Pub Date : 2009-03-16DOI: 10.1109/SAS.2009.4801791
Thomas Layton, E. Jacobs, S. Griffin
Securing national borders is an important and difficult task. Long and often remote borders make surveillance challenging and expensive. Remotely deployed devices can improve border security by detecting movement across the border. Such devices must be low power, low cost, and easily installed. This paper describes a test bed for a simple laser triangulation system capable of creating 2D and 3D images of moving objects. The 2D and 3D data can be used by classification algorithms to determine if something crossing the border is a threat.
{"title":"3D laser scanner and profiler for application to border security","authors":"Thomas Layton, E. Jacobs, S. Griffin","doi":"10.1109/SAS.2009.4801791","DOIUrl":"https://doi.org/10.1109/SAS.2009.4801791","url":null,"abstract":"Securing national borders is an important and difficult task. Long and often remote borders make surveillance challenging and expensive. Remotely deployed devices can improve border security by detecting movement across the border. Such devices must be low power, low cost, and easily installed. This paper describes a test bed for a simple laser triangulation system capable of creating 2D and 3D images of moving objects. The 2D and 3D data can be used by classification algorithms to determine if something crossing the border is a threat.","PeriodicalId":410885,"journal":{"name":"2009 IEEE Sensors Applications Symposium","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127753821","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-16DOI: 10.1109/SAS.2009.4801773
Vijayalakshmi Velusamy, K. Arshak, O. Korostynska, Kamila Oliwa, C. Adley
In recent years, there has been numerous research papers reported on the use of DNA biosensors for the detection of foodborne pathogens. However, none of the papers to date reflect the detection of foodborne pathogens directly in food using a handheld DNA biosensor.
{"title":"Design of a real time biorecognition system to detect foodborne pathogens-DNA biosensor","authors":"Vijayalakshmi Velusamy, K. Arshak, O. Korostynska, Kamila Oliwa, C. Adley","doi":"10.1109/SAS.2009.4801773","DOIUrl":"https://doi.org/10.1109/SAS.2009.4801773","url":null,"abstract":"In recent years, there has been numerous research papers reported on the use of DNA biosensors for the detection of foodborne pathogens. However, none of the papers to date reflect the detection of foodborne pathogens directly in food using a handheld DNA biosensor.","PeriodicalId":410885,"journal":{"name":"2009 IEEE Sensors Applications Symposium","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126242016","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-16DOI: 10.1109/SAS.2009.4801798
Jamal Madni, Juo-Yu Lee
Biometric data processing resting on sensor systems has been a growing field with a plethora of applications. However, to the best of our knowledge, a system of such kind based on random finite set theory and body sensor networks has not been developed and analyzed. For instance, there are many moments in basketball that when the game is either on the line or in a crucial situation, teams often succumb to pressure and this manifests itself in poor shot attempts, turnovers, and shot-clock violations. The severe movement of players introduces a fast changing channel that affects data transmission of body sensors. Data may be lost at the receiving side due to degenerated channel conditions. In this paper, we describe a system used to monitor stress and exhaustion of game (e.g. basketball) players in realtime during a game. Stress and exhaustion will be quantified and encapsulated within an equation that symbolizes player “readiness” and will include factors such as player talent, and player importance. Furthermore, a formal Bayesian toolkit, namely Random Finite Set Theory, is considered and enabled to process biometric data. Here ‘data’ is a generalized concept that encompasses ‘empty state’ indicating failed data reception. Using this system, a coach can decide to alter his strategy, personnel and the game flow based on the individual readiness of his players. A coach will receive these metrics from the sensors on the players' themselves wirelessly transmitted.
