This paper reviews the various applications for which lasers have been employed in the microelectronics industry. The applications encompass the integrated circuit technologies, including SICs and thin and thick film HICs. General topics covered include the fabrication, inspection, and repair of masks, wafer scribing, and passive and active trimming of devices.
{"title":"Laser applications In microelectronics","authors":"Vincent J. Zaleckas","doi":"10.1364/cleos.1976.tub4","DOIUrl":"https://doi.org/10.1364/cleos.1976.tub4","url":null,"abstract":"This paper reviews the various applications for which lasers have been employed in the microelectronics industry. The applications encompass the integrated circuit technologies, including SICs and thin and thick film HICs. General topics covered include the fabrication, inspection, and repair of masks, wafer scribing, and passive and active trimming of devices.","PeriodicalId":301658,"journal":{"name":"Conference on Laser and Electrooptical Systems","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125803206","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
We report on the development and proving of a rugged, wide bandwidth modulatable laser of relatively low cost. Conventional laser modulation systems employ external electrooptic (EO) or acoustooptic (AO) modulators.1,2 In the He–Ne case de modulation has been used. In applications such as laser beam recording the EO and AO modulators suffer various shortcomings, the principles of which are high cost, sensitivity to alignment, and imperfect extinction. Current modulation of the He–Ne laser is power-limited, bandwidth-limited, and can result in reduced tube life.
{"title":"Modulatable lasers for systems applications","authors":"J. D. Hawkins, W. Shull, T. Reynolds, M. Dowley","doi":"10.1364/cleos.1976.wd2","DOIUrl":"https://doi.org/10.1364/cleos.1976.wd2","url":null,"abstract":"We report on the development and proving of a rugged, wide bandwidth modulatable laser of relatively low cost. Conventional laser modulation systems employ external electrooptic (EO) or acoustooptic (AO) modulators.1,2 In the He–Ne case de modulation has been used. In applications such as laser beam recording the EO and AO modulators suffer various shortcomings, the principles of which are high cost, sensitivity to alignment, and imperfect extinction. Current modulation of the He–Ne laser is power-limited, bandwidth-limited, and can result in reduced tube life.","PeriodicalId":301658,"journal":{"name":"Conference on Laser and Electrooptical Systems","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126657934","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Since the pioneering work by Kaminow1 and others in the early Sixties, there has been a continuing interest in obtaining broadband low power microwave light modulators for a number of applications, ranging from optical communication and data processing systems2 to active Q switching and mode-locking of lasers.3 The work reported here was prompted by the fast pulse amplitude and phase control requirements of high-power laser fusion experiments and their associated diagnostics, where it is desirable, often mandatory, to perform optical gating or temporal pulse shaping operations in the sub-100-psec range. In this paper, we consider the problem of designing and constructing ultrafast electrooptic (EO) modulator devices capable of producing optical transmission risetimes shorter than 100 psec.
{"title":"Design and application of ultrafast KD*P electrooptic modulators","authors":"B. C. Johnson, D. Anafi","doi":"10.1364/cleos.1976.wa7","DOIUrl":"https://doi.org/10.1364/cleos.1976.wa7","url":null,"abstract":"Since the pioneering work by Kaminow1 and others in the early Sixties, there has been a continuing interest in obtaining broadband low power microwave light modulators for a number of applications, ranging from optical communication and data processing systems2 to active Q switching and mode-locking of lasers.3 The work reported here was prompted by the fast pulse amplitude and phase control requirements of high-power laser fusion experiments and their associated diagnostics, where it is desirable, often mandatory, to perform optical gating or temporal pulse shaping operations in the sub-100-psec range. In this paper, we consider the problem of designing and constructing ultrafast electrooptic (EO) modulator devices capable of producing optical transmission risetimes shorter than 100 psec.","PeriodicalId":301658,"journal":{"name":"Conference on Laser and Electrooptical Systems","volume":"130 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127045666","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A laser amplifier, rod or disk, has a well defined aperture that limits the diameter of the beam. If one attempts to fill this entire aperture with useful energy, the interaction of the beam with the hard limiting aperture produces Fresnel diffraction rings at the edge which will propagate throughout the beam. These diffraction rings will be amplified by later amplifiers, resulting in intensity modulation detrimental to the beam propagation and even initiating self-focusing with consequent damage to optical components.
