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gPVA: a system for the classification of grinding tools gPVA:研磨工具分类系统
Pub Date : 2018-08-07 DOI: 10.1117/12.2318695
C. Vogt, O. Faehnle, R. Rascher
The Grinding Process Validation Approach (gPVA) presented in 2017 enables the determination of suitable parameter windows for grinding tools. The abrasion properties of grinding tools are determined experimentally. The collected data can be used to derive optimum parameters for defined grinding tasks so that service life, process stability and productivity can be maximized. In this publication, the gPVA method is used to compare different grinding tools. Differences in stock removal performance with identical specified tools from different manufacturers are investigated. In addition to that, recommended tools for fine grinding of fused silica are examined also.
2017年提出的磨削过程验证方法(gPVA)能够确定磨削工具的合适参数窗口。实验确定了磨具的磨损性能。收集到的数据可用于确定磨削任务的最佳参数,从而最大限度地提高使用寿命、工艺稳定性和生产率。在这篇文章中,gPVA方法被用来比较不同的磨削工具。研究了不同厂家生产的相同规格刀具在除渣性能上的差异。除此之外,还对熔融石英的精磨推荐工具进行了研究。
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引用次数: 0
Characterizing the resolving power of laser Fizeau interferometers 激光菲索干涉仪分辨能力的表征
Pub Date : 2018-08-07 DOI: 10.1117/12.2317630
Torsten Glaschke, L. Deck, P. D. de Groot
Optical fabrication relies on precision metrology over a wide range of lateral scales. Consequently, an important performance parameter for Fizeau interferometers is the instrument transfer function (ITF), which specifies the system response as a function of surface spatial frequency. Advances in test procedures, instruments and automated analysis techniques now enable reliable ITF characterization independent of many traditional sources of error. Results here show the ITF for a commercial 100-mm aperture interferometer with spatial frequency response ranging from 0 to 1500 cycles per aperture
光学制造依赖于在大范围横向尺度上的精密计量。因此,菲索干涉仪的一个重要性能参数是仪器传递函数(ITF),它将系统响应指定为表面空间频率的函数。测试程序、仪器和自动化分析技术的进步现在使ITF的可靠表征不受许多传统误差来源的影响。这里的结果显示了商用100毫米孔径干涉仪的ITF,其空间频率响应范围为0到1500周期/孔径
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引用次数: 5
Simulation of MSF errors using Fourier transform 用傅里叶变换模拟MSF误差
Pub Date : 2018-08-07 DOI: 10.1117/12.2317484
M. Pohl, R. Boerret, R. Rascher, Olga Kukso
This research is focused on the link between manufacturing parameters and the resulting mid spatial frequency error in the manufacturing process of precision optics. This first publication focuses on the parameters of the grinding step. The Goal is to understand and avoid the appearance of the mid spatial frequency error and develop a simulation which is able to predict the resulting mid spatial frequency error for/of a manufacturing process.
研究了精密光学元件制造过程中制造参数与中频误差之间的关系。这第一出版物的重点是磨削步骤的参数。目标是了解和避免中频误差的出现,并开发一种能够预测制造过程中频误差的模拟。
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引用次数: 7
Workpiece self-weight in precision optics manufacturing: compensation of workpiece deformations by a fluid bearing 精密光学制造中的工件自重:用流体轴承补偿工件变形
Pub Date : 2018-08-07 DOI: 10.1117/12.2318577
Sebastian Sitzberger, C. Trum, R. Rascher, M. Zaeh
The effects, the extent and the importance of workpiece deformations, particularly lenses, caused by the weight of the workpiece itself, were examined in a previous paper1 . The considered deformations are in the single-digit to two-digit nanometer range. The investigation was carried out by FEM calculations. The conclusion of the previous aper was that a full-surface support of a workpiece in the processing of one surface presumably produces the best results. Furthermore, it was found that if the second functional surface is not to be touched in the process, a full contact lens mounting on its circumference is advisable. An alternative method for fixing precision lenses is therefore desirable. This can be accomplished in two steps. As a first step, the lens must be gripped at its periphery so that none of the optically functional surfaces of the lens is compromised. However, the complete circumference has to be fixated gaplessly because a punctual fixation has the disadvantage of deforming the lens surface asymmetrically. As a second step, the freely hanging lens surface should be supported to minimize deformation. An approach had to be found that supports the surface like a solid bearing but at the same time does not touch it. Therefore, the usage of an incompressible fluid as a hydrostatic bearing for full-surface support is pursued. For this purpose, the bottom side of the lens has to be stored on water. The results of the FEM simulation showed that with a fluid bearing the resulting deformations can be drastically reduced in comparison to a freely hanging surface. Furthermore, under the right conditions, a resulting deformation comparable to a full surface solid support can be achieved. The content of this paper is a test series under laboratory conditions for a first validation of the theoretical results. Therefore, a prototype model to test a lens fixation with a fluid bearing was developed and manufactured. The resulting deformations were measured with an interferometer and the effects are discussed.
