Pub Date : 2022-08-08DOI: 10.1109/3M-NANO56083.2022.9941712
Song-ang Peng, Xinhua Wang, Xinyu Liu, Bo Li, Wei-Ding Wu
The gate dielectric is the key component for the high performance of the carbon nanotube field effect transistor. In this study, we fabricated the top-gated carbon nanotube field effect transistor utilizing oxidized aluminium film as dielectric layer. The less hysteresis and small gate leakage of the device indicate the lower interface trap charges and high quality of the dielectric film.
{"title":"Top-gated Carbon Nanotube Field Effect Transistor with Dielectric Formed by Aluminium Natural Oxidation Process","authors":"Song-ang Peng, Xinhua Wang, Xinyu Liu, Bo Li, Wei-Ding Wu","doi":"10.1109/3M-NANO56083.2022.9941712","DOIUrl":"https://doi.org/10.1109/3M-NANO56083.2022.9941712","url":null,"abstract":"The gate dielectric is the key component for the high performance of the carbon nanotube field effect transistor. In this study, we fabricated the top-gated carbon nanotube field effect transistor utilizing oxidized aluminium film as dielectric layer. The less hysteresis and small gate leakage of the device indicate the lower interface trap charges and high quality of the dielectric film.","PeriodicalId":370631,"journal":{"name":"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129264628","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-08-08DOI: 10.1109/3M-NANO56083.2022.9941621
Zhiqiang Wang, G. Zhang, Yifan Liu, Shuze Geng, Donghuang Shi, Zhenghao Yang
Based on the theoretical derivation of one-dimensional fractal, a new method to realize on-line tool wear monitoring of micro end tool is proposed. First, several different wear conditions of micro end tool are chosen as comparison samples, which includes the wear rate of micro end tool is 0, 10, 20, 30, $i$ and tipping respectively. The vibration signals of all samples are collected in time domain, and the range $k$ of each wear status is obtained based on one-dimensional fractal. Secondly, the vibration status of tested tool is monitored and analyzed, and its one-dimensional fractal is extracted. Finally, comparing the one-dimensional fractal of the tested tool with the fractal dimension range $j$ of the comparison samples, the status of tested tool is detected. In order to verify the above monitoring method, a small triaxial vertical testing machine is used. The results show that the one-dimensional fractal of each monitored micro end tool falls within the range of fractal dimension corresponding to actual wear.
{"title":"On Line Monitoring of Micro End Tool Wear Based on One-dmensional Fractal","authors":"Zhiqiang Wang, G. Zhang, Yifan Liu, Shuze Geng, Donghuang Shi, Zhenghao Yang","doi":"10.1109/3M-NANO56083.2022.9941621","DOIUrl":"https://doi.org/10.1109/3M-NANO56083.2022.9941621","url":null,"abstract":"Based on the theoretical derivation of one-dimensional fractal, a new method to realize on-line tool wear monitoring of micro end tool is proposed. First, several different wear conditions of micro end tool are chosen as comparison samples, which includes the wear rate of micro end tool is 0, 10, 20, 30, $i$ and tipping respectively. The vibration signals of all samples are collected in time domain, and the range $k$ of each wear status is obtained based on one-dimensional fractal. Secondly, the vibration status of tested tool is monitored and analyzed, and its one-dimensional fractal is extracted. Finally, comparing the one-dimensional fractal of the tested tool with the fractal dimension range $j$ of the comparison samples, the status of tested tool is detected. In order to verify the above monitoring method, a small triaxial vertical testing machine is used. The results show that the one-dimensional fractal of each monitored micro end tool falls within the range of fractal dimension corresponding to actual wear.","PeriodicalId":370631,"journal":{"name":"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128262499","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Cells are the basic unit of live activities, and the cell mechanical properties can effectively reflect their functions and statuses. Furthermore, the cell mechanical properties can effectively characterize the cellular function. In this work, the atomic force microscopy (AFM) was used to detected the mechanical properties of cardiomyocytes. We measured Young's modulus, adhesion and the beating force of nuclei, cytoplasm and margin of cardiomyocytes extracted from a 1–3 day newborn mouse. The mechanical properties of different areas of the cardiomyocytes were statistical analysis provides useful information for the diagnosis of myocardial disease and the pharmaceutical testing and screening.
