Summary Using a RF‐Plasma Enhanced Chemical Vapor (RF‐PECVD) Depositions method, employing hydrogen and methane gas, Diamond like carbon (DLC) films were fabricated on glass and silicon substrates. The impact of varying CH 4 to H 2 ratios on the resulting film's structure, optical characteristics, and mechanical properties was investigated. The deposition process occurred at methane flow rates spanning 5 to 40 sccm. The films' surface morphology, and roughness were analyzed through Atomic Force Microscopy. Moreover, the Vickers hardness tests was employed to determine the hardness of produced films. The optical behavior of the DLC thin films was explored utilizing UV‐visible spectrometry and ellipsometry. A thorough investigation was conducted to understand how the CH 4 flow rate influences layer growth, morphology, topography, and how these factors relate to the films' transmittance, reflectance, refractive index, and optical band gap.
{"title":"Structure and Optical Characteristics of DLC Films","authors":"Alireza Grayeli","doi":"10.1002/vipr.202300807","DOIUrl":"https://doi.org/10.1002/vipr.202300807","url":null,"abstract":"Summary Using a RF‐Plasma Enhanced Chemical Vapor (RF‐PECVD) Depositions method, employing hydrogen and methane gas, Diamond like carbon (DLC) films were fabricated on glass and silicon substrates. The impact of varying CH 4 to H 2 ratios on the resulting film's structure, optical characteristics, and mechanical properties was investigated. The deposition process occurred at methane flow rates spanning 5 to 40 sccm. The films' surface morphology, and roughness were analyzed through Atomic Force Microscopy. Moreover, the Vickers hardness tests was employed to determine the hardness of produced films. The optical behavior of the DLC thin films was explored utilizing UV‐visible spectrometry and ellipsometry. A thorough investigation was conducted to understand how the CH 4 flow rate influences layer growth, morphology, topography, and how these factors relate to the films' transmittance, reflectance, refractive index, and optical band gap.","PeriodicalId":42842,"journal":{"name":"Vakuum in Forschung und Praxis","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2023-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135660795","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Vakuum in Forschung und PraxisVolume 35, Issue 5 p. 42-45 Magazin DVG: Vakuum in Forschung und Praxis 5/2023 First published: 09 October 2023 https://doi.org/10.1002/vipr.202370506AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat Volume35, Issue5October/November 2023Pages 42-45 RelatedInformation
真空在Forschung und praxis第35卷，第5期p. 42-45杂志DVG:真空在Forschung und Praxis 5/2023首次发布:2023年10月9日https://doi.org/10.1002/vipr.202370506AboutPDF ToolsRequest permissionExport citation添加到favoritesTrack citation ShareShare给予accessShare全文accessShare全文accessShare请查看我们的使用条款和条件，并勾选下面的文本共享文章的全文版本。我已经阅读并接受了Wiley在线图书馆使用共享链接的条款和条件，请使用下面的链接与您的朋友和同事分享本文的全文版本。学习更多的知识。复制URL共享一个链接共享一个emailfacebooktwitterlinkedinredditwechat第35卷，第5期2023年10月/ 11月42-45页相关信息
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Vakuum in Forschung und PraxisVolume 35, Issue 5 p. 12-17 Magazin Forschung: Vakuum in Forschung und Praxis 5/2023 First published: 09 October 2023 https://doi.org/10.1002/vipr.202370503AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat Volume35, Issue5October/November 2023Pages 12-17 RelatedInformation
真空在Forschung und praxis第35卷，第5期p. 12-17杂志Forschung:真空在Forschung und Praxis 5/2023首次发布:2023年10月9日https://doi.org/10.1002/vipr.202370503AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack引文ShareShare给accessShare全文accessShare全文accessShare请查看我们的使用条款和条件，并勾选下面的文本共享文章的全文版本。我已经阅读并接受了Wiley在线图书馆使用共享链接的条款和条件，请使用下面的链接与您的朋友和同事分享本文的全文版本。学习更多的知识。复制URL共享一个链接共享一个emailfacebooktwitterlinkedinredditwechat第35卷，第5期2023年10月/ 11月12-17页相关信息
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Vakuum in Forschung und PraxisVolume 35, Issue 5 TitelbildFree Access Titelbild: Vakuum in Forschung und Praxis 5/2023 First published: 09 October 2023 https://doi.org/10.1002/vipr.202370510AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat No abstract is available for this article. Volume35, Issue5October/November 2023 RelatedInformation
真空在Forschung und praxis第35卷，第5期titelbild免费访问Titelbild:真空在Forschung und Praxis 5/2023首次发布:2023年10月9日https://doi.org/10.1002/vipr.202370510AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare给予accessShare全文accessShare全文accessShare请查看我们的使用条款和条件，并勾选下面的文本共享文章的全文版本。我已经阅读并接受了Wiley在线图书馆使用共享链接的条款和条件，请使用下面的链接与您的朋友和同事分享本文的全文版本。学习更多的知识。复制URL共享链接共享一个emailfacebooktwitterlinkedinreddit微信本文无摘要第35卷，第5期2023年10月/ 11月
