Bubble nucleation, growth and separation from cavities on the bottom of a microchannel for subcooled flow boiling are investigated by pseudo-potential lattice Boltzmann method. The influence of subcooling temperature, wall superheat, wettability, cavity size, and cavity number on the flow boiling heat transfer is systematically studied. The results show that the bubble equivalent diameter is 1.9 times larger at subcooling temperature 0.05 than that at 0.15, and the heat flux is also 8 % higher at subcooling temperature 0.05 than that at 0.15. It is found that the flow boiling changes from nucleate boiling to film boiling with the increase of wall superheat. When the wall wettability changes from the hydrophobic wall (θ = 120°) to the hydrophilic wall (θ = 30°), the average Nusselt number (Nuav) is reduced by 23 %. We also optimize cavity height and the uniformly distributed cavity number in the microchannel. It is found that the Nuav is increased by 9.7 % when the cavity height changes from h = 20lu (lattice unit) to h = 60lu. However, there exists an optimal cavity height about h = 60lu, where the heat transfer performance cannot be improved with the cavity height over this value. In addition, the number of cavities in the microchannel can improve the boiling heat transfer. When the cavity number changes from 1 to 4, the Nuav is increased by 10 %.