首页 > 最新文献

Archives of Electrical Engineering最新文献

英文 中文
Practical aspects of testing superconducting electromagnets by the capacitor discharge method taking into account the non-linearity of circuit parameters 考虑电路参数非线性的电容放电法测试超导电磁铁的实用问题
IF 1.3 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-06-28 DOI: 10.24425/aee.2023.145411
M. I. M. Ichna, A. N. W. Ilk, M. A. W. Ołoszyk, M. I. Z. Iółko, S. Alla, P. I. S. Zwangruber
: The article presents selected issues related to the development and testing of the diagnostics systems dedicated for superconducting electromagnets. The systems were constructed to assess the production quality of superconducting electromagnets of the SIS100 synchrotron, a new accelerator being built as part of the Facility of Antiproton and Ion Research (FAIR). One of the systems is used for automatic checking of electrical connection parameters and the continuity of electric circuits. The role of the second device is to assess the quality of winding insulation and to estimate circuit parameters of electromagnet coils using the capacitor discharge method. The work presents measurements and analysis of current and voltage waveforms acquired during discharges on a magnet coil simulator and on the SIS100 main dipole electromagnet.
本文介绍了与超导电磁铁专用诊断系统的开发和测试有关的选定问题。这些系统的建造是为了评估SIS100同步加速器超导电磁铁的生产质量,SIS100同步加速器是反质子和离子研究设施(FAIR)的一部分。其中一个系统用于自动检查电气连接参数和电路的连续性。第二个装置的作用是用电容放电法评估绕组绝缘质量和估计电磁铁线圈的电路参数。该工作介绍了在磁铁线圈模拟器和SIS100主偶极电磁铁上放电期间获得的电流和电压波形的测量和分析。
{"title":"Practical aspects of testing superconducting electromagnets by the capacitor discharge method taking into account the non-linearity of circuit parameters","authors":"M. I. M. Ichna, A. N. W. Ilk, M. A. W. Ołoszyk, M. I. Z. Iółko, S. Alla, P. I. S. Zwangruber","doi":"10.24425/aee.2023.145411","DOIUrl":"https://doi.org/10.24425/aee.2023.145411","url":null,"abstract":": The article presents selected issues related to the development and testing of the diagnostics systems dedicated for superconducting electromagnets. The systems were constructed to assess the production quality of superconducting electromagnets of the SIS100 synchrotron, a new accelerator being built as part of the Facility of Antiproton and Ion Research (FAIR). One of the systems is used for automatic checking of electrical connection parameters and the continuity of electric circuits. The role of the second device is to assess the quality of winding insulation and to estimate circuit parameters of electromagnet coils using the capacitor discharge method. The work presents measurements and analysis of current and voltage waveforms acquired during discharges on a magnet coil simulator and on the SIS100 main dipole electromagnet.","PeriodicalId":45464,"journal":{"name":"Archives of Electrical Engineering","volume":"43 1","pages":""},"PeriodicalIF":1.3,"publicationDate":"2023-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85869364","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Impact of increased temperature of lower end-fitting of a composite long rod insulator on its mechanical strength under variable loads 变载荷下复合长棒绝缘子下端管件温度升高对其机械强度的影响
IF 1.3 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-06-28 DOI: 10.24425/aee.2023.145415
J. E. B. Ielecki, P. I. K. Otowski, J. A. W. Ańkowicz
: This paper describes results of tensile mechanical strength testing of two types of composite suspension line insulators from two manufacturers. In order to take into account the operation of composite insulators in overhead transmission lines with high-temperature low-sag (HTLS) conductors, the testing of their static and fatigue strength was performed at both ambient and elevated temperatures. The results showed that the static mechanical strength of composite insulators decreased with an increase in the temperature of the lower end fitting of the insulator, and proved that it followed a third-degree polynomial function. Calculations performed demonstrated that a significant cause of reduction in strength was the increase in the radial stress following the temperature increase in the crimped glass-epoxy resin core of the insulator. The results of the fatigue strength testing demonstrated that the increase in the temperature of the lower end fitting of the insulator up to 85 ◦ C degree had a little effect on the fatigue strength of the tested composite insulators.
