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Structure and Optical Characteristics of DLC Films DLC薄膜的结构和光学特性
Q4 Materials Science Pub Date : 2023-10-01 DOI: 10.1002/vipr.202300807
Alireza Grayeli
Summary Using a RF‐Plasma Enhanced Chemical Vapor (RF‐PECVD) Depositions method, employing hydrogen and methane gas, Diamond like carbon (DLC) films were fabricated on glass and silicon substrates. The impact of varying CH 4 to H 2 ratios on the resulting film's structure, optical characteristics, and mechanical properties was investigated. The deposition process occurred at methane flow rates spanning 5 to 40 sccm. The films' surface morphology, and roughness were analyzed through Atomic Force Microscopy. Moreover, the Vickers hardness tests was employed to determine the hardness of produced films. The optical behavior of the DLC thin films was explored utilizing UV‐visible spectrometry and ellipsometry. A thorough investigation was conducted to understand how the CH 4 flow rate influences layer growth, morphology, topography, and how these factors relate to the films' transmittance, reflectance, refractive index, and optical band gap.
采用射频等离子体增强化学气相沉积(RF - PECVD)方法,利用氢气和甲烷气体,在玻璃和硅衬底上制备了类金刚石(DLC)薄膜。研究了不同的ch4 / h2比例对薄膜结构、光学特性和机械性能的影响。沉积过程发生在5 - 40 sccm的甲烷流速范围内。通过原子力显微镜对膜的表面形貌和粗糙度进行了分析。采用维氏硬度法测定了薄膜的硬度。利用紫外可见光谱法和椭偏法研究了DLC薄膜的光学特性。为了了解ch4流速如何影响薄膜的生长、形貌和形貌,以及这些因素与薄膜的透光率、反射率、折射率和光学带隙的关系,我们进行了深入的研究。
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引用次数: 0
DVG: Vakuum in Forschung und Praxis 5/2023 dvd:真空研究/2023 /
Q4 Materials Science Pub Date : 2023-10-01 DOI: 10.1002/vipr.202370506
Vakuum in Forschung und PraxisVolume 35, Issue 5 p. 42-45 Magazin DVG: Vakuum in Forschung und Praxis 5/2023 First published: 09 October 2023 https://doi.org/10.1002/vipr.202370506AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat Volume35, Issue5October/November 2023Pages 42-45 RelatedInformation
真空在Forschung und praxis第35卷,第5期p. 42-45杂志DVG:真空在Forschung und Praxis 5/2023首次发布:2023年10月9日https://doi.org/10.1002/vipr.202370506AboutPDF ToolsRequest permissionExport citation添加到favoritesTrack citation ShareShare给予accessShare全文accessShare全文accessShare请查看我们的使用条款和条件,并勾选下面的文本共享文章的全文版本。我已经阅读并接受了Wiley在线图书馆使用共享链接的条款和条件,请使用下面的链接与您的朋友和同事分享本文的全文版本。学习更多的知识。复制URL共享一个链接共享一个emailfacebooktwitterlinkedinredditwechat第35卷,第5期2023年10月/ 11月42-45页相关信息
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引用次数: 0
Forschung: Vakuum in Forschung und Praxis 5/2023 /科研真空/2023 /
Q4 Materials Science Pub Date : 2023-10-01 DOI: 10.1002/vipr.202370503
Vakuum in Forschung und PraxisVolume 35, Issue 5 p. 12-17 Magazin Forschung: Vakuum in Forschung und Praxis 5/2023 First published: 09 October 2023 https://doi.org/10.1002/vipr.202370503AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat Volume35, Issue5October/November 2023Pages 12-17 RelatedInformation
真空在Forschung und praxis第35卷,第5期p. 12-17杂志Forschung:真空在Forschung und Praxis 5/2023首次发布:2023年10月9日https://doi.org/10.1002/vipr.202370503AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack引文ShareShare给accessShare全文accessShare全文accessShare请查看我们的使用条款和条件,并勾选下面的文本共享文章的全文版本。我已经阅读并接受了Wiley在线图书馆使用共享链接的条款和条件,请使用下面的链接与您的朋友和同事分享本文的全文版本。学习更多的知识。复制URL共享一个链接共享一个emailfacebooktwitterlinkedinredditwechat第35卷,第5期2023年10月/ 11月12-17页相关信息
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引用次数: 0
Titelbild: Vakuum in Forschung und Praxis 5/2023 封面:真空研究/2023 /
Q4 Materials Science Pub Date : 2023-10-01 DOI: 10.1002/vipr.202370510
Vakuum in Forschung und PraxisVolume 35, Issue 5 TitelbildFree Access Titelbild: Vakuum in Forschung und Praxis 5/2023 First published: 09 October 2023 https://doi.org/10.1002/vipr.202370510AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat No abstract is available for this article. Volume35, Issue5October/November 2023 RelatedInformation