{"title":"Mechanical Property Detection of Cardiomyocytes by Atomic Force Microscopy","authors":"Jianjun Dong, Bowei Wang, Xingyue Wang, Rui Wang, Jiani Li, Kaige Qu, Ying Wang, Huimiao Wei, Zuobin Wang","doi":"10.1109/3M-NANO56083.2022.9941570","DOIUrl":"https://doi.org/10.1109/3M-NANO56083.2022.9941570","url":null,"abstract":"Cells are the basic unit of live activities, and the cell mechanical properties can effectively reflect their functions and statuses. Furthermore, the cell mechanical properties can effectively characterize the cellular function. In this work, the atomic force microscopy (AFM) was used to detected the mechanical properties of cardiomyocytes. We measured Young's modulus, adhesion and the beating force of nuclei, cytoplasm and margin of cardiomyocytes extracted from a 1–3 day newborn mouse. The mechanical properties of different areas of the cardiomyocytes were statistical analysis provides useful information for the diagnosis of myocardial disease and the pharmaceutical testing and screening.","PeriodicalId":370631,"journal":{"name":"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"115 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116456286","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-08-08DOI: 10.1109/3M-NANO56083.2022.9941692
Fujun Wang, Xuteng Qin, Zhichen Huo, Dawei Zhang
In this paper, a novel linear fitting method for micro vision is proposed, which can be utilized to accurately estimate the pose of components in micro-assembly. After obtaining the edge information through Canny edge detection, an improved least square method is put forward to fit the linear edge of small components, where a threshold is utilized to reduce the influence of outliers in point set. In order to improve the estimation accuracy, the fitted linear edge is iteratively corrected through the information of detected broken lines. Compared with conventional linear edge fitting methods, the experimental results indicated that proposed method could effectively reduce the confidence interval of the fitted line, which would be helpful to improve the accuracy of pose estimation in micro-assembly.
{"title":"A Novel Linear Edge Fitting Method with Short Edge Correction","authors":"Fujun Wang, Xuteng Qin, Zhichen Huo, Dawei Zhang","doi":"10.1109/3M-NANO56083.2022.9941692","DOIUrl":"https://doi.org/10.1109/3M-NANO56083.2022.9941692","url":null,"abstract":"In this paper, a novel linear fitting method for micro vision is proposed, which can be utilized to accurately estimate the pose of components in micro-assembly. After obtaining the edge information through Canny edge detection, an improved least square method is put forward to fit the linear edge of small components, where a threshold is utilized to reduce the influence of outliers in point set. In order to improve the estimation accuracy, the fitted linear edge is iteratively corrected through the information of detected broken lines. Compared with conventional linear edge fitting methods, the experimental results indicated that proposed method could effectively reduce the confidence interval of the fitted line, which would be helpful to improve the accuracy of pose estimation in micro-assembly.","PeriodicalId":370631,"journal":{"name":"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125857282","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-08-08DOI: 10.1109/3M-NANO56083.2022.9941667
Na Sang, Chi Zhang, Xiaolu Huang, Hongtao Yu, Weizhen Wang, Guilin Yang
A flexure-based precision positioning stage driven by voice coil motor (VCM) with integrated active eddy current damper (ECD) is proposed in this paper. This device is constituted of two identical VCMs, one ECD and one compound double parallelogram mechanism (CDPM). The VCM with Halbach permanent magnets (PMs) array is designed to yield a large driving force and low force ripple. The CDPM is selected as the flexure guide with the advantages of deterministic motion and high precision displacement transmission. The double-sided active ECD is proposed to suppress the residual vibration especially in the deceleration or stop motion process. Based on the analytical models and theoretical analyses of the VCM, the ECD and the flexure guide, the relationship between the input driving current and output displacement is obtained. Finite element analysis (FEA) is carried out to verify both the electromagnetic and dynamic performance of the designed stage. The results validate that the proposed stage can achieve a large motion range about $boldsymbol{pm 5text{mm}}$, deliver the force-constant variation less than 2%, and possess a high bandwidth approximately 55Hz.
