Pub Date : 2021-03-22DOI: 10.1109/inertial51137.2021.9430451
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{"title":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Proceedings","authors":"","doi":"10.1109/inertial51137.2021.9430451","DOIUrl":"https://doi.org/10.1109/inertial51137.2021.9430451","url":null,"abstract":"Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"222 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116201951","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-03-22DOI: 10.1109/INERTIAL51137.2021.9430485
Pramod Martha, Anju Sebastian, V. Seena, Naveen Kadayinti
MEMS inertial sensors are used in handheld smart devices such as smartphones and smart watches to detect and monitor physical activities. The most common transduction techniques used are based on piezoelectric [1], piezoresistive [2] or capacitive [3] techniques. The performance of these sensors is limited by passive detection, the need of a functional material, area of electrode, converter and amplifier circuits in the front end of read-out network. Suspended gate FET (SGFET) based sensors are being investigated as an alternative type of inertial sensor that offers in-built amplification as well as eliminates the aforementioned limitations. The suspended gate SGFET is an active transducer and has the potential for monolithic integration with CMOS.
{"title":"A Technique for Modeling and Simulating Transistor Based MEMS Sensors","authors":"Pramod Martha, Anju Sebastian, V. Seena, Naveen Kadayinti","doi":"10.1109/INERTIAL51137.2021.9430485","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430485","url":null,"abstract":"MEMS inertial sensors are used in handheld smart devices such as smartphones and smart watches to detect and monitor physical activities. The most common transduction techniques used are based on piezoelectric [1], piezoresistive [2] or capacitive [3] techniques. The performance of these sensors is limited by passive detection, the need of a functional material, area of electrode, converter and amplifier circuits in the front end of read-out network. Suspended gate FET (SGFET) based sensors are being investigated as an alternative type of inertial sensor that offers in-built amplification as well as eliminates the aforementioned limitations. The suspended gate SGFET is an active transducer and has the potential for monolithic integration with CMOS.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126797424","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-03-22DOI: 10.1109/INERTIAL51137.2021.9430469
Petr Dejdar, Vojtech Myska, P. Munster, Radim Burget
Fiber optic infrastructure security is of growing interest. The current distributed sensor systems are robust and expensive solutions, and their practical applications are uncommon. Research into simple and cost-effective solutions based on changes in the state of polarization is crucial. This paper expands the use of a vibration sensor based on the sensing of rapid changes in the state of polarization (SOP) of light in a standard single-mode optical fiber by using a convolutional neural network to detect trains running along the optical fiber infrastructure. It is a simple system that determines ongoing events near the optical fiber route by simply determining the signal boundaries that define the idle state. By using a neural network, it is possible to eliminate the distortion caused by the temperature changes and, for example, to improve detection in the the zones where the vibrations are not strong enough for a simple threshold resolution.
{"title":"Trains Detection Using State of Polarization Changes Measurement and Convolutional Neural Networks","authors":"Petr Dejdar, Vojtech Myska, P. Munster, Radim Burget","doi":"10.1109/INERTIAL51137.2021.9430469","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430469","url":null,"abstract":"Fiber optic infrastructure security is of growing interest. The current distributed sensor systems are robust and expensive solutions, and their practical applications are uncommon. Research into simple and cost-effective solutions based on changes in the state of polarization is crucial. This paper expands the use of a vibration sensor based on the sensing of rapid changes in the state of polarization (SOP) of light in a standard single-mode optical fiber by using a convolutional neural network to detect trains running along the optical fiber infrastructure. It is a simple system that determines ongoing events near the optical fiber route by simply determining the signal boundaries that define the idle state. By using a neural network, it is possible to eliminate the distortion caused by the temperature changes and, for example, to improve detection in the the zones where the vibrations are not strong enough for a simple threshold resolution.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132153547","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-03-22DOI: 10.1109/INERTIAL51137.2021.9430473
J. Juillard, A. Somma, A. Brenes
The limits on MEMS resonant sensor performance set by nonlinearity are often studied through a model of a Duffing resonator, with linear actuation. This model largely fails to capture the properties of MEMS resonant sensors with electrostatic gap-closing actuation. We have shown that a specific feature of such ubiquitous resonators is that their stability is strongly sensitive to the waveform used to drive them to resonance. In this paper, we conduct for the first time an experimental investigation of these phenomena and validate our theoretical results.
