

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An evaluation of electric-field sensors for projectile detection 弹丸探测用电场传感器的评价
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688441
Cassandra A. Browning, S. Vinci, Jack Zhu, D. Hull, M. Noras
The U.S. Army Research Laboratory (ARL) conducted an experiment at Aberdeen Proving Ground (APG), MD, to collect bullet signature data using three different types of electric-field sensors. The first type is a free-space electric potential sensor; we used Remote Voltage Sensors (RVSs) manufactured by Quasar Federal Systems (QFS). The second type of sensor measures the electric field; we used QFS potential gradiometers and a varactor-based E-field sensor prototype designed by the University of North Carolina - Charlotte (UNCC). The third type of sensor is a “D-dot” charge induction probe designed and built by ARL. We analyzed the performance of each sensor type with regard to bullet detection capability. Mathematical models and signatures were developed for each sensor type, and actual signatures were measured and compared to these models.
美国陆军研究实验室(ARL)在马里兰州阿伯丁试验场(APG)进行了一项实验,使用三种不同类型的电场传感器收集子弹特征数据。第一种是自由空间电位传感器;我们使用类星体联邦系统公司(QFS)生产的远程电压传感器(RVSs)。第二种传感器测量电场;我们使用了QFS电位梯度仪和北卡罗来纳大学夏洛特分校(UNCC)设计的基于变容因子的电场传感器原型。第三种传感器是由ARL设计和制造的“d点”电荷感应探头。我们分析了每种传感器类型在子弹探测能力方面的性能。为每种传感器类型开发了数学模型和签名,并测量了实际签名,并与这些模型进行了比较。
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引用次数: 13
A sensitive three-axis micromachined accelerometer based on an electrostatically suspended proof mass 一种灵敏的三轴微机械加速度计,基于静电悬浮的证明质量
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688167
Fengtian Han, Boqian Sun, Linlin Li, G. Ma
A three-axis micromachined accelerometer where a free proof mass is suspended electrostatically in six degrees of freedom is proposed and tested in order to evaluate this sensitive electrostatic accelerometer for potential microgravity space applications. The micromachined device is based on a novel glass/silicon/glass bonding structure, fabricated by bulk micromachining technique and operated with closed-loop forcefeedback technology. The motion of the proof mass with respect to each side is fully servo-controlled by capacitive position sensing and electrostatic force feedback. To facilitate ground test of this low-g accelerometer, the full input range in the vertical z axis is set at a relatively high value of 3.68g in order to counteract the gravity in one g condition, while the range in the lateral x axis is set as low as 2.90mg to achieve high sensitivity. Initial test of this MEMS accelerometer shows that a sensitivity of 688.8V/g is achieved by setting a low bias voltage of 1V.
提出了一种以六自由度静电悬浮自由质量的三轴微机械加速度计,并对其进行了测试,以评估这种灵敏的静电加速度计在微重力空间中的潜在应用。该微加工装置基于一种新型的玻璃/硅/玻璃键合结构,采用体微加工技术制造,并采用闭环力反馈技术操作。证明质量相对于每一边的运动是完全伺服控制的电容位置传感和静电力反馈。为了便于低g加速度计的地面测试,垂直z轴的全输入范围设置为较高的3.68g,以抵消一个g条件下的重力,而横向x轴的范围设置为低至2.90mg,以实现高灵敏度。该MEMS加速度计的初始测试表明,通过设置1V的低偏置电压,可以实现688.8V/g的灵敏度。
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引用次数: 10
2-D model of the indirectly-heated type microwave power sensor based on GaAs MMIC process 基于GaAs MMIC工艺的间接加热型微波功率传感器的二维模型
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688404
Zhenxiang Yi, X. Liao, Hao Wu
In this paper, a novel two-dimensional (2-D) model is established to describe the temperature distribution of the indirectly-heated type microwave power sensor. Fourier series is applied to obtain the solution of the heat transfer equation based on the boundary conditions. Finite-element method (FEM) analysis is performed to verify the 2-D model and the simulation shows that the 2-D model is more accurate than the existing 1-D model. The power sensor is fabricated by GaAs MMIC process and MEMS technology. Au is chosen for the transmission line and the measuring pad, TaN is fabricated to form the two loaded resistors. Power measurement is accomplished from 0- 100mW under 0.1GHz, 0.5GHz, 1GHz, 5GHz and 10GHz, and the sensitivities are 0.26mV/mW, 0.25mV/mW, 0.23mV/mW, 0.19mV/mW and 0.16mV/mW, respectively. The measured results demonstrate that the 2-D model agrees with the measurement well at low frequency. However, errors increase at high frequency because of electromagnetic coupling loss of the transmission line and the parasitic loss of the load resistors.
