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Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.最新文献

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Rf-magnetron sputtered ferroelectric (Na,K)NbO/sub 3/ films 射频磁控溅射铁电(Na,K)NbO/ sub3 /薄膜
M. Blomqvist, J. Koh, S. Khartsev, A. Grishin
Sodium potassium niobate (Na,K)NbO/sub 3/ (NKN) thin films were grown by rf-magnetron sputtering from stoichiometric Na/sub 0.5/K/sub 0.5/NbO/sub 3/ target on LaAlO/sub 3/ (LAO) single crystals and polycrystalline Pt/sub 80/Ir/sub 20/ (PtIr) substrates. NKN films on polycrystalline PtIr substrates were found to be preferentially (00l) oriented while XRD measurements reveal epitaxial quality of NKN/LaAlO/sub 3/ film structures. The ferroelectric state in NKN/PtIr films at room temperature is indicated by polarization loops with polarization as high as 33.4 /spl mu/C/cm/sup 2/ at 700 kV/cm remnant polarization of 9.9 /spl mu/C/cm/sup 2/, and coercive field of 91 kV/cm. I-V characteristics of vertical Au/NKN/PtIr capacitive cells and planar Au/NKN/LAO interdigital capacitors (IDCs) showed very good insulating properties. For NKN IDC the leakage current density was in the order of 30 nA/cm/sup 2/ at 400 kV/cm. Rf dielectric spectroscopy demonstrates low loss, low frequency dispersion, and high voltage tunability both for vertical Au/NKN/PtIr and planar interdigital Au/NKN/LAO capacitors.
以化学计量Na/sub 0.5/K/sub 0.5/NbO/sub 3/靶为基体,在LaAlO/sub 3/ (LAO)单晶和多晶Pt/sub 80/Ir/sub 20/ (PtIr)衬底上采用射频磁控溅射法制备了铌酸钠(Na,K)NbO/sub 3/ (NKN)薄膜。在多晶PtIr衬底上发现NKN薄膜具有优先(00l)取向,而XRD测试表明NKN/LaAlO/sub - 3/薄膜结构具有外延质量。在室温下,NKN/PtIr薄膜的极化环极化率高达33.4 /spl mu/C/cm/sup 2/,残余极化率为9.9 /spl mu/C/cm/sup 2/,矫顽力场为91 kV/cm。垂直Au/NKN/PtIr电容电池和平面Au/NKN/LAO数字间电容(idc)的I-V特性显示出良好的绝缘性能。对于NKN IDC,在400 kV/cm时,泄漏电流密度约为30 nA/cm/sup 2/。对于垂直Au/NKN/PtIr和平面数字间Au/NKN/LAO电容器,Rf介电光谱显示出低损耗、低频色散和高电压可调性。
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引用次数: 2
Spectral analysis of the electromechanical response of an electroactive material by implementation of Fourier decomposition 利用傅里叶分解实现电活性材料机电响应的频谱分析
C. B. DiAntonio, F. Williams, S. Pilgrim, W. Schulze
Implementation of a discrete Fourier transform in conjunction with Devonshire phenomenology allows the electromechanical response of an electroactive material to be fully characterized. The main thrust of this examination is the incorporation of signal decomposition through Fourier analysis to quantify the electro-mechanical and aging properties. Fourier analysis is a well-used technique in the electrical engineering community; however, it has not been applied to materials. The application presented here allows a fresh look at some old phenomena. The spectral representation provides to the underlying physics of the response, i.e., odd harmonics only exist for acentric materials. The ability to create the harmonic spectrum also provides a new way to characterize the effects of aging by revealing subtle changes in the fundamental components that comprise the response. This study shows how Fourier analysis can be applied to a PMN-PT-BT composition to characterize and quantify its electromechanical properties.
离散傅里叶变换的实现与德文郡现象学相结合,允许电活性材料的机电响应得到充分表征。本研究的主要内容是通过傅立叶分析结合信号分解来量化机电和老化性能。傅里叶分析是一种在电气工程界广泛使用的技术;然而,它还没有应用到材料上。这里提供的应用程序允许对一些旧现象进行重新审视。谱表示提供了响应的基础物理,即奇谐波只存在于非中心材料。通过揭示构成反应的基本成分的细微变化,创造谐波谱的能力也提供了一种表征衰老影响的新方法。本研究展示了傅里叶分析如何应用于PMN-PT-BT组合物来表征和量化其机电性能。
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引用次数: 0
A novel MEMS gas sensor with effective combination of high sensitivity and high selectivity 一种新型的MEMS气体传感器,有效地结合了高灵敏度和高选择性
Jia Zhou, Po Li, Song Zhang, Feng Zhou, Yipin Huang, Pengyuan Yang, M. Bao
A, novel MEMS gas sensor including a PZT thin film layer and a zeolite layer is developed in this paper, which shows effective combination of high sensitivity and high selectivity. Working in resonating mode, the sensor depicts the mass loading due to molecular adsorption of the zeolite by the frequency shift. The relationship between the frequency shift in percent and the concentration of Freon is linear. The minimum mass loading of 3.5 /spl times/ 10/sup -9/ and the sensitivity of -0.0024%/ppm can be determined from the experimental results.
