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Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.最新文献

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Low-temperature preparation of ferroelectric Ba/sub 2/NaNb/sub 5/O/sub 15/ thin films by pulsed laser deposition 脉冲激光沉积法低温制备Ba/ sub2 /NaNb/ sub5 /O/ sub15 /铁电薄膜
K. Ohnuki, T. Higuchi, M. Takayasu, M. Sogawa, T. Tsukamoto
Ferroelectric Ba/sub 2/NaNb/sub 5/O/sub 15/ (BNN) thin films were prepared on MgO (100) substrates by pulsed laser deposition method. When the laser power density and repetition frequency were fixed at 200 mJ/cm/sup 2/ and 5 Hz, respectively, the c-axis oriented BNN thin film was obtained at substrate temperature of 650/spl deg/C. The interface between the c-axis oriented BNN thin film and MgO substrate was very smooth. The band gap of the c-axis oriented BNN thin film was about 3.1 eV, which accords to that of the BNN single crystal.
采用脉冲激光沉积法在MgO(100)衬底上制备了Ba/ sub2 /NaNb/ sub5 /O/ sub15 / (BNN)铁电薄膜。当激光功率密度和重复频率分别为200 mJ/cm/sup /和5 Hz时,衬底温度为650/spl℃,可获得C轴取向的BNN薄膜。c轴取向BNN薄膜与MgO衬底之间的界面非常光滑。c轴取向的BNN薄膜的带隙约为3.1 eV,与BNN单晶的带隙一致。
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引用次数: 0
Piezoelectric properties and structural characterization of (Na,Bi)Bi/sub 2/Ta/sub 2/O/sub 9/ ceramics with bismuth layer-structure 铋层结构(Na,Bi)Bi/sub 2/Ta/sub 2/O/sub 9/陶瓷的压电性能及结构表征
R. Aoyagi, M. Matsushita, K. Komagata, H. Takeda, S. Okamura, T. Shiosaki
The piezoelectric properties of bismuth layer-structured ferroelectrics Na/sub 0.5-x/Bi/sub 0.5+x/3/Bi/sub 2/Ta/sub 2/O/sub 9/ (NBT(x)) dense ceramics were investigated, and the crystal structure of synthesized NBT(x) powders was analyzed by the Rietveld method. NBT(x) powder and ceramics were prepared by conventional synthesis method. NBT(x) powder for x = 0 and x = 0.1 was confirmed to be single phase of BLSFs (m = 2) by x-ray diffraction method. The electromechanical coupling coefficients k/sub p/ of NBT(x = 0) and NBT(x = 0.1) dense ceramics were 10% and 8.3%, respectively. The k/sub p/ of NBT(x = 0) was one of the largest in reported non-oriented BLSFs ceramics.
研究了铋层状结构铁电体Na/sub 0.5-x/Bi/sub 0.5+x/3/Bi/sub 2/Ta/sub 2/O/sub 9/ (NBT(x))致密陶瓷的压电性能,并用Rietveld法分析了合成的NBT(x)粉末的晶体结构。采用常规合成方法制备了NBT(x)粉体和陶瓷。x射线衍射法证实x = 0和x = 0.1的NBT(x)粉末为BLSFs (m = 2)的单相。NBT(x = 0)和NBT(x = 0.1)致密陶瓷的机电耦合系数k/sub p/分别为10%和8.3%。NBT(x = 0)的k/sub p/是已报道的无取向blsf陶瓷中最大的之一。
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引用次数: 0
Temperature characteristics for surface acoustic wave in annealed proton-exchanged LiNbO/sub 3/ waveguides 退火质子交换LiNbO/ sub3 /波导中表面声波的温度特性
Chien-Chuan Cheng, K. Kao, Ying-Chung Chen
The temperature characteristics for surface acoustic wave (SAW) in annealed proton-exchanged (APE) LiNbO/sub 3/ waveguides were investigated. The process performed by immersing z-cut LiNbO/sub 3/ substrates in pure octanoic acid was experimentally studied. The penetration depth of hydrogen assumed to be equal to the waveguide depth (d) was measured by secondary-ion mass spectrometry (SIMS). The annealing process was carried out in a horizontal furnace kept at 400/spl deg/C for 4 h under a dry O/sub 2/ gas flow. The velocity (V/sub p/) and temperature coefficient of frequency (TCF) of SAW measured by a network analyzer were observed. The results showed that the V/sub p/ and TCF in APE LiNbO/sub 3/ samples tended to improve in comparison with the PE LiNbO/sub 3/ samples. It exhibited that the annealing effect could result in a restoration of the decreased V/sub p/ and an improvement of TCF. However, the values of TCF in APE LiNbO/sub 3/ samples were larger than that of the unexchanged one.