本文建立了一种新的二维模型来描述间接加热型微波功率传感器的温度分布。采用傅立叶级数法求解基于边界条件的传热方程。通过有限元分析对二维模型进行了验证,仿真结果表明,二维模型比现有的一维模型精度更高。该功率传感器采用GaAs MMIC工艺和MEMS技术制作而成。传输线和测量垫选用Au,两个负载电阻选用TaN。在0.1GHz、0.5GHz、1GHz、5GHz和10GHz频段完成0- 100mW的功率测量,灵敏度分别为0.26mV/mW、0.25mV/mW、0.23mV/mW、0.19mV/mW和0.16mV/mW。实测结果表明,二维模型在低频下与实测结果吻合较好。但在高频时,由于传输线的电磁耦合损耗和负载电阻的寄生损耗,误差增大。
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引用次数: 4
Self-powered, tactile pressure sensing skin using crystalline ZnO nanorod arrays for robotic applications 自供电,触觉压力感应皮肤使用晶体ZnO纳米棒阵列的机器人应用
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688347
B. P. Nabar, Z. Çelik-Butler, D. Butler
Large area arrays of ordered ZnO piezoelectric nanorods are developed on flexible substrates towards self-powered sensing skin for robots. The sensor array is designed to measure tactile pressure in the 10 kPa-200 kPa range with 1 mm spatial resolution. A voltage signal in the range of few mV is observed in response to applied pressure. This work represents the first demonstration of perfectly ordered, vertically aligned, crystalline ZnO nanorod arrays, fabricated in polyimides to ensure conformity to non-planar surfaces such as a robot's. The sensors are self-packaged using a flexible substrate and a superstrate. In addition to the novelty of the sensor structure itself, the work includes an innovative low-temperature hydrothermal ZnO growth process compatible with the temperature restrictions imposed by the polyimide substrate/superstrate. Control of nanorod density and placement is achieved using a thermal nanoimprint lithography based template, another novelty of the presented work.
在柔性衬底上研制了大面积有序ZnO压电纳米棒阵列,用于机器人自供电传感皮肤。传感器阵列设计用于测量10kpa - 200kpa范围内的触觉压力,空间分辨率为1mm。在几毫伏范围内的电压信号被观察到响应于施加的压力。这项工作首次展示了完美有序、垂直排列的晶体ZnO纳米棒阵列,该阵列由聚酰亚胺制成,以确保与机器人等非平面表面保持一致。传感器采用柔性基板和上覆板自封装。除了传感器结构本身的新颖性外,该工作还包括一种创新的低温水热ZnO生长工艺,该工艺与聚酰亚胺衬底/上覆层施加的温度限制相兼容。利用基于热纳米压印的模板实现了纳米棒密度和放置的控制,这是本研究的另一个新颖之处。
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引用次数: 5
Gas concentration and flow speed measurements using a polymer-based membrane sensor 使用聚合物膜传感器测量气体浓度和流速
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688541
C. Hepp, F. Krogmann, G. Urban
This contribution presents a polymer-based membrane sensor that is capable of determining simultaneously flow speed and gas concentration of binary gas mixtures. The sensor therefore combines two excitation modes. It consists of an unsymmetrical 1D-resistor array made of platinum. The well defined temperature coefficient of resistance enables to switch between constant temperature and constant power excitation modes of the heating element. The response signal of the downstream temperature sensor allows the gas concentration measurement of a binary gas mixture using constant power excitation mode. A switch to constant temperature excitation allows flow speed measurements. A sinusoidal AC-excitation with a frequency of 1 Hz is chosen to carry out the proof-of-concept.