{"title":"Experimental investigation of parametric evasion properties of resonant sensors using electrostatic gap-closing actuation","authors":"J. Juillard, A. Somma, A. Brenes","doi":"10.1109/INERTIAL51137.2021.9430473","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430473","url":null,"abstract":"The limits on MEMS resonant sensor performance set by nonlinearity are often studied through a model of a Duffing resonator, with linear actuation. This model largely fails to capture the properties of MEMS resonant sensors with electrostatic gap-closing actuation. We have shown that a specific feature of such ubiquitous resonators is that their stability is strongly sensitive to the waveform used to drive them to resonance. In this paper, we conduct for the first time an experimental investigation of these phenomena and validate our theoretical results.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124894919","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-03-22DOI: 10.1109/INERTIAL51137.2021.9430453
C. P. Cameron, D. Gerrard, Janna Rodriguez, Yushi Yang, E. Ng, T. Kenny
This paper presents a novel spring disk resonator gyroscope (SRG). The SRG consists of coupled concentric serpentine spring-like rings to reduce mode stiffness while maintaining a device footprint the same as that of existing standard DRGs: 600um in diameter. The $Q$ is increased by a factor of 2.5, and the ring down-time of 934ms is 4 times longer than that of a standard DRG.
{"title":"A Novel Spring Disk Resonator Gyroscope for Maximizing Q/F","authors":"C. P. Cameron, D. Gerrard, Janna Rodriguez, Yushi Yang, E. Ng, T. Kenny","doi":"10.1109/INERTIAL51137.2021.9430453","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430453","url":null,"abstract":"This paper presents a novel spring disk resonator gyroscope (SRG). The SRG consists of coupled concentric serpentine spring-like rings to reduce mode stiffness while maintaining a device footprint the same as that of existing standard DRGs: 600um in diameter. The $Q$ is increased by a factor of 2.5, and the ring down-time of 934ms is 4 times longer than that of a standard DRG.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122250314","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-03-22DOI: 10.1109/INERTIAL51137.2021.9430454
T. Hiller, Lukas Blocher, Miloš Vujadinović, Zsigmond Péntek, A. Buhmann, H. Roth
This paper is concerned with cross-axis sensitivity in low-cost MEMS triaxial accelerometers and gyroscopes. A highly-accurate rate table is used to perform simple six-point measurements on forty devices. The gathered cross-axis sensitivity matrices are subdivided into scale-factor, non-orthogonality and misalignment. Additionally, accel-to-gyro triad alignment is examined. By applying the inverted cross-axis sensitivity matrix to the sensor output and remeasuring all devices, nonorthogonality and accel-to-gyro triad alignment can be compensated to below 0.2 %. Analytical formulas allow the calculation of the achievable precision as a function of sensor noise, magnitude of stimulus and measurement time. Root-causes of non-orthogonality are discussed and a mechanism is proposed, where quadrature motion of one axis induces Coriolis force onto another axis. Lastly, good stability of the accel-to-gyro triad alignment across temperature is demonstrated, indicating that a once-measured compensation is valid across environmental changes and for an extended time.
