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2014 IEEE International Conference on Semiconductor Electronics (ICSE2014)最新文献

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A Study on the role of solvent on properties of GdxZn1−xO films synthesized by sol-gel method 溶剂对溶胶-凝胶法制备GdxZn1−xO薄膜性能影响的研究
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920807
C. A. Norhidayah, S. Kamaraddin, N. Nafarizal, M. Z. Sahdan, A. R. Nuralfadzilah, S. Tawil
The increasing demand for high-performance and low cost optoelectronic devices motivates many researchers to develop more efficient transparent conductive oxide (TCO) films. Among the popular TCOs, the past decade has seen the emergence of zinc oxide (ZnO) as one of the potential materials for the fabrication of transparent conductive electrodes. The aim of this work is to study the influence of different solvents on the properties of GdxZn1-xO (x ≤ 0.01) films synthesized by sol-gel spin coating technique. Consequently, three different solutions were prepared with different solvents [2-Methoxyethanol (2-ME), ethanol (EtOH) and isopropanol (IPA)]. The structural, surface roughness and optical properties were investigated using an X-ray diffractometer (XRD, PANanalytical xpert-pro), atomic force microscope (AFM, Park XE-100) and ultra violet-visible spectrophotometer (UV-Vis, Shimadzu UV 1800), respectively. As a result, all films were found to have polycrystalline with hexagonal wurtzite structure. In addition, AFM analysis revealed that the film synthesized using EtOH exhibiting the smallest surface roughness of about 4.12 nm compared with IPA and 2-ME of about 5.12 nm and 12.22 nm, respectively. Also, the optical transmittance spectra indicate that all films exhibit good transparency in the visible spectral range with an average transmission of approximately 97.5%, 97.2% and 96.1% for EtOH, IPA and 2-ME, respectively. The optical band gap energy (Eg) values was estimated to be around 3.26 ~ 3.30 eV using Tauc's model with the lowest value for IPA (3.26 eV) and highest for 2-ME (3.30 eV). In a nutshell, the solvents are playing a key role for controlling the growth and nucleation in the preparation of GdxZn1-xO solution and it strongly affects the properties of the film.
对高性能、低成本光电器件的需求不断增长,促使许多研究人员开发出更高效的透明导电氧化物(TCO)薄膜。在流行的tco中,氧化锌(ZnO)作为制造透明导电电极的潜在材料之一在过去的十年中已经出现。研究了不同溶剂对溶胶-凝胶自旋镀膜技术合成的GdxZn1-xO (x≤0.01)薄膜性能的影响。因此,用不同的溶剂[2-甲氧基乙醇(2-ME)、乙醇(EtOH)和异丙醇(IPA)]制备了三种不同的溶液。分别用x射线衍射仪(XRD, PANanalytical expert -pro)、原子力显微镜(AFM, Park x -100)和紫外可见分光光度计(UV- vis, Shimadzu UV 1800)对其结构、表面粗糙度和光学性能进行了研究。结果发现,所有薄膜都具有六方纤锌矿结构的多晶。此外,AFM分析表明,与IPA和2-ME相比,EtOH合成的薄膜表面粗糙度最小,分别为5.12 nm和12.22 nm,表面粗糙度约为4.12 nm。透射光谱结果表明,所有膜在可见光范围内具有良好的透明度,EtOH、IPA和2-ME的平均透射率分别约为97.5%、97.2%和96.1%。利用Tauc的模型估计光学带隙能量(Eg)值约为3.26 ~ 3.30 eV,其中IPA带隙能量最小(3.26 eV), 2-ME带隙能量最高(3.30 eV)。综上所述,在制备GdxZn1-xO溶液的过程中,溶剂对薄膜的生长和成核起着关键的控制作用,对薄膜的性能有很大的影响。
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引用次数: 1
A 48GHz-78GHz MMIC sub-harmonic pumped image rejection mixer 48GHz-78GHz MMIC次谐波泵浦抑制混频器
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920853
Shengzhou Zhang, Lingling Sun, J. Wen, Jun Liu
The paper presents the design of a 48-78GHz sub-harmonic pumped image rejection mixer (SHIRM) based on a 3μm GaAs technology. The SHIRM contains two identical 2nd APDP-Based SHP mixers, a modified quadrature-phase RF Lange coupler and an in-phase LO Wilkinson power divider. The quasi-lumped topology is utilized with the compact size of 1.7×1.6 mm2. The conversion gain of -14±1dB and the minimum image rejection radio of 20dB over the frequency range 48-78GHz covering the whole V-band are simulated, with fixed IF of 1GHz and the LO input power of 12dBm. The 3dB bandwidth is superior to 30GHz. The LO-to-RF and 2LO-to-RF isolations are superior to 25dB and 70dB, respectively. The 2nd harmonic component of LO signal is suppressed by the symmetrical structure.
