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1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027)最新文献

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Enhancement of SAW laser probe measurements by signal processing 用信号处理增强SAW激光探头测量
H. Engan, A. Rønnekleiv
Many different types of the SAW laser probe have been used for several years to characterize SAW devices as well as inherent properties of particular materials. Our laser probe is of a modified knife-edge type. Operating with a linear response, it has a high dynamic range. The probe provides full phasor information of the detected signal, and directional properties of the detection process makes it possible to determine the surface tilt components in two spatially orthogonal directions. We first sum up the basic characteristics of the probe. We show several examples where we take advantage of these features combined with signal processing techniques such as the fast Fourier transform. This enables us to concentrate on distinct properties of the devices under test. We thus exploit the spatial frequency domain and, in the basic detection process, the directions of the wavecrests, to enhance measurements of particular properties. Examples include results obtained from measurements on a selection of components containing various structures.
许多不同类型的SAW激光探头已经使用了几年来表征SAW器件以及特定材料的固有特性。我们的激光探头是改良的刀口型。它具有线性响应,具有高动态范围。探头提供被检测信号的完整相量信息,并且检测过程的方向性使得可以确定两个空间正交方向上的表面倾斜分量。我们首先总结了探头的基本特性。我们展示了几个例子,其中我们利用这些特征与信号处理技术相结合,如快速傅里叶变换。这使我们能够专注于被测设备的不同特性。因此,我们利用空间频域,在基本的检测过程中,利用波峰的方向,来增强对特定特性的测量。例子包括对含有各种结构的选定部件进行测量得到的结果。
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引用次数: 25
Development of a scan system for Rayleigh, shear and longitudinal wave velocity mapping 瑞利、横波和纵波速度成像扫描系统的开发
S. Sathish, R. Martin
A high precision scanning acoustic microscope system to generate C-scan type velocity images of Rayleigh, surface skimming longitudinal (SSLW) and surface skimming shear waves (SSSW), has been developed. The acoustic microscope utilizes impulse excitation to separate in the time domain the direct reflected signal from the surface acoustic wave signals. Differences in the arrival times of these signals at two defocuses are used to compute the velocity and display a 2D x/y velocity in real time during the scan. A map of the Young's modulus of the material is generated using the velocity images. Examples of measurement on standard samples and Ti-6Al-4V alloys are presented.
研制了一种高精度扫描声显微镜系统,用于生成瑞利波、表面掠波纵波和表面掠波横波的c扫描型速度图像。声学显微镜利用脉冲激励在时域内将直接反射信号与表面声波信号分离。这些信号在两个散焦处到达时间的差异用于计算速度,并在扫描期间实时显示2D x/y速度。利用速度图像生成材料的杨氏模量图。给出了标准样品和Ti-6Al-4V合金的测量实例。
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引用次数: 2
Advances in acoustooptic digital computations via analog convolution in spectrum domain 频谱域模拟卷积声光数字计算研究进展
V. V. Proklov, O. Byshevski-Konopko, V. N. Kurskii
The presentation considers properties of the acoustooptic (AO) digital matrix multipliers based on the algorithm of digital multiplication via an analog convolution (DMAC) in the spectrum domain. The calculations, of main working regimes of the planar Bragg cell on base of Ti-diffused waveguides on YX-LiNbO3 with so called collinear waves interaction have been performed. The possibility of very high bit rate capabilities in AO digital matrix-vector multiplications up to 1.5×1010 mult.-adds/sec with 16-bit accuracy, is theoretically predicted . There are firstly discovered facility of the spectral DMAC for operation in the floating point regime as well as advantages of the AO digital multiplier implementation for a some prospective telecommunication systems. The most significant features of the proposed AO multipliers have been verified experimentally.
本文研究了基于频谱域模拟卷积(DMAC)数字乘法算法的声光数字矩阵乘法器的特性。用共线波相互作用计算了x - linbo3上基于ti扩散波导的平面Bragg细胞的主要工作状态。非常高的比特率能力的可能性,在AO数字矩阵矢量乘法高达1.5×1010 mult。-增加/秒16位精度,理论上预测。本文首次发现了频谱DMAC在浮点状态下工作的优点,以及AO数字乘法器在一些有发展前景的电信系统中的优点。所提出的AO乘法器的最重要特征已通过实验验证。
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引用次数: 1
Development of high quality AlN epitaxial film for 2.4 GHz front-end SAW matched filter 2.4 GHz前端SAW匹配滤波器高质量AlN外延膜的研制
S. Tomabechi, K. Wada, S. Saigusa, H. Matsuhashi, H. Nakase, K. Masu, K. Tsubouchi
We have developed aluminum nitride (AlN) epitaxial growth technology using Knudsen pressure MOCVD method. The thickness uniformity was ±1%. However groove-like cracks were formed on the surface of the AlN epitaxial film. AlN deposition on off-angle substrates and the AlN deposition at high temperature have been investigated for eliminating the cracks on the surface. AlN deposition on an Al2O3 surface which is -4 degree off-angle from c'-axis has resulted in elimination of the cracks from the SEM (Scanning Electron Microscope) observations. The cracks in an AlN film deposited at a higher temperature of 1140°C/40mTorr are found to be completely eliminated on the whole 2"-φ wafer from SEM and laser-scan microscope observations. The propagation loss has been evaluated from the characteristics of time domain impulse response of 2.4 GHz matched filters fabricated on 2"-φ wafers. The propagation loss of crackless AlN films is drastically improved by one order compared with that of cracked AlN films.
