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2014 IEEE International Conference on Semiconductor Electronics (ICSE2014)最新文献

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Modeling and FEM simulation using fluid-structures interaction of flexible micro-bridge bending within PDMS micro-channel PDMS微通道内柔性微桥弯曲流固耦合建模与有限元仿真
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920906
Nadir Belgroune, A. Hassein-bey, B. Majlis, M. Benamar
The manipulation of fluid flow in micro-channel with dimension of hundreds of micrometers has emerged as a distinct new field. In this paper, devices modeling and FEM simulation using Comsol Multiphysics of the fluid-structure interaction applied to PDMS micro-bridge deflection study under various fluid flow rates are presented. The introducing of fluid flow into the micro-channel causes the deflection of the microbridge. The simulation results predict a sensitive bending for low flow rate with an adapted micro-bridge dimension for each micro-channel depth. Thus demonstrate the feasibility of a new concept and open a new area of research in micro-fluidic devices and BioMEMS sensing to obtain higher sensitivity with low fluid flow rate, low coast and low power consumption.
数百微米微通道内流体流动的控制已成为一个崭新的研究领域。本文采用Comsol Multiphysics软件对PDMS微桥在不同流体流速下的流固耦合进行了装置建模和有限元模拟。流体进入微通道会引起微桥的偏转。模拟结果预测了低流量下的敏感弯曲,并根据每个微通道深度调整微桥尺寸。从而论证了一种新概念的可行性,开辟了微流体器件和BioMEMS传感的新研究领域,以低流体流速、低海岸和低功耗获得更高的灵敏度。
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引用次数: 0
Hydrothermal growth of ZnO nanotubes on InGaP/GaAs/Ge solar cells InGaP/GaAs/Ge太阳能电池上ZnO纳米管的水热生长
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920912
Chen-Chen Chung, K. Lin, H. Yu, Nguyen-Hong Quan, C. Dee, E. Chang
A new design where ZnO nanotubes were grown on the antireflection (AR) layer coated on triple-junction (T-J) solar cell devices to enhance the light conversion efficiency. Compared to the bare T-J solar cells (without an AR layer), the performance of Si3N4 AR coated solar cell showed improvement. The sample with a layer of ZnO nanotubes grown in top of AR layer showed the lowest light reflection compared with the bare and solely AR coated T-J solar cell especially in the spectrum range of 350-500 nm. The use of ZnO nanotubes have increased the conversion efficiency by 4.9% compared with the conventional T-J solar cell. While the Si3N4 AR coated sample only increased the conversion efficiency by 3.2%. This result is quite encouraging as further refinement and variation in the experiment procedures could possibly bring more exciting performance in the future.
将ZnO纳米管生长在三结(T-J)太阳能电池器件的增透层(AR)上,以提高光转换效率。与裸露的T-J太阳能电池(没有AR层)相比,Si3N4 AR涂层太阳能电池的性能有所提高。在AR层顶部生长一层ZnO纳米管的样品,在350 ~ 500 nm的光谱范围内,其光反射率较裸涂和单涂AR的T-J太阳能电池最低。与传统的T-J太阳能电池相比,ZnO纳米管的使用使转换效率提高了4.9%。而Si3N4 AR包覆样品仅提高了3.2%的转换效率。这一结果令人鼓舞,因为实验程序的进一步完善和变化可能会在未来带来更令人兴奋的表现。
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引用次数: 0
Performance analysis of zinc oxide piezoelectric MEMS energy harvester 氧化锌压电MEMS能量采集器性能分析
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920847
Umi Milhana Jamain, Nur Hidayah Ibrahim, R. A. Rahim
This paper presents the design and analysis of MEMS piezoelectric energy harvester. Zinc oxide (ZnO) MEMS piezoelectric energy harvester has been utilized as piezoelectrically active cantilever for mechanical to electrical transduction. A COMSOL Multiphysics model was used which provide accurate information on the frequency, stress and voltage output of a ZnO piezoelectric energy harvester. Few design parameters have been studied which are rectangular cantilever, triangular cantilever, rectangular cantilever with proof mass and using different types of piezoelectric materials. The effects of varying geometrical dimensions of the device were also investigated. From simulation results, it was found out that ZnO piezoelectric energy harvester with the length of 150 μm, width 50 μm and thickness of 4 μm generates 9.9184 V electric potential under the resonance frequency of 0.71 MHz and 1 μN/m2 mechanical force applied.