这一贡献提出了一种基于聚合物的膜传感器,能够同时确定二元气体混合物的流速和气体浓度。因此,传感器结合了两种激励模式。它由一个由铂制成的不对称一维电阻阵列组成。定义良好的电阻温度系数使加热元件的恒温和恒功率激励模式之间切换。下游温度传感器的响应信号允许使用恒定功率激励模式测量二元气体混合物的气体浓度。切换到恒温激励允许流速测量。选择频率为1hz的正弦交流激励进行概念验证。
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引用次数: 1
Design and implementation of a self-calibrating, compact micro strip sensor for in-situ dielectric spectroscopy and data transmission 一种用于现场介电光谱和数据传输的自校准紧凑型微带传感器的设计与实现
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688570
Gunjan Pandey, Ratnesh Kumar, R. Weber
A compact, on-board, self-calibrating, micro strip sensor is presented. The sensor can make accurate multi-frequency measurements of complex permittivity in real time and transmit this information wirelessly by using the same sensor as a micro strip patch antenna. Such multi-frequency measurements in a multi-phase mixture like soil are used to estimate the concentration of individual constituents like bulk-soil, water, and various nutrients in soil. The sensor architecture comprises of a programmable phase locked loop (PLL) which sweeps through the frequency band of 3-40 MHz. The signal generated by the PLL is allowed to reflect from the micro strip patch which is surrounded by the dielectric medium under test (such as soil or food). The amplitude and phase of incident and reflected signals are captured and impedance due to the surrounding dielectric mixture is calculated. This impedance value is used to estimate the dielectric constant by mapping the input impedance of the micro strip sensor to different surrounding dielectric constant values. The sensor has an inbuilt self-calibrating mechanism which makes it useful for remote, underground and hand held applications.
提出了一种紧凑的板载自校准微带传感器。该传感器可以实时精确地对复杂介电常数进行多频测量,并通过与微带贴片天线相同的传感器进行无线传输。在像土壤这样的多相混合物中,这种多频率测量被用来估计土壤中大块土壤、水和各种营养物质等单个成分的浓度。传感器结构包括一个可编程锁相环(PLL),扫描频率为3-40 MHz。锁相环产生的信号被允许从被测介质(如土壤或食物)包围的微带贴片反射。捕获入射和反射信号的振幅和相位,并计算由周围介质混合引起的阻抗。该阻抗值通过将微带传感器的输入阻抗映射到周围不同的介电常数值来估计介电常数。该传感器有一个内置的自校准机构,使其对远程,地下和手持应用非常有用。
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引用次数: 11
Microsensor analyses for trace targets over extended times in a simulated Martian environment 微传感器在模拟火星环境中长时间跟踪目标分析
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688126
K. Benkstein, P. Rogers, C. B. Montgomery, S. Semancik, C. Jin, B. Raman
We have studied the performance of a chemical microsensor array in a simulated Martian environment, which involved a carbon dioxide-rich background with low oxygen content (0.15 %) at low pressure and temperature to mimic the conditions at the Martian surface. Gas-phase target analytes (methane, ethane, hydrogen and sulfur dioxide) in complex ternary mixtures at concentrations of 200 nmol/mol and below were presented to the microsensor array under these conditions. The array featured individual metal oxide sensing elements on microhotplate platforms. We will review our operational approach for this extraterrestrial environment and report on the capabilities of the microsensor for detecting the target analytes. In particular, we will emphasize the application of Partial Least Squares-Discriminant Analysis (PLS-DA) models for the detection of the analytes, and discuss how the microsensor array performed over extended periods of operation (up to 3 weeks between training and test exposures).