设计了一种基于3μm GaAs技术的48-78GHz次谐波泵浦阻像混频器(SHIRM)。SHIRM包含两个相同的基于第二apdp的SHP混频器,一个改进的正交相RF兰格耦合器和一个同相LO威尔金森功率分配器。采用准集总拓扑结构,紧凑尺寸为1.7×1.6 mm2。在48-78GHz覆盖整个v波段的频率范围内,模拟了-14±1dB的转换增益和20dB的最小图像抑制无线电,固定中频为1GHz,本端输入功率为12dBm。3dB带宽优于30GHz。LO-to-RF和2LO-to-RF隔离度分别优于25dB和70dB。对称结构抑制了本征信号的二次谐波分量。
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引用次数: 2
Experimental analysis on SU8-micromolding structure of PDMS (poly-dimethylsiloxane) based microfluidic channel 聚二甲基硅氧烷微流控通道su8微成型结构的实验分析
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920809
M. Masrie, B. Majlis, J. Yunas
This paper reports experimental study of a microfluidic channel fabrication for bioparticles detection system. The microfluidic channel is fabricated by standard MEMS soft photolithography process implementing negative photoresist SU-8 and poly-dimethylsiloxane (PDMS). Based on the characterization process in the fabrication, an optimum structure of PDMS microfluidic has been achieved. A proper UV exposure dosage can be identified through the observation of the SU-8 mold film thickness and sidewalls profile produced in the characterization process. From this, UV expose for 60 s with exposure energy at 156 mJ/cm2 is considered as the optimal expose condition in this work. In addition, the difference between the PDMS microchannel pattern from the SU-8 mold are also observed. With these results, the produced structures can provide suitable channel formation for portable bioparticles detection purpose in lab on Chip applications.
本文报道了一种用于生物颗粒检测系统的微流控通道的实验研究。采用负光刻胶SU-8和聚二甲基硅氧烷(PDMS),采用标准MEMS软光刻工艺制备微流控通道。基于制备过程中的表征过程,实现了PDMS微流控的优化结构。通过观察表征过程中产生的SU-8模膜厚度和侧壁轮廓,可以确定合适的紫外曝光剂量。由此,我们认为以156 mJ/cm2的暴露能量照射60 s是本研究的最佳暴露条件。此外,还观察了SU-8模具PDMS微通道模式的差异。通过这些结果,所产生的结构可以为芯片实验室应用中的便携式生物颗粒检测目的提供合适的通道形成。
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引用次数: 2
Transistor sizing methodology for low noise charge sensitive amplifier with input transistor working in moderate inversion 输入晶体管工作在中等反转的低噪声电荷敏感放大器的晶体管尺寸方法
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920828
N. Aimaier, R. Sidek, M. Hamidon, N. Sulaiman
In this paper noise contribution of current source transistors and sizing methodology in charge sensitive amplifier for application in the front-end readout electronics is presented. In modern deep-submicron technologies, MOS transistor operating region tends to shift from strong inversion to moderate inversion, this makes traditional square-law MOS device modeling not applicable anymore. Thus a simplified EKV model, which is quite successful in all CMOS operating regions, has been adopted to develop a new analytical methodology to optimize geometry of current source transistors so that the noise contribution from these transistors is only a fraction of input transistor noise. A charge sensitive amplifier based on dual PMOS cascode structure is designed by adopting this current source transistor sizing methodology, and has been simulated using 130nm CMOS technology. The proposed methodology and noise contribution from current source transistors have been found in good agreement with simulation results using deep-submicron CMOS technology.