工件变形的影响、程度和重要性,特别是由工件本身的重量引起的透镜,在以前的一篇论文中进行了研究。所考虑的变形在一位数到两位数的纳米范围内。通过有限元计算进行了研究。前一篇论文的结论是,在一个表面的加工中,工件的全表面支持可能产生最好的结果。此外,我们还发现,如果在这个过程中不触及第二个功能表面,建议在其周围安装一个完整的隐形眼镜。因此,需要一种固定精密透镜的替代方法。这可以通过两个步骤来完成。作为第一步,必须抓住镜头的外围,这样镜头的光学功能表面就不会受到损害。然而,整个周长必须无间隙固定,因为准时固定的缺点是使透镜表面变形不对称。第二步,对自由悬挂的透镜表面进行支撑,使变形最小化。必须找到一种方法,使其像固体轴承一样支撑表面,同时又不接触表面。因此,使用不可压缩流体作为静压轴承的全表面支持是追求的。为了达到这个目的,镜片的底部必须放在水中。有限元模拟结果表明,与自由悬挂表面相比,在流体轴承下产生的变形可以大大减少。此外,在适当的条件下,可以实现与全表面固体支撑相当的变形。本文的内容是在实验室条件下进行一系列试验,对理论结果进行首次验证。因此,开发并制造了一个原型模型来测试带有流体轴承的透镜固定。用干涉仪测量了产生的变形,并讨论了其影响。
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引用次数: 0
Tight tolerances for large-volume precision-pressed plastic optics (COMPAS) 大体积精密压制塑料光学元件(COMPAS)的严格公差
Pub Date : 2018-08-07 DOI: 10.1117/12.2318670
Marc Wielandts, Remi Wielandts, R. Leutz
Ultra-precision molded polymer optics range from high precision imaging objectives to tiny lenses like those used in camera modules for cell phones, where centration tolerances and filling of small features is a challenge. We propose a manufacturing process termed Compression Molded Polymer Aspheres (COMPAS). Polymer preforms are inserted into mold cavities, and isothermally heated above glass point. Novel tooling has been developed to produce high volumes of COMPAS optics at reasonable cost and cycle time, using large scale parallelization of mold cavities. First results of the COMPAS process are very encouraging: shape accuracy (<500 nm peak-to-valley), surface centration (<5 μm), and birefringence (<20 nm/cm) are well below values typically measured for injection molded lenses. COMPAS lenses are also gate free. We describe details of the on-axis turning of arrays and multi-cavities (DPI) and the COMPAS precision polymer molding process. We describe the metaphysical background of disruptive engineering based on physical principles, which is the reason behind developing DPI and COMPAS.
从高精度成像物镜到手机相机模块中使用的微型镜头,超精密模制聚合物光学器件范围广泛,其中集中公差和小特征填充是一个挑战。我们提出了一种称为压缩成型聚合物球体(COMPAS)的制造工艺。聚合物预制件插入模腔,并在玻璃点以上等温加热。新型的工具已经开发出来,以合理的成本和周期时间生产大量的COMPAS光学元件,使用大规模的模具腔并行化。COMPAS工艺的初步结果非常令人鼓舞:形状精度(峰谷值<500 nm)、表面浓度(<5 μm)和双折射(<20 nm/cm)远低于注塑透镜的典型测量值。COMPAS镜头也是无栅极的。我们详细介绍了阵列和多腔(DPI)的轴向转动和COMPAS精密聚合物成型工艺。我们描述了基于物理原理的颠覆性工程的形而上背景,这是开发DPI和COMPAS的原因。
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引用次数: 0
Basics of ion beam figuring and challenges for real optics treatment 离子束计算的基础和实际光学处理的挑战
Pub Date : 2018-08-07 DOI: 10.1117/12.2318572
D. Schaefer
Nowadays Ion Beam Figuring (IBF) is a well-known finishing technique for the production of ultra-precise optical surfaces. The diameter of optics can be in the range of 5 mm up to 2000 mm. Newest in-house developments extend the range down to 1 mm, which follows the upcoming market for micro optical systems. Besides IBF, ion beam etching technology (IBE) enables roughness improvement by different methods. Feature sizes from < 100 nm up to > 10 μm can be smoothed. However, operational parameters of IBF or IBE technology need to be adapted to the optical element. Beside the right choice of ion beam sizes (tool size) to remove equivalent feature sizes of the optics, also the shape (concave/convex) is of importance to consider side effects like re-sputtering or contamination originating from the ion beam source. This article will tabulate the state of the art of ion beam technology for ultra-precise optics manufacturing considering all parameters and side effects for efficient optics finishing.
