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2014 IEEE International Conference on Semiconductor Electronics (ICSE2014)最新文献

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The annealing temperature effect on the structure and electrical properties of titanium dioxide (TiO2) film deposited by reactive RF sputtering 研究了退火温度对反应性射频溅射制备二氧化钛(TiO2)薄膜结构和电性能的影响
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920824
S. Norhafiezah, R. M. Ayub, M. Arshad, A. H. Azman, M. F. Fatin, M. A. Farehanim, U. Hashim
Titanium dioxide (TiO2) thin film is deposited using Reactive Radio Frequency (RF) sputtering on Si (100) wafer and annealed in N2 for 2 hours at different temperatures i.e. 500°C, 750°C and 1100°C. The TiO2 peak is characterized using X-ray diffraction (XRD). At 500°C and 750°C, only anatase peak is observed with the grain size of 150.72 nm and 186.51 respectively. As the temperature increase to 1100°C, both anatase and rutile structures start to grow but the grain size is reduced to 67.88 nm. The confirmation of grain and the surface roughness is determined by using atomic force microscopy (AFM). The grain sizes become larger from 66.58 nm to 86.01 nm as the temperature increase from 500°C to 750°C as well as the surface roughness (0.271 nm to 1.201 nm). However, at 1100°C, grain size shows no significant different i.e. 84.41 nm (compared at 750°C) and slightly higher surface roughness of 2.194 nm. Thus, the 1100°C annealing temperature requires to attain rutile structure and the smaller particle size. The electrical properties of TiO2 film annealed at 1100°C shows small amount of current flow through the device thus will be suitable to be used in biosensor application.
采用反应射频(RF)溅射技术在Si(100)晶圆上沉积二氧化钛(TiO2)薄膜,并在500℃、750℃和1100℃的不同温度下在N2中退火2小时。利用x射线衍射(XRD)对TiO2峰进行了表征。在500℃和750℃时,只观察到锐钛矿峰,晶粒尺寸分别为150.72 nm和186.51 nm。当温度升高到1100℃时,锐钛矿和金红石组织均开始生长,晶粒尺寸减小到67.88 nm。用原子力显微镜(AFM)测定了晶粒和表面粗糙度。随着温度从500℃升高到750℃,晶粒尺寸从66.58 nm增大到86.01 nm,表面粗糙度从0.271 nm增大到1.201 nm。然而,在1100℃时,晶粒尺寸没有显著差异,为84.41 nm(与750℃时相比),表面粗糙度略高,为2.194 nm。因此,1100℃的退火温度要求获得金红石结构和较小的粒度。TiO2薄膜在1100℃退火后的电学性能表明,通过器件的电流很小,因此将适合用于生物传感器应用。
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引用次数: 0
Design optimization and finite element analysis of AlN/3C-SiC piezoelectric bio-sensors AlN/3C-SiC压电生物传感器设计优化及有限元分析
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920910
A. Iqbal, F. Mohd-Yasin, S. Dimitrijev
In this paper we present the design and simulation of a bio-sensor for pathogens detection based on AlN/3C-SiC/Si piezoelectric cantilever. Cubic silicon carbide (3C-SiC) is chosen as the base layer due to its excellent material properties and chemical inertness over silicon in harsh environmental conditions. Aluminum nitride (AlN) is selected as piezoelectric active layer due to its similar thermal expansion coefficient with silicon carbide to reduce thermal stress. The desired resonant frequency of 157.16 KHz is optimized using Matlab and the finite element analysis is carried out using COMSOL software to verify the shift in the resonant frequency due to the added mass of the bacteria. The surface functionalizations of the SiC as biosensor, as well as the fabrication recipes are also proposed.