{"title":"Design of Precision Positioning Stage Driven by Voice Coil Motor with Integrated Active Eddy Current Damper","authors":"Na Sang, Chi Zhang, Xiaolu Huang, Hongtao Yu, Weizhen Wang, Guilin Yang","doi":"10.1109/3M-NANO56083.2022.9941667","DOIUrl":"https://doi.org/10.1109/3M-NANO56083.2022.9941667","url":null,"abstract":"A flexure-based precision positioning stage driven by voice coil motor (VCM) with integrated active eddy current damper (ECD) is proposed in this paper. This device is constituted of two identical VCMs, one ECD and one compound double parallelogram mechanism (CDPM). The VCM with Halbach permanent magnets (PMs) array is designed to yield a large driving force and low force ripple. The CDPM is selected as the flexure guide with the advantages of deterministic motion and high precision displacement transmission. The double-sided active ECD is proposed to suppress the residual vibration especially in the deceleration or stop motion process. Based on the analytical models and theoretical analyses of the VCM, the ECD and the flexure guide, the relationship between the input driving current and output displacement is obtained. Finite element analysis (FEA) is carried out to verify both the electromagnetic and dynamic performance of the designed stage. The results validate that the proposed stage can achieve a large motion range about $boldsymbol{pm 5text{mm}}$, deliver the force-constant variation less than 2%, and possess a high bandwidth approximately 55Hz.","PeriodicalId":370631,"journal":{"name":"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124820384","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-08-08DOI: 10.1109/3M-NANO56083.2022.9941632
Bingyu Li, Jiaojiao Li, Zhen Yang, Minjuan Li, Yan Li, XuWei Guo, Faze Chen, Chengjuan Yang
Lithium metal, as the most ideal anode material for high energy density batteries, has high capacity and low electrochemical potential. However, the decrease in battery stability caused by the growth of Li dendrites during cycling, and the capacity drop caused by uneven Li plating both hinder the practical application of lithium metal as an anode material. Herein, we fabricate a copper current collector with 3D hierarchical structure by simple ultrafast laser processing method. The micron-scale groove structure can accommodate the volume change of lithium during the plating and stripping process, and reduce the local current density by increasing the specific surface area. Moreover, the laser-induced fluffy nano-CuxO provides more nucleation sites for Li, which uniformizes Li plating and reduces the formation of Li dendrites. Compared with commercial copper foils, half-cells based on 3D hierarchical copper current collectors achieve high coulombic efficiencies over 90% after 125 cycles at 0.5 mA/cm2, and a symmetric cell has a long cycle life over 800 hours at 0.5 mA/cm2. Therefore, our findings provide a feasible way to address the short-circuit problem and capacity decline caused by lithium dendrites in Li-ion batteries.
{"title":"Three-dimensional Laser-induced Hierarchical Copper Current Collector for High-performance Lithium Metal Batteries","authors":"Bingyu Li, Jiaojiao Li, Zhen Yang, Minjuan Li, Yan Li, XuWei Guo, Faze Chen, Chengjuan Yang","doi":"10.1109/3M-NANO56083.2022.9941632","DOIUrl":"https://doi.org/10.1109/3M-NANO56083.2022.9941632","url":null,"abstract":"Lithium metal, as the most ideal anode material for high energy density batteries, has high capacity and low electrochemical potential. However, the decrease in battery stability caused by the growth of Li dendrites during cycling, and the capacity drop caused by uneven Li plating both hinder the practical application of lithium metal as an anode material. Herein, we fabricate a copper current collector with 3D hierarchical structure by simple ultrafast laser processing method. The micron-scale groove structure can accommodate the volume change of lithium during the plating and stripping process, and reduce the local current density by increasing the specific surface area. Moreover, the laser-induced fluffy nano-CuxO provides more nucleation sites for Li, which uniformizes Li plating and reduces the formation of Li dendrites. Compared with commercial copper foils, half-cells based on 3D hierarchical copper current collectors achieve high coulombic efficiencies over 90% after 125 cycles at 0.5 mA/cm2, and a symmetric cell has a long cycle life over 800 hours at 0.5 mA/cm2. Therefore, our findings provide a feasible way to address the short-circuit problem and capacity decline caused by lithium dendrites in Li-ion batteries.","PeriodicalId":370631,"journal":{"name":"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131336305","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-08-08DOI: 10.1109/3M-NANO56083.2022.9941662
Jian Li, Yiquan Li, Qianqian Cai
Aluminum alloys are widely used in aerospace and marine transportation industries because of their excellent properties. However, the aluminum oxide film on the surface of aluminum alloy in service is easy to be damaged by corrosive media, resulting in matrix corrosion cracking, which also hinders the wide application of aluminum alloy in more fields. In this paper, the PEO/SOT composite coating was prepared by plasma electrolytic oxidation (PEO) combined with surface oiling treatment (SOT). Oiling treatment can effectively cover the discharge channels and cracks on the PEO surface, so as to prevent corrosive ions from contacting through the coating and damaging the aluminum alloy matrix. The corrosion resistance of the composite coating was tested by electrochemical workstation. The results show that PEO/SOT composite coating has better corrosion resistance in corrosive environment than the substrate and PEO coating. This will help to expand the application of aluminum alloy in the field of higher requirements.