离子束加工(IBF)是目前生产超精密光学表面的一种著名的精加工技术。光学元件的直径可以在5毫米到2000毫米的范围内。最新的内部开发将范围扩展到1毫米,这紧跟即将到来的微光学系统市场。除了IBF,离子束刻蚀技术(IBE)可以通过不同的方法改善粗糙度。可以平滑从< 100 nm到> 10 μm的特征尺寸。然而,IBF或IBE技术的操作参数需要与光学元件相适应。除了正确选择离子束尺寸(工具尺寸)以消除光学元件的等效特征尺寸外,形状(凹/凸)也很重要,要考虑副作用,如重新溅射或源自离子束源的污染。本文将列出用于超精密光学制造的离子束技术的现状,考虑到高效光学精加工的所有参数和副作用。
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引用次数: 7
Increasing critcal depth of cut in ductile mode machining of tungsten carbide by process parameter controlling 通过工艺参数控制提高碳化钨韧性模加工的临界切削深度
Pub Date : 2018-08-07 DOI: 10.1117/12.2318709
M. Doetz, O. Dambon, F. Klocke, J. Lee, O. Fähnle, E. Langenbach
Ductile mode machining is usually applied for the optical finishing operation of e.g. tungsten carbide molds. One request for this mode is not to exceed the critical depth of cut hcu,crit characterized by the transition point from ductile to brittle material removal. Based on experimental investigations a formula for the critical depth of cut, relating the material specific properties Young’s-Modulus E, material hardness H and fracture toughness KC was developed by Bifano et. all [1]. Even when the influence of cutting conditions, like tool or process characteristics, are neglected the formula is widely used for setting up UPM machines ever since. However, previous investigations have shown that hcu,crit strongly depends on coolant fluid characteristic as well as on the compressive stress applied into the cutting zone by the use of tools with e.g. negative rank angles [2]. In this paper, we report on a ductile process analysis applying a recently developed method for process optimization in optics fabrication [3]. Following that trail, critical process parameters have been identified and their influences on the critical depth of cut hcu,crit have been tested experimentally in fundamental ruling tests. Among others, following parameters were identified and tested: (a) characteristics of the coolant used, (b) the pH value of the coolant, (c) the tool specifications of the applied diamond and (d) whether ultrasonic assistance (US) is being switched on or off. Depending on the applied set of process parameters and for the experimental data collected, maximum ductile mode material removal rates could be achieved with dcmax = 1600 nm. That way, a new formula was developed, which allows the prediction of the critical depth of cut depending on critical process parameters while machining binderless nanocrystalline tungsten carbide. The formula was set up based on experimental results and is one step towards extending Bifanos formula taking the influences of critical process parameters into account.