研究了表面声波在退火质子交换(APE) LiNbO/ sub3 /波导中的温度特性。实验研究了z-cut LiNbO/ sub3 /底物浸在纯辛酸中的工艺。假设氢的穿透深度等于波导深度(d),用二次离子质谱法(SIMS)测量了氢的穿透深度。退火过程在水平炉中进行,温度为400/spl℃,干燥O/sub / 2气流下,退火时间为4 h。用网络分析仪测量了声表面波的速度(V/sub p/)和频率温度系数(TCF)。结果表明,与PE LiNbO/ sub3 /样品相比,APE LiNbO/ sub3 /样品的V/sub p/和TCF有提高的趋势。结果表明,退火效应可以使降低的V/sub p/恢复,并提高TCF。而APE LiNbO/sub 3/样品的TCF值比未交换样品的TCF值大。
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引用次数: 0
Lead zirconate titanate thick films by sol-gel method for piezoelectric applications 溶胶-凝胶法制备锆钛酸铅压电厚膜
Y. Ohya, T. Tamakoshi, T. Ban, Y. Takahashi
Lead zirconate titanate (PZT) films were fabricated by a sol-gel method. The sol was prepared using Ti(O/sup i/Pr)/sub 4/, Pb(OAc)/sub 2//spl middot/3H/sub 2/O, Zr(O/sup n/Bu)/sub 4/, and diethanolamine (DEA) with a molar ratio of DEA/(Ti+Zr)=1. They were dissolved in isopropanol solvent. The concentrations of the sol were about 1.5 and 0.4 mol/L with compositions of Pb/sub x/(Ti/sub 0.5/Zr/sub 0.5/)O/sub 3/, (x = 1.1 and 1.3). The substrate used was Si wafer sputtered with Pt as an electrode. The deposition was conducted by a dip-coating procedure. After deposition and drying at 110/spl deg/C, the substrate was heated at 700/spl deg/C for 30min to crystallize perovskite phase. This coating-drying-heating cycle was repeated several times to obtain a thick PZT film. The fabricated films was about 7 /spl mu/m thick by eight depositions and consisted of the first three thin layers (90 nm each) and five to eight thick layers (1.2 /spl mu/m each). The dielectric constant of the films was about 400 and tan/spl delta/ was about 0.01 at 1 kHz. The films exhibited typical ferroelectric P-E hysteresis curve and the remanent polarization and coercive force were 29.7 /spl mu/C/cm/sup 2/ and 69.7 kV/cm, respectively. The admittance measurement of the poled thick film exhibited clear resonance and antiresonance peaks. The piezoelectric displacement was measured by a laser interferometer and the piezoelectric constant, d/sub 33/, was calculated as 430 to 550 pm/V.