{"title":"Processing biometric data of game players using body sensors","authors":"Jamal Madni, Juo-Yu Lee","doi":"10.1109/SAS.2009.4801798","DOIUrl":"https://doi.org/10.1109/SAS.2009.4801798","url":null,"abstract":"Biometric data processing resting on sensor systems has been a growing field with a plethora of applications. However, to the best of our knowledge, a system of such kind based on random finite set theory and body sensor networks has not been developed and analyzed. For instance, there are many moments in basketball that when the game is either on the line or in a crucial situation, teams often succumb to pressure and this manifests itself in poor shot attempts, turnovers, and shot-clock violations. The severe movement of players introduces a fast changing channel that affects data transmission of body sensors. Data may be lost at the receiving side due to degenerated channel conditions. In this paper, we describe a system used to monitor stress and exhaustion of game (e.g. basketball) players in realtime during a game. Stress and exhaustion will be quantified and encapsulated within an equation that symbolizes player “readiness” and will include factors such as player talent, and player importance. Furthermore, a formal Bayesian toolkit, namely Random Finite Set Theory, is considered and enabled to process biometric data. Here ‘data’ is a generalized concept that encompasses ‘empty state’ indicating failed data reception. Using this system, a coach can decide to alter his strategy, personnel and the game flow based on the individual readiness of his players. A coach will receive these metrics from the sensors on the players' themselves wirelessly transmitted.","PeriodicalId":410885,"journal":{"name":"2009 IEEE Sensors Applications Symposium","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128507508","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-16DOI: 10.1109/SAS.2009.4801767
B. Carter, R. Ragade
Coverage is an important optimization objective in sensor deployment problems. This paper addresses the issue of covering a set of target points in an area with a finite set of sensors. A probabilistic model is proposed which takes in account the detection probabilities of the sensing devices which may decay with distance, environmental conditions, and hardware configuration. The objective is to deploy sensors so that the distribution of the sensors meets the probability of detection requirements while minimizing costs. The expected points to cover and the deployment points are assumed to be stationary and known a priori. A probabilistic coverage matrix is defined and the deployment is optimized using a genetic algorithm. Our experimental results verify that the proposed probabilistic sensor deployment model finds more efficient solutions requiring fewer sensors compared to other deployment schemes.
{"title":"A probabilistic model for the deployment of sensors","authors":"B. Carter, R. Ragade","doi":"10.1109/SAS.2009.4801767","DOIUrl":"https://doi.org/10.1109/SAS.2009.4801767","url":null,"abstract":"Coverage is an important optimization objective in sensor deployment problems. This paper addresses the issue of covering a set of target points in an area with a finite set of sensors. A probabilistic model is proposed which takes in account the detection probabilities of the sensing devices which may decay with distance, environmental conditions, and hardware configuration. The objective is to deploy sensors so that the distribution of the sensors meets the probability of detection requirements while minimizing costs. The expected points to cover and the deployment points are assumed to be stationary and known a priori. A probabilistic coverage matrix is defined and the deployment is optimized using a genetic algorithm. Our experimental results verify that the proposed probabilistic sensor deployment model finds more efficient solutions requiring fewer sensors compared to other deployment schemes.","PeriodicalId":410885,"journal":{"name":"2009 IEEE Sensors Applications Symposium","volume":"126 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127072856","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-16DOI: 10.1109/SAS.2009.4801776
Yufei Liu, J. Zeng, Changhai Wang
Laser assisted polymer bonding is a novel technique for MEMS packaging, which can offer a short bonding time and reduce the thermally induced stress during the packaging process. However, due to the localised nature of the temperature rise, it is difficult to monitor the temperature change precisely during the bonding process using the conventional methods. In this paper, the development of thin film miniature temperature sensor arrays is presented for in-situ temperature monitoring in the laser assisted polymer bonding process. A high-power fibre-coupled diode laser at the wavelength of 970nm was used as the heat source for benzocyclobutene (BCB) bonding/curing in conjunction with novel beam forming optics that allows selective illumination of the substrates to be joined. Instead of using infrared detectors and temperature-sensitive paints in our previous work, thin film microsensor arrays were designed and fabricated on both glass and silicon substrates for obtaining the precise in-situ temperature change and the thermal distribution during the laser bonding process. The minimum track width of a meander sensor in the array was 3µm resulting in a foot print of only 250µm×240µm for the smallest sensor. The key parameters of the laser bonding process, such as laser beam profile, power and the resultant thermal responses, were investigated as well as the effect of the thermal arrangement underneath the substrate assembly.