真空在Forschung und praxis第35卷,第5期titelbild免费访问Titelbild:真空在Forschung und Praxis 5/2023首次发布:2023年10月9日https://doi.org/10.1002/vipr.202370510AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare给予accessShare全文accessShare全文accessShare请查看我们的使用条款和条件,并勾选下面的文本共享文章的全文版本。我已经阅读并接受了Wiley在线图书馆使用共享链接的条款和条件,请使用下面的链接与您的朋友和同事分享本文的全文版本。学习更多的知识。复制URL共享链接共享一个emailfacebooktwitterlinkedinreddit微信本文无摘要第35卷,第5期2023年10月/ 11月
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引用次数: 0
Tagungen: Vakuum in Forschung und Praxis 4/2023 年会:研究和实践的真空
IF 0.1 Q4 Materials Science Pub Date : 2023-08-01 DOI: 10.1002/vipr.202370406
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引用次数: 0
Titelbild: Vakuum in Forschung und Praxis 4/2023 封面:研究和实践的真空
Q4 Materials Science Pub Date : 2023-08-01 DOI: 10.1002/vipr.202370410
Vakuum in Forschung und PraxisVolume 35, Issue 4 TitelbildFree Access Titelbild: Vakuum in Forschung und Praxis 4/2023 First published: 15 August 2023 https://doi.org/10.1002/vipr.202370410AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat No abstract is available for this article. Volume35, Issue4August/September 2023 RelatedInformation
真空在Forschung und praxis第35卷,第4期titelbild免费访问Titelbild:真空在Forschung und Praxis 4/2023首次发布:2023年8月15日https://doi.org/10.1002/vipr.202370410AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack引文ShareShare给予accessShare全文accessShare全文accessShare请查看我们的使用条款和条件,并勾选下面的复选框共享文章的全文版本。我已经阅读并接受了Wiley在线图书馆使用共享链接的条款和条件,请使用下面的链接与您的朋友和同事分享本文的全文版本。学习更多的知识。复制URL共享链接共享一个emailfacebooktwitterlinkedinreddit微信本文无摘要第35卷,第4期2023年8 / 9月
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引用次数: 0
Inhalt: Vakuum in Forschung und Praxis 4/2023 内容:真空在研究与实践4/2023
IF 0.1 Q4 Materials Science Pub Date : 2023-08-01 DOI: 10.1002/vipr.202370411
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引用次数: 0
Vernetzen, verantworten, vergnügen 交接,上尉,娱乐
IF 0.1 Q4 Materials Science Pub Date : 2023-08-01 DOI: 10.1002/vipr.202370401
S. Ulrich
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引用次数: 0
Termine: Vakuum in Forschung und Praxis 4/2023 日期:研究与实践的真空4/2023
IF 0.1 Q4 Materials Science Pub Date : 2023-08-01 DOI: 10.1002/vipr.202370407
Informationen Unter
SEPTEMBER 2023 17. – 21. 20th IUVSTA School Vacuum Gas Dynamics Marseilles, Frankreich www.iuvsta‐school‐2023.com 19. – 21. V2023 Vakuum & Plasma Dresden www.efds.org/die-v 20. – 21. W3+ Fair im Rheintal Dornbirn, Österreich https://w3-fair.com/rheintal 26. – 28. parts2clean Stuttgart www.parts2clean.de 26. – 29. 19th International Conference on Thin Films (ICTF-2023) Burgos, Spanien https://ictf2023.com
2023年9月17日21.第20届IUVSTA学校真空气体动力学马赛,Frankreich www.IUVSTA‐School‐2023.com 19.–21.V2023 Vakuum&Plasma Dresden www.efds.org/die-v 20.–21.Österreich Rheintal Dornbirn的W3+博览会https://w3-fair.com/rheintal2628.parts2clean Stuttgart www.parts2clean.de 26.–29.第19届国际薄膜大会(ICTF-2023)西班牙布尔戈斯https://ictf2023.com
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引用次数: 0
Non‐contact vacuum pumps 非接触式真空泵
IF 0.1 Q4 Materials Science Pub Date : 2023-08-01 DOI: 10.1002/vipr.202300804
A. Raykov, S. Salikeev, A. Burmistrov, M. Fomina
An overview of the main methods for mathematical modeling of the working process of non‐contact vacuum pumps is given. The specifics and the main stages of mathematical model development for screw, scroll, claw and Roots vacuum pumps are considered. The results of mathematical modeling of pump characteristics are presented and compared with experimental data. The mathematical modeling technique presented here can be recommended for analyzing the influence of pump geometry and operating conditions on the pump characteristics of non‐contact oil‐free vacuum pumps.
概述了非接触式真空泵工作过程数学建模的主要方法。考虑了螺杆、涡旋、爪形和罗茨真空泵数学模型开发的具体情况和主要阶段。给出了泵特性的数学建模结果,并与实验数据进行了比较。本文提出的数学建模技术可用于分析泵的几何形状和操作条件对非接触式无油真空泵泵特性的影响。
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引用次数: 0
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Vakuum in Forschung und Praxis
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