Pub Date : 2021-03-22DOI: 10.1109/INERTIAL51137.2021.9430458
M. Skalský, J. Fialka, Ladislav Kopečný, Z. Havránek
The paper presents an effective method for scale-factor stabilization and modulation depth control in a low-cost all-fiber interferometric gyroscope utilizing a piezoelectric phase modulator to perform modulation for biasing as well as compensation of the Sagnac phase shift in a closed-loop. The technique uses a virtual-sensor approach consisting in deriving the actual compensation shift from comparison of the real and the modeled gyroscope output intensity signals. The first experimental results are provided, suggesting that the model-base approach can decrease the scale-factor drift by more than one order of magnitude to reduce significantly the effect of the modulator parameter instability.
{"title":"Scale-Factor Stability Control Technique for Closed-Loop All-Fiber Interferometric Optical Gyroscope","authors":"M. Skalský, J. Fialka, Ladislav Kopečný, Z. Havránek","doi":"10.1109/INERTIAL51137.2021.9430458","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430458","url":null,"abstract":"The paper presents an effective method for scale-factor stabilization and modulation depth control in a low-cost all-fiber interferometric gyroscope utilizing a piezoelectric phase modulator to perform modulation for biasing as well as compensation of the Sagnac phase shift in a closed-loop. The technique uses a virtual-sensor approach consisting in deriving the actual compensation shift from comparison of the real and the modeled gyroscope output intensity signals. The first experimental results are provided, suggesting that the model-base approach can decrease the scale-factor drift by more than one order of magnitude to reduce significantly the effect of the modulator parameter instability.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125499320","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-03-22DOI: 10.1109/INERTIAL51137.2021.9430455
Milind S. Pandit, G. Sobreviela, Callisto Pili, P. Steinmann, Douglas Young, Chun Zhao, Colin Baker, A. Seshia
Optimization of the oscillator front-end for resonant sensors is critical to addressing key metrics such as noise floor and output stability. This paper reports a method to improve the noise floor of resonant MEMS accelerometers by avoiding aliasing of high-frequency seismic noise for long-period measurements. In particular, the optimization of a Phase Locked Loop (PLL) front-end is employed for continuous tracking of the output. A noise floor improvement of 13x is seen in comparison to the case with no anti-aliasing control. A custom PLL is designed to mitigate the impact of high-frequency noise enabling the realization of a resonant accelerometer sensor module with a noise floor of 10 ng/√Hz.
{"title":"A 10 NANO-G/RT-HZ RESONANT MEMS ACCELEROMETER EMPLOYING ANTI-ALIASING CONTROL","authors":"Milind S. Pandit, G. Sobreviela, Callisto Pili, P. Steinmann, Douglas Young, Chun Zhao, Colin Baker, A. Seshia","doi":"10.1109/INERTIAL51137.2021.9430455","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430455","url":null,"abstract":"Optimization of the oscillator front-end for resonant sensors is critical to addressing key metrics such as noise floor and output stability. This paper reports a method to improve the noise floor of resonant MEMS accelerometers by avoiding aliasing of high-frequency seismic noise for long-period measurements. In particular, the optimization of a Phase Locked Loop (PLL) front-end is employed for continuous tracking of the output. A noise floor improvement of 13x is seen in comparison to the case with no anti-aliasing control. A custom PLL is designed to mitigate the impact of high-frequency noise enabling the realization of a resonant accelerometer sensor module with a noise floor of 10 ng/√Hz.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"57 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114280952","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-03-22DOI: 10.1109/INERTIAL51137.2021.9430480
B. Hamelin, Jeremy Yang, Zhenming Liu, F. Ayazi
This paper reports on the unique merits of monocrystalline hexagonal silicon carbide-on-insulator (4H-SiCOI) substrates for the implementation of maximally-driven bulk acoustic wave (BAW) gyroscopes on a chip. The scaling of performance in planar silicon micromechanical gyroscopes over the past two decades has hovered above inertial-grade level. The material properties of monocrystalline hexagonal silicon carbide, an isoelastic high acoustic velocity semiconductor with ultra-low internal damping, are superbly amenable to mode-matched ultra-high-Q micromechanical resonant gyroscopes with low mechanical Brownian noise. The recent development of 40,..m-thick bond and etch-back SiCOI substrates and their nanoscale-precision DRIE may enable maximally-driven ultra-high-Q planar SiC BAW gyroscopes with navigation-grade performance on a chip
{"title":"Monocrystalline 4H Silicon Carbide-on-Insulator Substrates for Nav-Grade Planar BAW Gyroscopes","authors":"B. Hamelin, Jeremy Yang, Zhenming Liu, F. Ayazi","doi":"10.1109/INERTIAL51137.2021.9430480","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430480","url":null,"abstract":"This paper reports on the unique merits of monocrystalline hexagonal silicon carbide-on-insulator (4H-SiCOI) substrates for the implementation of maximally-driven bulk acoustic wave (BAW) gyroscopes on a chip. The scaling of performance in planar silicon micromechanical gyroscopes over the past two decades has hovered above inertial-grade level. The material properties of monocrystalline hexagonal silicon carbide, an isoelastic high acoustic velocity semiconductor with ultra-low internal damping, are superbly amenable to mode-matched ultra-high-Q micromechanical resonant gyroscopes with low mechanical Brownian noise. The recent development of 40,..m-thick bond and etch-back SiCOI substrates and their nanoscale-precision DRIE may enable maximally-driven ultra-high-Q planar SiC BAW gyroscopes with navigation-grade performance on a chip","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"16 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133016285","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-03-22DOI: 10.1109/inertial51137.2021.9430488
Daniel Dominguez, L. Hackett, Micheal J. Miller, Jennifer Restrepo, Katya M. Casper, M. Eichenfield
We present the design, fabrication, and initial characterization of a CMOS compatible, ultra-high bandwidth, bulk-micro machined, optomechanical accelerometer. Displacement detection is achieved via a SiN integrated photonics Mach-Zehnder interferometer (MZI) fabricated on the surface of the device that is optomechanically coupled to acceleration-induced deformation of the accelerometer's proof mass tethers. The device is designed to measure vibrations at microsecond timescales with high dynamic range for the characterization of shock dynamics.