采用溶胶-凝胶法制备锆钛酸铅(PZT)薄膜。以Ti(O/sup i/Pr)/sub - 4/、Pb(OAc)/sub - 2//spl middot/3H/sub - 2/O、Zr(O/sup n/Bu)/sub - 4/和二乙醇胺(DEA)为原料制备溶胶,DEA/(Ti+Zr)的摩尔比为1。将它们溶解在异丙醇溶剂中。土壤中Pb/sub x/(Ti/sub 0.5/Zr/sub 0.5/)O/sub 3/ (x = 1.1和1.3)的浓度分别为1.5和0.4 mol/L。衬底为硅晶片溅射,电极为铂。该沉积是通过浸渍涂层程序进行的。基底在110/spl℃下沉积干燥后,在700/spl℃下加热30min使钙钛矿相结晶。这种涂覆-干燥-加热循环重复几次,以获得厚的PZT膜。通过8次沉积制备的薄膜厚度约为7 /spl mu/m,由前3层薄层(每层90 nm)和5至8层厚层(每层1.2 /spl mu/m)组成。在1 kHz时,薄膜的介电常数约为400,tan/spl δ /约为0.01。薄膜表现出典型的铁电P-E迟滞曲线,剩余极化和矫顽力分别为29.7 /spl mu/C/cm/sup 2/和69.7 kV/cm。极化厚膜的导纳测量显示出明显的共振峰和反共振峰。用激光干涉仪测量压电位移,计算压电常数d/sub 33/为430 ~ 550 pm/V。
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引用次数: 1
Domain engineering of Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.91/Ti/sub 0.09/]O/sub 3/ single crystals and piezoelectric related properties Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.91/Ti/sub 0.09/]O/sub 3/单晶的畴工程及相关压电性能
A. Renault, H. Dammak, P. Gaucher, M. Pham Thi, G. Calvarin
The domain configuration and the electromechanical related properties have been studied in Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.91/Ti/sub 0.09/]O/sub 3/ (PZN-9%PT) single crystals cut along [001] and [101~]. It was established that soft (with high d) and hard (with lower d) piezoelectric properties are respectively obtained in a multidomain and a single domain configuration. The softer piezoelectric material (d/sub 33/ = 2700 pC/N, s/sub 33//sup E/ = 180 pN/m/sup 2/, k/sub 33/ = 93%) was found in the monoclinic multidomain state after poling with a small field along [001]. Optimal poling process and electromechanical related properties of the single crystals were discussed in term of the field-temperature diagram.
研究了沿[001]和[101~]切割的Pb[(Zn/sub 1/3/Nb/sub 2/3/)/sub 0.91/Ti/sub 0.09/]O/sub 3/ (PZN-9%PT)单晶的畴结构和机电相关性能。在多域和单域结构下分别获得了高d值的软压电和低d值的硬压电。沿小电场极化后,发现较软的压电材料(d/sub 33/ = 2700 pC/N, s/sub 33//sup E/ = 180 pN/m/sup 2/, k/sub 33/ = 93%)处于单斜多畴态[001]。根据场温图讨论了最佳极化工艺和单晶的机电相关性能。
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引用次数: 0
Hysteresis properties of Pb(Zr/sub x/Ti/sub 1-x/)O/sub 3/ thin-film bulk acoustic resonators Pb(Zr/sub -x/ Ti/sub - 1-x/)O/sub - 3/薄膜体声谐振器的滞回特性
R. Gabl, M. Schreiter, R. Primig, D. Pitzer, W. Wersing
Applying ferroelectric materials for bulk acoustic resonators, the field dependency of piezoelectric properties has to be considered. In this work, to our knowledge for the first time, the electro-acoustic hysteresis properties of integrated PZT thin-film bulk acoustic resonators are comprehensively investigated. PZT thin film resonators with resonance frequencies around 1.8 GHz and Zr content ranging from 25% to 60% have been fabricated employing multi-target sputtering. The couple coefficient and the impedance characteristics are found to show a hysteresis behaviour particularly dependent on the Zr content. For PZT resonators with low Zr content we observe a distinctive dependence of anti-resonance on the applied field while the series resonance is mostly unaffected. This behaviour changes completely for samples with high Zr content where primarily the series resonance is found to vary dependent on the applied field, a dependence which is supposed to be the consequence of 109/spl deg//71/spl deg/ domain switching in the rhombohedral phase. As potential application making use of this field dependence of acoustic properties a band-width tuneable PZT FBAR based filter will be proposed.
