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Wave front sensing for metrology by using optical filter 用滤光片测量波前传感
Pub Date : 2019-06-28 DOI: 10.1117/12.2530013
G. Fütterer
An interferometric problem is the limited fringe density, which is due to the limited allowed slope difference of superimposed wave fronts. Thus, the angular dynamic range of measurable surfaces and objects under test is limited. In other words, all shapes that deviate from a plane surface or a sphere represent a measuring problem in interferometers, or require an individually adapted null optics, which might cost e.g. 10 k∈ or more. In addition, ground surfaces cannot be measured in standard interferometers, except by using Speckle interferometry, which is limited in resolution. Freeform optics are very problematic. Even when polished, only tactile or confocal coordinate measurement might work. Several interferometers address the problem of the angular deviation to a sphere. For instance, lateral stitching on a curved surface, which is equivalent to the best-fit sphere, or longitudinal stitching is used. To use a tilted wave interferometer for asphere metrology is another option, which provides versatile measurement configurations. The approach discussed here is to use optical filters. The development of this technique is part of a project most recently started at the Technology Campus in Teisnach. The surface under test (SUT) is imaged onto an optical filter, which has a calibrated angular selectivity. Thus, the angles of the local wave front normal vectors are transferred into an intensity distribution. A set of angular measurements enables reduced uncertainty of the wave front measurement. Aspects as e.g. the working principle, boundary conditions and the identification of practical filters are discussed in the paper.
干涉测量的一个问题是有限条纹密度,这是由于有限允许的斜率差叠加波前。因此,被测表面和被测物体的角动态范围是有限的。换句话说,所有偏离平面表面或球体的形状都代表干涉仪的测量问题,或者需要单独适应的零光学元件,这可能需要花费例如10 k∈或更多。此外,地面表面不能在标准干涉仪测量,除非使用散斑干涉,这是有限的分辨率。自由曲面光学是非常有问题的。即使经过抛光,也只能使用触觉或共聚焦坐标测量。一些干涉仪解决了到球体的角偏差问题。例如,在曲面上使用横向拼接,相当于最适合的球体,或者使用纵向拼接。使用倾斜波干涉仪进行非球面测量是另一种选择,它提供了多种测量配置。这里讨论的方法是使用光学滤光片。这项技术的开发是泰斯纳赫技术园区最近启动的一个项目的一部分。被测表面(SUT)成像到光学滤光片上,该滤光片具有校准过的角选择性。因此,局部波前法向量的角度被转换为强度分布。一组角度测量可以减少波前测量的不确定性。本文从工作原理、边界条件和实际滤波器的辨识等方面进行了讨论。
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引用次数: 1
Monte Carlo simulations: a tool to assess complex measurement systems 蒙特卡罗模拟:一种评估复杂测量系统的工具
Pub Date : 2019-06-28 DOI: 10.1117/12.2526799
A. Harsch, C. Pruss, G. Baer, W. Osten
In the metrology of aspheres and freeforms, missing reference surfaces are a big challenge. The evaluation of the performance of measurement systems is currently done by round robin tests. Since the true form of the used specimens are unknown, the question still remains: who is right? This problem is also faced during the assessment of the performance of the Tilted Wave Interferometer. For both the calibration and measurement complex algorithms are applied. They calculate the system model parameters or the surface error from phaseshifting data. The analytical evaluation of different configurations or the influence of certain errors is impossible. The GUM (Guide to the Expression of Uncertainty in Measurement) proposes Monte Carlo simulations as an option for uncertainty evaluations. They are applicable for complex relationships between a measurand and the system’s input quantities. By repeatedly setting the input quantities to random values within a given range and evaluating the system response, statistically relevant data can be generated. In this contribution we present a Monte Carlo based simulation environment for the performance assessment of non-null interferometric measurements. By using the presented simulation tool, virtual experiments can be executed, including the calibration of the setup. They provide simulated measurement data - in the case of the Tilted Wave Interferometer simulated phase data – taking a number of possible errors, like interferometer errors, stage errors and errors of the reference spheres, into account. On this basis, complete calibration procedures and measurements on given samples can be simulated. Its result can be compared with the simulated truth, since all parameters and errors are known, and a statement about the performance can be made. This tool also proves useful for investigations on effects of measurement parameters such as misalignments of the sample.