{"title":"Analysis and Compensation of Cross-Axis Sensitivity in Low-Cost MEMS Inertial Sensors","authors":"T. Hiller, Lukas Blocher, Miloš Vujadinović, Zsigmond Péntek, A. Buhmann, H. Roth","doi":"10.1109/INERTIAL51137.2021.9430454","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430454","url":null,"abstract":"This paper is concerned with cross-axis sensitivity in low-cost MEMS triaxial accelerometers and gyroscopes. A highly-accurate rate table is used to perform simple six-point measurements on forty devices. The gathered cross-axis sensitivity matrices are subdivided into scale-factor, non-orthogonality and misalignment. Additionally, accel-to-gyro triad alignment is examined. By applying the inverted cross-axis sensitivity matrix to the sensor output and remeasuring all devices, nonorthogonality and accel-to-gyro triad alignment can be compensated to below 0.2 %. Analytical formulas allow the calculation of the achievable precision as a function of sensor noise, magnitude of stimulus and measurement time. Root-causes of non-orthogonality are discussed and a mechanism is proposed, where quadrature motion of one axis induces Coriolis force onto another axis. Lastly, good stability of the accel-to-gyro triad alignment across temperature is demonstrated, indicating that a once-measured compensation is valid across environmental changes and for an extended time.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128839482","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-03-22DOI: 10.1109/INERTIAL51137.2021.9430476
S. Srinara, Chi-Ming Lee, S. Tsai, G. Tsai, K. Chiang
Because robustness and accuracy of localization are crucial for autonomous driving applications. Using the conventional integration scheme of Inertial Navigation System (INS) and Global Navigation Satellite System (GNSS), pose estimation error can drift and accumulate with time, especially in GNSS challenging environment and in unknown environment where an existing map has not been constructed. In this paper, in term of using multi-sensor fusion for improving the positioning accuracy, we proposed a localization method that is based on LiDAR-based 3D Normal Distribution Transform (NDT) scan matching with an INS/GNSS integration scheme. As the experimental results, our proposed method showed a statistical improvement over the state of the art INS/GNSS integration scheme.
{"title":"Performance Analysis of 3D NDT Scan Matching for Autonomous Vehicles Using INS/GNSS/3D LiDAR-SLAM Integration Scheme","authors":"S. Srinara, Chi-Ming Lee, S. Tsai, G. Tsai, K. Chiang","doi":"10.1109/INERTIAL51137.2021.9430476","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430476","url":null,"abstract":"Because robustness and accuracy of localization are crucial for autonomous driving applications. Using the conventional integration scheme of Inertial Navigation System (INS) and Global Navigation Satellite System (GNSS), pose estimation error can drift and accumulate with time, especially in GNSS challenging environment and in unknown environment where an existing map has not been constructed. In this paper, in term of using multi-sensor fusion for improving the positioning accuracy, we proposed a localization method that is based on LiDAR-based 3D Normal Distribution Transform (NDT) scan matching with an INS/GNSS integration scheme. As the experimental results, our proposed method showed a statistical improvement over the state of the art INS/GNSS integration scheme.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117040555","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-03-22DOI: 10.1109/INERTIAL51137.2021.9430461
B. Adams, C. Macrae, M. Entezami, K. Ridley, Archie Kubba, Y. Lien, S. Kinge, K. Bongs
This paper reports on the development of a transportable high data rate quantum absolute gravimeter for gravity map matching navigation. Its target sensitivity is 10−7 g/ ✓ Hz at 100 Hz data rate with a stability of 10−9 g over a month. The design issues, sensitivity analysis and an evaluation of noises are discussed.