本文介绍了MEMS压电能量采集器的设计与分析。氧化锌(ZnO) MEMS压电能量采集器已被用作压电主动悬臂梁,用于机械到电转导。采用COMSOL多物理场模型对ZnO压电能量采集器的频率、应力和电压输出进行了精确的分析。研究了矩形悬臂梁、三角形悬臂梁、带证明质量的矩形悬臂梁和不同类型压电材料的设计参数。研究了器件几何尺寸的变化对实验结果的影响。仿真结果表明,长度为150 μm、宽度为50 μm、厚度为4 μm的ZnO压电能量采集器在谐振频率为0.71 MHz、施加1 μN/m2的机械力时,产生9.9184 V的电势。
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引用次数: 23
Aluminum nitride thin film deposition using DC sputtering 直流溅射沉积氮化铝薄膜
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920798
Mohd H. S. Alrashdan, A. A. Hamzah, B. Majlis, Mohd Faizal Aziz
Aluminum nitride thin film depositions at a low temperature become one of the most promising fields in micro-electro mechanical systems and in the semiconductor industry; because of its good compatibility with designs on silicon substrates, its mechanically strong, chemically stable, wide bandgap energy (≈6.2 eV), and has a large electro-mechanical coupling constant. An AlN thin film deposition using DC Magnetron sputtering have the advantage over other deposition methods due to its simplicity, better parameter control, cheapness, and requires a low deposition temperature. The NTI nano film DC sputtering system was used to deposit the AlN thin film with 99.99% pure aluminum target material and 100 silicon substrates, the working temperature is at 20C°, there is a 10Cm separation distance between the target and the substrate, 335~351 V cathode voltage, the foreline and base pressures are 2×10-2 T, 4×10-5 T respectively, and uses 200W DC power. We vary the time and nitrogen/argon gas flow ratio. Deposited film was characterized by X-ray diffraction and (002) of wurtzite hexagonal phase of AlN thin film was found with beak intensity of 800 count per second for 50% nitrogen content. Field Emission Scanning Electron Microscopy was used to study thin film cross section, film thicknesses and deposition flow rate at different times and gas flow ratio, there is inverse relationship between nitrogen gas percentage deposition and flow rate. Deposition flow rate are 4.12 nm/ min for 50% nitrogen and 2.217 nm/min for 75% of nitrogen content.
低温氮化铝薄膜沉积是微电子机械系统和半导体工业中最具发展前景的领域之一;由于其与硅衬底设计的良好相容性,其机械强度强,化学稳定,能带能宽(≈6.2 eV),并具有较大的机电耦合常数。用直流磁控溅射法沉积AlN薄膜具有简单、参数控制好、成本低、沉积温度低等优点。采用NTI纳米薄膜直流溅射系统沉积99.99%纯铝靶材和100硅衬底的AlN薄膜,工作温度为20℃,靶材与衬底之间有10Cm的分离距离,阴极电压335~351 V,前线和基压分别为2×10-2 T, 4×10-5 T,使用200W直流功率。我们改变时间和氮气/氩气的流量比。用x射线衍射对沉积膜进行了表征,发现氮含量为50%时,AlN薄膜的纤锌矿六方相为(002),喙形强度为800次/秒。采用场发射扫描电镜研究了不同时间下薄膜的横截面、膜厚和沉积流速以及气体流动比,氮气沉积百分比与流速呈反比关系。氮含量为50%时沉积流速为4.12 nm/min,氮含量为75%时沉积流速为2.217 nm/min。
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引用次数: 12
Effects of material and membrane structure on maximum temperature of microheater for gas sensor applications 材料和膜结构对气体传感器微加热器最高温度的影响
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920845
M. M. Noor, G. Sugandi, Mohd Faizal Aziz, B. Majlis
The material selection for membrane is important in designing a microheater. A membrane is used as an insulator layer to prevent heat dissipation from the microheater to the substrate. At the same time, the thermal characteristic of the microheater is influenced by the insulator layer. A study on the effects of material and membrane structure on the maximum temperature of the microheater for gas sensor applications has been carried out using Heat Transfer Module of COMSOL 4.2. Three different membrane materials namely silicon nitride (Si3N4), silicon dioxide (SiO2) and polyimide and two types of membrane structures namely full-membrane and bridgemembrane have been chosen for the study. Their effects on the microheater temperature are presented. The resistive meander type of microheater is used in this study. The heater material is platinum. The thickness and the area of the heater are 2 μm and 600 μm × 680 μm respectively. The thickness of each membrane is 5 μm. The area of the full-membrane and the bridgemembrane are 2500 μm × 2500 μm and 850 μm × 850 μm respectively.