在球面和自由曲面的测量中,缺少参考面是一个很大的挑战。测量系统的性能评估目前是通过循环测试来完成的。由于所用标本的真实形态尚不清楚,问题仍然存在:谁是正确的?在对倾斜波干涉仪的性能进行评估时,也会遇到这个问题。对于标定和测量都采用了复杂的算法。他们根据相移数据计算系统模型参数或表面误差。对不同结构或某些误差的影响进行分析评估是不可能的。GUM(测量不确定度表达指南)建议蒙特卡罗模拟作为不确定度评估的一种选择。它们适用于测量量与系统输入量之间的复杂关系。通过反复将输入量设置为给定范围内的随机值,并评估系统响应,可以生成统计相关数据。在这个贡献中,我们提出了一个基于蒙特卡罗的模拟环境,用于非零干涉测量的性能评估。利用所提出的仿真工具,可以进行虚拟实验,包括装置的标定。它们提供模拟测量数据-在倾斜波干涉仪模拟相位数据的情况下-考虑到许多可能的误差,如干涉仪误差,阶段误差和参考球体的误差。在此基础上,可以模拟给定样品的完整校准过程和测量。由于所有参数和误差都是已知的,因此可以将其结果与模拟真值进行比较,并可以对性能进行陈述。该工具也证明了有用的调查测量参数的影响,如样品的错位。
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引用次数: 3
Measurement of freeforms and complex geometries by use of tactile profilometry and multi-wavelength interferometry 使用触觉轮廓测量法和多波长干涉测量法测量自由形状和复杂几何形状
Pub Date : 2019-06-28 DOI: 10.1117/12.2526734
M. Wendel
A comparison of two different measurement approaches, a tactile profilometer as well as a non-contact point-probe based metrology system, is conducted. The properties of each approach are highlighted, and measurement results examined.
比较了两种不同的测量方法,即触觉轮廓仪和基于非接触式点探针的测量系统。强调每种方法的特性,并检查测量结果。
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引用次数: 2
A new approach to surface shape and centration measurement on aspheres with the new V-SPOT technology 利用新型V-SPOT技术测量球面表面形状和浓度的新方法
Pub Date : 2019-06-28 DOI: 10.1117/12.2527650
E. Hofbauer, R. Kometer
Accurate measurement of centration of aspheric lenses or even freeforms is a challenge for most devices in optical manufacturing. We are providing a new attempt by combining an autocollimation device and a Vignetting Field Stop [1, 2, 3] device to measure lens centration and sagittal surface profile in a deflectometric approach. Both devices work independently at high accuracy. This presentation explains the technical setup, consisting of an autocollimation sensor (ELWIMAT-AKF) and a Vignetting Field Stop Sensor (ELWIMAT V-SPOT), which is mounted together with an air bearing rotary table in a vertical arrangement. Secondly, we provide the results of the centration measurement and the results from the surface reconstruction and slope error from the measured sagittal angle deviations. Finally, the results from a measured asphere (High Level Expert Meeting HLEM sample #3) is critically discussed to state the accuracy and applicability of the proposed measurement attempt.
