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Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.最新文献

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Rf-magnetron sputtered ferroelectric (Na,K)NbO/sub 3/ films 射频磁控溅射铁电(Na,K)NbO/ sub3 /薄膜
M. Blomqvist, J. Koh, S. Khartsev, A. Grishin
Sodium potassium niobate (Na,K)NbO/sub 3/ (NKN) thin films were grown by rf-magnetron sputtering from stoichiometric Na/sub 0.5/K/sub 0.5/NbO/sub 3/ target on LaAlO/sub 3/ (LAO) single crystals and polycrystalline Pt/sub 80/Ir/sub 20/ (PtIr) substrates. NKN films on polycrystalline PtIr substrates were found to be preferentially (00l) oriented while XRD measurements reveal epitaxial quality of NKN/LaAlO/sub 3/ film structures. The ferroelectric state in NKN/PtIr films at room temperature is indicated by polarization loops with polarization as high as 33.4 /spl mu/C/cm/sup 2/ at 700 kV/cm remnant polarization of 9.9 /spl mu/C/cm/sup 2/, and coercive field of 91 kV/cm. I-V characteristics of vertical Au/NKN/PtIr capacitive cells and planar Au/NKN/LAO interdigital capacitors (IDCs) showed very good insulating properties. For NKN IDC the leakage current density was in the order of 30 nA/cm/sup 2/ at 400 kV/cm. Rf dielectric spectroscopy demonstrates low loss, low frequency dispersion, and high voltage tunability both for vertical Au/NKN/PtIr and planar interdigital Au/NKN/LAO capacitors.
以化学计量Na/sub 0.5/K/sub 0.5/NbO/sub 3/靶为基体,在LaAlO/sub 3/ (LAO)单晶和多晶Pt/sub 80/Ir/sub 20/ (PtIr)衬底上采用射频磁控溅射法制备了铌酸钠(Na,K)NbO/sub 3/ (NKN)薄膜。在多晶PtIr衬底上发现NKN薄膜具有优先(00l)取向,而XRD测试表明NKN/LaAlO/sub - 3/薄膜结构具有外延质量。在室温下,NKN/PtIr薄膜的极化环极化率高达33.4 /spl mu/C/cm/sup 2/,残余极化率为9.9 /spl mu/C/cm/sup 2/,矫顽力场为91 kV/cm。垂直Au/NKN/PtIr电容电池和平面Au/NKN/LAO数字间电容(idc)的I-V特性显示出良好的绝缘性能。对于NKN IDC,在400 kV/cm时,泄漏电流密度约为30 nA/cm/sup 2/。对于垂直Au/NKN/PtIr和平面数字间Au/NKN/LAO电容器,Rf介电光谱显示出低损耗、低频色散和高电压可调性。
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引用次数: 2
Spectral analysis of the electromechanical response of an electroactive material by implementation of Fourier decomposition 利用傅里叶分解实现电活性材料机电响应的频谱分析
C. B. DiAntonio, F. Williams, S. Pilgrim, W. Schulze
Implementation of a discrete Fourier transform in conjunction with Devonshire phenomenology allows the electromechanical response of an electroactive material to be fully characterized. The main thrust of this examination is the incorporation of signal decomposition through Fourier analysis to quantify the electro-mechanical and aging properties. Fourier analysis is a well-used technique in the electrical engineering community; however, it has not been applied to materials. The application presented here allows a fresh look at some old phenomena. The spectral representation provides to the underlying physics of the response, i.e., odd harmonics only exist for acentric materials. The ability to create the harmonic spectrum also provides a new way to characterize the effects of aging by revealing subtle changes in the fundamental components that comprise the response. This study shows how Fourier analysis can be applied to a PMN-PT-BT composition to characterize and quantify its electromechanical properties.
