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2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献

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Finding the critical impact energy for micro debris generation in MEMS inertial sensors MEMS惯性传感器中微碎片产生的临界冲击能量求解
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430462
L. G. Pagani, L. Guerinoni, L. Falorni, P. Fedeli, G. Langfelder
The work presents a consistent follow-up on a study to identify the critical impact energy of suspended polysilicon masses onto stoppers [1], to prevent creation of debris and particles which affect the lifetime stability of MEMS inertial sensors. The proposed test device is capable of detecting debris generation by monitoring the leakage current between buried electrodes underneath the mass-stopper contact region. Results indicate that leakage begins to appear at 15 nJ impact energy, and manifests on 100% of tested structures at energies of 25 nJ. Optical analyses after device uncapping confirm the prediction, validating the test method.
这项工作提出了一个一致的后续研究,以确定悬浮多晶硅质量对挡板的临界冲击能量[1],以防止产生影响MEMS惯性传感器寿命稳定性的碎片和颗粒。所提出的测试装置能够通过监测质量阻截器接触区域下方埋置电极之间的泄漏电流来检测碎片的产生。结果表明,冲击能为15 nJ时开始出现泄漏,冲击能为25 nJ时,100%的被试结构都出现泄漏。器件开封后的光学分析证实了预测,验证了测试方法。
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引用次数: 0
Sensor Fusion To Improve State Estimate Accuracy Using Multiple Inertial Measurement Units 传感器融合提高多惯性测量单元状态估计精度
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430484
Ujjval N. Patel, Imraan A. Faruque
The growing availability of low-cost commercial inertial measurement units (IMUs) raises questions about how to best improve sensor estimates when using multiple IMUs. This paper reports on the performance of two approaches applied to GPS-denied onboard attitude estimation. The approaches are a virtual IMU approach fusing sensor measurements and a Federated Filter fusing state estimates from several Extended Kalman Filters (EKFs) each using one IMU and magnetometer. We compare their performance as quantified by root mean square (RMS) using parallel implementations of estimators in a Raspberry-Pi-based autopilot during prescribed motions in a motion capture volume. The results suggest that a Multi-IMU GPS-denied approach can deliver comparable performance to the single-IMU GPS aided approach and provide a testbed for multi-IMU performance quantification.11Portions of this work received support from NASA University Leadership Initiative grant 80NSSC20M0162.
越来越多的低成本商用惯性测量单元(imu)提出了如何在使用多个imu时最好地提高传感器估计的问题。本文研究了两种用于gps拒接星载姿态估计的方法的性能。该方法是一种虚拟IMU方法融合传感器测量,一种联邦滤波器融合几个扩展卡尔曼滤波器(ekf)的状态估计,每个扩展卡尔曼滤波器使用一个IMU和磁力仪。我们比较了它们的性能,用均方根(RMS)量化,使用基于树莓派的自动驾驶仪中估计器的并行实现,在运动捕捉体积的规定运动中。结果表明,多imu GPS拒绝方法可以提供与单imu GPS辅助方法相当的性能,并为多imu性能量化提供了一个测试平台。11本研究的部分工作得到了NASA大学领导计划基金80NSSC20M0162的支持。
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引用次数: 3
Resonant Accelerometer with Compliant Parallel Motion Linkage Force Amplification Mechanism 具有柔性并联运动连杆力放大机构的谐振加速度计
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430489
O. Halevy, Stella Lulinsky, S. Krylov
We report on a novel architecture of a resonant accelerometer incorporating four proof masses and a compliant parallel motion linkage as a force amplifier. A simple, Manhattan geometry, manufacturable, device is distinguished by low parasitic compliance and purely axial, lacking any bending, loading of the sensing beams. Silicon on insulator (SOI) devices were operated in open loop and in a non-differential mode, the acceleration was emulated by an electrostatic force. Consistently with the model prediction a sensitivity of ≈ 2.3 Hz/V2, which is equivalent to ≈ 417 Hz/g, was experimentally demonstrated in a Si device with ≈ 500 µm × 480 µm × 25 µm masses and 250 µm long and ≈ 1.5 µm wide resonant sensing beams.