{"title":"Improvement of Corrosion Resistance of 7075 Aluminum Alloy by Micro Arc Oxidation after Hole Sealing Treatment","authors":"Jian Li, Yiquan Li, Qianqian Cai","doi":"10.1109/3M-NANO56083.2022.9941662","DOIUrl":"https://doi.org/10.1109/3M-NANO56083.2022.9941662","url":null,"abstract":"Aluminum alloys are widely used in aerospace and marine transportation industries because of their excellent properties. However, the aluminum oxide film on the surface of aluminum alloy in service is easy to be damaged by corrosive media, resulting in matrix corrosion cracking, which also hinders the wide application of aluminum alloy in more fields. In this paper, the PEO/SOT composite coating was prepared by plasma electrolytic oxidation (PEO) combined with surface oiling treatment (SOT). Oiling treatment can effectively cover the discharge channels and cracks on the PEO surface, so as to prevent corrosive ions from contacting through the coating and damaging the aluminum alloy matrix. The corrosion resistance of the composite coating was tested by electrochemical workstation. The results show that PEO/SOT composite coating has better corrosion resistance in corrosive environment than the substrate and PEO coating. This will help to expand the application of aluminum alloy in the field of higher requirements.","PeriodicalId":370631,"journal":{"name":"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131012317","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-08-08DOI: 10.1109/3M-NANO56083.2022.9941608
Chengyang Li, Kecai Xie, Zhongjing Ren, Peng Yan
This paper presents a shape memory alloy (SMA) driven micro-catheter for active navigation in vascular interventions. SMA wires with microscale diameters and silicone rubber are employed for developing prototypes of such catheters. Selectively processed U shape SMA wires are biasedly embedded into silicone rubber to form the distal actuators with submillimeter diameters, which are characterized by infrared and CCD cameras. The transformation temperatures of SMA wires used for creation of distal actuator is proven to be approximately 35°C by the infrared imaging. The deflection angles of distal actuators are determined by the residual stress resulting from biased SMA wires and their shape memory effect. As a result, distal deflection within acute angles range is accomplished with actuators in submillimeter diameters. A micro-catheter (0.8 mm in diameter) with a distal actuator (0.5 mm in diameter) is mounted inside a vascular introducing sheath fixed on a 3D vascular model to experimentally validate the ability of proposed catheter for navigation.