在体声谐振器中应用铁电材料,必须考虑压电特性的场依赖性。本文首次对集成PZT薄膜体声谐振器的电声滞后特性进行了全面的研究。采用多靶溅射技术制备了共振频率约为1.8 GHz、Zr含量为25% ~ 60%的PZT薄膜谐振器。发现耦合系数和阻抗特性表现出滞后行为,特别是依赖于Zr含量。对于低Zr含量的PZT谐振器,我们观察到反谐振对外加电场有明显的依赖性,而串联谐振基本上不受影响。对于具有高Zr含量的样品,这种行为完全改变,其中主要发现系列共振取决于施加的场,这种依赖应该是在菱形相中109/spl度/71/spl度/域切换的结果。作为利用声学特性的场依赖性的潜在应用,我们将提出一种基于PZT FBAR的带宽可调谐滤波器。
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引用次数: 0
The influence of Pb(Mg/sub 1/3/Nb/sub 2/3/)O/sub 3/ content on the piezoelectric and dielectric properties of PMNN-PZT system near the MPB Pb(Mg/sub 1/3/Nb/sub 2/3/)O/sub 3/含量对MPB附近PMNN-PZT体系压电和介电性能的影响
Haiyan Chen, X. Guo, Wenbiao Wu, Z. Meng
Pb(Mg/sub 1/3/Nb/sub 2/3/)O/sub 3/-Pb(Mn/sub 1/3/Nb/sub 2/3/)O/sub 3/-PbZrO/sub 3/-PbTiO/sub 3/ (PMMN-PZT) quaternary piezoelectric ceramics with the various contents of Pb(Mg/sub 1/3/Nb/sub 2/3/)O/sub 3/ (PMN), which locate in the vicinity of the morphotropic phase boundary (MPB), were fabricated. The phase structure of the system was delineated by X-ray diffraction analysis. The piezoelectric and dielectric properties were also measured. Experimental results reveal that the MPB coexisting tetragonal and rhombohedral phases in the present system has a broad composition region from 0.10 to 0.14mol% PM. The piezoelectric coefficient and electromechanical coupling factor increase with increasing PMN and reach the maximum values at 12mol% PMN, then decrease remarkably with further PMN addition, whereas the variation of Qm with PMN addition shows the opposite trend. The dielectric constant also reaches the maximum value at 12mol% PMN. It is found that compared with the as-sintered samples, the dielectric constant of the poled samples in tetragonal phase increases, while there are contrary results in rhombohedral phase. The variation of dielectric properties reflects the transition from tetragonal phase to rhombohedral phase.
制备了Pb(Mg/sub 1/3/Nb/sub 2/3/)O/sub 3/-Pb(Mn/sub 1/3/Nb/sub 2/3/)O/sub 3/-PbZrO/sub 3/-PbTiO/sub 3/ (PMMN-PZT)含量不同的Pb(Mg/sub 1/3/Nb/sub 2/3/)O/sub 3/ (PMN)的四元压电陶瓷,其分布在亲晶相边界(MPB)附近。通过x射线衍射分析确定了体系的相结构。测试了材料的压电和介电性能。实验结果表明,该体系中四边形和菱形相共存的MPB在0.10 ~ 0.14mol% PM范围内具有较宽的组成范围。压电系数和机电耦合系数随PMN的增加而增大,在PMN添加量为12mol%时达到最大值,然后随着PMN添加量的增加而显著减小,而Qm随PMN添加量的变化趋势相反。介电常数在12mol% PMN时也达到最大值。结果表明,与烧结试样相比,正方相极化试样的介电常数增大,而菱形相极化试样的介电常数增大。介电性能的变化反映了从四方相到菱形相的转变。
{"title":"The influence of Pb(Mg/sub 1/3/Nb/sub 2/3/)O/sub 3/ content on the piezoelectric and dielectric properties of PMNN-PZT system near the MPB","authors":"Haiyan Chen, X. Guo, Wenbiao Wu, Z. Meng","doi":"10.1109/ISAF.2002.1195948","DOIUrl":"https://doi.org/10.1109/ISAF.2002.1195948","url":null,"abstract":"Pb(Mg/sub 1/3/Nb/sub 2/3/)O/sub 3/-Pb(Mn/sub 1/3/Nb/sub 2/3/)O/sub 3/-PbZrO/sub 3/-PbTiO/sub 3/ (PMMN-PZT) quaternary piezoelectric ceramics with the various contents of Pb(Mg/sub 1/3/Nb/sub 2/3/)O/sub 3/ (PMN), which locate in the vicinity of the morphotropic phase boundary (MPB), were fabricated. The phase structure of the system was delineated by X-ray diffraction analysis. The piezoelectric and dielectric properties were also measured. Experimental results reveal that the MPB coexisting tetragonal and rhombohedral phases in the present system has a broad composition region from 0.10 to 0.14mol% PM. The piezoelectric coefficient and electromechanical coupling factor increase with increasing PMN and reach the maximum values at 12mol% PMN, then decrease remarkably with further PMN addition, whereas the variation of Qm with PMN addition shows the opposite trend. The dielectric constant also reaches the maximum value at 12mol% PMN. It is found that compared with the as-sintered samples, the dielectric constant of the poled samples in tetragonal phase increases, while there are contrary results in rhombohedral phase. The variation of dielectric properties reflects the transition from tetragonal phase to rhombohedral phase.","PeriodicalId":415725,"journal":{"name":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124472234","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A 35 MHz linear ultrasonic array for medical imaging 用于医学成像的35 MHz线性超声阵列