韧性模式加工通常用于光学精加工,例如碳化钨模具。这种模式的一个要求是不超过临界切割深度,即从韧性到脆性材料去除的过渡点。Bifano等[1]在实验研究的基础上,推导出了与材料特性杨氏模量E、材料硬度H和断裂韧性KC相关的临界切割深度公式。即使忽略刀具或工艺特性等切削条件的影响,该公式也被广泛用于设置UPM机器。然而,先前的研究表明,hcu、crit在很大程度上取决于冷却液特性以及使用具有负等级角的工具施加到切割区域的压应力[2]。在本文中,我们报告了应用最近开发的光学制造过程优化方法的韧性过程分析[3]。在此基础上,确定了关键工艺参数,并在基本规则试验中测试了它们对切削临界深度的影响。其中,确定并测试了以下参数:(a)所使用冷却液的特性,(b)冷却液的pH值,(c)所应用金刚石的工具规格,(d)是否打开或关闭超声波辅助(US)。根据所应用的工艺参数集和所收集的实验数据,当dcmax = 1600 nm时,可实现最大的塑性模式材料去除率。通过这种方式,开发了一个新的公式,该公式允许在加工无粘结剂纳米晶碳化钨时根据关键工艺参数预测临界切割深度。该公式是在实验结果的基础上建立的,是对考虑关键工艺参数影响的比法诺斯公式进行扩展的一步。
{"title":"Increasing critcal depth of cut in ductile mode machining of tungsten carbide by process parameter controlling","authors":"M. Doetz, O. Dambon, F. Klocke, J. Lee, O. Fähnle, E. Langenbach","doi":"10.1117/12.2318709","DOIUrl":"https://doi.org/10.1117/12.2318709","url":null,"abstract":"Ductile mode machining is usually applied for the optical finishing operation of e.g. tungsten carbide molds. One request for this mode is not to exceed the critical depth of cut hcu,crit characterized by the transition point from ductile to brittle material removal. Based on experimental investigations a formula for the critical depth of cut, relating the material specific properties Young’s-Modulus E, material hardness H and fracture toughness KC was developed by Bifano et. all [1]. Even when the influence of cutting conditions, like tool or process characteristics, are neglected the formula is widely used for setting up UPM machines ever since. However, previous investigations have shown that hcu,crit strongly depends on coolant fluid characteristic as well as on the compressive stress applied into the cutting zone by the use of tools with e.g. negative rank angles [2]. In this paper, we report on a ductile process analysis applying a recently developed method for process optimization in optics fabrication [3]. Following that trail, critical process parameters have been identified and their influences on the critical depth of cut hcu,crit have been tested experimentally in fundamental ruling tests. Among others, following parameters were identified and tested: (a) characteristics of the coolant used, (b) the pH value of the coolant, (c) the tool specifications of the applied diamond and (d) whether ultrasonic assistance (US) is being switched on or off. Depending on the applied set of process parameters and for the experimental data collected, maximum ductile mode material removal rates could be achieved with dcmax = 1600 nm. That way, a new formula was developed, which allows the prediction of the critical depth of cut depending on critical process parameters while machining binderless nanocrystalline tungsten carbide. The formula was set up based on experimental results and is one step towards extending Bifanos formula taking the influences of critical process parameters into account.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121418283","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Contribution of the phase transfer function of extended measurement cavities to mid spatial frequencies and the overall error budget 扩展测量腔的相传递函数对中频的贡献和总体误差预算
Pub Date : 2018-08-07 DOI: 10.1117/12.2318711
G. Fütterer, J. Liebl, A. Haberl
A challenge of coaxial - measurement cavity based - interferometer is to realize an interference contrast in the vicinity of one and to realize a complete elimination of the parasitic reflections. Another challenge, which also exists in non-coaxial setups, is the phase transfer function of extended measurement cavities. Ideally, the surface under test (SUT) and the reference surface (REF) are both exactly imaged onto the detector plane. In practice, SUT and REF have to be placed within the depth of field (DOF), which refers to the object space. The term depth of focus refers to the image space. To avoid confusion, the depth of field might be referred to as DOOF (depth of object field) and the depth of focus might be referred to as DOIF (depth of image field). However, in many measurement situations, the REF is not placed within the DOOF, which is the small z-range, which is imaged onto the detector plane. Furthermore, the phase transfer function (PTF) of the REF and the image distortion of the REF are both dependent on the focal plane used to image the SUT onto the detector plane. Effects as phase deformation, image distortion and image blurring have to be taken into account when using extended measurement cavities. This can be done by using a look up table (LUT), which contains simulated and/or calibrated data. Thus, the related system error can be subtracted. A remaining challenge is an unknown object under test (OUT), which is measured by using a double path arrangement. The measured wave front depends on the two surfaces of the OUT and the position of the return mirror. For simplicity, a homogeneous substrate and a perfect return mirror might be presumed. The simulation of waves propagating within extended measurement cavities, as well as measurement results, will be discussed. In addition, the influence on the power spectral density (PSD) will be described. This is important for high end correction techniques as e.g. magneto rheological figuring (MRF) and ion beam figuring (IBF).