本文介绍了用于前端读出电子器件的电荷敏感放大器中电流源晶体管的噪声贡献及尺寸确定方法。在现代深亚微米技术中,MOS晶体管的工作区域有从强反转向中反转转变的趋势,这使得传统的平方律MOS器件建模不再适用。因此,一个简化的EKV模型,这是相当成功的所有CMOS工作区域,已采用开发一种新的分析方法来优化电流源晶体管的几何结构,使这些晶体管的噪声贡献仅为输入晶体管噪声的一小部分。采用该电流源晶体管尺寸设计方法设计了一种基于双PMOS级联结构的电荷敏感放大器,并采用130nm CMOS技术进行了仿真。所提出的方法和电流源晶体管的噪声贡献与采用深亚微米CMOS技术的仿真结果一致。
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引用次数: 8
Influence of gadolinium doping on the crystalline structure and optical properties of zinc oxide thin films 钆掺杂对氧化锌薄膜晶体结构和光学性能的影响
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920850
N. Sarip, F. Mahmud, M. Z. Sahdan, S. Tawil
This report represents an experimental investigation on the structural and optical modification of ZnO thin films towards the Gd dopant content, whereby the desired films were deposited on glass substrates by chemical solution method. The prepared samples were characterized by X-ray diffraction (XRD), field-emission scanning electron microscopy (FE-SEM), and surface profiler. The optical properties were studied by UV-Visible spectroscopy technique. The influence of Gd dopant on structural and optical properties of the prepared thin films were investigated and discussed based on the structure modification and band gap of undoped and Gd-doped ZnO thin films.
本文报道了采用化学溶液法在玻璃衬底上沉积ZnO薄膜的实验研究,并对Gd掺杂量对ZnO薄膜的结构和光学修饰进行了研究。采用x射线衍射(XRD)、场发射扫描电镜(FE-SEM)和表面轮廓仪对制备的样品进行了表征。利用紫外-可见光谱技术研究了其光学性质。通过对未掺杂和掺杂ZnO薄膜的结构修饰和带隙的研究,探讨了Gd掺杂对ZnO薄膜结构和光学性能的影响。
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引用次数: 2
Investigation of TMAl preflow to the properties of AlN and GaN film grown on Si(111) by MOCVD TMAl预流对MOCVD在Si(111)上生长的AlN和GaN薄膜性能的影响
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920785
F. Lumbantoruan, Yuan-Yee Wong, Yue-Han Wu, Wei-Ching Huang, Niraj Man Shrestra, T. T. Luong, T. B. Tinh, E. Chang
The influence of TMAl preflow to the AlN buffer layer and GaN thin film was studied by Optical Microscope, Atomic Force Microscope, X-ray diffraction and Transmission Electron Microscope. Different duration of TMAl preflow lead to substantially differences of the AlN buffer layer and GaN film properties in terms of surface morphology and crystal quality. It was found without TMAl preflow the crystal quality of AlN buffer layer and GaN deteriorated due to the formation of amorphous interlayer between Si and AlN. Meltback etching and cracks was observed on the surface of GaN grown on AlN without TMAl preflow. However, overlong duration of TMAl preflow degraded the properties of AlN buffer layer and the subsequent GaN layer. GaN grown with longer TMAl preflow suffer of poor crystal quality, high density cracks and rough surface morphology. With the optimum duration of TMAl preflow, crystal quality and surface roughness of GaN can be improved.
采用光学显微镜、原子力显微镜、x射线衍射和透射电镜研究了TMAl预流动对氮化铝缓冲层和氮化镓薄膜的影响。不同的TMAl预流时间导致AlN缓冲层和GaN薄膜在表面形貌和晶体质量方面存在很大差异。结果表明,在未进行TMAl预流动的情况下,由于在Si和AlN之间形成非晶夹层,导致AlN缓冲层和GaN的晶体质量下降。在没有TMAl预流的情况下,在AlN上生长的GaN表面出现了熔回腐蚀和裂纹。然而,TMAl预流时间过长会降低AlN缓冲层和后续GaN层的性能。长TMAl预流生长的GaN晶体质量差,裂纹密度高,表面形貌粗糙。通过优化TMAl预流时间,可以提高GaN的晶体质量和表面粗糙度。
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引用次数: 9
Fabrication and characterization of undoped polysilicon nanowire for pH sensor pH传感器用未掺杂多晶硅纳米线的制备与表征
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920881
C. Yee, M. Arshad, M. Nuzaihan, M. Fathil, U. Hashim
Polysilicon has great benefit in application of pH sensor due to the unique properties and easiness to use top-down approach. In this paper, we present fabrication and characterization of undoped polysilicon nanowire (NW) for pH sensor application. The fabrication processes steps involve were photolithography, etching, deposition and oxidation. 3-aminopropyltriethoxysilane or APTES were used to enhance the sensitivity of polysilicon layer as well as able to provide surface modification by undergoing protonation and deprotonation process. Surface analysis using SEM were used for surface morphology analysis. Different types of pH solution provide different resistivity and conductivity towards polysilicon surface. In addition, voltage, current, conductance against pH level are characterized and compared. Alkaline solution has the higher current as compared to acidic. This was due to the polysilicon layer contains more holes which are easily being attracted by - SiO to the surface and hence, forming a strong channel from source to drain. Results obtain reveal a linearity of pH measurement with a corresponding sensitivity of 4.65 nS/pH.