本文提出了一种基于AlN/3C-SiC/Si压电悬臂梁的病原体检测生物传感器的设计与仿真。选择立方碳化硅(3C-SiC)作为基材层,是因为它具有优异的材料性能和在恶劣环境条件下相对于硅的化学惰性。选用氮化铝(AlN)作为压电有源层,是因为其热膨胀系数与碳化硅相近,可以减小热应力。利用Matlab对157.16 KHz的期望谐振频率进行了优化,并利用COMSOL软件进行了有限元分析,验证了由于细菌质量的增加而引起的谐振频率的变化。提出了碳化硅作为生物传感器的表面功能化及其制备方法。
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引用次数: 1
Dependency of electrical characteristics on nano gap variation in pinch off lateral gate transistors 夹断侧栅晶体管的电特性与纳米间隙变化的关系
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920823
F. Larki, A. Dehzangi, S. Ali, A. Jalar, M. Islam, B. Majlis, E. Saion, M. Hamidon, S. D. Hutagalung
The variation of electrical characteristics with nano size air gap variation between gates and channel of a pinch off lateral gate transistor were investigated using 3D Technology Computer Aided Design. It is found that smaller nanosize gaps which can be formed by approaching the lateral gates to the channel can improve the switching performance of the device significantly. Devices with different air gap demonstrate same on state current and maximum transconductance of 0.05 μS, however the on/off current ratio (ION/IOFF) is varied by three orders of magnitude. The parameters such as electric field and band energy variation are investigated in order to explain the variation of electrical characteristics by air gap variation.
利用三维计算机辅助设计技术研究了掐断侧栅晶体管的电学特性随栅极和沟道间纳米气隙变化的变化。研究发现,通过靠近沟道的侧门形成更小的纳米级间隙,可以显著提高器件的开关性能。不同气隙器件的导通电流相同,最大跨导率为0.05 μS,但导通/关断电流比(ION/IOFF)变化了3个数量级。为了解释气隙变化引起的电特性变化,研究了电场和能带变化等参数。
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引用次数: 1
Amorphous oxide electronics 非晶氧化物电子学
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920777
A. Nathan
Summary form only given. Oxide semiconductors are known for their optical transparency and high electron mobility even when processed at room temperature, making them a promising candidate for the next-generation thin film transistor (TFT) technology. Compared to existing well-established TFT technologies, the oxide transistor shows superiority in terms of process simplicity and cost, and stable device behaviour in the dark. While its non-uniformity over large areas is comparable to that of thin film silicon transistors, its photo-instability at low wavelengths can be an issue due to persistence in photoconductivity. This talk will discuss progress and issues related to oxide transistors for large area applications, and in particular, show how the material can be tuned for displays and imaging applications.
只提供摘要形式。氧化物半导体以其光学透明性和高电子迁移率而闻名,即使在室温下加工,也使其成为下一代薄膜晶体管(TFT)技术的有希望的候选者。与现有成熟的TFT技术相比,氧化物晶体管在工艺简单和成本方面表现出优势,并且在黑暗中稳定的器件行为。虽然它在大面积上的不均匀性与薄膜硅晶体管相当,但由于光导电性的持续存在,它在低波长下的光不稳定性可能是一个问题。本讲座将讨论用于大面积应用的氧化晶体管的进展和相关问题,特别是展示如何将材料用于显示和成像应用。
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引用次数: 0
Memristor applied in delay locked loop for high lock speed and wide frequency range 忆阻器应用于延时锁相环,锁相速度快,频率范围宽
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920870
Siti Musliha Ajmal Binti Mokhtar, W. Abdullah
Locking speed and operating frequency range of DLL is limited to the delays of its VCDL. Since memristor resistance changes according to external bias, memristor can be used as programmable resistor. In this paper, memristor is applied to VCDL as variable resistor where the memristor resistance regulates total delay of the VCDL. VCDL consists of current starved inverter as the delay unit. A voltage to current converter (VCC) is used to convert control voltage from capacitor, Vc to control current, Ic. The control current, Ic with memristor resistance generates new voltage, Vr that regulates the delay. Compared to conventional DLL, the proposed DLL design offers one more control parameter which is Vr. By applying memristor to the DLL, the control voltage Vc can be further manipulated. Simulation results show that proposed DLL with memristor has higher locking speed and can lock higher input frequency compared to conventional DLL without memristor. Therefore, higher locking speed and wide operating frequency range are both achievable by proposed DLL with memristor.