我们报告了一种新型的共振加速度计结构,它包括四个证明质量和一个柔性并联运动连杆作为力放大器。一个简单的,曼哈顿几何,可制造,设备的特点是低寄生顺应性和纯轴向,缺乏任何弯曲,传感梁的负载。将绝缘体上硅(SOI)器件置于开环和非差分模式下,用静电力模拟其加速度。在质量为≈500µm × 480µm × 25µm、谐振光束长为250µm、宽为≈1.5µm的Si器件中,实验证明了与模型预测一致的灵敏度为≈2.3 Hz/V2,相当于≈417 Hz/g。
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引用次数: 1
Theoretical Consideration of Mismatch Compensation for MEMS Resonator Having Unaligned Principle Axes 主轴未对准的MEMS谐振器失配补偿的理论思考
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430491
T. Tsukamoto, Shuji Tanaka
In this paper, a theoretical aspect of frequency and damping mismatch compensation in a MEMS rate integrating gyroscope (RIG) controlled by CW and CCW rotational modes is reported. The mismatches of a resonator could be compensated by the amplitudes and phases of the driving signals, even if the principle axes of stiffness and damping are not aligned to the X-Y coordinate. The proposed theoretical formula well consistent with the previously reported experimental results, as well as the numerical simulation.
本文研究了连续波和连续波两种旋转模式控制的MEMS速率积分陀螺仪(RIG)频率和阻尼失配补偿的理论问题。谐振器的不匹配可以通过驱动信号的幅值和相位来补偿,即使刚度和阻尼的主轴与X-Y坐标不对齐。本文提出的理论公式与已有的实验结果以及数值模拟结果吻合较好。
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引用次数: 2
Exploiting Nonlinearities for Frequency-Matched MEMS Gyroscopes Tuning 利用非线性进行频率匹配MEMS陀螺仪调谐
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430478
J. Marconi, Giacomo Bonaccorsi, D. Giannini, L. Falorni, F. Braghin
This paper describes how mechanical nonlinearities can be exploited to obtain a frequency-matched MEMS gyroscope. Exploiting the hardening behavior of the oscillator, we show how it is possible to match drive and sense frequency by changing the drive displacement amplitude. This way, both the resonance amplitudes of the drive and sense axes are exploited, boosting the sensitivity of the device. Moreover, the near-flat drive frequency response increases both the robustness and bandwidth. A prototype of a yaw gyroscope was also manufactured to test the feasibility of the proposed approach.
本文描述了如何利用机械非线性来获得频率匹配的MEMS陀螺仪。利用振荡器的硬化行为,我们展示了如何通过改变驱动器位移幅度来匹配驱动和传感频率。这样,驱动轴和感测轴的共振幅度都得到了利用,从而提高了器件的灵敏度。此外,近平坦的驱动频率响应增加了鲁棒性和带宽。还制造了一个偏航陀螺仪的原型来测试所提出方法的可行性。
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引用次数: 2
Vibration Immune, Long-Term Stable and Low Noise Synchronized Mass MEMS Gyroscope 抗振动、长期稳定、低噪声的同步大质量MEMS陀螺仪
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430483
I. Prikhodko, J. Geen, Carey Merritt, Sam Zhang
The paper describes a small size (2.25 mm2active sensor area) yaw rate sensor component for ADIS1654x series Inertial Measurement Units (IMUs) with notable performance parameters such as in-run bias instability of 0.55 °/hr stable over 3 months on Allan Deviation, g-sensitivity of 0.8 (°/hr)/g, bias repeatability of 50 °/hr in 10 years, and no observable startup drift from a cold-start. The current generation IMU offers improvement of bias improvement by 4x, g-sensitivity by 30x, and repeatability by 10x over previous generation ADI's IMU.