{"title":"Megahertz Bandwidth Bulk Micromachined Optomechanical Accelerometer With Fiber Optical Interconnects","authors":"Daniel Dominguez, L. Hackett, Micheal J. Miller, Jennifer Restrepo, Katya M. Casper, M. Eichenfield","doi":"10.1109/inertial51137.2021.9430488","DOIUrl":"https://doi.org/10.1109/inertial51137.2021.9430488","url":null,"abstract":"We present the design, fabrication, and initial characterization of a CMOS compatible, ultra-high bandwidth, bulk-micro machined, optomechanical accelerometer. Displacement detection is achieved via a SiN integrated photonics Mach-Zehnder interferometer (MZI) fabricated on the surface of the device that is optomechanically coupled to acceleration-induced deformation of the accelerometer's proof mass tethers. The device is designed to measure vibrations at microsecond timescales with high dynamic range for the characterization of shock dynamics.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115988325","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-03-22DOI: 10.1109/INERTIAL51137.2021.9430468
Lukas Blocher, Wolfram Mayer, M. Arena, Dusan Radovic, T. Hiller, J. Gerlach, O. Bringmann
This paper examines the position precision of purely inertial navigation using an array of redundant, low-cost MEMS sensors. A carefully designed IMU is used to perform navigation experiments and to analyze the benefits of a sensor array over a single sensor in practice. As our experimental results show, navigation can be improved significantly by calibrating the IMU device regarding scale factors, offsets and cross-axis sensitivity. By comparing predicted navigation error and experimental results it is shown that gyroscope angle random walk and bias instability are dominant and therefore can be used to estimate naviaation performance. The latter improves roughly by a factor of $sqrt{14}$ when using an array of 14 devices instead of a single one. A Kalman Filter with motion constraints minimizes the error when estimating positions.
{"title":"Purely Inertial Navigation with a Low-Cost MEMS Sensor Array","authors":"Lukas Blocher, Wolfram Mayer, M. Arena, Dusan Radovic, T. Hiller, J. Gerlach, O. Bringmann","doi":"10.1109/INERTIAL51137.2021.9430468","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430468","url":null,"abstract":"This paper examines the position precision of purely inertial navigation using an array of redundant, low-cost MEMS sensors. A carefully designed IMU is used to perform navigation experiments and to analyze the benefits of a sensor array over a single sensor in practice. As our experimental results show, navigation can be improved significantly by calibrating the IMU device regarding scale factors, offsets and cross-axis sensitivity. By comparing predicted navigation error and experimental results it is shown that gyroscope angle random walk and bias instability are dominant and therefore can be used to estimate naviaation performance. The latter improves roughly by a factor of $sqrt{14}$ when using an array of 14 devices instead of a single one. A Kalman Filter with motion constraints minimizes the error when estimating positions.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129946724","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-03-22DOI: 10.1109/INERTIAL51137.2021.9430464
Md Abdulla Al Mamun, David Vera Anaya, M. Yuce
At present, fingerprinting based localization methods gain a massive attraction for numerous indoor location-based services. However, creation of a radio map is a laborious and time-consuming process that limits the applicability of this method. In this study, we propose FaStER, a Fast, Stable, Expendable and Reliable radio map creation system for fingerprinting based indoor localization applications. Data from a chest mounted IMU with ZigBee protocol based wireless network technology and indoor floor plan are used as inputs to the system. The proposed system ensures high accuracy both in terms of location estimation and RSSI acquisition by correcting errors generated from the IMU and from the presence of human body. The stability of a generated radio map is guaranteed by exploiting the concept of RSSI similarity index. The system is especially proposed for facilitating indoor location-based services with chest mounted wearable devices towards IoT connected wearable health and environmental monitoring applications. Results demonstrate that the proposed system can create a fast, stable, expendable, and reliable radio map that can help to improve the accuracy for location fingerprinting.