采用Knudsen压力MOCVD法开发了氮化铝(AlN)外延生长技术。厚度均匀度为±1%。然而,在AlN外延膜表面形成沟槽状裂纹。研究了在非角度衬底上沉积AlN和在高温下沉积AlN以消除表面裂纹。AlN沉积在与c′轴偏离-4度的Al2O3表面上,从SEM(扫描电子显微镜)观察中可以消除裂纹。SEM和激光扫描显微镜观察发现,在1140°C/40mTorr较高温度下沉积的AlN膜在整个2”-φ晶圆上完全消除了裂纹。从2" φ晶圆上制作的2.4 GHz匹配滤波器的时域脉冲响应特性出发,对其传播损耗进行了评价。无裂纹AlN薄膜的传播损耗比有裂纹AlN薄膜显著提高了一个数量级。
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引用次数: 2
Analysis of SAW grating waveguides considering velocity dispersion caused by reflectivity 考虑反射率引起的速度色散的SAW光栅波导分析
K. Hirota, K. Nakamura
Conventional SAW grating waveguide analyses based on the scalar potential theory regard the phase velocity in the grating region as a constant. The velocity at the center frequency of the stop band was often used as a constant in those analyses. In reality, velocity dispersion is caused by the reflectivity of finger electrodes, and the velocity changes near the stop band. In this paper, a new approximate analytical model of SAW grating waveguides is proposed. This model includes the effect of the velocity dispersion, by placing a longitudinal component of wave number in such a way that it becomes a solution of the coupling-of-modes equations. To verify the adequacy of the model, 2-port resonators on 36.5°Y-X quartz and 45°X-Z Li2B4O7 are measured and compared with the computational results.
传统的基于标量势理论的声表面波光栅波导分析将光栅区域的相速度视为常数。在这些分析中,经常使用在停止带中心频率处的速度作为常数。在现实中,速度色散是由手指电极的反射率引起的,速度在停止带附近变化。本文提出了一种新的SAW光栅波导近似解析模型。该模型通过将波数的纵向分量置于模耦合方程的解中,从而考虑了速度色散的影响。为了验证模型的充分性,对36.5°Y-X石英和45°X-Z Li2B4O7上的2端口谐振器进行了测量,并与计算结果进行了比较。
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引用次数: 8
Medical imaging arrays for frequencies above 25 MHz 频率在25兆赫以上的医学成像阵列
T. Ritter, K. Shung, R. Tutwiler, T. Shrout
A fabrication method has been developed for composite linear arrays operating at a frequency of 30 MHz. The design features dual matching layers, a lens for focusing in the elevation direction, a 2-2 composite with 28 /spl mu/m wide ceramics and 5.3 /spl mu/m polymer widths, and coaxial cable for electrical impedance matching. Bandwidths exceeding 65% and crosstalk values less than -30 dB were measured on prototype arrays. A non-composite 35 MHz design has also been investigated. An interconnect method using a flex circuit and sputtered metal has been tested. Properties were then measured by fitting experimental impedance data to a model using a non-linear regression technique. A k/sub 33/' of 0.63 and an /spl epsiv//sub 33//sup S///spl epsiv//sub 0/ of 1310 were measured for array elements operating at 35 MHz.
研制了一种工作频率为30mhz的复合线性阵列的制造方法。该设计采用双匹配层,一个用于仰角方向聚焦的透镜,一个由28 /spl μ m宽的陶瓷和5.3 /spl μ m宽的聚合物组成的2-2复合材料,以及用于电阻抗匹配的同轴电缆。在原型阵列上测量了超过65%的带宽和小于-30 dB的串扰值。还研究了一种非复合35 MHz设计。使用挠性电路和溅射金属的互连方法进行了测试。然后通过使用非线性回归技术将实验阻抗数据拟合到模型中来测量性能。在35 MHz频率下,测得k/sub 33/' = 0.63, A /spl epsiv//sub 33//sup S///spl epsiv//sub 0/ = 1310。
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引用次数: 10
Correction of geometric artifacts in intravascular ultrasound imaging during stent implantation 支架置入术中血管内超声成像几何伪影的校正
P. Delachartre, E. Brusseau, F. Guérault, G. Finet, C. Cachard, D. Vray
A model has been developed for correcting geometric artifacts observed in intravascular ultrasound imaging during coronary artery stent implantation. Geometric artifacts occur when the position of the transducer inside the stent is off-centered and inclined. In coronary applications, the position of the catheter changes a lot due to the curved nature of the arteries. This gives images that do not correspond to the expected cross section of the stent and lead to ambiguous interpretation by physicians. The authors' work consists of estimating and correcting artifacts in all stent images where the catheter is positioned off-centered and not parallel with the vessel axis. Estimation is made using the analytical model of geometric artifacts which predicts positioning of the ultrasound catheter inside the stent (tilt angle, off centering in both directions x and y, azimuth angle). Correction consists in using the predicted values of artifacts to calculate the equivalent stent image seen by a centered and non-inclined catheter. The "corrected" image is then used to compute clinical parameters for quantitative analysis of stent implantation.