本文介绍了一种用于ADIS1654x系列惯性测量单元(imu)的小尺寸(主动传感器面积2.25 mm2)偏航率传感器组件,该组件具有显著的性能参数,如运行中偏置不稳定性为0.55°/hr,在Allan偏差上稳定超过3个月,g灵敏度为0.8(°/hr)/g,偏置可重复性为50°/hr 10年,并且在冷启动时没有可观察到的启动漂移。与上一代ADI的IMU相比,当前一代IMU的偏置改善了4倍,g灵敏度提高了30倍,可重复性提高了10倍。
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引用次数: 3
Insole-based Real-time Gait Analysis: Feature Extraction and Classification 基于鞋垫的实时步态分析:特征提取和分类
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430482
A. R. Anwary, Damla Arifoglu, Michael Jones, M. Vassallo, H. Bouchachia
Gait assessment relies on clinical tools based on observation by trained staffs who give a subjective opinion. Objective gait analysis via motion capture systems (e.g. Qualisys) have limited availability as they are laboratory based and require complex equipment. A low-cost user-friendly Inertial Measurement Units (IMUs) embedded insole and an Android App based personalized gait analysis system is developed for uses in home or clinics. Accelerometer and gyroscope synchronous data are collected from both right and left legs for 10 young and 10 older adults a period of 100 consecutive days. We propose an automatic gait features extraction method, real-time visualization and age-groups classification. Accuracy of stride detection method is 100% for young. Accuracy for older adults is 91% for right and 88% for left leg. Convolutional neural networks (CNNs) are used to extract features from gait data and are combined with long short-term memory (LSTM) to exploit the time information between features. This is evaluated empirically using traditional classification and deep learning techniques (CNN+LSTM RNN) regardless of feature engineering. Accuracy to classify young and older adults with CNN-LSTM, NB, SVM and J48 is 100%. Our insole-based gait analysis automatically interprets the gait features and users can monitor their gait at home using our simple visualization tool that allows widespread home-based diagnosis and management of gait abnormalities and rehabilitation.
步态评估依赖于临床工具,基于训练有素的工作人员的观察,他们给出了主观的意见。通过运动捕捉系统(如Qualisys)进行客观步态分析的可用性有限,因为它们是基于实验室的,需要复杂的设备。一种低成本的用户友好的惯性测量单元(imu)嵌入式鞋垫和基于Android应用程序的个性化步态分析系统被开发用于家庭或诊所。在连续100天的时间里,从10名年轻人和10名老年人的右腿和左腿上收集加速度计和陀螺仪同步数据。提出了一种步态特征自动提取、实时可视化和年龄组分类的方法。步幅检测方法对年轻人的准确率为100%。老年人右腿和左腿的准确率分别为91%和88%。利用卷积神经网络(cnn)从步态数据中提取特征,并与长短期记忆(LSTM)相结合,利用特征之间的时间信息。这是使用传统分类和深度学习技术(CNN+LSTM RNN)进行经验评估的,而不考虑特征工程。CNN-LSTM、NB、SVM和J48对年轻人和老年人的分类准确率为100%。我们基于鞋垫的步态分析自动解释步态特征,用户可以在家里使用我们简单的可视化工具来监测他们的步态,这种工具允许广泛的基于家庭的步态异常诊断和管理以及康复。
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引用次数: 4
Identification of Gain Mismatches in Control Electronics of Rate Integrating CVGs 速率积分CVGs控制电子学增益失配辨识
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430479
D. Vatanparvar, A. Shkel
In Coriolis Vibratory Rate Integrating Gyroscopes (CVRIG), accuracy of angle measurement is known to be coupled to symmetry of the mechanical structure. This paper provides a study on the effect of asymmetries in control electronics on operation and accuracy of direct angle measurements. We demonstrated that gain mismatch in detection electronics affects the estimation of the pendulum variables in the CVRIG mathematical model. An error in the pendulum variables was shown to adversely affect the estimated orientation of the orbital trajectory and the closed-loop control. In the case of gain mismatch in actuation electronics, the control forces were observed to interfere with free precession of the oscillation pattern causing additional errors in the angle measurement. We proposed a method to distinguish the angle errors due to mechanical asymmetries from the angle errors caused by imperfections in control electronics. Using the method, we identified gain mismatches in the control electronics and subsequently used the identified parameters for calibration of a micro-fabricated gyroscope. By applying the method of calibration to a Dual Foucault Pendulum (DFP) gyroscope, we were able to reduce the angle bias error by 10-times and reached a 0.06 degree of precession accuracy at the input angular rate of 500 dps, without any compensation for mechanical asymmetries.