离散傅里叶变换的实现与德文郡现象学相结合,允许电活性材料的机电响应得到充分表征。本研究的主要内容是通过傅立叶分析结合信号分解来量化机电和老化性能。傅里叶分析是一种在电气工程界广泛使用的技术;然而,它还没有应用到材料上。这里提供的应用程序允许对一些旧现象进行重新审视。谱表示提供了响应的基础物理,即奇谐波只存在于非中心材料。通过揭示构成反应的基本成分的细微变化,创造谐波谱的能力也提供了一种表征衰老影响的新方法。本研究展示了傅里叶分析如何应用于PMN-PT-BT组合物来表征和量化其机电性能。
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引用次数: 0
Surface acoustic wave bandpass filters properties of AlN thin films sputtered on LiNbO/sub 3/ substrates LiNbO/ sub3 /衬底溅射AlN薄膜的表面声波带通滤光性能
K. Kao, Chien-Chuan Cheng, Ying-Chung Chen, Chien-Hsing Chen
Surface acoustic wave (SAW) filter properties such as center frequency (F/sub c/) and 3dB bandwidth of aluminum nitride (AlN) thin films sputtered on z-cut LiNbO/sub 3/ substrates were investigated. Highly c-axis prefer-oriented AlN thin films deposited on z-cut LiNbO/sub 3/ substrates were obtained by reactive rf magnetron sputtering. The results of our experiments showed that F/sub c/ of SAW filter was increased significantly for the increase of h//spl lambda/, where h was the AlN film thickness and /spl lambda/ was the wavelength of SAW. Comparing the SAW propagate along with the z-cut LiNbO/sub 3/ single crystal, the AlN/LiNbO/sub 3/ based surface acoustic wave (SAW) devices could improve the velocity of SAW. The 3dB bandwidth of SAW filter was decreased by the increase of h//spl lambda/ meaning that frequency selection getting stricter.
研究了z-cut LiNbO/sub - 3/衬底溅射氮化铝(AlN)薄膜的表面声波(SAW)滤波性能,如中心频率(F/sub -c /)和3dB带宽。采用反应性射频磁控溅射技术,在z-cut LiNbO/ sub3 /衬底上制备了高c轴择优取向AlN薄膜。实验结果表明,随着h//spl λ / (h为AlN膜厚度,/spl λ /为SAW波长)的增大,声呐滤光片的F/sub c/显著增大。通过与z切割LiNbO/sub - 3/单晶的声表面波传播比较,发现AlN/LiNbO/sub - 3/基表面波器件可以提高声表面波的传播速度。声表面波滤波器的3dB带宽随着h//spl λ /的增大而减小,这意味着频率选择变得更加严格。
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引用次数: 0
Improved mixing rule on permittivity 改进介电常数混合规则
K. Wakino
Several equations of mixing rule on permittivity have been proposed, but none of these equations is not perfect, because of too many different configurations exist in actual cases. Serial model and parallel model are two extremes of mixing manner. For the random mixture of fine particles, which does not have a remarkable aspect ratio, customarily the logarithmic mixing rule has been applied. But, the logarithmic mixing rule does not estimate the correct apparent permittivity in low or high mixing rate. The author proposed new equation for the mixing rule that gives better agreement with measured value for whole range of mixing rate compared to the logarithmic rule. In this paper, a desirable refinement on the equation in previous paper is made to adapt to the structural image of actual compound and then the equation has been expanded to the complex permittivity to apply the equation on the dissipative materials cases.
提出了几种介电常数混合规律的方程,但由于实际情况中存在太多不同的构型,这些方程都不是完美的。串行模型和并行模型是混合方式的两个极端。对于长径比不显著的细颗粒的随机混合,通常采用对数混合规则。但是,在低混合率和高混合率情况下,对数混合规则不能正确估计视介电常数。本文提出了新的混合规律方程,与对数规律相比,在混合速率全范围内与实测值的一致性更好。本文对前文中的方程作了适当的细化,以适应实际化合物的结构图像,然后将方程展开为复介电常数,应用于耗散材料的情况。
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引用次数: 3
Temperature dependant domain structures of lithium niobate single crystals 铌酸锂单晶的温度依赖域结构
D. Xue, S. Wu, R. Jayavel, K. Terabe, S. Kurimura, K. Kitamura
The domain structure of lithium niobate single crystals is studied from the corresponding crystallographic characteristics at different temperatures (ranging from room temperature to the Curie temperature). The temperature dependent nature of the domain reversal and domain structures of such ferroelectric crystals have been quantitatively analyzed. Various constituent chemical bonds and oxygen octahedra (formed by these bonds) of ferroelectric lithium niobate crystals are utilized as the starting point of this work. At low temperatures, the domain structure is simplex and regular owing to the regular occupancy of constituent ions at the corresponding lattice sites (of the space group R3c). With temperature increasing, the domain structure of the ferroelectric lithium niobate crystal becomes complex, due to the complicated site occupancies of constituent ions. At high temperatures, the multi-domain is formed owing to the fact that vacant sites are energetically available for Li/sup +/ cations (i.e., the random location of Li/sup +/ cations in the crystallographic frame).