{"title":"Design and Experiment on a Novel SMA Driven Micro-catheter for Active Navigation in Vascular Interventions","authors":"Chengyang Li, Kecai Xie, Zhongjing Ren, Peng Yan","doi":"10.1109/3M-NANO56083.2022.9941608","DOIUrl":"https://doi.org/10.1109/3M-NANO56083.2022.9941608","url":null,"abstract":"This paper presents a shape memory alloy (SMA) driven micro-catheter for active navigation in vascular interventions. SMA wires with microscale diameters and silicone rubber are employed for developing prototypes of such catheters. Selectively processed U shape SMA wires are biasedly embedded into silicone rubber to form the distal actuators with submillimeter diameters, which are characterized by infrared and CCD cameras. The transformation temperatures of SMA wires used for creation of distal actuator is proven to be approximately 35°C by the infrared imaging. The deflection angles of distal actuators are determined by the residual stress resulting from biased SMA wires and their shape memory effect. As a result, distal deflection within acute angles range is accomplished with actuators in submillimeter diameters. A micro-catheter (0.8 mm in diameter) with a distal actuator (0.5 mm in diameter) is mounted inside a vascular introducing sheath fixed on a 3D vascular model to experimentally validate the ability of proposed catheter for navigation.","PeriodicalId":370631,"journal":{"name":"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"176 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132563805","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Ferroelectric field effect transistor (FeFET) based on two-dimensional (2D) materials is centered great expectations for next-generation non-volatile memory devices owing to its excellent properties. In this paper, we fabricated monolayer $text{MoS}_{2}$ FeFET devices array through coupling ferroelectric P(VDF - TrFE) as the dielectric layer. The $text{MoS}_{2}$ FeFET device demonstrated excellent storage performance, including high on/off current ratios $boldsymbol{(> 10^{6})}$, a broad memory window (~15 V), long endurance (>200 cycles), and retention time (>1000 s). In additional, attributed to the chemical vapor deposition (CVD) synthesis of large-scale uniform Mos2,the devices array shows consistent characteristics, which suggest huge potential integrated circuit applications in the future.
{"title":"High Uniformity Ferroelectric MoS2 Nonvolatile Memory Array","authors":"Chunyang Li, Lu Li, Zhongyi Li, Fanqing Zhang, Lixin Dong, Jing Zhao","doi":"10.1109/3M-NANO56083.2022.9941686","DOIUrl":"https://doi.org/10.1109/3M-NANO56083.2022.9941686","url":null,"abstract":"Ferroelectric field effect transistor (FeFET) based on two-dimensional (2D) materials is centered great expectations for next-generation non-volatile memory devices owing to its excellent properties. In this paper, we fabricated monolayer $text{MoS}_{2}$ FeFET devices array through coupling ferroelectric P(VDF - TrFE) as the dielectric layer. The $text{MoS}_{2}$ FeFET device demonstrated excellent storage performance, including high on/off current ratios $boldsymbol{(> 10^{6})}$, a broad memory window (~15 V), long endurance (>200 cycles), and retention time (>1000 s). In additional, attributed to the chemical vapor deposition (CVD) synthesis of large-scale uniform Mos2,the devices array shows consistent characteristics, which suggest huge potential integrated circuit applications in the future.","PeriodicalId":370631,"journal":{"name":"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"88 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133022008","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-08-08DOI: 10.1109/3M-NANO56083.2022.9941606
Huaxian Wei, Jian Yang, Yuanchao Li, Zhouwu Chen
Tip-tilt-z micro-positioning is crucial in wafer alignment. Due to the restrain of traditional manufacturing technique, it is hard to development compliant tip-tilt-z (CTTZ) mechanism in the form of single-piece monolithic structure. This paper presents the design, fabrication, and experimental tests of a CTTZ stage with monolithic spatial structure based on additive manufacturing (3D printing). The results verified the feasibility of developing complex compliant mechanism with spatial, compact, and monolithic structure, which could realize precision capability up to submicron and micro-radian using easy-access 3D-printing.
{"title":"Study of a 3D-printed Monolithic Compliant Tip-tilt-z Stage for Micro-alignment","authors":"Huaxian Wei, Jian Yang, Yuanchao Li, Zhouwu Chen","doi":"10.1109/3M-NANO56083.2022.9941606","DOIUrl":"https://doi.org/10.1109/3M-NANO56083.2022.9941606","url":null,"abstract":"Tip-tilt-z micro-positioning is crucial in wafer alignment. Due to the restrain of traditional manufacturing technique, it is hard to development compliant tip-tilt-z (CTTZ) mechanism in the form of single-piece monolithic structure. This paper presents the design, fabrication, and experimental tests of a CTTZ stage with monolithic spatial structure based on additive manufacturing (3D printing). The results verified the feasibility of developing complex compliant mechanism with spatial, compact, and monolithic structure, which could realize precision capability up to submicron and micro-radian using easy-access 3D-printing.","PeriodicalId":370631,"journal":{"name":"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130810557","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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