膜材料的选择是设计微加热器的重要环节。膜用作绝缘层,以防止从微加热器散热到基板。同时,微加热器的热特性也受到绝缘层的影响。利用COMSOL 4.2的传热模块,研究了材料和膜结构对气体传感器微加热器最高温度的影响。选择了氮化硅(Si3N4)、二氧化硅(SiO2)和聚酰亚胺三种不同的膜材料以及全膜和桥膜两种膜结构进行研究。介绍了它们对微加热器温度的影响。本研究采用电阻曲径式微加热器。加热器材料为铂。加热器的厚度为2 μm,面积为600 μm × 680 μm。每层膜的厚度为5 μm。全膜和桥膜的面积分别为2500 μm × 2500 μm和850 μm × 850 μm。
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引用次数: 5
I-V characteristic effects of fluidic-based memristor for glucose concentration detection 液体基忆阻器在葡萄糖浓度检测中的I-V特性效应
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920797
N. Hadis, Asrulnizam Abd Manaf, S. H. Herman
The I-V characteristic effect of thin film TiO2 fluidic-based memristor sensor utilized in sensing various glucose concentrations is described in this paper. Four different glucose concentrations, namely, 5, 10, 20, and 30 mM, are prepared and applied to the sensor. The device is then characterized with Keithley 4200-SCS semiconductor characterization system. Results show that different concentration levels of glucose affect the I-V characteristic of the sensor device. The difference is observed at the first voltage sweep of 0 V to 3 V after glucose was applied. A uniform change in current was recorded for small voltages below 0.9 V. The current decreases as the glucose concentration increases. Analysis shows that the resistance of the memristor sensor increases with the increase in glucose concentration through a quadratic relation.
本文描述了薄膜TiO2流体型忆阻器传感器在各种葡萄糖浓度传感中的I-V特性效应。制备了四种不同的葡萄糖浓度,即5、10、20和30 mM,并将其应用于传感器。然后用Keithley 4200-SCS半导体表征系统对该器件进行表征。结果表明,不同浓度的葡萄糖会影响传感器器件的I-V特性。在葡萄糖施加后,在0 V到3 V的第一次电压扫描中观察到差异。在低于0.9 V的小电压下,记录了电流的均匀变化。电流随着葡萄糖浓度的增加而减小。分析表明,忆阻传感器的电阻随葡萄糖浓度的增加呈二次关系增加。
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引用次数: 3
FDCCTA: The active building block for analog signal processing applications FDCCTA:模拟信号处理应用的主动构建块
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920822
M. Kumngern
This study presents a new active building block for analog signal processing applications, namely fully differential current conveyor transconductance amplifier. The proposed circuit is realized using differential difference current conveyors and transconductance amplifiers. Unlike, previous building blocks, both fully differential input and electronic tuning capability can be obtained into a single new device. The proposed building block is used to realize a universal biquadratic filter as an example application. PSPICE simulation results using 0.5 μm CMOS technology from MIETEC are used to confirm the presented building block. The simulation results express that the proposed active building block can be used to realize analog signal processing circuits.
本研究提出了一种新的模拟信号处理应用的主动构件,即全差动电流传送带跨导放大器。该电路采用差分电流传送带和跨导放大器实现。与以前的构建模块不同,完全差分输入和电子调谐能力都可以在单个新设备中获得。并以该构造块为例,实现了一个通用双二次滤波器。采用MIETEC的0.5 μm CMOS技术的PSPICE仿真结果验证了所提出的构建模块。仿真结果表明,所提出的有源模块可用于模拟信号处理电路的实现。
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引用次数: 0
Theoretical study of on-chip meander line resistor to improve Q-factor 片上曲线电阻提高q系数的理论研究
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920901
Wong Goon Weng, Norhayati Binti Soin
In this paper, the theoretical configuration geometry of the layout on-chip meander line resistor was studied and investigated. Various simulation of the geometric design on-chip resistor in a range Giga Hertz frequency are performed. The effect of the quality factor of each design geometry of meander line resistor on high frequency operation was in deep studied and discussed. Besides, parameter extraction geometry of this on-chip meander line resistor was introduced. As a result, the parameter line length (h), line segment (N) and then following by spacing (d) and width (w), which are playing an important role on designing the geometry layout to improve the Q-factor. Throughout the scaling graphical method, it has been granted out optimize value combination of parameter by improving almost 70% of Q-factor and loss of resistance less than 17% of the nominal design. The result of the Design optimization configuration has low Q-factor when compared with a nominal Design nominal configuration. This is because of the large value of number segment (N) and smaller numbers of line length (h), which has less coupling effect and less resistivity effect. All result base on mathematics computation data was discussed and performed.