{"title":"Titelbild: Vakuum in Forschung und Praxis 5/2023","authors":"","doi":"10.1002/vipr.202370510","DOIUrl":"https://doi.org/10.1002/vipr.202370510","url":null,"abstract":"Vakuum in Forschung und PraxisVolume 35, Issue 5 TitelbildFree Access Titelbild: Vakuum in Forschung und Praxis 5/2023 First published: 09 October 2023 https://doi.org/10.1002/vipr.202370510AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat No abstract is available for this article. Volume35, Issue5October/November 2023 RelatedInformation","PeriodicalId":42842,"journal":{"name":"Vakuum in Forschung und Praxis","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2023-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135706211","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Tagungen: Vakuum in Forschung und Praxis 4/2023","authors":"","doi":"10.1002/vipr.202370406","DOIUrl":"https://doi.org/10.1002/vipr.202370406","url":null,"abstract":"","PeriodicalId":42842,"journal":{"name":"Vakuum in Forschung und Praxis","volume":null,"pages":null},"PeriodicalIF":0.1,"publicationDate":"2023-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"42915922","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Vakuum in Forschung und PraxisVolume 35, Issue 4 TitelbildFree Access Titelbild: Vakuum in Forschung und Praxis 4/2023 First published: 15 August 2023 https://doi.org/10.1002/vipr.202370410AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat No abstract is available for this article. Volume35, Issue4August/September 2023 RelatedInformation
真空在Forschung und praxis第35卷，第4期titelbild免费访问Titelbild:真空在Forschung und Praxis 4/2023首次发布:2023年8月15日https://doi.org/10.1002/vipr.202370410AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack引文ShareShare给予accessShare全文accessShare全文accessShare请查看我们的使用条款和条件，并勾选下面的复选框共享文章的全文版本。我已经阅读并接受了Wiley在线图书馆使用共享链接的条款和条件，请使用下面的链接与您的朋友和同事分享本文的全文版本。学习更多的知识。复制URL共享链接共享一个emailfacebooktwitterlinkedinreddit微信本文无摘要第35卷，第4期2023年8 / 9月
{"title":"Titelbild: Vakuum in Forschung und Praxis 4/2023","authors":"","doi":"10.1002/vipr.202370410","DOIUrl":"https://doi.org/10.1002/vipr.202370410","url":null,"abstract":"Vakuum in Forschung und PraxisVolume 35, Issue 4 TitelbildFree Access Titelbild: Vakuum in Forschung und Praxis 4/2023 First published: 15 August 2023 https://doi.org/10.1002/vipr.202370410AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat No abstract is available for this article. Volume35, Issue4August/September 2023 RelatedInformation","PeriodicalId":42842,"journal":{"name":"Vakuum in Forschung und Praxis","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2023-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"136222033","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Inhalt: Vakuum in Forschung und Praxis 4/2023","authors":"","doi":"10.1002/vipr.202370411","DOIUrl":"https://doi.org/10.1002/vipr.202370411","url":null,"abstract":"","PeriodicalId":42842,"journal":{"name":"Vakuum in Forschung und Praxis","volume":null,"pages":null},"PeriodicalIF":0.1,"publicationDate":"2023-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"43874563","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Vernetzen, verantworten, vergnügen","authors":"S. Ulrich","doi":"10.1002/vipr.202370401","DOIUrl":"https://doi.org/10.1002/vipr.202370401","url":null,"abstract":"","PeriodicalId":42842,"journal":{"name":"Vakuum in Forschung und Praxis","volume":null,"pages":null},"PeriodicalIF":0.1,"publicationDate":"2023-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"42699835","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
An overview of the main methods for mathematical modeling of the working process of non‐contact vacuum pumps is given. The specifics and the main stages of mathematical model development for screw, scroll, claw and Roots vacuum pumps are considered. The results of mathematical modeling of pump characteristics are presented and compared with experimental data. The mathematical modeling technique presented here can be recommended for analyzing the influence of pump geometry and operating conditions on the pump characteristics of non‐contact oil‐free vacuum pumps.
{"title":"Non‐contact vacuum pumps","authors":"A. Raykov, S. Salikeev, A. Burmistrov, M. Fomina","doi":"10.1002/vipr.202300804","DOIUrl":"https://doi.org/10.1002/vipr.202300804","url":null,"abstract":"An overview of the main methods for mathematical modeling of the working process of non‐contact vacuum pumps is given. The specifics and the main stages of mathematical model development for screw, scroll, claw and Roots vacuum pumps are considered. The results of mathematical modeling of pump characteristics are presented and compared with experimental data. The mathematical modeling technique presented here can be recommended for analyzing the influence of pump geometry and operating conditions on the pump characteristics of non‐contact oil‐free vacuum pumps.","PeriodicalId":42842,"journal":{"name":"Vakuum in Forschung und Praxis","volume":null,"pages":null},"PeriodicalIF":0.1,"publicationDate":"2023-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"43588667","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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