从不同温度(室温至居里温度)下铌酸锂单晶的晶体学特征出发,研究了铌酸锂单晶的畴结构。定量分析了这类铁电晶体的畴反转和畴结构的温度依赖性。利用铁电铌酸锂晶体的各种组成化学键和氧八面体(由这些键形成)作为本工作的起点。在低温下,由于组成离子有规律地占据相应的晶格位置(R3c空间群),结构是简单而规则的。随着温度的升高,铁电铌酸锂晶体的畴结构变得复杂,这是由于组成离子的位置占位复杂所致。在高温下,由于Li/sup +/阳离子在能量上可获得空位(即Li/sup +/阳离子在晶体框架中的随机位置),形成了多畴。
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引用次数: 0
The effect of annealing temperature on the structure and dielectric properties of (Ba/sub 0.6/Sr/sub 0.4/)TiO/sub 3/ thin films 退火温度对(Ba/sub 0.6/Sr/sub 0.4/)TiO/sub 3/薄膜结构和介电性能的影响
Wenbiao Wu, Dong-wen Peng, Xiaofeng Liang, Z. Meng
Ba/sub 0.6/Sr/sub 0.4/TiO/sub 3/ thin films were prepared on LaAlO/sub 3/ substrates by sol-gel method. The effects of annealing temperature on the structure and dielectric properties were studied. The microstructure was examined by XRD, SEM and AFM. It was observed that as the annealing temperature increased, films were crystallized in preferential (001) orientation. When annealed at 1100/spl deg/C, the films reveal agglomeration structure, and surface roughness increase. By the measurement, we found that the dielectric properties strongly depend upon annealing temperature. The higher the annealing temperature, the lower dissipation factor and the larger tunability will be. At the same thickness, the tunability of the films annealed at 1100/spl deg/C enhanced to 46.9% (DC bias electric field of 80KV/cm) and the dissipation factor is 0.008 at 1 MHz.
采用溶胶-凝胶法在LaAlO/sub 3/基底上制备了Ba/sub 0.6/Sr/sub 0.4/TiO/sub 3/薄膜。研究了退火温度对结构和介电性能的影响。采用XRD、SEM和AFM对其微观结构进行了表征。观察到,随着退火温度的升高,薄膜以(001)优先取向结晶。在1100℃退火时,薄膜呈现团聚结构,表面粗糙度增大。通过测量,我们发现介电性能强烈依赖于退火温度。退火温度越高,耗散系数越低,可调性越大。在相同厚度下,1100/spl度/C退火后,薄膜的可调性提高到46.9%(直流偏置电场为80KV/cm), 1 MHz时的耗散系数为0.008。
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引用次数: 0
La-doped PbZrTiO/sub 3/(PLZT) thin film optical detectors (TOD) for retinal implantation-a "bionic" eye 用于视网膜植入的la掺杂PbZrTiO/sub 3/(PLZT)薄膜光学探测器(TOD) -仿生眼
A. Zomorrodian, N. Wu, S. Wilczak, C. Colbert, A. Ignatiev, C. Garcia
A new ceramic optical microdetector has been developed for retinal implant as a direct replacement for damaged retinal photo-detectors in patients with dystrophies such as Retinitis Pigmentosa (RP) and Age-related Macular degeneration (AMD). The thin film optical detector (TOD) is a heterostructure device composed of an atomically ordered La-doped PbZrTiO/sub 3/(PLZT) layer epitaxially grown on an atomically ordered Pt thin film layer. The TOD has an optical response, which in the visible region has a peak at around 550 nm with a sensitivity that overlaps the eye response from 400 nm to 650 nm. The device responsivity in the visible range is at a value of /spl sim/ 1000 V/W. Individual detectors are fabricated by photolithography and etch processing as is common in the microelectronics industry. Detectors 40 /spl mu/m in diameter have been processed and have been integrated with a newly developed polymer carrier layer technique for ease of handling and implantation of microdetector arrays into the eye.