本文介绍了两家生产厂家的两种复合悬索线绝缘子的拉伸机械强度试验结果。为了考虑高温低下垂(HTLS)导线复合绝缘子在架空输电线路中的运行情况,对复合绝缘子进行了环境和高温下的静强度和疲劳强度测试。结果表明,复合绝缘子的静机械强度随绝缘子下端拟合温度的升高而降低,并符合三次多项式函数。计算表明,强度降低的一个重要原因是,随着绝缘子卷曲玻璃环氧树脂芯的温度升高,径向应力增加。疲劳强度测试结果表明,绝缘子下端接头温度升高至85℃时,对复合绝缘子的疲劳强度影响不大。
{"title":"Impact of increased temperature of lower end-fitting of a composite long rod insulator on its mechanical strength under variable loads","authors":"J. E. B. Ielecki, P. I. K. Otowski, J. A. W. Ańkowicz","doi":"10.24425/aee.2023.145415","DOIUrl":"https://doi.org/10.24425/aee.2023.145415","url":null,"abstract":": This paper describes results of tensile mechanical strength testing of two types of composite suspension line insulators from two manufacturers. In order to take into account the operation of composite insulators in overhead transmission lines with high-temperature low-sag (HTLS) conductors, the testing of their static and fatigue strength was performed at both ambient and elevated temperatures. The results showed that the static mechanical strength of composite insulators decreased with an increase in the temperature of the lower end fitting of the insulator, and proved that it followed a third-degree polynomial function. Calculations performed demonstrated that a significant cause of reduction in strength was the increase in the radial stress following the temperature increase in the crimped glass-epoxy resin core of the insulator. The results of the fatigue strength testing demonstrated that the increase in the temperature of the lower end fitting of the insulator up to 85 ◦ C degree had a little effect on the fatigue strength of the tested composite insulators.","PeriodicalId":45464,"journal":{"name":"Archives of Electrical Engineering","volume":"78 1","pages":""},"PeriodicalIF":1.3,"publicationDate":"2023-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86662850","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Induction machine with pole-changing winding for turbomechanisms 涡轮机构用变极绕组感应电机
IF 1.3 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-06-28 DOI: 10.24425/aee.2023.145417
{"title":"Induction machine with pole-changing winding for turbomechanisms","authors":"","doi":"10.24425/aee.2023.145417","DOIUrl":"https://doi.org/10.24425/aee.2023.145417","url":null,"abstract":"","PeriodicalId":45464,"journal":{"name":"Archives of Electrical Engineering","volume":"307 1","pages":""},"PeriodicalIF":1.3,"publicationDate":"2023-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77062432","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fault location of distribution network with distributed generation based on Karrenbauer transform and support vector machine regression 基于Karrenbauer变换和支持向量机回归的分布式发电配电网故障定位
IF 1.3 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-06-28 DOI: 10.24425/aee.2023.145420
{"title":"Fault location of distribution network with distributed generation based on Karrenbauer transform and support vector machine regression","authors":"","doi":"10.24425/aee.2023.145420","DOIUrl":"https://doi.org/10.24425/aee.2023.145420","url":null,"abstract":"","PeriodicalId":45464,"journal":{"name":"Archives of Electrical Engineering","volume":"101 1","pages":""},"PeriodicalIF":1.3,"publicationDate":"2023-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90165267","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Research on the influence of power frequency electric field of pantograph on passengers’ health in high-speed EMU 高速动车组受电弓工频电场对乘客健康影响的研究
IF 1.3 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-06-28 DOI: 10.24425/aee.2023.145421
{"title":"Research on the influence of power frequency electric field of pantograph on passengers’ health in high-speed EMU","authors":"","doi":"10.24425/aee.2023.145421","DOIUrl":"https://doi.org/10.24425/aee.2023.145421","url":null,"abstract":"","PeriodicalId":45464,"journal":{"name":"Archives of Electrical Engineering","volume":"31 2 1","pages":""},"PeriodicalIF":1.3,"publicationDate":"2023-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88662872","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Load regulation application of university campus based on solar power generation forecasting 基于太阳能发电预测的大学校园负荷调节应用
IF 1.3 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-06-28 DOI: 10.24425/aee.2023.145418