本文研制了一种新型的由PZT薄膜层和沸石层组成的MEMS气体传感器,该传感器实现了高灵敏度和高选择性的有效结合。在谐振模式下工作,传感器通过频移描绘沸石分子吸附引起的质量负载。频移百分数与氟里昂浓度呈线性关系。实验结果可确定最小质量载荷为3.5 /spl倍/ 10/sup -9/,灵敏度为-0.0024%/ppm。
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引用次数: 12
The effect of annealing temperature on the structure and dielectric properties of (Ba/sub 0.6/Sr/sub 0.4/)TiO/sub 3/ thin films 退火温度对(Ba/sub 0.6/Sr/sub 0.4/)TiO/sub 3/薄膜结构和介电性能的影响
Wenbiao Wu, Dong-wen Peng, Xiaofeng Liang, Z. Meng
Ba/sub 0.6/Sr/sub 0.4/TiO/sub 3/ thin films were prepared on LaAlO/sub 3/ substrates by sol-gel method. The effects of annealing temperature on the structure and dielectric properties were studied. The microstructure was examined by XRD, SEM and AFM. It was observed that as the annealing temperature increased, films were crystallized in preferential (001) orientation. When annealed at 1100/spl deg/C, the films reveal agglomeration structure, and surface roughness increase. By the measurement, we found that the dielectric properties strongly depend upon annealing temperature. The higher the annealing temperature, the lower dissipation factor and the larger tunability will be. At the same thickness, the tunability of the films annealed at 1100/spl deg/C enhanced to 46.9% (DC bias electric field of 80KV/cm) and the dissipation factor is 0.008 at 1 MHz.
采用溶胶-凝胶法在LaAlO/sub 3/基底上制备了Ba/sub 0.6/Sr/sub 0.4/TiO/sub 3/薄膜。研究了退火温度对结构和介电性能的影响。采用XRD、SEM和AFM对其微观结构进行了表征。观察到,随着退火温度的升高,薄膜以(001)优先取向结晶。在1100℃退火时,薄膜呈现团聚结构,表面粗糙度增大。通过测量,我们发现介电性能强烈依赖于退火温度。退火温度越高,耗散系数越低,可调性越大。在相同厚度下,1100/spl度/C退火后,薄膜的可调性提高到46.9%(直流偏置电场为80KV/cm), 1 MHz时的耗散系数为0.008。
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引用次数: 0
Light modulation properties of novel piezoelectric polymers 新型压电聚合物的光调制特性
Y. Tajitsu
Using new techniques, we fabricated two kinds of piezoelectric films, polyurea-5 and poly-L-lactic acid (PLLA) films, in order to investigate their optical properties, of which the higher order structures are simple. Our main findings are as follows. In the case of the PLLA film fabricated by the new technique, giant optical rotatory power and high-speed light modulation exists. On the other hand, in the case of the polyurea-5 film prepared by vapor deposition polymerization, the Pockels coefficient of 0.09 pm/V is obtained. This value is fairly large for polymers.