一种新型陶瓷光学微探测器用于视网膜植入,可直接替代视网膜色素性视网膜炎(RP)和老年性黄斑变性(AMD)等营养不良患者受损的视网膜光探测器。薄膜光学探测器(TOD)是在原子有序Pt薄膜层外延生长的原子有序la掺杂PbZrTiO/ sub3 /(PLZT)层构成的异质结构器件。TOD具有光学响应,在可见光区域,其峰值约为550纳米,其灵敏度与眼睛响应重叠,从400纳米到650纳米。器件在可见光范围内的响应度为/spl sim/ 1000v /W。单个探测器是由光刻和蚀刻加工制造的,这在微电子工业中是常见的。直径为40 /spl mu/m的探测器已经过加工,并与新开发的聚合物载流子层技术相结合,以便于操作和将微探测器阵列植入眼睛。
{"title":"La-doped PbZrTiO/sub 3/(PLZT) thin film optical detectors (TOD) for retinal implantation-a \"bionic\" eye","authors":"A. Zomorrodian, N. Wu, S. Wilczak, C. Colbert, A. Ignatiev, C. Garcia","doi":"10.1109/ISAF.2002.1195887","DOIUrl":"https://doi.org/10.1109/ISAF.2002.1195887","url":null,"abstract":"A new ceramic optical microdetector has been developed for retinal implant as a direct replacement for damaged retinal photo-detectors in patients with dystrophies such as Retinitis Pigmentosa (RP) and Age-related Macular degeneration (AMD). The thin film optical detector (TOD) is a heterostructure device composed of an atomically ordered La-doped PbZrTiO/sub 3/(PLZT) layer epitaxially grown on an atomically ordered Pt thin film layer. The TOD has an optical response, which in the visible region has a peak at around 550 nm with a sensitivity that overlaps the eye response from 400 nm to 650 nm. The device responsivity in the visible range is at a value of /spl sim/ 1000 V/W. Individual detectors are fabricated by photolithography and etch processing as is common in the microelectronics industry. Detectors 40 /spl mu/m in diameter have been processed and have been integrated with a newly developed polymer carrier layer technique for ease of handling and implantation of microdetector arrays into the eye.","PeriodicalId":415725,"journal":{"name":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","volume":"133 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123287424","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Single-crystal Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.93/Ti/sub 0.07/]O/sub 3/ (PZNT 93/7) for highly reliable ultrasonic transducers 用于高可靠性超声波换能器的单晶Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.93/Ti/sub 0.07/]O/sub 3/ (PZNT 93/7)
K. Harada, Y. Hosono, Y. Yamashita
Piezoelectric single crystals of Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.93/Ti/sub 0.07/]O/sub 3/ (PZNT 93/7) 40 mm in diameter were grown with PbO flux by the solution Bridgman method. The prerequisites for the growth of PZNT 93/7 single crystals are higher melting temperature, a longer melting time than Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.91/Ti/sub 0.09/]O/sub 3/ (PZNT 91/9), and the addition of ZnO. The pyrochlore pellets of PZNT 93/7 are more stable than those of PZNT 91/9. The Curie temperature is 155-175/spl deg/C and the temperature corresponds to the rhombohedral-tetragonal phase change, T/sub rt/, is higher than 100/spl deg/C for PZNT 93/7 single crystals. T/sub rt/ corresponds to the degradation boundary temperature of the electromechanical coupling coefficient, k/sub 33/, and also of the dielectric constant. The sensitivity degradation of ultrasonic transducers using PZNT 93/7 single crystals can be avoided up to a high temperature of about 100/spl deg/C. Although the piezoelectric properties of single crystals of PZNT 91/9 are excellent, it has become clear that the electromechanical coupling coefficient, k/sub 33/, and other properties degrade drastically above about 80/spl deg/C. Therefore, our results indicate that PZNT 93/7 has good potential for application in the mass production of ultrasonic transducers.