Guozheng HANo, Shujuan TANo, Zihan ZHANGo, Guozheng Han
: For a solar photovoltaic power system on a university campus, the electricity generated by the system meets the campus load, and the extra electricity is delivered to the grid. Generally, the price of the photovoltaic system is cheaper than that of the utility power system. The full use of solar electricity can reduce the electricity cost of the school. The deep belief network is used to predict solar photovoltaic generation and electricity load, and the gap is found. According to the gap, the power loads on the campus are adjusted to improve the utilization rate of solar power generation. Through the practical application of Changqing Campus of Qilu University of Technology in China, it is found that the utilization rate of solar photovoltaic power generation effectively improved from 91.24% in 2017 to 98.16% in 2019, and the annual electricity is saved by 68610 yuan (in 2019).
:高校校园太阳能光伏发电系统,系统产生的电能满足校园负荷,多余的电能送入电网。一般来说,光伏发电系统的价格要比公用电力系统便宜。充分利用太阳能发电可以降低学校的用电成本。利用深度信念网络对太阳能光伏发电和电力负荷进行预测,并找到缺口。根据差距,调整校园的电力负荷,提高太阳能发电的利用率。通过对中国齐鲁理工大学长庆校区的实际应用发现,太阳能光伏发电利用率从2017年的91.24%有效提升至2019年的98.16%,年节电68610元(2019年)。
{"title":"Load regulation application of university campus based on solar power generation forecasting","authors":"Guozheng HANo, Shujuan TANo, Zihan ZHANGo, Guozheng Han","doi":"10.24425/aee.2023.145418","DOIUrl":"https://doi.org/10.24425/aee.2023.145418","url":null,"abstract":": For a solar photovoltaic power system on a university campus, the electricity generated by the system meets the campus load, and the extra electricity is delivered to the grid. Generally, the price of the photovoltaic system is cheaper than that of the utility power system. The full use of solar electricity can reduce the electricity cost of the school. The deep belief network is used to predict solar photovoltaic generation and electricity load, and the gap is found. According to the gap, the power loads on the campus are adjusted to improve the utilization rate of solar power generation. Through the practical application of Changqing Campus of Qilu University of Technology in China, it is found that the utilization rate of solar photovoltaic power generation effectively improved from 91.24% in 2017 to 98.16% in 2019, and the annual electricity is saved by 68610 yuan (in 2019).","PeriodicalId":45464,"journal":{"name":"Archives of Electrical Engineering","volume":"19 1","pages":""},"PeriodicalIF":1.3,"publicationDate":"2023-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89497091","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Comparative study of DC/DC electric vehicle charging system with conventional transformer and planar transformer 传统变压器与平面变压器DC/DC电动汽车充电系统的比较研究
IF 1.3 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-06-28 DOI: 10.24425/aee.2023.145412
Maciej RUDAWSKIo
: This paper presents an analysis of electric vehicle charging station operation based on a dual active bridge topology. Two cases are considered: one with the use of a medium frequency planar transformer, the other with a conventional Litz winding trans-former.Ananalysiswasperformedusingbothsolutionsinordertocomparetheperformance characteristics of the system for both cases and to present the differences between each transformer solution. The analysis was based on tests carried out on the full-scale model of an electric vehicle charging station, which is the result of the project "Electric vehicle charging system integrated with lighting infrastructure" realized by the Department of Drives and Electrical Machines,
本文提出了一种基于双有源桥拓扑的电动汽车充电站运行分析方法。考虑了两种情况:一种是使用中频平面变压器,另一种是使用传统的利兹绕组变压器。分析使用这两种解决方案,以比较两种情况下系统的性能特征,并提出每个变压器解决方案之间的差异。该分析基于对电动汽车充电站全尺寸模型进行的测试,该模型是由驱动和电机部实现的“与照明基础设施集成的电动汽车充电系统”项目的结果。