多晶硅由于其独特的性能和易于自顶向下的使用方法,在pH传感器的应用中具有很大的优势。本文介绍了用于pH传感器的未掺杂多晶硅纳米线(NW)的制备和表征。制造工艺步骤包括光刻、蚀刻、沉积和氧化。利用3-氨基丙基三乙氧基硅烷或APTES提高多晶硅层的敏感性,并能通过质子化和去质子化过程进行表面改性。表面形貌分析采用扫描电镜进行。不同类型的pH溶液对多晶硅表面提供不同的电阻率和电导率。此外,电压,电流,电导随pH值的变化进行了表征和比较。碱性溶液比酸性溶液具有更高的电流。这是由于多晶硅层包含更多的孔,这些孔很容易被- SiO吸引到表面,因此形成了从源到漏的强大通道。结果表明,pH测量具有良好的线性关系,灵敏度为4.65 nS/pH。
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引用次数: 2
Contactor characterization methodology on pin inductance 引脚电感的接触器表征方法
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920782
L. L. Ong, Chan Yee Kit, Y. Heng
Contactor pin is commonly used as the test tooling to enable million times of repeatability functional testing in manufacturing. Simulation should be performed before contactor sent for prototyping. The objective is to optimize the design according to device performance and avoid design faulty which may lead to higher testing cost. This paper introduces the methodology on contactor pin characterization specifically the pin inductance that are helpful for high speed tooling engineer to access their contactor's performances. The impact of the contactor pin design, topology and contactor housing design will be explained in this paper. Indirectly, this is to emphasize the importance of assessing the contactor by considering many design factors instead of assessing in ideal way. It is widely applicable to any electronic devices testing that need contactor.
接触器引脚是制造过程中常用的测试工具,可实现百万次重复性功能测试。在将接触器送去制作原型之前,应进行模拟。目标是根据设备性能优化设计,避免设计错误导致更高的测试成本。本文介绍了接触器引脚特性的方法,特别是引脚电感的特性,有助于高速模具工程师了解接触器的性能。本文将解释接触器引脚设计、拓扑结构和接触器外壳设计的影响。间接地,这强调了通过考虑许多设计因素来评估接触器的重要性,而不是以理想的方式进行评估。广泛适用于任何需要接触器的电子器件测试。
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引用次数: 2
Synthesizing SnAgCu nanoparticles by electrodeposition of reverse microemulsion electrolyte 反相微乳液电解液电沉积法制备SnAgCu纳米颗粒
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920911
S. P. Foo, K. Siow, A. Jalar
Solder printing faces challenges in print definition and sustainable volume transfer as the microelectronic industry migrates to smaller footprints. Nano-sized alloy particles mitigate these issues by modifying the solder formulation and rheology. We propose an electrodeposition method using reverse microemulsion (without reducing agent) as electrolyte to synthesize Sn-Ag-Cu solder alloy nanoparticle. SnCl2.2H2O, Ag2SO4 and CuSO4 are used as the precursor. N-hexane, TritonX-100 and n-hexanol are used as oil phase, surfactant and co-surfactant, respectively. Three volume ratios of aqueous to surfactant phase, Wo are carried out namely: 0.20, 0.40 and 0.60 but only the ratio of 4.5:1.0 is able to synthesize the nano-sized SAC particles. Scanning electron microscopy shows the spherical SAC particles are well dispersed and their sizes range from 15 to 90 nm. X-ray diffraction spectra show the formation of Sn, Ag3Sn and Cu6Sn5 without any oxide peaks in the synthesized nanoparticles; their absence suggests the effectiveness of the surfactants in protecting the alloy particles from oxidation. This electrodeposition method compares favourably to the microemulsion (with reducing agent) method in producing spherical and well-distributed nanosized solder particles.