我们研究了化学微传感器阵列在模拟火星环境中的性能,该环境涉及在低压和低温下富含二氧化碳的低氧含量背景(0.15%),以模拟火星表面的条件。在这些条件下,将浓度在200 nmol/mol及以下的复杂三元混合物中的气相目标分析物(甲烷、乙烷、氢和二氧化硫)呈现给微传感器阵列。该阵列在微热板平台上具有单个金属氧化物传感元件。我们将回顾我们在这种地外环境中的操作方法,并报告微传感器检测目标分析物的能力。特别是,我们将强调偏最小二乘判别分析(PLS-DA)模型在分析物检测中的应用,并讨论微传感器阵列在长时间操作(训练和测试暴露之间长达3周)中的表现。
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引用次数: 0
Functionalized single ZnO-metal junction as a pH sensor 功能化单zno -金属结作为pH传感器
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688513
P. Motto, V. Cauda, S. Stassi, G. Canavese, D. Demarchi
We have prepared a novel pH sensor consisting in single ZnO micro-wire (MW) aligned on gold-electrode array prepared by electromigrating eight parallel gold wires on silicon wafer with a custom electronic system, leading to nano-sized gap. We also anchored to the ZnO MW surface organic functional molecules rich of amine (-NH2) groups, thus ZnO-NH The MWs were then deposited from solution and oreinted through dielectrophoresis, resulting in eight single MWs aligned across the electromigrated gold electrodes. Therefore each single silicon chip is composed by eight separated pH sensors. We measured the I-V characteristic and secondly the ZnO MW Field Effect Transistor (MW-FET) to evaluate the sensitivity of both amine-functionalized and unfunctionalized ZnO-gold junctions upon a pH variation to both acidic and basic values of the solution environmentWe show the superiority in pH response of the ZnO-NH junctions, with an increase of one order of magnitude of the current during the pH reduction, with respect to the bare ZnO ones. In particular a strong sensitivity enhancement was measured by MW-FET with respect to conventional I-V characteristics.
我们制备了一种新型的pH传感器,该传感器由单根ZnO微线(MW)排列在由8根平行金线在硅片上电迁移而成的金电极阵列上,并采用定制的电子系统,导致纳米级的间隙。我们还锚定了氧化锌MW表面富含胺(-NH2)基团的有机功能分子,从而将ZnO- nhh MW从溶液中沉积并通过介电电泳定向,得到8个单MW排列在电迁移的金电极上。因此,每个硅芯片由八个独立的pH传感器组成。我们测量了氧化锌毫微米场效应晶体管(MW- fet)的I-V特性,以评估胺功能化和非功能化ZnO-金结在pH值变化时对溶液环境的酸性和碱性值的敏感性。结果表明,在pH值降低期间,ZnO- nh结的pH响应优于裸ZnO结,电流增加了一个数量级。特别是,相对于传统的I-V特性,用毫瓦场效应管测量了一个很强的灵敏度增强。
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引用次数: 3
Fabrication and characterization of a dual-mode SPR/SERS sensor based on plasmonic nanodome arrays 基于等离子体纳米天线阵列的双模SPR/SERS传感器的制备与表征
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688128
Charles J. Choi, S. Semancik
This work describes a label-free, optical sensor system fabricated on a flexible plastic film with dual detection modalities: surface-enhanced Raman scattering (SERS) for specific chemical identification and localized surface plasmon resonance (LSPR) for capture-affinity biosensing. The sensor surface is comprised of a close-packed array of 383 nm diameter dome structures with interdome spacing of 14 nm, fabricated by a nanoreplica molding process and unpatterned blanket deposition of SiO2 and Ag thin films. The nanoreplica molding process presented in this work allows for simple, high-throughput fabrication of uniform nanoscale structures (nanodome arrays) over large surface areas without the requirement for high resolution lithography, additional processes such as etching and liftoff, or defect-free deposition of spherical microparticle monolayer templates. Such fabrication characteristics are important for realizing high performance, low-cost measurement technology.