{"title":"Comparative study of DC/DC electric vehicle charging system with conventional transformer and planar transformer","authors":"Maciej RUDAWSKIo","doi":"10.24425/aee.2023.145412","DOIUrl":"https://doi.org/10.24425/aee.2023.145412","url":null,"abstract":": This paper presents an analysis of electric vehicle charging station operation based on a dual active bridge topology. Two cases are considered: one with the use of a medium frequency planar transformer, the other with a conventional Litz winding trans-former.Ananalysiswasperformedusingbothsolutionsinordertocomparetheperformance characteristics of the system for both cases and to present the differences between each transformer solution. The analysis was based on tests carried out on the full-scale model of an electric vehicle charging station, which is the result of the project \"Electric vehicle charging system integrated with lighting infrastructure\" realized by the Department of Drives and Electrical Machines,","PeriodicalId":45464,"journal":{"name":"Archives of Electrical Engineering","volume":"767 2","pages":""},"PeriodicalIF":1.3,"publicationDate":"2023-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72433785","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A new method for estimating fault location in radial medium voltage distribution network only using measurements at feeder beginning 提出了一种基于馈线起始点测量的径向中压配电网故障定位新方法
IF 1.3 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-06-28 DOI: 10.24425/aee.2023.145422
Truong NGOC-HUNGo
: This paper proposes a new fault location method in radial medium voltage distribution networks. The proposed method only uses the measurement data at the feeder beginning to approximate the characteristic equation showing the dependence between the positive-sequence voltage and phase angle at the monitoring point with the distance to the fault location for each fault type on each line segment. To determine these characteristic equation coefficients, the entire distribution network will be modeled and simulated by four types of faults at different locations along the lines to build the initial database. Based on this database, the mathematical functions in MATLAB software are applied to approximate these coefficients corresponding to each type of fault for each line segment in the network. Then, from the current and voltage measurement data at the feeder beginning, the algorithms of global search, comparison, and fault ranking are used to find out where the fault occurs on the distribution network. Two types of distribution network with and without branches are studied and simulated in this paper to verify and evaluate the effectiveness of the proposed method.
提出了一种新的径向中压配电网故障定位方法。该方法仅利用馈线起始点的测量数据,近似得到监测点的正序电压和相位角随各线段上每种故障类型到故障位置距离的关系特征方程。为了确定这些特征方程系数,将对整个配电网沿线路不同位置的四种故障进行建模和模拟,以建立初始数据库。在此基础上,应用MATLAB软件中的数学函数对网络中每条线段的每一种故障类型对应的系数进行近似。然后,根据馈线起始时的电流和电压测量数据,采用全局搜索、比对和故障排序算法找出配电网的故障发生位置。本文对带和不带分支的两种配电网进行了仿真研究,以验证和评价所提方法的有效性。
{"title":"A new method for estimating fault location in radial medium voltage distribution network only using measurements at feeder beginning","authors":"Truong NGOC-HUNGo","doi":"10.24425/aee.2023.145422","DOIUrl":"https://doi.org/10.24425/aee.2023.145422","url":null,"abstract":": This paper proposes a new fault location method in radial medium voltage distribution networks. The proposed method only uses the measurement data at the feeder beginning to approximate the characteristic equation showing the dependence between the positive-sequence voltage and phase angle at the monitoring point with the distance to the fault location for each fault type on each line segment. To determine these characteristic equation coefficients, the entire distribution network will be modeled and simulated by four types of faults at different locations along the lines to build the initial database. Based on this database, the mathematical functions in MATLAB software are applied to approximate these coefficients corresponding to each type of fault for each line segment in the network. Then, from the current and voltage measurement data at the feeder beginning, the algorithms of global search, comparison, and fault ranking are used to find out where the fault occurs on the distribution network. Two types of distribution network with and without branches are studied and simulated in this paper to verify and evaluate the effectiveness of the proposed method.","PeriodicalId":45464,"journal":{"name":"Archives of Electrical Engineering","volume":"26 1","pages":""},"PeriodicalIF":1.3,"publicationDate":"2023-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74171604","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Computation of electromagnetic forces in the windings of amorphous core transformers 非晶铁心变压器绕组电磁力的计算