J. Cannata, T. Shrout, K. Shung
Ultrasound backscatter microscope (UBM) imaging systems operating above 20 MHz are capable of achieving the axial and lateral resolutions needed for applications in ophthalmology and dermatology. Unfortunately these systems rely upon mechanically scanned single element transducers and suffer from a fixed focus, low frame rate and cumbersome scanning hardware. High frequency arrays are therefore desirable for several reasons, including the ability to dynamically focus the sound beam, increase frame rates and clinical convenience. This study investigates the design tradeoffs involved in the development of a high frequency (35 MHz) 64-element linear array. This array was designed primarily for human eye and skin imaging, and features monolithic elements mechanically diced out of a fine grain high density PZT-5H ceramic. Array elements were spaced with a 50 /spl mu/m pitch, interconnected via a flexible circuit and matched to the 50 /spl Omega/ system electronics via a 85 /spl Omega/ transmission line coaxial cable. Several prototype arrays were constructed with promising results. An average center frequency of 34 MHz with a -6 dB bandwidth of at least 45% per element was achieved. The maximum combined electrical and acoustical crosstalk for nearest and next nearest elements was less than -29 dB, and the average 40 dB pulse length was 105 ns.
工作在20兆赫以上的超声后向散射显微镜(UBM)成像系统能够实现眼科和皮肤病学应用所需的轴向和横向分辨率。不幸的是,这些系统依赖于机械扫描的单元件传感器,并且受到固定焦点,低帧率和笨重的扫描硬件的影响。因此,出于几个原因,高频阵列是可取的,包括动态聚焦声束的能力,提高帧率和临床便利性。本研究探讨了开发高频(35 MHz) 64元线性阵列所涉及的设计权衡。该阵列主要是为人眼和皮肤成像而设计的,其特点是采用细颗粒高密度PZT-5H陶瓷机械切割而成的单片元件。阵列元件间距为50 /spl μ /m,通过柔性电路互连,并通过85 /spl ω /传输线同轴电缆与50 /spl ω /系统电子设备匹配。构建了几个原型阵列,并取得了令人满意的结果。平均中心频率为34 MHz,每个元件的-6 dB带宽至少为45%。最近和次最近元件的最大电声串扰小于-29 dB,平均40 dB脉冲长度为105 ns。
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引用次数: 5
Broad band microwave probe for nondestructive test of dielectric coatings 用于介质涂层无损检测的宽带微波探头
A. Grishin, V. Denysenkov
We report on nondestructive characterization of Thermal Barrier Coatings (TBC: YSZ/MCrAlY/Ni-superalloy). To test TBC we have employed the method of electromagnetic defectoscopy. We have modernized this method by applying microwave probe instead of RF coil: an open-ended coaxial probe was used to measure complex permittivity of dielectric material /spl epsiv/ = /spl epsiv/' + /spl epsiv/". The probe is basically a coaxial transmission line with an open end put into tight mechanical contact with the sample under test. Complex permittivity of the sample material was calculated from the coefficient of microwave reflection from the probe-sample interface. Using the probe the complex permittivity can be measured in a wide frequency range. Such broadband spectroscopy enables detection of foreign phase inclusions, delamination of dielectric layer and cracks on the ceramics/metal substrate interface, etc. Microwave probe enables noninvasive and nondestructive test of both small-area and large-area surfaces. Defects in the ceramic layer under test are revealed as anomalies of the dielectric permittivity on the background of almost constant /spl epsiv/, which is characteristic for the rest of the material.