采用溶液布里奇曼法在PbO助熔剂下生长了直径为40 mm的Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.93/Ti/sub 0.07/]O/sub 3/ (PZNT 93/7)的压电单晶。较Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.91/Ti/sub 0.09/]O/sub 3/ (PZNT 91/9)]和ZnO的加入是PZNT 93/7单晶生长的先决条件。PZNT 93/7的焦绿石球团比PZNT 91/9的焦绿石球团更稳定。PZNT 93/7单晶的居里温度为155 ~ 175/spl℃,对应的温度为菱形-四方相变T/亚rt/大于100/spl℃。T/sub rt/对应机电耦合系数k/sub 33/的退化边界温度,也对应介电常数的退化边界温度。使用PZNT 93/7单晶的超声波换能器在高达约100/spl℃的高温下可以避免灵敏度下降。虽然PZNT 91/9单晶的压电性能很好,但在80/spl℃以上,机电耦合系数、k/sub 33/和其他性能明显下降。因此,我们的研究结果表明,PZNT 93/7在超声波换能器的批量生产中具有良好的应用潜力。
{"title":"Single-crystal Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.93/Ti/sub 0.07/]O/sub 3/ (PZNT 93/7) for highly reliable ultrasonic transducers","authors":"K. Harada, Y. Hosono, Y. Yamashita","doi":"10.1109/ISAF.2002.1195956","DOIUrl":"https://doi.org/10.1109/ISAF.2002.1195956","url":null,"abstract":"Piezoelectric single crystals of Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.93/Ti/sub 0.07/]O/sub 3/ (PZNT 93/7) 40 mm in diameter were grown with PbO flux by the solution Bridgman method. The prerequisites for the growth of PZNT 93/7 single crystals are higher melting temperature, a longer melting time than Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.91/Ti/sub 0.09/]O/sub 3/ (PZNT 91/9), and the addition of ZnO. The pyrochlore pellets of PZNT 93/7 are more stable than those of PZNT 91/9. The Curie temperature is 155-175/spl deg/C and the temperature corresponds to the rhombohedral-tetragonal phase change, T/sub rt/, is higher than 100/spl deg/C for PZNT 93/7 single crystals. T/sub rt/ corresponds to the degradation boundary temperature of the electromechanical coupling coefficient, k/sub 33/, and also of the dielectric constant. The sensitivity degradation of ultrasonic transducers using PZNT 93/7 single crystals can be avoided up to a high temperature of about 100/spl deg/C. Although the piezoelectric properties of single crystals of PZNT 91/9 are excellent, it has become clear that the electromechanical coupling coefficient, k/sub 33/, and other properties degrade drastically above about 80/spl deg/C. Therefore, our results indicate that PZNT 93/7 has good potential for application in the mass production of ultrasonic transducers.","PeriodicalId":415725,"journal":{"name":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123634773","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Analysis of the resonance modes of PZT/epoxy 1-3 composite rings PZT/环氧树脂1-3复合环的共振模式分析
C. Chong, H. Chan, M. Chan, P. Liu
PZT/epoxy 1-3 composite rings with PZT volume fractions /spl Phi/ ranging from 0.58 to 0.93 are fabricated. They have sufficiently small epoxy width (/spl sim/77 81 /spl mu/m) and can be treated as effective homogeneous media. The mode coupling theory and a finite element model (FEM) are applied to predict the thickness (f/sub T/), lateral (f/sub L/), radial (f/sub R/) and wall-thickness (f/sub W/) resonances of the composite rings. As the frequencies and electromechanical coupling coefficients play a significant role in the performance of composite transducer, it is important to know how these parameters change with /spl Phi/. Good agreements are found between the experimental results and the FEM simulations. It is obvious that f/sub R/ and f/sub W/ vibrations greatly deteriorate at low value of /spl Phi/. To avoid unwanted modes from coupling to f/sub T/, the thickness and configuration of the PZT elements in the rings should be optimized.