在科里奥利振动速率积分陀螺仪(CVRIG)中,角度测量的精度与机械结构的对称性有关。本文研究了控制电子学中的不对称性对直接角度测量的操作和精度的影响。我们证明了检测电子器件中的增益失配会影响CVRIG数学模型中钟摆变量的估计。结果表明,摆变量的误差会对轨道姿态的估计和闭环控制产生不利影响。在致动电子器件增益失配的情况下,观察到控制力会干扰振荡模式的自由进动,导致角度测量中的额外误差。提出了一种区分机械不对称引起的角度误差和控制电子器件缺陷引起的角度误差的方法。使用该方法,我们确定了控制电子器件中的增益不匹配,并随后使用确定的参数对微型制造陀螺仪进行校准。通过对双傅科摆陀螺仪进行标定,在不补偿机械不对称的情况下,在输入角速率为500 dps的情况下,我们能够将角度偏差误差降低10倍,达到0.06度的进动精度。
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引用次数: 7
Effect of EAM on Quality Factor and Noise in MEMS Vibratory Gyroscopes EAM对MEMS振动陀螺仪质量因数和噪声的影响
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430471
Danmeng Wang, A. Shkel
This paper reports a study on contribution of electromechanical amplitude modulation (EAM) on performance of MEMS Coriolis vibratory gyroscopes (CVGs). We theoretically predicted and experimentally demonstrated the impact of EAM on both quality factor and output noise in MEMS CVGs operating in the open-loop rate mode. We demonstrated the effect on a dynamically amplified dual-mass gyroscope (DAG) improving the gyroscope performance from 0.04 deg/rt-hr in Angular Random Walk (ARW) and 0.52 deg/hr in bias instability to 0.0065 deg/rt-hr in ARW and 0.08 deg/hr in bias instability by changed the EAM setting from 3.5 to 1.2 V in amplitude and from 75 to 225 kHz in frequency. The optimized EAM parameters were derived by the noise prediction model presented in the paper.
本文研究了机电调幅(EAM)对MEMS科里奥利振动陀螺仪性能的影响。我们从理论上预测并实验证明了EAM对工作在开环速率模式下的MEMS CVGs的质量因子和输出噪声的影响。我们演示了动态放大双质量陀螺仪(DAG)的效果,通过将EAM设置从3.5到1.2 V的振幅和75到225 kHz的频率,将陀螺仪的性能从角随机漫步(ARW)的0.04°/rt-hr和0.52°/hr的偏置不稳定性提高到ARW的0.0065°/rt-hr和0.08°/hr的偏置不稳定性。利用本文提出的噪声预测模型推导出优化后的EAM参数。
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引用次数: 2
Improved Sensor Based Human Activity Recognition via Hybrid Convolutional and Recurrent Neural Networks 基于混合卷积和递归神经网络的改进传感器人体活动识别
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430460
Sonia Perez-Gamboa, Qingquan Sun, Yan Zhang
Non-intrusive sensor based human activity recognition (HAR) is utilized in a spectrum of applications including fitness tracking devices, gaming, health care monitoring, and smartphone applications. In this paper, we design a multi-layer hybrid architecture with Convolutional Neural Networks (CNN) and Long Short Term Memory (LSTM). Based on the exploration of a variety of multi-layer combinations, we present a lightweight, hybrid, and multi-layer model which can improve the recognition performance by integrating local features and scale-invariant with dependencies of activities. The experimental results demonstrate the efficacy of the proposed model which can achieve a 94.7% activity recognition rate on a benchmark dataset. This model outperforms traditional machine learning and other deep learning methods. Additionally, our implementation achieves a balance between accuracy and efficiency.
基于非侵入式传感器的人类活动识别(HAR)被广泛应用于健身跟踪设备、游戏、医疗保健监控和智能手机应用等领域。本文设计了卷积神经网络(CNN)和长短期记忆(LSTM)的多层混合架构。在探索多种多层组合的基础上,提出了一种轻量化、混合的多层模型,该模型通过结合局部特征和活动依赖的尺度不变性来提高识别性能。实验结果证明了该模型的有效性,在一个基准数据集上,活动识别率达到了94.7%。该模型优于传统的机器学习和其他深度学习方法。此外,我们的实现实现了准确性和效率之间的平衡。
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引用次数: 10
期刊
2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
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