这项工作描述了一种无标签的光学传感器系统,该系统制造在柔性塑料薄膜上,具有双重检测模式:用于特定化学识别的表面增强拉曼散射(SERS)和用于捕获亲和生物传感的局部表面等离子体共振(LSPR)。传感器表面由直径为383 nm、间距为14 nm的紧密排列的圆顶结构组成,采用纳米复制成型工艺和无图案的SiO2和Ag薄膜毯沉积而成。在这项工作中提出的纳米复制成型工艺允许在大表面积上简单,高通量地制造均匀的纳米级结构(纳米圆顶阵列),而不需要高分辨率光刻,额外的工艺,如蚀刻和剥离,或球形微粒单层模板的无缺陷沉积。这些制造特性对于实现高性能、低成本的测量技术具有重要意义。
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引用次数: 1
BioArgo: A global scale chemical sensor network to observe carbon, oxygen, and nitrogen cycles in the ocean BioArgo:一个全球规模的化学传感器网络,用于观察海洋中的碳、氧和氮循环
Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688480
K. Johnson
This talk will focus on the development and operation of a global scale, chemical sensor network that is distributed throughout the world's ocean. The daily, seasonal and interannual changes in the concentrations of inorganic carbon, pH, dissolved oxygen and nitrate that are driven by photosynthesis and respiration are basic tracers of ocean metabolism. This metabolism has a fundamental control on the earth's climate, as production of organic matter in the surface ocean acts to lower atmospheric carbon dioxide by about 200 ppm. It is possible that these rates of elemental cycling will change in the future as the surface ocean warms [1]. However, there are no existing observing systems that allow ocean metabolism to be observed directly at a global scale. In particular, sampling chemistry from ships does not work because of the expense and remoteness of most of the ocean. At the global scale, ocean productivity can only be sensed indirectly from satellite ocean color observations. Global scale sensor networks using robotic platforms equipped with chemical sensors are required to directly observe ocean metabolism [2]. The Argo network (http://www.argo.ucsd.edu), which is used to monitor the heat content of the ocean, is a model for such a system. There are >3000 Argo profiling floats throughout the ocean. They rise from 2000 m depth at 5 to 10 day intervals measuring temperature and salinity during the ascent and then transmit the data to low earth orbit communications networks. This cycle is repeated for the 5 year life of each float. The BioArgo system is now working to build a complementary network equipped with pH, oxygen, nitrate and biooptical sensors [3]. More than 200 profiling floats with oxygen and >40 floats with nitrate are now operating from the Arctic to the Antarctic in all of the major ocean basins (http://argo.jcommops.org/maps.html, scroll right to the Bio map). These sensors have demonstrated exceptional stability and precision over time periods now reaching four years [4-7]. Experimental pH sensors are now operating on profiling floats with a precision and stability near 0.001 pH over an annual cycle. These results demonstrate the feasibility of establishing a global chemical sensor network. This talk will review the methods used to develop chemical sensors with multi-year stability and the development of a global observing system.
本讲座将集中讨论分布在全球海洋的化学传感器网络的发展和运作。由光合作用和呼吸作用驱动的无机碳、pH、溶解氧和硝酸盐浓度的日、季、年际变化是海洋代谢的基本示踪剂。这种新陈代谢对地球气候具有根本的控制作用,因为海洋表层有机物的产生可以将大气中的二氧化碳含量降低约200ppm。随着海洋表面变暖,这些元素循环速率在未来有可能发生变化[1]。然而,目前还没有能够在全球范围内直接观测海洋代谢的现有观测系统。特别是,由于大部分海洋的昂贵和偏远,从船上取样化学物质是行不通的。在全球范围内,海洋生产力只能通过卫星海洋颜色观测间接地感知。要直接观测海洋代谢,需要使用配备化学传感器的机器人平台的全球尺度传感器网络[2]。用于监测海洋热含量的Argo网络(http://www.argo.ucsd.edu)就是这样一个系统的模型。在整个海洋中有超过3000个Argo剖面浮标。它们每隔5至10天从2000米的深度上升,在上升过程中测量温度和盐度,然后将数据传输到近地轨道通信网络。这个循环在每个浮子的5年寿命中重复进行。BioArgo系统目前正致力于建立一个配备pH值、氧气、硝酸盐和生物光学传感器的互补网络[3]。目前,从北极到南极的所有主要海洋盆地(http://argo.jcommops.org/maps.html,向右滚动到生物地图),有200多艘携带氧气的分析浮标和40多艘携带硝酸盐的分析浮标在运行。这些传感器在四年的时间周期内表现出卓越的稳定性和精度[4-7]。实验pH传感器现在在剖面浮子上运行,在一年的周期内精度和稳定性接近0.001 pH。这些结果证明了建立全球化学传感器网络的可行性。本讲座将回顾用于开发具有多年稳定性的化学传感器的方法和全球观测系统的发展。
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引用次数: 2
期刊
2013 IEEE SENSORS
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