DLL的锁定速度和工作频率范围受限于其VCDL的延迟。由于忆阻器的电阻随外部偏置的变化而变化,因此忆阻器可以用作可编程电阻。本文将忆阻器作为可变电阻应用于VCDL中,由忆阻电阻调节VCDL的总延时。VCDL由缺流逆变器作为延时单元组成。电压电流变换器(VCC)用于将控制电压从电容器Vc转换为控制电流Ic,控制电流Ic与忆阻电阻产生新的电压Vr来调节延迟。与传统的动态链接库相比,本文提出的动态链接库设计增加了一个控制参数,即虚拟现实。通过在DLL中加入忆阻器,可以进一步控制电压Vc。仿真结果表明,与不带忆阻器的DLL相比,带忆阻器的DLL具有更高的锁定速度和更高的锁定频率。因此,基于忆阻器的动态动态链接可以实现更高的锁定速度和更宽的工作频率范围。
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引用次数: 0
Design and implementation of a 1-bit FinFET Full Adder cell for ALU in subthreshold region 用于亚阈值区域ALU的1位FinFET全加法器单元的设计与实现
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920791
Aqilah Binti Abdul Tahrim, M. Tan
The FinFET based Full Adder in various cell designs is investigated in terms of performance and energy efficiency. Additionally, the performance of the FinFET Full Adder in the subthreshold region reveals significant results in low power technology. The 1-bit FinFET based Full Adder is designed in four different cell designs, and while the average power dissipated, delays, power-delay-product (PDP) and energy-delay-product (EDP) of all four topologies were analyzed based on the types of transistors used i.e. conventional Field Oxide Transistor (MOSFET) and FinFET. Based on this study, FinFET based Full Adder shows an average of 94 % reduction in delay, 97 % reduction in power dissipation and 99 % reduction for both PDP and EDP over the conventional FET, giving FinFET advantages in energy efficiency.
研究了基于FinFET的全加法器在各种电池设计中的性能和能量效率。此外,FinFET全加法器在亚阈值区域的性能显示了低功耗技术的显著成果。基于1位FinFET的全加法器设计了四种不同的单元设计,同时根据所使用的晶体管类型,即传统场氧化晶体管(MOSFET)和FinFET,分析了所有四种拓扑结构的平均功耗、延迟、功率延迟积(PDP)和能量延迟积(EDP)。基于这项研究,基于FinFET的全加法器显示,与传统FET相比,延迟平均降低94%,功耗降低97%,PDP和EDP均降低99%,从而使FinFET在能效方面具有优势。
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引用次数: 11
Two-stage small-signal amplifier with Darlington and Sziklai pairs 两级小信号放大器与达林顿和Sziklai对
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920783
S. Shukla, Beena Pandey
A New circuit model of two-stage small-signal amplifier using Darlington and Sziklai pairs is proposed for the first time. Proposed circuit is obtained by cascading a small-signal Darlington pair amplifier with that of Sziklai pair based small-signal amplifier with minor modifications. Proposed amplifier essentially uses two additional biasing resistances in its design. It crops considerably high voltage and current gain (345.523 and 464.357 respectively) with audible range bandwidth of 43.363 KHz for AC input signals swinging in 10-30mV range at 1KHz or lower frequency. Proposed circuit-architecture successfully removes the poor response problem of conventional Darlington pair amplifiers at higher frequencies and narrow bandwidth problem of recently announced (by authors) circuits of small-signal Sziklai pair amplifier. Variations in voltage gain with frequency and various biasing components like biasing resistances, DC supply voltage and coupling capacitors are discussed in length. Temperature sensitivity of performance parameters, THD and small-signal AC equivalent circuit analysis of the proposed circuit are elaborately studied. Proposed design can be implemented in cascadable gain blocks for receivers, 715Hz-44KHz frequency range power sources and in the circuits where reproduction of signal with simultaneously high voltage and current gain is the prime requirement.