{"title":"KMSF laser subsystems","authors":"N. Moncur, B. Guscott, J. Hildum","doi":"10.1364/cleos.1976.thd2","DOIUrl":"https://doi.org/10.1364/cleos.1976.thd2","url":null,"abstract":"A laser amplifier, rod or disk, has a well defined aperture that limits the diameter of the beam. If one attempts to fill this entire aperture with useful energy, the interaction of the beam with the hard limiting aperture produces Fresnel diffraction rings at the edge which will propagate throughout the beam. These diffraction rings will be amplified by later amplifiers, resulting in intensity modulation detrimental to the beam propagation and even initiating self-focusing with consequent damage to optical components.","PeriodicalId":301658,"journal":{"name":"Conference on Laser and Electrooptical Systems","volume":" 12","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133017988","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper reports on an intracavity CdTe electrooptic modulator being developed for a 10.6-µm transmitter operating at 300 Mbps between low altitude and synchronous satellites. As the transmitter laser is a waveguide CO2 device,1 a waveguide mode of propagation in the modulator rod is used for optical confinement.2 This design, shown in Fig. 1, is a modification of the open resonator structure with an intracavity lens used in conventional transmitters. The waveguide configuration removes the limit on modulator length imposed by open resonator diffraction, eliminates the safety factor in the transverse dimension of the rod, and avoids loss arising from the intracavity lens.
{"title":"Waveguide electrooptic modulator for CO2 lasers","authors":"F. Goodwin, D. Henderson, A. Reiss, J. Wilkerson","doi":"10.1364/cleos.1976.thb4","DOIUrl":"https://doi.org/10.1364/cleos.1976.thb4","url":null,"abstract":"This paper reports on an intracavity CdTe electrooptic modulator being developed for a 10.6-µm transmitter operating at 300 Mbps between low altitude and synchronous satellites. As the transmitter laser is a waveguide CO2 device,1 a waveguide mode of propagation in the modulator rod is used for optical confinement.2 This design, shown in Fig. 1, is a modification of the open resonator structure with an intracavity lens used in conventional transmitters. The waveguide configuration removes the limit on modulator length imposed by open resonator diffraction, eliminates the safety factor in the transverse dimension of the rod, and avoids loss arising from the intracavity lens.","PeriodicalId":301658,"journal":{"name":"Conference on Laser and Electrooptical Systems","volume":"145 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121295056","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
We are presently completing a CO2 laser designed to produce peak power in excess of 2 TW to study the scaling characteristics of pellets for laser induced fusion. The design goal of 2500 J in a 1 nsec pulse also includes other requirements, among them being that the energy on the target before the arrival of the main pulse be kept under 100 μJ. This requirement is needed to prevent the target from disintegrating before the TW pulse can compress it. Since the small signal gain in the dual-beam triple-pass amplifier is estimated to be about 108, the prepulse energy from the oscillator–preamplifier feeding the final amplifier must be less than 10−12 J. Since about 0.2 J is required to drive each half of the dual beam module, a prepulse rejection ratio better than 4 × 1011 must be achieved.
{"title":"Prepulse elimination in high-power CO2 lasers","authors":"I. Liberman, J. Hayden, S. Singer","doi":"10.1364/cleos.1976.wg5","DOIUrl":"https://doi.org/10.1364/cleos.1976.wg5","url":null,"abstract":"We are presently completing a CO2 laser designed to produce peak power in excess of 2 TW to study the scaling characteristics of pellets for laser induced fusion. The design goal of 2500 J in a 1 nsec pulse also includes other requirements, among them being that the energy on the target before the arrival of the main pulse be kept under 100 μJ. This requirement is needed to prevent the target from disintegrating before the TW pulse can compress it. Since the small signal gain in the dual-beam triple-pass amplifier is estimated to be about 108, the prepulse energy from the oscillator–preamplifier feeding the final amplifier must be less than 10−12 J. Since about 0.2 J is required to drive each half of the dual beam module, a prepulse rejection ratio better than 4 × 1011 must be achieved.","PeriodicalId":301658,"journal":{"name":"Conference on Laser and Electrooptical Systems","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128597324","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
J. T. Jacobs, D. Schreiber, W. Crooks, W. J. Weiche
Laser transfer printing of high resolution microfilm has been achieved. Volatile dyes were transferred from a Mylar substrate into a plastic receiver substrate. The carrier and receiver were held in contact by a simple vacuum chuck. The 70-mW He-Ne laser beam was focused onto the carrier, where it was absorbed, heating the dye and causing it to vaporize. The vapor condensed on and diffused into the plastic receiver substrate.