{"title":"Temperature monitoring in laser assisted polymer bonding for MEMS packaging using a thin film sensor array","authors":"Yufei Liu, J. Zeng, Changhai Wang","doi":"10.1109/SAS.2009.4801776","DOIUrl":"https://doi.org/10.1109/SAS.2009.4801776","url":null,"abstract":"Laser assisted polymer bonding is a novel technique for MEMS packaging, which can offer a short bonding time and reduce the thermally induced stress during the packaging process. However, due to the localised nature of the temperature rise, it is difficult to monitor the temperature change precisely during the bonding process using the conventional methods. In this paper, the development of thin film miniature temperature sensor arrays is presented for in-situ temperature monitoring in the laser assisted polymer bonding process. A high-power fibre-coupled diode laser at the wavelength of 970nm was used as the heat source for benzocyclobutene (BCB) bonding/curing in conjunction with novel beam forming optics that allows selective illumination of the substrates to be joined. Instead of using infrared detectors and temperature-sensitive paints in our previous work, thin film microsensor arrays were designed and fabricated on both glass and silicon substrates for obtaining the precise in-situ temperature change and the thermal distribution during the laser bonding process. The minimum track width of a meander sensor in the array was 3µm resulting in a foot print of only 250µm×240µm for the smallest sensor. The key parameters of the laser bonding process, such as laser beam profile, power and the resultant thermal responses, were investigated as well as the effect of the thermal arrangement underneath the substrate assembly.","PeriodicalId":410885,"journal":{"name":"2009 IEEE Sensors Applications Symposium","volume":"118 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125103439","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-16DOI: 10.1109/SAS.2009.4801812
C. Ibala, K. Arshak
The aim of this paper is to present the methodology and tools used to debug a system comprising a HDL, microprocessor and Rocket I/O in a Partial Reconfiguration flow for sensor reading. The complexities of this system make it impossible to use a simple simulation tool such as Modelsim to assess the top level design functionality. The Bus Macros (BM) that interface between the static region and the reconfigurable region of the top level design make it impossible, as there is no simulation model for them. In general, 30% of the development time is taken by design and 70% by the test of the design functionalities. But many factors tend to increase testing time. The following are some of them: important signals are embedded deep in logic, design parts run at different speeds, so the computer screen cannot show all the data in different clock domains at the same time; the simulation time is too long; the design works in simulation but it does not work in hardware, and so on. This paper will present a practical case and the strategy used to debug it. The following software are used for these tests: ISE (Integrated Software Environment) 9.2 Service Pack 4 with the Partial Reconfiguration layout PR7, XPS (Xilinx Platform Studio) 9.2 Service Pack 2, PlanAhead 10.1.6, Chipscope 9.2 Service Pack 4 and two Virtex-5 boards.
本文的目的是介绍用于调试由HDL，微处理器和Rocket I/O组成的系统的方法和工具，用于传感器读取的部分重构流程。该系统的复杂性使得不可能使用简单的仿真工具(如Modelsim)来评估顶层设计功能。在顶层设计的静态区域和可重构区域之间的接口总线宏(BM)使其不可能实现，因为没有针对它们的仿真模型。一般来说，30%的开发时间用于设计，70%用于测试设计功能。但许多因素往往会增加测试时间。主要有:重要信号嵌入逻辑深处，设计部件运行速度不同，计算机屏幕无法同时显示不同时钟域的所有数据;仿真时间过长;该设计可用于仿真，但不能用于硬件，等等。本文将给出一个实际案例和调试策略。这些测试使用以下软件:ISE(集成软件环境)9.2 Service Pack 4(带有部分重新配置布局PR7)、XPS (Xilinx Platform Studio) 9.2 Service Pack 2、PlanAhead 10.1.6、Chipscope 9.2 Service Pack 4和两块Virtex-5板。
{"title":"Testing a Partial Reconfiguration based design for sensor reading","authors":"C. Ibala, K. Arshak","doi":"10.1109/SAS.2009.4801812","DOIUrl":"https://doi.org/10.1109/SAS.2009.4801812","url":null,"abstract":"The aim of this paper is to present the methodology and tools used to debug a system comprising a HDL, microprocessor and Rocket I/O in a Partial Reconfiguration flow for sensor reading. The complexities of this system make it impossible to use a simple simulation tool such as Modelsim to assess the top level design functionality. The Bus Macros (BM) that interface between the static region and the reconfigurable region of the top level design make it impossible, as there is no simulation model for them. In general, 30% of the development time is taken by design and 70% by the test of the design functionalities. But many factors tend to increase testing time. The following are some of them: important signals are embedded deep in logic, design parts run at different speeds, so the computer screen cannot show all the data in different clock domains at the same time; the simulation time is too long; the design works in simulation but it does not work in hardware, and so on. This paper will present a practical case and the strategy used to debug it. The following software are used for these tests: ISE (Integrated Software Environment) 9.2 Service Pack 4 with the Partial Reconfiguration layout PR7, XPS (Xilinx Platform Studio) 9.2 Service Pack 2, PlanAhead 10.1.6, Chipscope 9.2 Service Pack 4 and two Virtex-5 boards.","PeriodicalId":410885,"journal":{"name":"2009 IEEE Sensors Applications Symposium","volume":"84 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130291263","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-16DOI: 10.1109/SAS.2009.4801817
S. Yurish
Application of Universal Frequency-to-Digital Converter (UFDC-1) for design of low-cost, smart temperature sensors systems based on quasi-digital sensors is described in the paper. Designed sensors systems have self-adaptation and self-identification abilities. Experimental results have confirmed high metrological performances of designed sensors systems.