随着微电子工业向更小的足迹迁移,焊锡印刷面临着打印定义和可持续体积转移的挑战。纳米尺寸的合金颗粒通过改变焊料配方和流变性来缓解这些问题。提出了一种以反相微乳液(不含还原剂)为电解液制备Sn-Ag-Cu钎料合金纳米颗粒的电沉积方法。采用SnCl2.2H2O、Ag2SO4和CuSO4作为前驱体。正己烷、TritonX-100和正己醇分别作为油相、表面活性剂和助表面活性剂。水相与表面活性剂的体积比分别为0.20、0.40和0.60,但只有4.5:1.0的体积比才能合成纳米级SAC颗粒。扫描电镜显示,球形SAC颗粒分散良好,粒径在15 ~ 90 nm之间。x射线衍射谱图表明,合成的纳米粒子形成了Sn、Ag3Sn和Cu6Sn5,无氧化峰;它们的缺失表明表面活性剂在保护合金颗粒免于氧化方面是有效的。这种电沉积法在生产球形和均匀分布的纳米焊料颗粒方面优于微乳液法(含还原剂)。
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引用次数: 1
On-wafer scattering parameter characterization of differential four-port networks LNA using two-port vector network analyzer 基于双端口矢量网络分析仪的差分四端口网络LNA的片上散射参数表征
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920867
M. Muhamad, N. Soin, H. Ramiah, N. Noh, C. W. Keat
This paper presents a technique that enables very accurate measurement for S-parameter of differential low noise amplifier by means of a standard two-port vector network analyzer (VNA). This technique involves by terminating two ports at one time while another two ports are measured. Accurate characterization of a two port device requires a four-port vector network analyzer, which might be not easily available. Thus, it is a common practice to terminate the two of the four ports to be used which the conventional/standard two port VNA. Even though the above approach is applicable but the reliability and conformity of the test method is still limited and uncertain. For verification, the measurement using four-port VNA have been conducted to test the devices S-parameters are accurately similar with the two port network. The fabricated on-wafer differential LNA structure was tested and measured with normal two-port VNA and also four-port VNA. By using this technique, there is no need to purchase a four-port VNA. By using this technique, any multi-port circuit network can be measured. The LNA has been implemented in RF 0.13um CMOS process. The differential LNA shows the measured performance in term of gain is equal to 17.4 dB. This give the percentage difference of 0.63 compared with measured using four-port VNA. The circuit consume only 9 mW power while dissipating 7.59mA from a 1.8 V supply. Generally, the measured results of the on-wafer fabricated differential LNA show good agreement for both set up.
本文提出了一种利用标准双端口矢量网络分析仪(VNA)对差分低噪声放大器s参数进行精确测量的方法。该技术涉及在测量另外两个端口时同时终止两个端口。准确表征一个双端口设备需要一个四端口矢量网络分析仪,这可能不容易获得。因此,通常的做法是终止传统/标准双端口VNA所使用的四个端口中的两个。尽管上述方法是适用的,但测试方法的可靠性和符合性仍然是有限的和不确定的。为了验证,使用四端口VNA进行了测量,以测试设备的s参数与两端口网络精确相似。采用普通双端口VNA和四端口VNA对制备的片上差分LNA结构进行了测试和测量。通过使用这种技术,不需要购买四端口VNA。利用该技术,可以对任意多端口电路网络进行测量。LNA已在RF 0.13um CMOS工艺中实现。差分LNA显示增益方面的测量性能等于17.4 dB。与使用四端口VNA测量相比,这给出了0.63的百分比差异。该电路仅消耗9mw功率,而从1.8 V电源耗散7.59mA。一般来说,片上制造的差分LNA的测量结果与两种设置的结果一致。
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引用次数: 1
期刊
2014 IEEE International Conference on Semiconductor Electronics (ICSE2014)
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