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Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.最新文献

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Impact of microstructure on the electrical properties of zirconium titanate thin films in MOS configuration MOS结构下微结构对钛酸锆薄膜电性能的影响
P. Victor, J. Nagaraju, S. .. Krupanidhi
Zirconium titanate thin films were deposited on p - type Si substrate by pulsed excimer laser ablation technique. The thin films were highly oriented along (020) and polycrystalline depending on the deposition parameters. A correlation of the microstructure with the electrical properties has been studied in detail. C - V, G V and DC leakage current studies were done on both types of the films. The higher dielectric constant and higher leakage current were observed on the highly oriented thin films than the polycrystalline thin films. The C - V and G - V measurements were carried at higher frequency ranging from 1 kHz to 100 kHz in elevated temperatures and the activation energy calculated from arrhenius plot were approximately half the silicon band gap. This suggests that generation recombination mechanism is taking place in the depletion region of Si substrate through bulk traps. The interface states were calculated using high frequency method and it were higher for the polycrystalline than highly oriented thin films. The electronic conduction mechanism is analysed on both the types of films in detail, applying different kinds of mechanism like Poole-Frenkel, Schottky and space charge limited conduction.
采用脉冲准分子激光烧蚀技术在p型Si衬底上制备了钛酸锆薄膜。根据沉积参数的不同,薄膜具有沿(020)取向和多晶取向。详细研究了微观结构与电性能的关系。对两种薄膜进行了C - V、G - V和直流泄漏电流的研究。高取向薄膜的介电常数和漏电流均高于多晶薄膜。C - V和G - V在高温下在1 ~ 100 kHz的频率范围内进行测量,由arrhenius图计算的活化能约为硅带隙的一半。这表明在硅衬底的耗尽区通过体阱发生了生成复合机制。用高频法计算界面态,发现多晶的界面态比高取向薄膜的界面态高。采用Poole-Frenkel、Schottky和空间电荷限制传导等不同的传导机制,对两种薄膜的电子传导机制进行了详细的分析。
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引用次数: 1
The linearisation of an electrostrictive device for MEMS applications 用于MEMS应用的电伸缩器件的线性化
D. Jenkins, E. Fribourg-Blanc, É. Cattan, D. Remiens
A control system which utilises analogue electronics has previously been designed to successfully transform an electrostatic actuator, with inherently nonlinear behaviour, into a linear actuator. It is intended that this control system can be applied to electrostrictive actuators, which respond in the same way to the square of the applied electric field. This controller also enables the use of an automated dc bias field to extend the actuation range, whilst still maintaining linear behaviour. This control system is applied to electrostrictive thin films (PMN) deposited on beams to linearly drive them for vibration control and micropositioning of probes, such as in scanning probe microscopy.
利用模拟电子学的控制系统先前已被设计用于成功地将具有固有非线性行为的静电致动器转换为线性致动器。该控制系统可以应用于电致伸缩执行器,其以相同的方式响应施加电场的平方。该控制器还可以使用自动直流偏置场来扩展驱动范围,同时仍然保持线性行为。该控制系统应用于沉积在光束上的电致伸缩薄膜(PMN),以线性驱动它们用于振动控制和探针的微定位,例如扫描探针显微镜。
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引用次数: 1
The influence of piezoceramic actuator on the stator vibrations in traveling wave ultrasonic motor 压电陶瓷作动器对行波超声电机定子振动的影响
Xiao-ying Zhao, Haiyan Chen, D. Jin, Z. Meng
Based on the 3D finite element modeling of the stator in disc-type traveling wave ultrasonic motor, the influence of several kinds of piezoelectric ceramics bonded underneath the surface of the stator on exciting ultrasonic vibrations was investigated. Taken electromechanical coupling effect into account, numerical simulations were carried out by using the ANSYS finite element software package due to the boundary conditions we proposed. Vibration modes, resonance frequencies and voltage-induced displacements were obtained. The calculated results were in good agreement with the experimental data we measured.