{"title":"Low-cost, smart temperature sensors systems based on Universal Frequency-to-Digital Converter","authors":"S. Yurish","doi":"10.1109/SAS.2009.4801817","DOIUrl":"https://doi.org/10.1109/SAS.2009.4801817","url":null,"abstract":"Application of Universal Frequency-to-Digital Converter (UFDC-1) for design of low-cost, smart temperature sensors systems based on quasi-digital sensors is described in the paper. Designed sensors systems have self-adaptation and self-identification abilities. Experimental results have confirmed high metrological performances of designed sensors systems.","PeriodicalId":410885,"journal":{"name":"2009 IEEE Sensors Applications Symposium","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127433556","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-16DOI: 10.1109/SAS.2009.4801784
V. Jha, Y. Mehta, Michael Byrne, F. Manning, Edward J. Saridaki
The rehabilitation process usually undertaken by the Rhode Island Department of Transportation (RIDOT) for preservation of cracked pavement involves milling and replacing 2.5-5 cm of the surface layer. The problem associated with the above process was that the pavement in Rhode Island still failed prematurely and thus caused RIDOT lose millions of dollars. The purpose of this study was to determine ways that the cracking can be controlled in the surface layer and provide the solution for this problem in the form of catalog from which various stiffness and thickness can be selected for the surface layer based on different field condition. The criteria that differentiated an uncracked section from cracked sections were found to be a limiting value of tensile critical strain beneath the surface layer. In most of the overlay sections it was observed that the thickness provided by the RIDOT was too thin and thus cracking was observed at those stations.
{"title":"Evaluation of pavement cracking performance in the state of rhode island using falling weight deflectometer data","authors":"V. Jha, Y. Mehta, Michael Byrne, F. Manning, Edward J. Saridaki","doi":"10.1109/SAS.2009.4801784","DOIUrl":"https://doi.org/10.1109/SAS.2009.4801784","url":null,"abstract":"The rehabilitation process usually undertaken by the Rhode Island Department of Transportation (RIDOT) for preservation of cracked pavement involves milling and replacing 2.5-5 cm of the surface layer. The problem associated with the above process was that the pavement in Rhode Island still failed prematurely and thus caused RIDOT lose millions of dollars. The purpose of this study was to determine ways that the cracking can be controlled in the surface layer and provide the solution for this problem in the form of catalog from which various stiffness and thickness can be selected for the surface layer based on different field condition. The criteria that differentiated an uncracked section from cracked sections were found to be a limiting value of tensile critical strain beneath the surface layer. In most of the overlay sections it was observed that the thickness provided by the RIDOT was too thin and thus cracking was observed at those stations.","PeriodicalId":410885,"journal":{"name":"2009 IEEE Sensors Applications Symposium","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130222367","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-16DOI: 10.1109/SAS.2009.4801795
Chuantong Wang, S. Woodard, B. Taylor
All sensors or sensor systems previously used for tire measurements have one common feature - the sensors are part of electrically closed circuits and electrical connections are used to form the closed circuits. In this paper, we present a new tire safety monitoring system using a recently developed method for designing, powering and interrogating sensors developed at NASA. In lieu of sensors being a collection of components assembled using electrical connections, the sensors are patterns of electrically conductive material that can store electric fields and magnetic fields without electrical connections. They are powered using oscillating magnetic fields and respond with their own magnetic fields whose signatures give information about the measured parameters. Because no electrical connections are used to power, communicate with the sensor or to make the sensor, there is no point on the sensor that if damaged, renders the sensor non-functional. Many damage events simply shift the sensor's frequency range. Survivability of the sensor allows it to continue measurement while damaged. The physical quantities to be measured are correlated to the sensor's magnetic field response amplitude, frequency and bandwidth. The proposed method measures wheel speed, rotation angle, direction, acceleration, temperature, damage and wear of tread element by using two or more sensors. In this study, two sensors are used. One of the sensors is coated with temperature sensitive dielectric material. The two sensors working cooperatively are able to measure the seven parameters. The results and multifunctional measurement strategies are presented.