精确测量非球面透镜甚至自由曲面的焦点是光学制造中大多数设备面临的挑战。我们提供了一种新的尝试,通过结合自动准直装置和渐晕场止光器[1,2,3]装置,以偏转法测量透镜集中度和矢状面轮廓。两种设备独立工作,精度高。本演示解释了技术设置,包括一个自动准直传感器(ELWIMAT- akf)和一个逐光场停止传感器(ELWIMAT V-SPOT),它与一个空气轴承转台垂直安装在一起。其次,给出了浓度测量结果和表面重建结果以及矢状角偏差的斜率误差。最后,对非球面测量结果(高级别专家会议HLEM样品#3)进行了严格讨论,以说明所提出的测量尝试的准确性和适用性。
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引用次数: 2
Processing of a new nonlinear optical crystal for continuous wave UV-laser applications 一种用于连续波紫外激光器的新型非线性光学晶体的加工
Pub Date : 2019-06-28 DOI: 10.1117/12.2528140
Jessica Stelzl, C. Wünsche, S. Höfer
Lasers have been known for a long time and are used in a wide variety of fields such as industrial and material processing or measuring and control technology. A new application is being tested which aims to use continuous wave UV-lasers in metrology. For this application a nonlinear optical crystal is needed. Its processing is developed in a two-year project at the Institute for Precision Manufacturing and High-Frequency Technology of Deggendorf Institute of Technology. The crucial factor for the full optical performance in the UV range is the low roughness of the crystal surface, as it is installed between two prisms and the contactability between them should be ensured. In China, a nonlinear crystal that meets the requirements has already been designed and a production process for the raw crystal has been established. However, since the production of optically homogenous crystals has proven to be difficult, the availability of such is very limited. For this reason, a reference material with similar hardness and material behaviour is used in the process development in order not to be limited in the number of trials. It is important to be able to transfer the results from the reference material in an analogous way to the original crystal. One challenge of the project lies in the crystal thickness, since only a maximum thickness of three millimetres can be achieved for the purest form of the crystal required in the application. Therefore, it is important to handle the material sparingly during the process. In addition, the small dimensions of about ten to five millimetres and the brittleness of the material pose a problem. The goal of the project will be to develop a process that can circumvent all these problems so that small roughness of the crystal can be achieved by precision polishing.
激光已经知道了很长一段时间,并广泛用于各种领域,如工业和材料加工或测量和控制技术。一种新的应用正在测试中,目的是在计量中使用连续波紫外激光器。对于这种应用,需要一种非线性光学晶体。它的加工是在德根多夫理工学院精密制造和高频技术研究所的一个为期两年的项目中开发的。在UV范围内实现全光学性能的关键因素是晶体表面的低粗糙度,因为它安装在两个棱镜之间,并且应该确保它们之间的可接触性。国内已经设计出符合要求的非线性晶体,并建立了原晶体的生产工艺。然而,由于光学均质晶体的生产已被证明是困难的,因此这种晶体的可用性非常有限。因此,为了不受试验次数的限制,在工艺开发中使用具有相似硬度和材料性能的参考材料。能够以类似的方式将参考物质的结果转移到原始晶体是很重要的。该项目的一个挑战在于晶体厚度,因为在应用中需要的最纯净的晶体形式只能达到3毫米的最大厚度。因此,在加工过程中要节约处理物料。此外,大约10到5毫米的小尺寸和材料的脆性也构成了一个问题。该项目的目标将是开发一种可以绕过所有这些问题的工艺,以便通过精密抛光实现晶体的小粗糙度。
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引用次数: 1
MSF-error prevention strategies for the grinding process 磨削过程的msf误差预防策略
Pub Date : 2019-06-28 DOI: 10.1117/12.2526581
M. Pohl, U. Bielke, R. Boerret, R. Rascher, Olga Kukso
This research is focused on the link between manufacturing parameters and the resulting mid-spatial frequency error in the manufacturing process of precision optics. This third publication focuses on strategies of avoidance and generation mechanisms of the mid-spatial frequency errors from the grinding process. The Goal is to understand the generation mechanisms of the mid-spatial frequency errors and avoid their appearance in the manufacturing process.