采用新技术制备了聚脲-5和聚l -乳酸(PLLA)两种压电薄膜,研究了其高阶结构简单的光学性能。我们的主要发现如下。在新工艺制备的PLLA薄膜中,存在着巨大的旋光功率和高速的光调制。另一方面,对于气相沉积聚合法制备的聚氨酯-5薄膜,其Pockels系数为0.09 pm/V。这个值对于聚合物是相当大的。
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引用次数: 0
Growth and characterisation of piezoelectric PZN-PT 91/9 and PMN-PT 66/34 single crystals for ultrasonic transducers 超声换能器用压电PZN-PT 91/9和PMN-PT 66/34单晶的生长和表征
J. Santailler, B. Ferrand, Dragan Damjanovic, M. Couchaud, P. Dusserre, M. Budimir, S. Mibord, T. Abad
Today, high crystal quality in sufficient size with high crystal growth yield appears to be a key point for a wide dissemination and use in ferroelectrics applications. So, this paper is related to the growth of PZN-PT solid solution compound like (1-x)(PbZn/sub 1/3/Nb/sub 2/3/O/sub 3/)-xPbTiO/sub 3/ and PMN-PT compound like (1-y)(PbMg/sub 1/3/Nb/sub 2/3/O/sub 3/)-yPbTiO/sub 3/. For these two relaxor ferroelectric single crystals promising properties are obtained near the Morphotropic Phase Boundary (MPB) transition which occurred at values closed to x=0.09 for PZN-PT and y=0.34 for PMN-PT. The complex unit cell phase transition combined with an adequate applied electric field, oriented in the pseudo <001>/sub c/ direction; confer to these single crystals some interesting piezoelectric properties. We present some crystal growth results obtained by the Vertical Gradient Freeze-Solution Growth method (VGF-SG) for PZN-PT and by a pseudo Kyropoulos method developed for PMN-PT. The obtained single crystals, up to 120 g for PZN-PT and 160 g for PMN-PT are then analysed in term of composition and structure. Both PMN-PT and PZN-PT perovskite crystals are rhombohedral (@RT), they show a good global homogeneity. Samples demonstrate ferroelectric behaviour, and after polarisation process, dielectric constants up to 48000 near the Curie temperature (Tc /spl sim/174/spl deg/C @ 1kHz) are obtained for PZN-PT and respectively 74000 for PMN-PT (Tc /spl sim/ 142/spl deg/C @ 100 Hz). The piezoelectric coefficient d/sub 33/ gives values up to /spl sim/2200 pC/N (@RT 9 kV/cm) for PZN-PT and 1700 pC/N(@RT) for PMN-PT. A value up to 94% is measured for the electromechanical coupling coefficient k/sub 33/.
如今,足够尺寸的高晶体质量和高晶体生长率似乎是铁电材料广泛推广和应用的关键。因此,本文研究了PZN-PT固溶体化合物如(1-x)(PbZn/sub 1/3/Nb/sub 2/3/O/sub 3/)-xPbTiO/sub 3/和PMN-PT化合物如(1-y)(PbMg/sub 1/3/Nb/sub 2/3/O/sub 3/)-yPbTiO/sub 3/的生长。这两种弛豫铁电单晶在嗜形相边界(MPB)转变附近获得了良好的性能,PZN-PT在x=0.09和PMN-PT在y=0.34附近发生转变。复合单晶相转变结合适当的外加电场,在pseudo /sub /方向取向;赋予这些单晶一些有趣的压电性质。本文介绍了PZN-PT的垂直梯度冷冻溶液生长方法(VGF-SG)和PMN-PT的伪Kyropoulos生长方法的一些晶体生长结果。所得的单晶,PZN-PT高达120 g, PMN-PT高达160 g,然后分析其组成和结构。PMN-PT和PZN-PT钙钛矿晶体均为菱形(@RT),具有良好的整体均匀性。样品表现出铁电行为,极化处理后,PZN-PT在居里温度(Tc /spl sim/174/spl度/C @ 1kHz)附近的介电常数高达48000,PMN-PT (Tc /spl sim/ 142/spl度/C @ 100 Hz)的介电常数为74000。压电系数d/sub 33/给出PZN-PT高达/spl sim/2200 pC/N(@RT 9 kV/cm)和PMN-PT 1700 pC/N(@RT)的值。机电耦合系数k/sub / 33的测量值高达94%。
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引用次数: 0
La-doped PbZrTiO/sub 3/(PLZT) thin film optical detectors (TOD) for retinal implantation-a "bionic" eye 用于视网膜植入的la掺杂PbZrTiO/sub 3/(PLZT)薄膜光学探测器(TOD) -仿生眼
A. Zomorrodian, N. Wu, S. Wilczak, C. Colbert, A. Ignatiev, C. Garcia
A new ceramic optical microdetector has been developed for retinal implant as a direct replacement for damaged retinal photo-detectors in patients with dystrophies such as Retinitis Pigmentosa (RP) and Age-related Macular degeneration (AMD). The thin film optical detector (TOD) is a heterostructure device composed of an atomically ordered La-doped PbZrTiO/sub 3/(PLZT) layer epitaxially grown on an atomically ordered Pt thin film layer. The TOD has an optical response, which in the visible region has a peak at around 550 nm with a sensitivity that overlaps the eye response from 400 nm to 650 nm. The device responsivity in the visible range is at a value of /spl sim/ 1000 V/W. Individual detectors are fabricated by photolithography and etch processing as is common in the microelectronics industry. Detectors 40 /spl mu/m in diameter have been processed and have been integrated with a newly developed polymer carrier layer technique for ease of handling and implantation of microdetector arrays into the eye.