制备了PZT体积分数/spl Phi/范围为0.58 ~ 0.93的PZT/环氧1-3复合环。它们具有足够小的环氧树脂宽度(/spl sim/77 81 /spl mu/m),可以作为有效的均质介质处理。应用模态耦合理论和有限元模型预测了复合材料环的厚度(f/sub T/)、横向(f/sub L/)、径向(f/sub R/)和壁厚(f/sub W/)共振。由于频率和机电耦合系数对复合换能器的性能起着重要的作用,因此了解这些参数随/spl Phi/的变化是很重要的。实验结果与有限元模拟结果吻合较好。很明显,f/sub R/和f/sub W/振动在/spl Phi/较低时明显恶化。为了避免不希望的模式耦合到f/sub T/,应优化环内PZT元件的厚度和结构。
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引用次数: 1
Preparation and electrical property of /spl beta/-PVDF/PbTiO/sub 3/ thin films /spl β /-PVDF/PbTiO/sub - 3/薄膜的制备及其电学性能
C. Wang, M. Kao, Y. Chen
Ferroelectric polymer/ceramic structure thin films were fabricated on Pt/SiO/sub 2//Si substrates using a sol-gel method. The bilayer thin film was composed of polar /spl beta/-phase poly(vinylidene fluoride) (PVDF) and 1 /spl mu/m thickness of polycrystalline lead titanate (PbTiO/sub 3/) thin film. By changing the concentrations of PVDF solutions (0.6/spl sim/1.0 M), various thickness of PVDF thin films (50-580 nm) were obtained, and the effects of various processing parameters on the characteristics of PVDF/PbTiO/sub 3/ thin films were studied. The characteristic of the /spl beta/ phase at infrared spectrum of 511 and 840 cm/sup -1/ can be observed in PVDF film crystallized at 65/spl deg/C for 2 h. With the increase of the PVDF thickness of the PVDF/PbTiO/sub 3/ films, the relative dielectric constant (/spl epsi//sub r/) decreased from 63 to 20 and the leakage current density (J) also decreased from 1.54 /spl times/ 10/sup -6/ to 3.86 /spl times/ 10/sup -7/ A/cm/sup 2/.
采用溶胶-凝胶法在Pt/SiO/ sub2 /Si衬底上制备了铁电聚合物/陶瓷结构薄膜。双层薄膜由极性/spl β /-相聚偏氟乙烯(PVDF)和厚度为1 /spl μ /m的多晶钛酸铅(PbTiO/ sub3 /)薄膜组成。通过改变PVDF溶液的浓度(0.6/spl sim/1.0 M),得到了不同厚度的PVDF薄膜(50-580 nm),并研究了不同工艺参数对PVDF/PbTiO/sub 3/薄膜特性的影响。在65/spl℃下结晶2 h的PVDF薄膜,在511和840 cm/sup -1/的红外光谱处,可以观察到/spl β /相的特征。随着PVDF/PbTiO/sub 3/薄膜PVDF厚度的增加,相对介电常数(/spl epsi//sub r/)从63降低到20,泄漏电流密度(J)也从1.54 /spl次/ 10/sup -6/降低到3.86 /spl次/ 10/sup -7/ A/cm/sup 2/。
{"title":"Preparation and electrical property of /spl beta/-PVDF/PbTiO/sub 3/ thin films","authors":"C. Wang, M. Kao, Y. Chen","doi":"10.1109/ISAF.2002.1195898","DOIUrl":"https://doi.org/10.1109/ISAF.2002.1195898","url":null,"abstract":"Ferroelectric polymer/ceramic structure thin films were fabricated on Pt/SiO/sub 2//Si substrates using a sol-gel method. The bilayer thin film was composed of polar /spl beta/-phase poly(vinylidene fluoride) (PVDF) and 1 /spl mu/m thickness of polycrystalline lead titanate (PbTiO/sub 3/) thin film. By changing the concentrations of PVDF solutions (0.6/spl sim/1.0 M), various thickness of PVDF thin films (50-580 nm) were obtained, and the effects of various processing parameters on the characteristics of PVDF/PbTiO/sub 3/ thin films were studied. The characteristic of the /spl beta/ phase at infrared spectrum of 511 and 840 cm/sup -1/ can be observed in PVDF film crystallized at 65/spl deg/C for 2 h. With the increase of the PVDF thickness of the PVDF/PbTiO/sub 3/ films, the relative dielectric constant (/spl epsi//sub r/) decreased from 63 to 20 and the leakage current density (J) also decreased from 1.54 /spl times/ 10/sup -6/ to 3.86 /spl times/ 10/sup -7/ A/cm/sup 2/.","PeriodicalId":415725,"journal":{"name":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","volume":"110 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126373403","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
期刊
Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.
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