研究了精密光学元件制造过程中制造参数与中频误差之间的关系。这第三出版物的重点是避免策略和产生机制的中空间频率误差的磨削过程。目的是了解中空间频率误差的产生机制,避免其在制造过程中出现。
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引用次数: 3
Filled-Up-Microscopy (FUM): a non-destructive method for approximating the depth of sub-surface damage on ground surfaces 填充显微镜(FUM):一种近似地表亚表面损伤深度的非破坏性方法
Pub Date : 2018-08-07 DOI: 10.1117/12.2318576
C. Trum, C. Vogt, Sebastian Sitzberger, O. Faehnle, R. Rascher
Subsurface Damages (SSDs) can cause a wide variety of defects to optical lenses and other components. In addition to the adhesion and quality of coatings, the mechanical stability, the transmission quality and the laser-induced damage threshold (LIDT) of the products, is also affected. It is, therefore, attempted to get components as SSD-free as possible at the end of the production chain. Already during the individual production steps, it is important to know the depth of the SSDs in order to remove them in the following manufacturing steps. To design the manufacturing processes efficiently and avoid damage, it is important to be able to measure the depth and characteristics of SSDs as precisely as possible. There are a several approaches and methods to determine SSDs known in literature. However, many of them inevitably lead to the destruction of the workpiece. Although others are non-destructive, but very complex in design and/or associated with large investments. Likewise, only a few are suitable for determining SSDs on ground rough surfaces. Filled-Up Miicroscopy (FUM) is an alternative approach to approximating the depth of SSDs, even on rough surfaces without destroying them. At a first glance at the method, the procedure is described in detail and all necessary steps of preparing the samples are shown. A first comparison with the known Ball Dimpling Method confirms the functionality of the concept.
亚表面损伤(ssd)会对光学透镜和其他部件造成各种各样的缺陷。除了影响涂层的附着力和质量外,还会影响产品的机械稳定性、传输质量和激光损伤阈值(LIDT)。因此,它试图在生产链的末端获得尽可能无ssd的组件。在各个生产步骤中,了解ssd的深度非常重要,以便在接下来的制造步骤中删除它们。为了有效地设计制造工艺并避免损坏,能够尽可能精确地测量ssd的深度和特性非常重要。文献中已知有几种方法和方法来确定ssd。然而,其中许多不可避免地导致工件的破坏。虽然其他的是非破坏性的,但在设计上非常复杂和/或与大量投资有关。同样,只有少数适合于确定地面粗糙表面上的ssd。填充显微镜(FUM)是一种接近ssd深度的替代方法,即使在粗糙的表面上也不会破坏它们。乍一看,该方法详细描述了程序,并显示了制备样品的所有必要步骤。与已知的球窝法的第一次比较证实了这个概念的功能。
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引用次数: 1
Mid-spatial frequency errors of mass-produced aspheres 量产球面的中频误差
Pub Date : 2018-08-07 DOI: 10.1117/12.2318663
Wilhelmus Messelink, Amy Frantz, S. Ament, Matthew Stairiker
For the (CNC) polishing of aspheres, generally a compliant, sub-aperture tool is applied, which may cause mid- spatial frequency errors on the surface of the workpiece. The tolerance on surface figure is commonly given in peak-to-valley (PV) or root-mean-square (RMS). Even if a surface is fabricated within specified tolerances according to one of the mentioned metrics, the optical performance may be inadequate for the desired application. For the specification of the tolerance on mid-spatial frequency errors, several other characteristics have been proposed, e.g. power spectral density (PSD) or surface slope error. This paper presents an investigation into the mid-spatial frequency form error of mass-produced aspheres, discusses the results and draws relevant conclusions.