IF 1.3 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-06-28 DOI: 10.24425/aee.2023.145423
B. A. D. Oan, T. H. O. D. Oan, D. U. T. U. o, T. U. -. O. L. E. o
: Electromagnetic forces generated by the short circuit current and leakage flux in low-and high-voltage windings of distribution transformers as well as amorphous core transformers will cause the translation, destruction, and explosion of the windings. Thus, the investigation of these forces plays a significant role for researchers and manufacturers. Many authors have recently used the finite element method to analyze electromagnetic forces. In this paper, an analytic model is first developed for magnetic vector potential formulations to compute the electromagnetic forces (i.e., axial and radial forces) acting on the low-and high-voltage windings of an amorphous core transformer. The finite element technique is then presented to validate the results obtained from the analytical model. The developed model is applied to an actual problem.
配电变压器和非晶铁心变压器的低压、高压绕组中短路电流和漏磁产生的电磁力会引起绕组的平动、破坏和爆炸。因此,对这些力的调查对研究人员和制造商起着重要的作用。最近许多作者使用有限元法来分析电磁力。本文首先为磁矢量势公式建立了一个解析模型,用于计算作用在非晶铁心变压器低压和高压绕组上的电磁力(即轴向和径向力)。然后提出了有限元技术来验证从分析模型得到的结果。将所建立的模型应用于实际问题。
{"title":"Computation of electromagnetic forces in the windings of amorphous core transformers","authors":"B. A. D. Oan, T. H. O. D. Oan, D. U. T. U. o, T. U. -. O. L. E. o","doi":"10.24425/aee.2023.145423","DOIUrl":"https://doi.org/10.24425/aee.2023.145423","url":null,"abstract":": Electromagnetic forces generated by the short circuit current and leakage flux in low-and high-voltage windings of distribution transformers as well as amorphous core transformers will cause the translation, destruction, and explosion of the windings. Thus, the investigation of these forces plays a significant role for researchers and manufacturers. Many authors have recently used the finite element method to analyze electromagnetic forces. In this paper, an analytic model is first developed for magnetic vector potential formulations to compute the electromagnetic forces (i.e., axial and radial forces) acting on the low-and high-voltage windings of an amorphous core transformer. The finite element technique is then presented to validate the results obtained from the analytical model. The developed model is applied to an actual problem.","PeriodicalId":45464,"journal":{"name":"Archives of Electrical Engineering","volume":"11 1","pages":""},"PeriodicalIF":1.3,"publicationDate":"2023-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80229739","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Indium-gallium-zinc oxide thin-film preparation via single-step radio frequency sputter deposition using mixed-oxide powder targets 混合氧化物粉末靶单步射频溅射制备铟镓锌氧化物薄膜
IF 1.3 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-06-28 DOI: 10.24425/aee.2023.145425
Akahiko, Atake, Iroharu, awasaki, Hin, I. ., Chi, Oqiu
: Indium gallium zinc oxide (In–Ga–Zn–O) thin films, which are transparent conductive films for liquid crystals and electroluminescent displays, were fabricated via single-step sputter deposition using one target containing different proportions of indium oxide, gallium oxide, and zinc oxide powders. Experimental results suggest that the In–Ga–Zn–O thin films can be prepared using the method of single-step radio frequency (RF) sputter deposition, applying a powder target containing indium oxide, gallium oxide, and zinc oxide. The In–Ga–Zn–O thin films were prepared on Si substrates, and the deposition rate depended on the target composition. In these plasma processes, electron density and temperature were essentially independent of target composition. The prepared films were very smooth with a root-mean-square roughness of less than 10 nm. The crystallinity of the ZnO peak was observed in all the films; whereas the In and Ga peaks were not observed in the films prepared. The X-ray photoelectron spectroscopy of the films also revealed that the elemental concentration ratio of In–Ga–Zn–O thin films could be prepared using one target, and that can be easily controlled by ratios in the In 2 O 3 /Ga 2 O 3 /ZnO composition in the powder target. The transmittances were > 75% at 800 nm for all the target mixtures, and increased with increasing In 2 O 3 in the powder target.