本文报道了热障涂层(TBC: YSZ/MCrAlY/Ni-superalloy)的无损表征。为了检测TBC,我们采用了电磁缺陷检查的方法。采用微波探针代替射频线圈,实现了该方法的现代化:采用开放式同轴探针测量介电材料的复介电常数/spl epsiv/ = /spl epsiv/' + /spl epsiv/'”。探头基本上是一条同轴传输线,其开口端与被测样品紧密机械接触。根据探针-样品界面的微波反射系数计算样品材料的复介电常数。利用探针可以在很宽的频率范围内测量复介电常数。这种宽带光谱可以检测到异相夹杂物、介电层分层和陶瓷/金属衬底界面上的裂纹等。微波探头可以实现小面积和大面积表面的无创和无损检测。被测陶瓷层中的缺陷表现为介电常数在几乎恒定/spl /背景下的异常,这是材料其余部分的特征。
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引用次数: 4
Bi/sub 4/Ti/sub 3/O/sub 12/-based lead-free piezoelectric ceramics with grain orientation 具有晶粒取向的Bi/sub 4/Ti/sub 3/O/sub 12基无铅压电陶瓷
H. Nagata, Y. Fujita, H. Enosawa, T. Takenaka
Piezoelectric properties of Bi/sub 4/Ti/sub 3-x/Nb/sub x/O/sub 12/ [BITN-x] and B/sub 4/Ti/sub 3-x/V/sub x/O/sub 12/ [BITV-x] ceramics are investigated. Furthermore, grain orientation effects of BITN and BITV ceramics on their piezoelectric properties are studied using the hot-forging (HF) method. The optimal sintering temperature of the BITV ceramic becomes lower with increasing the amount of doped-V ions. On the ordinarily fired (OF) sample with a random orientation, an electromechanical coupling factor, k/sub 33/ of BITN-0.08 and BITV-0.02 ceramics enhanced 0.20 and 0.25. On the HF sample, k/sub 33/ values of BITN-0.08 and BITV-0.04 ceramics enhanced the 0.39 and 0.38, respectively.
研究了Bi/sub 4/Ti/sub 3-x/Nb/sub x/O/sub 12/ [BITV-x]和B/sub 4/Ti/sub 3-x/V/sub x/O/sub 12/ [BITV-x]陶瓷的压电性能。此外,采用热锻(HF)方法研究了BITN和BITV陶瓷的晶粒取向对压电性能的影响。随着掺杂量的增加,BITV陶瓷的最佳烧结温度逐渐降低。在随机取向的普通烧成(OF)样品上,BITN-0.08和BITV-0.02陶瓷的机电耦合系数k/sub 33/分别提高了0.20和0.25。在HF样品上,BITN-0.08和BITV-0.04陶瓷的k/sub 33/值分别提高了0.39和0.38。
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引用次数: 0
期刊
Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.
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