一种新型陶瓷光学微探测器用于视网膜植入,可直接替代视网膜色素性视网膜炎(RP)和老年性黄斑变性(AMD)等营养不良患者受损的视网膜光探测器。薄膜光学探测器(TOD)是在原子有序Pt薄膜层外延生长的原子有序la掺杂PbZrTiO/ sub3 /(PLZT)层构成的异质结构器件。TOD具有光学响应,在可见光区域,其峰值约为550纳米,其灵敏度与眼睛响应重叠,从400纳米到650纳米。器件在可见光范围内的响应度为/spl sim/ 1000v /W。单个探测器是由光刻和蚀刻加工制造的,这在微电子工业中是常见的。直径为40 /spl mu/m的探测器已经过加工,并与新开发的聚合物载流子层技术相结合,以便于操作和将微探测器阵列植入眼睛。
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引用次数: 5
Single-crystal Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.93/Ti/sub 0.07/]O/sub 3/ (PZNT 93/7) for highly reliable ultrasonic transducers 用于高可靠性超声波换能器的单晶Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.93/Ti/sub 0.07/]O/sub 3/ (PZNT 93/7)
K. Harada, Y. Hosono, Y. Yamashita
Piezoelectric single crystals of Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.93/Ti/sub 0.07/]O/sub 3/ (PZNT 93/7) 40 mm in diameter were grown with PbO flux by the solution Bridgman method. The prerequisites for the growth of PZNT 93/7 single crystals are higher melting temperature, a longer melting time than Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.91/Ti/sub 0.09/]O/sub 3/ (PZNT 91/9), and the addition of ZnO. The pyrochlore pellets of PZNT 93/7 are more stable than those of PZNT 91/9. The Curie temperature is 155-175/spl deg/C and the temperature corresponds to the rhombohedral-tetragonal phase change, T/sub rt/, is higher than 100/spl deg/C for PZNT 93/7 single crystals. T/sub rt/ corresponds to the degradation boundary temperature of the electromechanical coupling coefficient, k/sub 33/, and also of the dielectric constant. The sensitivity degradation of ultrasonic transducers using PZNT 93/7 single crystals can be avoided up to a high temperature of about 100/spl deg/C. Although the piezoelectric properties of single crystals of PZNT 91/9 are excellent, it has become clear that the electromechanical coupling coefficient, k/sub 33/, and other properties degrade drastically above about 80/spl deg/C. Therefore, our results indicate that PZNT 93/7 has good potential for application in the mass production of ultrasonic transducers.
采用溶液布里奇曼法在PbO助熔剂下生长了直径为40 mm的Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.93/Ti/sub 0.07/]O/sub 3/ (PZNT 93/7)的压电单晶。较Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.91/Ti/sub 0.09/]O/sub 3/ (PZNT 91/9)]和ZnO的加入是PZNT 93/7单晶生长的先决条件。PZNT 93/7的焦绿石球团比PZNT 91/9的焦绿石球团更稳定。PZNT 93/7单晶的居里温度为155 ~ 175/spl℃,对应的温度为菱形-四方相变T/亚rt/大于100/spl℃。T/sub rt/对应机电耦合系数k/sub 33/的退化边界温度,也对应介电常数的退化边界温度。使用PZNT 93/7单晶的超声波换能器在高达约100/spl℃的高温下可以避免灵敏度下降。虽然PZNT 91/9单晶的压电性能很好,但在80/spl℃以上,机电耦合系数、k/sub 33/和其他性能明显下降。因此,我们的研究结果表明,PZNT 93/7在超声波换能器的批量生产中具有良好的应用潜力。
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引用次数: 0
Domains and piezo-image of PZT family thin films PZT族薄膜的畴与压电像
Y. Masuda, K. Kakimoto, H. Kakemoto, K. Watanabe
PZT thin films are promising materials for ferroelectric random access memory (FeRAM) and micro electro-mechanical system (MEMS). For these applications, it is important to clarify the relationship between the motion of ferroelectric domains and their piezoelectric properties. Nanometer-size structure of polarized domains and grains for PLD-derived PZT thin film was investigated by AFM and KFM, when dc voltage was applied to the film through a conductive tip. Topographic and piezoelectric domain images in the film surface clearly showed switchable domains with 100 nm in size.