采用含有不同比例氧化铟、氧化镓和氧化锌粉末的靶材,采用单步溅射沉积法制备了用于液晶和电致发光显示器的透明导电薄膜铟镓锌氧化物(In-Ga-Zn-O)薄膜。实验结果表明,在含有氧化铟、氧化镓和氧化锌的粉末靶上,采用单步射频溅射沉积方法可以制备In-Ga-Zn-O薄膜。在Si衬底上制备了In-Ga-Zn-O薄膜,其沉积速率与目标成分有关。在这些等离子体过程中,电子密度和温度基本上与目标成分无关。制备的薄膜非常光滑,均方根粗糙度小于10 nm。在所有薄膜中均观察到ZnO峰的结晶度;而在制备的薄膜中没有观察到In和Ga峰。薄膜的x射线光电子能谱分析还表明,使用一个靶材可以制备出in - Ga - zn - O薄膜的元素浓度比,并且可以通过粉末靶材中in 2o3 /Ga 2o3 /ZnO的比例来控制。所有靶材混合物在800 nm处的透光率均> 75%,且随粉体靶材中In 2o3的增加而增加。
{"title":"Indium-gallium-zinc oxide thin-film preparation via single-step radio frequency sputter deposition using mixed-oxide powder targets","authors":"Akahiko, Atake, Iroharu, awasaki, Hin, I. ., Chi, Oqiu","doi":"10.24425/aee.2023.145425","DOIUrl":"https://doi.org/10.24425/aee.2023.145425","url":null,"abstract":": Indium gallium zinc oxide (In–Ga–Zn–O) thin films, which are transparent conductive films for liquid crystals and electroluminescent displays, were fabricated via single-step sputter deposition using one target containing different proportions of indium oxide, gallium oxide, and zinc oxide powders. Experimental results suggest that the In–Ga–Zn–O thin films can be prepared using the method of single-step radio frequency (RF) sputter deposition, applying a powder target containing indium oxide, gallium oxide, and zinc oxide. The In–Ga–Zn–O thin films were prepared on Si substrates, and the deposition rate depended on the target composition. In these plasma processes, electron density and temperature were essentially independent of target composition. The prepared films were very smooth with a root-mean-square roughness of less than 10 nm. The crystallinity of the ZnO peak was observed in all the films; whereas the In and Ga peaks were not observed in the films prepared. The X-ray photoelectron spectroscopy of the films also revealed that the elemental concentration ratio of In–Ga–Zn–O thin films could be prepared using one target, and that can be easily controlled by ratios in the In 2 O 3 /Ga 2 O 3 /ZnO composition in the powder target. The transmittances were > 75% at 800 nm for all the target mixtures, and increased with increasing In 2 O 3 in the powder target.","PeriodicalId":45464,"journal":{"name":"Archives of Electrical Engineering","volume":"67 1","pages":""},"PeriodicalIF":1.3,"publicationDate":"2023-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90734035","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
Archives of Electrical Engineering
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1