首次提出了一种基于Darlington和Sziklai对的两级小信号放大器电路模型。该电路采用小信号达林顿对放大器与基于Sziklai对的小信号放大器进行级联,并进行了少量修改。所提出的放大器在其设计中基本上使用了两个额外的偏置电阻。在1KHz或更低频率下,在10-30mV范围内摆动的交流输入信号,可获得相当高的电压和电流增益(分别为345.523和464.357),可听范围带宽为43.363 KHz。所提出的电路结构成功地解决了传统达灵顿对放大器在较高频率下响应差的问题和作者最近公布的小信号Sziklai对放大器电路的窄带宽问题。电压增益随频率和各种偏置元件(如偏置电阻、直流电源电压和耦合电容器)的变化进行了详细讨论。对该电路的性能参数的温度灵敏度、THD和小信号交流等效电路的分析进行了详细的研究。所提出的设计可用于接收器的级联增益模块,715Hz-44KHz频率范围的电源,以及同时具有高电压和高电流增益的信号再现是主要要求的电路。
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引用次数: 9
Realization of GaN-based technology for high power and high frequency applications 基于gan的高功率高频应用技术的实现
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920776
E. Chang
Summary form only given. Wide band gap semiconductor of GaN and its related materials are promising for future power and high frequency applications. In particular, the GaN high electron mobility transistor (HEMT) grown on large-size Si substrate is suitable for low-lost and high power switching applications. The GaN HEMT could be fabricated into convertors and invertors for electrified vehicle (EV). In order to achieve GaN HEMT device with high efficiency, various issues have to be considered. These include the careful design of material structure and device layout. Furthermore, surface passivation techniques are critical for reducing dynamic on-resistance (Ron) and improving reliability. For safety purpose, a normally-off device is required. Thus, the pros and cons of normally-off device fabrication approaches such as gate-recessed, p-GaN cap and F-plasma treatment will be discussed. The possibility of using fully-copper-based metallization will also be addressed. The copper metallization can reduce the fabrication cost effectively by replacing the conventional gold metallization. Finally, power module is demonstrated by employing the GaN HEMTs and Schottky barrier diodes. For future RF power application, GaN HEMTs on SiC substrate are fabricated. The GaN material grown on SiC can achieve better crystal quality and the HEMT devices are also beneficial from better thermal dissipation due to high thermal conductivity SiC substrate. GaN HEMT on SiC could be used in future high frequency applications such as formilitary phased array radar and civilian 4th-generation base station. Besides the AlGaN/GaN HEMT structure, new material structures such as InAlN/GaN and AlN/GaN are also demonstrated. These structures have great potential for very high frequency (>300 GHz) and high power applications.
只提供摘要形式。氮化镓及其相关材料的宽带隙半导体在未来的功率和高频应用中具有广阔的前景。特别是,在大尺寸Si衬底上生长的GaN高电子迁移率晶体管(HEMT)适用于低损耗和高功率开关应用。GaN HEMT可以制作成电动汽车的变换器和逆变器。为了实现高效率的GaN HEMT器件,必须考虑各种问题。这包括材料结构和器件布局的精心设计。此外,表面钝化技术对于降低动态导通电阻(Ron)和提高可靠性至关重要。为了安全起见,需要一个正常关闭的装置。因此,将讨论通常关闭器件制造方法的优缺点,如栅极凹槽,p-GaN帽和f等离子体处理。还将讨论使用全铜基金属化的可能性。铜金属化可以代替传统的金金属化,有效地降低制造成本。最后,采用GaN hemt和肖特基势垒二极管对功率模块进行了演示。为了未来射频功率的应用,在SiC衬底上制备了GaN hemt。在SiC上生长的GaN材料可以获得更好的晶体质量,并且由于SiC衬底的高导热性,HEMT器件也有利于更好的散热。基于SiC的GaN HEMT可用于军用相控阵雷达和民用第四代基站等未来的高频应用。除了AlGaN/GaN HEMT结构外,还展示了InAlN/GaN和AlN/GaN等新型材料结构。这些结构在甚高频(>300 GHz)和高功率应用中具有很大的潜力。
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引用次数: 1
FEM analysis of wavelength effects in piezoelectric substrate 压电衬底中波长效应的有限元分析
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920846
Norazreen Abd Aziz, B. Bais, M. R. Buyong, B. Majlis, A. Nordin