本文对片上布局曲线图电阻的理论构型几何进行了研究。对几何设计的片上电阻在千兆赫频率范围内进行了各种仿真。深入研究和讨论了曲线电阻器各设计几何形状的品质因子对高频工作的影响。此外,还介绍了该片上曲线电阻的参数提取几何形状。因此,线长(h)、线段(N)、间距(d)和宽度(w)等参数对几何布局的设计起到重要作用,从而提高q因子。通过标度图法,得到了参数组合的最优值,使q因子提高了近70%,电阻损失低于标称设计的17%。设计优化配置的结果与标称设计标称配置相比,q因子较低。这是由于数段(N)的值较大,线长(h)的值较小,耦合效应较小,电阻率效应较小。所有的结果都是基于数学计算数据进行讨论和执行的。
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引用次数: 1
Properties of boron doped amorphous carbon films by carbon palm oil for carbon based solar cell applications 碳基太阳能电池用碳棕榈油掺杂硼非晶碳膜的性能研究
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920888
A. Ishak, M. F. Malek, M. Rusop
The boron doped amorphous carbon were prepared by in-situ mixing of hydrocarbon palm oil and boron dopant and carrier gas, argon in the chamber by using bias assisted pyrolysis-CVD. The effect of substrate bias on the thickness, electrical and electronic properties of a-C:B film were investigated. The fabricated solar cell with the configuration of Au/p-C:B/n-Si/Au achieved conversion efficiency (r) of 0.453% at applied bias voltage of -20 V. This result showed the successful interstitial doping of boron in the amorphous carbon films deposited by this method and palm oil precursor as confirmed by the fill factor, open circuit voltage, and current density results.
采用偏置辅助热解-气相沉积的方法,将烃类棕榈油与硼掺杂剂、载气、氩气原位混合制备硼掺杂非晶态碳。研究了衬底偏压对a-C:B薄膜厚度、电性能和电子性能的影响。所制备的Au/p-C:B/n-Si/Au结构的太阳能电池在施加-20 V偏置电压时的转换效率(r)为0.453%。通过填充系数、开路电压和电流密度等测试结果,证实了硼在该方法制备的非晶碳膜和棕榈油前驱体中得到了成功的间隙掺杂。
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引用次数: 0
The impact of scaled channel length in tunneling field effect transistors (TFETs) 隧道场效应晶体管(tfet)中沟道长度的影响
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920814
Nurul Huda Abdul Rahman, M. Arshad, N. Othman, M. Fathil, M. S. Nur Humaira, U. Hashim
In this paper, we investigate the channel length (LCH) of the silicon-on-insulator (SOI) n-type tunneling field effect transistor (NTFET) with the respect of device performance. 2D-device simulation was used for simulating the devices with 30 nm gate length of SOI NTFET with 10 nm thin buried oxide (tBOX) and 7 nm thin silicon body (tsi). The device performance, such as threshold voltage (VTH), ON current (ION), OFF current (IOFF), and subthreshold swing (SS) was extracted from the current-voltage characterizations of SOI NTFET. The longer the channel length, the lower the SS value and ION/IOFF ratio obtained in these simulations. Unfortunately, the SS values obtained throughout these simulations were still higher than the typical SS value of TFET device which is supposed to be lower than 60 mV/decade. However, the SS values obtained was still lower compared to the SS value of the MOSFET. On the other hand, ION/IOFF ratio still high which is better for switching operation of the devices.
本文研究了绝缘体上硅(SOI) n型隧道场效应晶体管(NTFET)的沟道长度(LCH)与器件性能的关系。采用二维器件仿真的方法,对栅极长度为30 nm、10 nm薄埋氧化物(tBOX)和7 nm薄硅体(tsi)的SOI NTFET器件进行了模拟。从SOI NTFET的电流-电压特性中提取器件性能,如阈值电压(VTH)、开通电流(ION)、关断电流(IOFF)和亚阈值摆幅(SS)。通道长度越长,得到的SS值和ION/IOFF比越低。不幸的是,通过这些模拟获得的SS值仍然高于TFET器件的典型SS值,该值应该低于60 mV/ 10年。然而,与MOSFET的SS值相比,获得的SS值仍然较低。另一方面,离子/ off比仍然很高,有利于器件的开关操作。
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引用次数: 0
期刊
2014 IEEE International Conference on Semiconductor Electronics (ICSE2014)
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