对于(CNC)球面抛光,通常使用柔性的子孔径工具,这可能会导致工件表面的中频误差。表面图形的公差通常用峰谷差(PV)或均方根差(RMS)来表示。即使表面是根据上述指标之一在规定的公差范围内制造的,光学性能也可能不足以满足所需的应用。对于中空间频率误差公差的规定,提出了其他几个特征,如功率谱密度(PSD)或表面斜率误差。本文对量产球的中空间频率形式误差进行了研究,并对结果进行了讨论,得出了相关结论。
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引用次数: 1
Fast and reliable in-situ measurements of large and complex surfaces using a novel deflectometric device 快速和可靠的原位测量大型和复杂的表面使用新的偏转测量装置
Pub Date : 2018-08-07 DOI: 10.1117/12.2318583
R. Kometer, E. Hofbauer
In-situ measurements of complex surfaces during the polishing process is a challenge for the production of aspheric surfaces or freeforms. We are providing a new attempt by using a scanning deflectometric device based on our recently published DaOS [1] principle, which allows in-situ measurements of large optical surfaces in realistic production environments and offers the conditions for direct intervention and correction in the polishing process. The results of insitu surface measurements after three polishing steps of a large glass substrate (320 mm in diameter) in a lever-polishing machine (NLP500 from Stock Konstruktion GmbH) are shown and critically compared with interferometric measurements on a SSI-A Interferometer. In this paper, the technical setup consisting of a highly precise scanning penta prism device and a Vignetting Field Stop (VFS) Sensor is explained. Secondly, we are discussing the mathematical algorithm to reconstruct the complete surface from angle measurements from a given number of cross-sectional cuts. The data of the surface reconstruction are transformed into a XYZ-file format to be analyzed with MetroPro®. The results are shown and discussed in terms of accuracy and reproducibility. Finally, a comparison with interferometric measurements on an SSI-A (QED) at TH Deggendorf (THD), Technology Campus Teisnach is shown to proof the degree of accuracy and applicability of our new, fast and reliable device for in-situ measurements of complex surfaces.
在抛光过程中,复杂表面的原位测量对于非球面或自由曲面的生产是一个挑战。基于我们最近发表的DaOS[1]原理,我们正在使用扫描偏转测量设备进行新的尝试,该设备允许在现实生产环境中对大型光学表面进行原位测量,并为抛光过程中的直接干预和校正提供条件。本文给出了在杠杆抛光机(NLP500,来自Stock konstrution GmbH)上对直径为320 mm的大型玻璃基板进行三个抛光步骤后的原位表面测量结果,并与SSI-A干涉仪上的干涉测量结果进行了严格的比较。本文介绍了由高精度扫描五棱镜装置和渐晕场停止(VFS)传感器组成的技术装置。其次,我们正在讨论从给定数量的横截面切割的角度测量重建完整表面的数学算法。表面重建数据被转换成xyz文件格式,用MetroPro®进行分析。结果显示并讨论了准确性和再现性。最后,与德国德根多夫理工学院(THD)的SSI-A (QED)干涉测量进行了比较,证明了我们的新型、快速、可靠的设备用于复杂表面的原位测量的准确性和适用性。
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引用次数: 2
SPDT and standard CNC-grinding of tungsten carbide molds for precision glass molding: an experimental process analysis 精密玻璃成型用碳化钨模具的SPDT和标准cnc磨削:实验过程分析
Pub Date : 2018-08-07 DOI: 10.1117/12.2318710
C. Vogt, O. Faehnle, M. Doetz
The contents of this work are based on [1], [2] and [3]. Using the three wagons approach, critical parameters were identified and the process window of ductile machining was considerably enlarged. This made it possible to increase the critical depth of cut, which is ten times greater than predicted by the Bifano formula. A new formula to describe the machining process was developed and verified experimentally. In addition, the level of surface roughness (Sq) generated in ductile mode was analyzed and a formula was generated that allows roughness prediction depending on the critical process parameters. Finally, both formulas were used to create optimized sets of process parameters that produce a "first light" in ductile machining for a) single point diamond turning (SPDT) on ultra-precision machines (UPM) of binder-free carbide form and b) non-UPM, standard CNC ductile grinding of WC and glass.
本工作的内容以[1]、[2]、[3]为基础。采用三车法,确定了关键参数,大大扩大了延性加工的工艺窗口。这使得增加临界切割深度成为可能,这是比比法诺公式预测的十倍。提出了一种描述加工过程的新公式,并进行了实验验证。此外,分析了在韧性模式下产生的表面粗糙度(Sq)水平,并生成了一个公式,可以根据关键工艺参数进行粗糙度预测。最后,使用这两个公式来创建优化的工艺参数集,为无粘结剂硬质合金形式的超精密机床(UPM)上的单点金刚石车削(SPDT)和非UPM的WC和玻璃的标准CNC球墨磨削产生“第一光”。
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引用次数: 3
期刊
Precision Optics Manufacturing
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