In this paper, we discussed simulation of several annular surface acoustic wave (A-SAW) devices using various wavelengths to identify its effects on the focusing properties and to analyze the propagation of Rayleigh waves in piezoelectric substrate. By choosing Y-cut Z propagating Lithium Niobate as the substrate and aluminum electrodes as the IDT, we modeled the A-SAW devices using Comsol Multiphysics. We used 8 pairs of annular electrodes with thickness of 1 μm with three different design's wavelength of 100 μm, 150 μm and 200 μm, respectively. To minimize the computational time in determining the optimum frequency i.e. resonant frequency of the device, only one pair of electrode for each design is simulated under eigenfrequency analysis in 2D piezoelectric (pzd) module. To understand the Rayleigh waves behavior, simulation of the whole device structure was done under frequency domain analysis in 2D-axisymmetric piezoelectric module. From the simulation results, it can be observed that SAW displacement profiles, electric potential field and operating frequency are significantly influenced by the wavelength. The formation of focused acoustic waves at the center of A-SAW device suits them in biosensing and microfluidic actuation applications that require detection or manipulation of localized variations.
本文讨论了几种不同波长的环形表面声波(A-SAW)器件的仿真,以确定其对聚焦特性的影响,并分析了瑞利波在压电衬底中的传播。通过选择y切割Z传播铌酸锂作为衬底,铝电极作为IDT,我们使用Comsol Multiphysics对A-SAW器件进行了建模。我们使用了8对厚度为1 μm的环形电极,波长分别为100 μm、150 μm和200 μm。为了最大限度地减少确定器件的最佳频率(即谐振频率)的计算时间,在二维压电(pzd)模块中,每个设计只对一对电极进行特征频率分析。为了解瑞利波特性,在二维轴对称压电模块中对整个器件结构进行了频域分析仿真。从仿真结果可以看出,波长对SAW的位移分布、电位场和工作频率有显著影响。在A-SAW装置中心形成聚焦声波,适用于需要检测或操纵局部变化的生物传感和微流体驱动应用。
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引用次数: 1
Channel length effect on the saturation current and the threshold voltages of CNTFET 通道长度对饱和电流和阈值电压的影响
Pub Date : 2014-10-13 DOI: 10.1109/SMELEC.2014.6920848
Abu Hanifah Muhamad Ali, M. Ani, M. A. Mohamed
Carbon nanotubes (CNTs) are such promising material in future microelectronic devices due to their great property in conductivity, mechanical strength and light weight. Field effect transistor (FET) has already come to its most maximum efficiency because of their reduced size leads to decrease in their capability in conducting electric. It is interested to embed ballistic electron transfer capability of CNTs on FET. In this study, direct growth method of CNTs was employed to attach it on FET electrodes with various terminal gaps. The results show that CNTFET has successfully fabricated, with averaged saturation currents always lowest at the channel size of 15μm. While their highest measured threshold voltage value is 4.291 V at 15 μm gap. This phenomenon is attributed to the change of CNTs' chirality, which apparently changes the metallic type of CNTs to the semiconducting CNTs.
碳纳米管具有良好的导电性、机械强度和重量轻等优点,是未来微电子器件中非常有前途的材料。场效应晶体管(FET)由于其体积的减小而导致其导电性的降低,其效率已经达到了最高。在FET上嵌入碳纳米管的弹道电子转移能力是人们感兴趣的。本研究采用直接生长法将CNTs附着在具有不同端隙的FET电极上。结果表明:成功制备了CNTFET,在通道尺寸为15μm时,平均饱和电流始终最低;在15 μm间隙处,测量到的最高阈值为4.291 V。这一现象是由于碳纳米管的手性发生了变化,使得碳纳米管的金属型明显转变为半导体型碳纳米管。
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引用次数: 2
期刊
2014 IEEE International Conference on Semiconductor Electronics (ICSE2014)
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