{"title":"Sensing of multiple unrelated tire parameters using electrically open circuit sensors having no electrical connections","authors":"Chuantong Wang, S. Woodard, B. Taylor","doi":"10.1109/SAS.2009.4801795","DOIUrl":"https://doi.org/10.1109/SAS.2009.4801795","url":null,"abstract":"All sensors or sensor systems previously used for tire measurements have one common feature - the sensors are part of electrically closed circuits and electrical connections are used to form the closed circuits. In this paper, we present a new tire safety monitoring system using a recently developed method for designing, powering and interrogating sensors developed at NASA. In lieu of sensors being a collection of components assembled using electrical connections, the sensors are patterns of electrically conductive material that can store electric fields and magnetic fields without electrical connections. They are powered using oscillating magnetic fields and respond with their own magnetic fields whose signatures give information about the measured parameters. Because no electrical connections are used to power, communicate with the sensor or to make the sensor, there is no point on the sensor that if damaged, renders the sensor non-functional. Many damage events simply shift the sensor's frequency range. Survivability of the sensor allows it to continue measurement while damaged. The physical quantities to be measured are correlated to the sensor's magnetic field response amplitude, frequency and bandwidth. The proposed method measures wheel speed, rotation angle, direction, acceleration, temperature, damage and wear of tread element by using two or more sensors. In this study, two sensors are used. One of the sensors is coated with temperature sensitive dielectric material. The two sensors working cooperatively are able to measure the seven parameters. The results and multifunctional measurement strategies are presented.","PeriodicalId":410885,"journal":{"name":"2009 IEEE Sensors Applications Symposium","volume":"85 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123153895","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-16DOI: 10.1109/SAS.2009.4801778
Szu-Chieh Wang, Chao‐Sung Lai, C. Lue, Chia‐Ming Yang
In this study, a novel approach for realization of an inorganic ISFET/REFET system was presented. Single Si3N4 layer was used as the sensing membrane of EIS structure directly on n and p type substrate. The differential pH sensitivity of them is 25.1 mV/pH, and the linearity is higher than 99%. The drift effect for the single Si3N4 EIS structures could be minimized to around 1 mV/h by this differential arrangement. Besides, light and hysteresis effect for both conditions were investigated.
{"title":"Single Si3N4 layer on dual substrate for pH sensing micro sensor","authors":"Szu-Chieh Wang, Chao‐Sung Lai, C. Lue, Chia‐Ming Yang","doi":"10.1109/SAS.2009.4801778","DOIUrl":"https://doi.org/10.1109/SAS.2009.4801778","url":null,"abstract":"In this study, a novel approach for realization of an inorganic ISFET/REFET system was presented. Single Si3N4 layer was used as the sensing membrane of EIS structure directly on n and p type substrate. The differential pH sensitivity of them is 25.1 mV/pH, and the linearity is higher than 99%. The drift effect for the single Si3N4 EIS structures could be minimized to around 1 mV/h by this differential arrangement. Besides, light and hysteresis effect for both conditions were investigated.","PeriodicalId":410885,"journal":{"name":"2009 IEEE Sensors Applications Symposium","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114685072","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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