同轴测量腔型干涉仪面临的挑战是如何实现1附近的干涉对比度,并完全消除寄生反射。另一个挑战,也存在于非同轴设置中,是扩展测量腔的相传递函数。理想情况下,被测表面(SUT)和参考表面(REF)都精确成像到探测器平面上。在实践中,SUT和REF必须放置在景深(DOF)内,这是指对象空间。聚焦深度一词指的是图像空间。为避免混淆,景深可称为DOOF(对象景深),焦距可称为DOIF(图像景深)。然而,在许多测量情况下,REF没有被放置在DOOF内,这是一个很小的z范围,它被成像到探测器平面上。此外,reft的相传递函数(PTF)和reft的像畸变都依赖于SUT成像到探测器平面的焦平面。在使用扩展测量腔时,必须考虑相位变形、图像失真和图像模糊等影响。这可以通过使用包含模拟和/或校准数据的查找表(LUT)来完成。这样就可以减去相关的系统误差。剩下的挑战是一个未知的被测对象(OUT),它是通过使用双路径安排来测量的。测得的波前取决于外镜的两个表面和反射镜的位置。为简单起见,可以假设有一个均匀的衬底和一个完美的回镜。将讨论波在扩展测量腔内传播的模拟,以及测量结果。此外,还将描述对功率谱密度(PSD)的影响。这对于高端校正技术非常重要,例如磁流变校正(MRF)和离子束校正(IBF)。
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引用次数: 0
First steps in ELT optics polishing ELT光学抛光的第一步
Pub Date : 2018-08-07 DOI: 10.1117/12.2317604
R. Geyl, D. Bardon, R. Bourgois, N. Ferachoglou, E. Harel, C. Couteret
Green light for the construction of the 39-m aperture giant Extremely Large Telescope (ELT) was given by the European Southern Observatory (ESO) council on Dec 4th, 2014. Procurement of the key elements, especially the optics, was immediately initiated by ESO team. Up today, Safran Reosc was awarded all the key optical polishing and testing contracts with: 2015-07: contract for the Adaptive Optics M4 mirror thin glass petals, 2016-07: contract for the 4-m M2 convex mirror, 2017-02: contract for the 4-m M3 mirror. 2017-05: contract for polishing and intergation of the 931 1.45-m hexagonal segments for the giant 39-m M1 mirror assembly This paper is dedicated to highlighting the various challenges linked to these various optical fabrication projects and reporting about the progress of our work so far.
2014年12月4日,欧洲南方天文台(ESO)理事会为建造39米口径的超大望远镜(ELT)开了绿灯。ESO团队立即启动了关键元件的采购,特别是光学元件。今天,赛峰Reosc获得了所有关键的光学抛光和测试合同,包括:2015-07:自适应光学M4镜面薄玻璃花瓣合同,2016-07:4米M2凸面镜合同,2017-02:4米M3镜面合同。2017-05:为巨大的39米M1反射镜组件抛光和集成931个1.45米六角形部分的合同。本文致力于强调与这些不同光学制造项目相关的各种挑战,并报告我们到目前为止的工作进展。
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引用次数: 10
DefGO DefGO
Pub Date : 2018-08-07 DOI: 10.1117/12.2318704
J. Liebl, C. Schopf, R. Rascher
The manufacturing of optical lenses has various steps. Generally, the manufacturing can be split up into the following steps: the workpiece is pre-ground with a coarse tool; it is then fine-ground with a finer tool. As the final polishing is a demanding and time-consuming process that cannot manage large removal rations not can it equalise rough shape errors, the starting quality and surface quality needs to be as high as possible. According to the current state of technology, ground lenses must be measured with tactile measuring techniques in order to detect shape errors. This is timeconsuming and expensive, and only two dimensional profiles can be measured. DefGO’s project objective is to introduce deflectometry as a new, three dimensional lens measuring standard. A problem with the application of deflectometry is that the object to be measured has to reflect enough light, which is not the case for ground glass with rough surfaces. DefGO’s solution is to wet the lens with a fluid to create a closed reflecting surface.
光学透镜的制造有不同的步骤。一般来说,制造可分为以下几个步骤:用粗刀具预磨工件;然后用更精细的工具将其磨细。由于最后的抛光是一个要求高且耗时的过程,不能处理大的去除量,也不能平衡粗糙的形状误差,因此初始质量和表面质量需要尽可能高。根据目前的技术状况,地面透镜必须采用触觉测量技术来检测形状误差。这既耗时又昂贵,而且只能测量二维轮廓。DefGO的项目目标是引入偏转法作为一种新的三维透镜测量标准。应用偏转法的一个问题是,被测量的物体必须反射足够的光,而对于表面粗糙的磨砂玻璃来说,情况并非如此。DefGO的解决方案是用液体湿润镜片,形成一个封闭的反射表面。
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引用次数: 0
期刊
Precision Optics Manufacturing
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