{"title":"FaStER: Fast, Stable, Expendable and Reliable Radio Map for Indoor Localization","authors":"Md Abdulla Al Mamun, David Vera Anaya, M. Yuce","doi":"10.1109/INERTIAL51137.2021.9430464","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430464","url":null,"abstract":"At present, fingerprinting based localization methods gain a massive attraction for numerous indoor location-based services. However, creation of a radio map is a laborious and time-consuming process that limits the applicability of this method. In this study, we propose FaStER, a Fast, Stable, Expendable and Reliable radio map creation system for fingerprinting based indoor localization applications. Data from a chest mounted IMU with ZigBee protocol based wireless network technology and indoor floor plan are used as inputs to the system. The proposed system ensures high accuracy both in terms of location estimation and RSSI acquisition by correcting errors generated from the IMU and from the presence of human body. The stability of a generated radio map is guaranteed by exploiting the concept of RSSI similarity index. The system is especially proposed for facilitating indoor location-based services with chest mounted wearable devices towards IoT connected wearable health and environmental monitoring applications. Results demonstrate that the proposed system can create a fast, stable, expendable, and reliable radio map that can help to improve the accuracy for location fingerprinting.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"75 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126200186","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-03-22DOI: 10.1109/INERTIAL51137.2021.9430472
Seungyong Shin, A. Daruwalla, Zhenming Liu, F. Ayazi
This paper reports on the design, implementations and preliminary characterization of an ultra-sensitive frequency modulated (FM) resonant accelerometer. The accelerometer consists of a pair of piezoelectrically actuated clamped-clamped beam resonators implemented in the device layer of an SOI wafer, and a proof-mass with mechanical coupler and force amplifier defined in both the device and handle layer of an SOI substrate. The device is designed to detect minimum acceleration in the range of 10s of nano-g while having a linear upper range of 25g with 0.5% of scale factor nonlinearity. Fabricated devices measure 660 nano-g/✓Hz VRW and 2µg BI using discrete electronics with projected bandwidth of 260Hz.
{"title":"A Sub-Micro-G Resolution Frequency-Modulated Piezoelectric In-Plane Accelerometer","authors":"Seungyong Shin, A. Daruwalla, Zhenming Liu, F. Ayazi","doi":"10.1109/INERTIAL51137.2021.9430472","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430472","url":null,"abstract":"This paper reports on the design, implementations and preliminary characterization of an ultra-sensitive frequency modulated (FM) resonant accelerometer. The accelerometer consists of a pair of piezoelectrically actuated clamped-clamped beam resonators implemented in the device layer of an SOI wafer, and a proof-mass with mechanical coupler and force amplifier defined in both the device and handle layer of an SOI substrate. The device is designed to detect minimum acceleration in the range of 10s of nano-g while having a linear upper range of 25g with 0.5% of scale factor nonlinearity. Fabricated devices measure 660 nano-g/✓Hz VRW and 2µg BI using discrete electronics with projected bandwidth of 260Hz.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125028222","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-03-22DOI: 10.1109/INERTIAL51137.2021.9430457
Florenc Demrozi, Marin Jereghi, G. Pravadelli
In machine learning, the data annotation process is an essential, but error-prone and time-consuming manual activity, which associates metadata to the samples of a dataset. In the context of Human Activity Recognition (HAR) this generally reflects in a human watching the video recordings of the activities carried out by the target user to assign a label to each video frame. The label can refer, for example, to the nature of the performed activity, or to the time series collected through sensors worn by the user or present in the environment. This paper deals with the automation of the data annotation process in the HAR context by presenting a methodology that (i) maps Bluetooth Low Energy (BLE) beacons distributed in the environment to the locations where a human typically performs activities like eating, cooking, working, and resting, and (ii) associates the data collected by sensors embedded in the smartwatch worn by the user (i.e., acceleration, angular velocity, and magnetometer) to the nearest BLE beacon. In this way, data gathered through the smartwatch are automatically annotated with the human activity associated to the nearest beacon.
{"title":"Towards the automatic data annotation for human activity recognition based on wearables and BLE beacons","authors":"Florenc Demrozi, Marin Jereghi, G. Pravadelli","doi":"10.1109/INERTIAL51137.2021.9430457","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430457","url":null,"abstract":"In machine learning, the data annotation process is an essential, but error-prone and time-consuming manual activity, which associates metadata to the samples of a dataset. In the context of Human Activity Recognition (HAR) this generally reflects in a human watching the video recordings of the activities carried out by the target user to assign a label to each video frame. The label can refer, for example, to the nature of the performed activity, or to the time series collected through sensors worn by the user or present in the environment. This paper deals with the automation of the data annotation process in the HAR context by presenting a methodology that (i) maps Bluetooth Low Energy (BLE) beacons distributed in the environment to the locations where a human typically performs activities like eating, cooking, working, and resting, and (ii) associates the data collected by sensors embedded in the smartwatch worn by the user (i.e., acceleration, angular velocity, and magnetometer) to the nearest BLE beacon. In this way, data gathered through the smartwatch are automatically annotated with the human activity associated to the nearest beacon.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"71 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127400257","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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