在对盘式行波超声电机定子进行三维有限元建模的基础上,研究了定子表面下粘结的几种压电陶瓷对激发超声振动的影响。由于所提出的边界条件,考虑了机电耦合效应,利用ANSYS有限元软件包进行了数值模拟。得到了振动模态、共振频率和电压感应位移。计算结果与实测数据吻合较好。
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引用次数: 2
A study on the T5 fluorescent lamp ballast used contour vibration mode piezoelectric transformer using a one-chip microcontroller 采用单片机对T5型日光灯的轮廓振动型压电变压器镇流器进行了研究
L. Hwang, J. Yoo, J. R. Kim, E. S. Jang, C. S. Lee, M. T. Cho, J. S. Kim
The traditional magnetic ballasts operated at 50-60Hz have been suffered from noticeable flicker, high loss, large crest factor and heavy weight. In this study, in order to solve the problems, new type of electronic ballast which composed of rectifier, active power factor corrector, series-resonant half bridge inverter, feed back circuit for maintaining constantly current to lamp, protection circuit out of order ballast circuit or piezoelectric transformer and end of lamps life, dimming control, piezoelectric transformer for driving T5 fluorescent lamp were manufactured and using a one chip microcontroller. These ballast circuits could replace magnetic transformer and resonant capacitor with piezoelectric transformers. The proposed electronic ballast operated at high frequency (about 75kHz) showed input power factor of more than 0.995, total harmonic distortion of less than 12% and lamp current crest factor of less than 1.5, respectively. And also, output power and efficiency shown 28W and 85%, respectively. Accordingly, it is considered that the ballast using piezoelectric transformer can replace the typical electronic ballast.
传统的磁镇流器工作频率为50 ~ 60hz,存在闪烁明显、损耗高、波峰系数大、重量大等问题。为了解决这一问题,本研究采用单片微控制器,研制了由整流器、有源功率因数校正器、串联谐振半桥逆变器、维持灯具恒流反馈电路、镇流器失序或压电变压器失效保护电路、调光控制、驱动T5荧光灯的压电变压器等组成的新型电子镇流器。这种镇流器电路可以用压电变压器代替磁变压器和谐振电容器。所设计的高频(约75kHz)电子镇流器的输入功率因数大于0.995,总谐波失真小于12%,灯电流波峰因数小于1.5。输出功率为28W,效率为85%。因此,认为采用压电变压器的镇流器可以代替典型的电子镇流器。
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引用次数: 5
PLZT thin film optical waveguide devices PLZT薄膜光波导器件
K. Nashimoto
(Pb,La)(Zr,Ti)O/sub 3/ (PLZT) bilayer waveguides consisting of an optical waveguide layer and an optical buffer layer were grown on Nb-doped semiconductive SrTiO/sub 3/ (NST) substrates by solid-phase epitaxy. Very low propagation losses less than 0.1 dB/cm were achieved at 1.55 /spl mu/m-wavelength in the PLZT slab waveguides on NST substrates. Electro-optic deflection devices were fabricated by preparing indium tin oxide transparent prism electrodes on the surface of the waveguides. Efficient deflection of laser beam coupled in the waveguides was demonstrated by applying voltage between the prism, electrodes and the substrates. Effective electro-optic coefficients as large as 45 pm/V and polarization insensitive properties were observed. A wet-etching or dry-etching process was utilized for fabricating devices with 3 to 6 /spl mu/m-wide channels in the waveguides. Fabricated optical switches showed low-loss, low-voltage drive, and fast response characteristics.
采用固相外延技术在掺铌半导体SrTiO/sub 3/ (NST)衬底上生长了由光波导层和光缓冲层组成的(Pb,La)(Zr,Ti)O/sub 3/ (PLZT)双层波导。在NST衬底的PLZT平板波导中,在1.55 /spl mu/m波长下实现了小于0.1 dB/cm的极低传播损耗。通过在波导表面制备氧化铟锡透明棱镜电极,制备了光电偏转器件。通过在棱镜、电极和衬底之间施加电压,证明了耦合在波导中的激光束的有效偏转。有效电光系数可达45 pm/V,且具有极化不敏感特性。采用湿蚀刻或干蚀刻工艺制备波导中3 ~ 6 μ mu/m宽通道的器件。所制备的光开关具有低损耗、低电压驱动、快速响应等特点。
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引用次数: 5
BioFerroelectricity and BioMedicine: new results and approaches 生物电学与生物医学:新成果与新方法
V. Bystrov, N. Bystrova, G. Ovtchinnikova, Y. Pirogov, Y. Dekhtyar
The new experimental results and theoretical approaches in the bioferroelectricity field are analyzed and discussed. The earlier predicted Ferroelectric and Liquid-Crystal-Like Ferroelectric properties of a biological membrane (V. Bystrov, Ferr.Lett., 1992, v.13(6), p.127; 1997, v.27., p.87; 2000, v.27(5-6), p.147; R.Leuchtag&v.Bystrov, Ferroelectrics, 1999, v.220(3-4), p. 157), which was studied in the ion channels, now was experimentally observed in bacteriorhodopsin containing purple membrane films (I.Ermolina et al, J.Phys.Chem., 2001, v.105 (14), p. 2673). Recently bioferroelectric properties of biological objects had developed to the biomedical applications. One of this specific features is the nonlinear response on the weak actions (irradiation, external fields, various kind of nutrition etc.) in the vicinity of the critical for human organism (bifurcation) point, characterized biological object on various levels as on molecular, cell as on the whole organism level.