一个模型已经开发用于纠正几何伪影观察在血管内超声成像期间冠状动脉支架植入。当换能器在支架内的位置偏离中心和倾斜时,会发生几何伪影。在冠状动脉的应用中,由于动脉的弯曲性,导管的位置会发生很大的变化。这导致图像与预期的支架横截面不一致,导致医生的解释不明确。作者的工作包括估计和纠正所有支架图像中的伪影,其中导管位置偏离中心且与血管轴不平行。利用几何伪影的解析模型进行估计,预测超声导管在支架内的定位(倾斜角度,x和y两个方向的偏离中心,方位角)。校正包括使用伪影的预测值来计算中心和非倾斜导管所看到的等效支架图像。“校正”后的图像用于计算临床参数,用于支架植入的定量分析。
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引用次数: 2
A novel WDM-CDMA optical fiber communication system with asynchronous despreading technology 采用异步扩频技术的新型WDM-CDMA光纤通信系统
Dai Enguang, Wu Deming, Xu Anshi
A WDM/CDMA optical fiber communication system with asynchronous despreading technology employing surface acoustic wave MSK match filter is reported. Key devices were designed and fabricated. The system can be used as a signaling network to manage other networks and can be evolved into a multi-stage multiplexing system.
报道了一种采用表面声波MSK匹配滤波器的WDM/CDMA异步扩频光纤通信系统。设计并制作了关键器件。该系统既可以作为信令网络来管理其他网络,也可以发展成多级复用系统。
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引用次数: 1
Multi-level signal processing for very precise ultrasonic measurement on machine tools 用于机床上非常精确的超声波测量的多级信号处理
T. Pfeifer, M. Benz
The integration of metrology into the manufacturing process is becoming more and more important for production technology. The measurement directly on machine tools is especially improving manufacturing strategies. So far optical or tactile measuring systems are the state-of-the-art for dimensional measurements in process metrology. However, the wall thickness of structures with inner cavities can not be measured with these systems. Due to these deficits, an ultrasonic system has been integrated into the periphery of a machine tool. Both the extensive, multi-level signal processing of the acoustic echoes and the developed software tool “μ-sonic” are discussed in the paper. The aim of this presentation is to illustrate the potential of the ultrasonic in-line measurement. Finally, the practical realization for a lathe and initial results are presented.
在生产技术中,计量与制造过程的集成变得越来越重要。直接在机床上进行测量尤其改善了制造策略。到目前为止,光学或触觉测量系统是最先进的尺寸测量过程计量。然而,这些系统无法测量具有内腔结构的壁厚。由于这些缺陷,超声波系统已被集成到机床的外围。本文讨论了声学回波广泛、多层次的信号处理和开发的“μ-sonic”软件工具。本报告的目的是说明超声波在线测量的潜力。最后给出了在一台车床上的实际实现和初步结果。
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引用次数: 2
Design of SAW filters on langasite 菱叶石上SAW过滤器的设计
V. B. Chvets, P. G. Ivanov, V. M. Makarov, V. S. Orlov
Due to good temperature stability and moderately high electromechanical coupling coefficient langasite (Li3Ga5SiO4 or LGS) is known as a promising material for SAW devices. The characteristics of the Rayleigh wave propagation on LGS have been studied fairly well. However, no design of SAW devices on LGS suitable for modern communication systems has been reported as yet. In this paper, transversal filters on LGS based on bidirectional interdigital transducers, and low-loss filters on LGS based on natural single phase unidirectional transducers (NSPUDT), are described. The filters on LGS have exhibited better electrical parameters than their analogues on quartz and lithium tantalate.
由于其良好的温度稳定性和较高的机电耦合系数,langasite (Li3Ga5SiO4或LGS)被认为是一种很有前途的SAW器件材料。在地面测井仪上,瑞利波的传播特性已经得到了较好的研究。然而,在LGS上还没有适合现代通信系统的声波器件的设计报道。本文介绍了基于双向数字间换能器的LGS横向滤波器和基于自然单相单向换能器(NSPUDT)的LGS低损耗滤波器。LGS上的滤波器比石英和钽酸锂上的滤波器表现出更好的电参数。
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引用次数: 9
期刊
1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027)
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