{"title":"Microfilm by laser transfer printing","authors":"J. T. Jacobs, D. Schreiber, W. Crooks, W. J. Weiche","doi":"10.1364/cleos.1976.tud7","DOIUrl":"https://doi.org/10.1364/cleos.1976.tud7","url":null,"abstract":"Laser transfer printing of high resolution microfilm has been achieved. Volatile dyes were transferred from a Mylar substrate into a plastic receiver substrate. The carrier and receiver were held in contact by a simple vacuum chuck. The 70-mW He-Ne laser beam was focused onto the carrier, where it was absorbed, heating the dye and causing it to vaporize. The vapor condensed on and diffused into the plastic receiver substrate.","PeriodicalId":301658,"journal":{"name":"Conference on Laser and Electrooptical Systems","volume":"58 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116107670","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Electrooptical (EO) devices, such as Pockels cells, can provide effective bidirectional isolation for high-gain laser systems, such as those used for laser fusion experiments. In these systems, undesirable forward propagating radiation in the form of a precursor to the main pulse can preheat or destroy the target. Retroreflected radiation, arising from target or component surfaces, can experience sufficient amplification to destroy optical elements near the front end of the system. Protection of the target and laser from these effects is an important consideration in the design of any high-power laser irradiation system.
{"title":"Designing large aperture Pockels cells","authors":"M. Summers, B. C. Johnson","doi":"10.1364/cleos.1976.tha8","DOIUrl":"https://doi.org/10.1364/cleos.1976.tha8","url":null,"abstract":"Electrooptical (EO) devices, such as Pockels cells, can provide effective bidirectional isolation for high-gain laser systems, such as those used for laser fusion experiments. In these systems, undesirable forward propagating radiation in the form of a precursor to the main pulse can preheat or destroy the target. Retroreflected radiation, arising from target or component surfaces, can experience sufficient amplification to destroy optical elements near the front end of the system. Protection of the target and laser from these effects is an important consideration in the design of any high-power laser irradiation system.","PeriodicalId":301658,"journal":{"name":"Conference on Laser and Electrooptical Systems","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115236495","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The ARGUS laser system is presently performing irradiation experiments leading toward laser fusion at the Lawrence Livermore Laboratory. The laser is a two-arm system with 20-cm final amplifier apertures and is capable of delivering more than 3 TW of focusable power to laser fusion targets. This capability is planned to be upgraded in the near future. In this paper we describe the physical characteristics of the laser and associated facility and some important components incorporated therein, and we shall summarize system performance to date.
{"title":"Design, construction, and initial performance of ARGUS: a two-beam laser irradiation facility","authors":"W. Simmons, G. Allen, W. Neef, E. Wallerstein","doi":"10.1364/cleos.1976.tha3","DOIUrl":"https://doi.org/10.1364/cleos.1976.tha3","url":null,"abstract":"The ARGUS laser system is presently performing irradiation experiments leading toward laser fusion at the Lawrence Livermore Laboratory. The laser is a two-arm system with 20-cm final amplifier apertures and is capable of delivering more than 3 TW of focusable power to laser fusion targets. This capability is planned to be upgraded in the near future. In this paper we describe the physical characteristics of the laser and associated facility and some important components incorporated therein, and we shall summarize system performance to date.","PeriodicalId":301658,"journal":{"name":"Conference on Laser and Electrooptical Systems","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114624318","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pulsed laser instrumentation will be discussed, emphasizing advantages and limitations of engineering designs and techniques toward achieving optimum signal-to-noise with low cost, ease of operation, and reliability in a normal laboratory environment.
{"title":"Instrumentation for pulsed laser spectroscopy","authors":"G. Klauminzer","doi":"10.1364/cleos.1976.wf6","DOIUrl":"https://doi.org/10.1364/cleos.1976.wf6","url":null,"abstract":"Pulsed laser instrumentation will be discussed, emphasizing advantages and limitations of engineering designs and techniques toward achieving optimum signal-to-noise with low cost, ease of operation, and reliability in a normal laboratory environment.","PeriodicalId":301658,"journal":{"name":"Conference on Laser and Electrooptical Systems","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127566420","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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