分析和讨论了生物热发电领域新的实验结果和理论方法。先前预测的生物膜的铁电特性和液晶样铁电特性(V. Bystrov, Ferr.Lett)。, 1992年,第13(6)节,第127页;1997年,v.27。p.87;2000,第27节(5-6),第147页;R.Leuchtag&v。Bystrov, Ferroelectrics, 1999, v.220(3-4), p. 157),在离子通道中进行了研究,现在在含有紫色膜膜的细菌视紫红质中进行了实验观察(I.Ermolina et al ., J.Phys.Chem)。, 2001,第105页(14),第2673页。近年来,生物物体的生物热电特性已发展到生物医学领域。这种特殊的特征之一是对人体有机体临界(分岔)点附近的弱作用(辐照、外场、各种营养等)的非线性响应,在分子、细胞以至整个生物体的各个水平上表征生物对象。
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引用次数: 0
"Chevron"-type piezoelectric inkjet actuator “雪佛龙”型压电喷墨执行器
J. Brunahl, A. Grishin
This paper presents two kinds of Xaar-type shared wall actuators for inkjet printing: monolithic and chevron-type. A brief review of design and principle of operation of such devices is given. Analysis of the acoustic resonances of the lead titanate zirconate (PZT) ceramic actuators used as an active element in the printhead is presented. Furthermore, functional performance of the actuators was investigated by means of stroboscopic analysis.
本文介绍了两种用于喷墨打印的xaar型共享壁驱动器:整体式和线形。简要介绍了这类装置的设计和工作原理。对钛酸锆酸铅(PZT)陶瓷促动器作为打印头的有源元件进行了声共振分析。此外,采用频闪分析的方法研究了执行器的功能性能。
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引用次数: 2
8 GHz microwave filters based on bulk acoustic waves in piezoelectric AlN thin films 基于压电AlN薄膜体声波的8ghz微波滤波器
R. Lanz, P. Muralt
Bulk acoustic wave (BAW) resonators and filters have been fabricated in the frequency range between 7 and 8 GHz. Resonators with quality factors of 550, and coupling factors k/sup 2/ of 5.5 % have been achieved. The obtained resonator characteristics theoretically yield filters of 3.5 % 3dB bandwidths with flat channel characteristics, and insertion losses of -6 dB. The tradeoffs related to the use of aluminum or platinum bottom electrodes is investigated theoretically. While aluminum is expected to yield filters with lower insertion loss, Pt is expected to yield larger bandwidths.
体声波(BAW)谐振器和滤波器的频率范围在7至8 GHz之间。实现了质量因数为550,耦合系数k/sup为5.5%的谐振腔。所获得的谐振器特性理论上产生3.5% 3dB带宽的滤波器,具有平坦的通道特性,插入损耗为-6 dB。从理论上研究了与使用铝或铂底电极有关的权衡。虽然铝有望产生具有更低插入损耗的滤波器,但Pt有望产生更大的带宽。
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引用次数: 3
Dielectric properties of CaCu/sub 3/Ti/sub 4/O/sub 12/ thin films CaCu/sub 3/Ti/sub 4/O/sub 12/薄膜的介电性能
Kyuho Cho, N. Wu, A. Ignatiev, Jianren Li
High dielectric CaCu/sub 3/Ti/sub 4/O/sub 12/ (CCTO) thin films were successfully grown on LaAlO/sub 3/(100) (LAO) crystalline substrates and on SrRuO/sub 3/(SRO) conductive films on LAO substrates by the pulsed laser deposition (PLD) method. Microstructure and dielectric properties of (001) oriented (CCTO) epitaxial thin films were evaluated, and compared to those of CCTO polycrystalline bulk samples by x-ray diffraction, DC conductivity and dielectric measurements. The gigantic dielectric constant of greater than 20,000 in polycrystalline CCTO can be accounted for by the internal barrier layer capacitance (IBLC) model. However, this model fails to explain the large dielectric constant behavior for epitaxial CCTO/SRO/LAO thin films which also show high DC conductivity. XPS analysis indicated that oxygen vacancies could be a possible factor responsible for the low resistivity of thin film.