PZT薄膜是铁电随机存取存储器(FeRAM)和微机电系统(MEMS)的重要材料。对于这些应用,阐明铁电畴的运动与其压电性能之间的关系是很重要的。采用原子力显微镜(AFM)和KFM技术,研究了当直流电压通过导电尖端作用于pld衍生的PZT薄膜时,极化畴和晶粒的纳米级结构。薄膜表面的形貌和压电畴图像清晰地显示出100 nm大小的可切换畴。
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引用次数: 0
Preparation and electrical property of /spl beta/-PVDF/PbTiO/sub 3/ thin films /spl β /-PVDF/PbTiO/sub - 3/薄膜的制备及其电学性能
C. Wang, M. Kao, Y. Chen
Ferroelectric polymer/ceramic structure thin films were fabricated on Pt/SiO/sub 2//Si substrates using a sol-gel method. The bilayer thin film was composed of polar /spl beta/-phase poly(vinylidene fluoride) (PVDF) and 1 /spl mu/m thickness of polycrystalline lead titanate (PbTiO/sub 3/) thin film. By changing the concentrations of PVDF solutions (0.6/spl sim/1.0 M), various thickness of PVDF thin films (50-580 nm) were obtained, and the effects of various processing parameters on the characteristics of PVDF/PbTiO/sub 3/ thin films were studied. The characteristic of the /spl beta/ phase at infrared spectrum of 511 and 840 cm/sup -1/ can be observed in PVDF film crystallized at 65/spl deg/C for 2 h. With the increase of the PVDF thickness of the PVDF/PbTiO/sub 3/ films, the relative dielectric constant (/spl epsi//sub r/) decreased from 63 to 20 and the leakage current density (J) also decreased from 1.54 /spl times/ 10/sup -6/ to 3.86 /spl times/ 10/sup -7/ A/cm/sup 2/.
采用溶胶-凝胶法在Pt/SiO/ sub2 /Si衬底上制备了铁电聚合物/陶瓷结构薄膜。双层薄膜由极性/spl β /-相聚偏氟乙烯(PVDF)和厚度为1 /spl μ /m的多晶钛酸铅(PbTiO/ sub3 /)薄膜组成。通过改变PVDF溶液的浓度(0.6/spl sim/1.0 M),得到了不同厚度的PVDF薄膜(50-580 nm),并研究了不同工艺参数对PVDF/PbTiO/sub 3/薄膜特性的影响。在65/spl℃下结晶2 h的PVDF薄膜,在511和840 cm/sup -1/的红外光谱处,可以观察到/spl β /相的特征。随着PVDF/PbTiO/sub 3/薄膜PVDF厚度的增加,相对介电常数(/spl epsi//sub r/)从63降低到20,泄漏电流密度(J)也从1.54 /spl次/ 10/sup -6/降低到3.86 /spl次/ 10/sup -7/ A/cm/sup 2/。
{"title":"Preparation and electrical property of /spl beta/-PVDF/PbTiO/sub 3/ thin films","authors":"C. Wang, M. Kao, Y. Chen","doi":"10.1109/ISAF.2002.1195898","DOIUrl":"https://doi.org/10.1109/ISAF.2002.1195898","url":null,"abstract":"Ferroelectric polymer/ceramic structure thin films were fabricated on Pt/SiO/sub 2//Si substrates using a sol-gel method. The bilayer thin film was composed of polar /spl beta/-phase poly(vinylidene fluoride) (PVDF) and 1 /spl mu/m thickness of polycrystalline lead titanate (PbTiO/sub 3/) thin film. By changing the concentrations of PVDF solutions (0.6/spl sim/1.0 M), various thickness of PVDF thin films (50-580 nm) were obtained, and the effects of various processing parameters on the characteristics of PVDF/PbTiO/sub 3/ thin films were studied. The characteristic of the /spl beta/ phase at infrared spectrum of 511 and 840 cm/sup -1/ can be observed in PVDF film crystallized at 65/spl deg/C for 2 h. With the increase of the PVDF thickness of the PVDF/PbTiO/sub 3/ films, the relative dielectric constant (/spl epsi//sub r/) decreased from 63 to 20 and the leakage current density (J) also decreased from 1.54 /spl times/ 10/sup -6/ to 3.86 /spl times/ 10/sup -7/ A/cm/sup 2/.","PeriodicalId":415725,"journal":{"name":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","volume":"110 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126373403","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
期刊
Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.
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