{"title":"The development of a High data rate atom interferometric gravimeter (HIDRAG) for gravity map matching navigation","authors":"B. Adams, C. Macrae, M. Entezami, K. Ridley, Archie Kubba, Y. Lien, S. Kinge, K. Bongs","doi":"10.1109/INERTIAL51137.2021.9430461","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430461","url":null,"abstract":"This paper reports on the development of a transportable high data rate quantum absolute gravimeter for gravity map matching navigation. Its target sensitivity is 10−7 g/ ✓ Hz at 100 Hz data rate with a stability of 10−9 g over a month. The design issues, sensitivity analysis and an evaluation of noises are discussed.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126364219","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-03-22DOI: 10.1109/INERTIAL51137.2021.9430486
M. Gadola, M. S. Perna, M. Allieri, P. Robert, T. Verdot, A. Berthelot, G. Langfelder
The paper presents a miniaturized pitch/roll gyroscope with the lowest angle random walk (ARW of 600 $mu textbf{dps}/sqrt{textbf{Hz}})$ and lowest bias instability (BI of 2.8 dph) ever recorded on planar MEMS sensors for in-plane rate capture. The device is based on NEMS resistive sensing, features a 1.2 mm2footprint, a 100-Hz bandwidth, and can be combined to yaw gyroscopes for ultra-low-noise 3-axis systems. The key advancement over previous implementations is represented by a 10-fold increase in the scale factor, obtained through a novel architecture which, combined with quadrature compensation, optimizes at the same time the energy transfer to the NEMS gauges and the robustness to vibrations.
{"title":"600 µdps / √Hz, 1.2 mm2 MEMS Pitch Gyroscope","authors":"M. Gadola, M. S. Perna, M. Allieri, P. Robert, T. Verdot, A. Berthelot, G. Langfelder","doi":"10.1109/INERTIAL51137.2021.9430486","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430486","url":null,"abstract":"The paper presents a miniaturized pitch/roll gyroscope with the lowest angle random walk (ARW of 600 $mu textbf{dps}/sqrt{textbf{Hz}})$ and lowest bias instability (BI of 2.8 dph) ever recorded on planar MEMS sensors for in-plane rate capture. The device is based on NEMS resistive sensing, features a 1.2 mm2footprint, a 100-Hz bandwidth, and can be combined to yaw gyroscopes for ultra-low-noise 3-axis systems. The key advancement over previous implementations is represented by a 10-fold increase in the scale factor, obtained through a novel architecture which, combined with quadrature compensation, optimizes at the same time the energy transfer to the NEMS gauges and the robustness to vibrations.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133741764","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-03-22DOI: 10.1109/INERTIAL51137.2021.9430475
Takashi Ichikawa, A. Uchiyama, Kohei Shibata, S. Iida, Sang-yeop Lee, N. Ishihara, K. Machida, K. Masu, Hiroyuki Ito
This paper describes a novel capacitive-detection electrode for a single gold proof-mass three-axis MEMS (microelectromechanical systems) accelerometer. We propose a 3-D capacitive-detection electrode (3-DCE) for a high and uniform sensitivity to sense micro-G (G=9.Sm/s2) level. Based on the analysis in terms of the sensitivity and the Brownian noise BN, we design and fabricate the device with 3-DCE by the multi-metal layer technology for a post-CMOS process. The experimental results show that the obtained BNis 0.16 µG/√Hz and the sensitivities of X-, Y-, and Z-axis are 162, 210, and 341 fF /G, respectively.
{"title":"A 3-D Capacitive-Detection Electrode for a Single Gold Proof-Mass Three-Axis MEMS Accelerometer","authors":"Takashi Ichikawa, A. Uchiyama, Kohei Shibata, S. Iida, Sang-yeop Lee, N. Ishihara, K. Machida, K. Masu, Hiroyuki Ito","doi":"10.1109/INERTIAL51137.2021.9430475","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430475","url":null,"abstract":"This paper describes a novel capacitive-detection electrode for a single gold proof-mass three-axis MEMS (microelectromechanical systems) accelerometer. We propose a 3-D capacitive-detection electrode (3-DCE) for a high and uniform sensitivity to sense micro-G (G=9.Sm/s2) level. Based on the analysis in terms of the sensitivity and the Brownian noise BN, we design and fabricate the device with 3-DCE by the multi-metal layer technology for a post-CMOS process. The experimental results show that the obtained BNis 0.16 µG/√Hz and the sensitivities of X-, Y-, and Z-axis are 162, 210, and 341 fF /G, respectively.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127252596","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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