采用脉冲激光沉积(PLD)方法,成功地在LaAlO/sub 3/(100) (LAO)晶体基底上生长了高介电CaCu/sub 3/Ti/sub 4/O/sub 12/ (CCTO)薄膜,并在LaAlO/sub 3/(100) (LAO)基底上生长了SrRuO/sub 3/(SRO)导电薄膜。研究了(001)取向(CCTO)外延薄膜的微观结构和介电性能,并通过x射线衍射、直流电导率和介电测量与CCTO多晶体样品进行了比较。多晶CCTO中大于20,000的巨大介电常数可以用IBLC模型来解释。然而,该模型无法解释外延CCTO/SRO/LAO薄膜具有高直流导电性的大介电常数行为。XPS分析表明,氧空位可能是导致薄膜电阻率低的一个原因。
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引用次数: 1
Synthesis of platelet SrTiO/sub 3/ by epitaxial growth on Sr/sub 3/Ti/sub 2/O/sub 7/ core particles Sr/sub 3/Ti/sub 2/O/sub 7/核心颗粒外延生长制备血小板SrTiO/sub 3/
M. E. Ebrahimi, M. Allahverdi, A. Safari
A method for synthesis of platelet seeds by epitaxial growth of SrTiO/sub 3/ on Sr/sub 3/Ti/sub 2/O/sub 7/ core particles is reported. The aim of this study was to control the morphology, particle size, phase and chemical purity of SrTiO/sub 3/ seeds. Strontium titanate seeds will be used as templates in layered manufacturing to grow large lead magnesium niobate-lead titanate (PMN-PT) crystals within a polycrystalline matrix. Anisometric single crystal particles of Sr/sub 3/Ti/sub 2/O/sub 7/ were synthesized in molten KCl salt at 1200-1300/spl deg/C. Plate-like morphology with a high aspect ratio of 7-10 was obtained. The XRD and SEM revealed a well-developed single crystal structure with rectangular faces. The plate-like Sr/sub 3/Ti/sub 2/O/sub 7/ particles were then reacted with TiO/sub 2/ in a second molten salt synthesis to prepare SrTiO/sub 3/. Platelet <001> SrTiO/sub 3/ particles with rectangular faces having an edge length of 10-40 /spl mu/m and a thickness of 1-4 /spl mu/m were obtained. The effects of processing steps on the morphology, particles size, and composition of the platelets are presented. The high aspect ratio SrTiO/sub 3/ platelets are suitable template candidates to achieve textured PMN-PT ceramics.
报道了一种在Sr/sub 3/Ti/sub 2/O/sub 7/核粒子上外延生长SrTiO/sub 3/的方法。本研究的目的是控制SrTiO/ sub3 /种子的形态、粒度、物相和化学纯度。钛酸锶种子将用作层状制造的模板,在多晶基质中生长大型铌镁-钛酸铅(PMN-PT)晶体。在熔融KCl盐中,温度为1200 ~ 1300℃,合成了Sr/sub - 3/Ti/sub - 2/O/sub - 7/等不对称单晶颗粒。获得了高纵横比为7-10的片状形貌。XRD和SEM分析表明,该材料具有发育良好的矩形面单晶结构。然后在第二次熔盐合成中,将片状Sr/sub 3/Ti/sub 2/O/sub 7/颗粒与TiO/sub 2/反应,制备出SrTiO/sub 3/颗粒。获得了边缘长度为10-40 /spl mu/m、厚度为1-4 /spl mu/m的矩形表面的血小板SrTiO/ sub3 /颗粒。介绍了处理步骤对血小板的形态、颗粒大小和组成的影响。高宽高比SrTiO/sub - 3/血小板是实现有织构PMN-PT陶瓷的合适模板候选者。
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引用次数: 0
期刊
Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.
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