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Axial-Stereo 3-D Optical Metrology for Inner Profile of Pipes Using a Scanning Laser Endoscope. 使用扫描激光内窥镜对管道内轮廓进行轴向-立体三维光学测量。
IF 5.5 3区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2015-01-01 Epub Date: 2015-06-24 DOI: 10.1080/15599612.2015.1059535
Yuanzheng Gong, Richard S Johnston, C David Melville, Eric J Seibel

As the rapid progress in the development of optoelectronic components and computational power, 3D optical metrology becomes more and more popular in manufacturing and quality control due to its flexibility and high speed. However, most of the optical metrology methods are limited to external surfaces. This paper proposed a new approach to measure tiny internal 3D surfaces with a scanning fiber endoscope and axial-stereo vision algorithm. A dense, accurate point cloud of internally machined threads was generated to compare with its corresponding X-ray 3D data as ground truth, and the quantification was analyzed by Iterative Closest Points algorithm.

随着光电元件和计算能力的飞速发展,三维光学计量因其灵活性和高速性在制造和质量控制领域越来越受欢迎。然而,大多数光学计量方法仅限于外部表面。本文提出了一种利用扫描光纤内窥镜和轴向立体视觉算法测量微小内部三维表面的新方法。本文生成了内部加工螺纹的高密度精确点云,并将其与相应的 X 射线三维数据作为地面实况进行比较,同时采用迭代最邻近点算法对量化结果进行了分析。
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引用次数: 0
On-Chip Tuning of the Resonant Wavelength in a High-Q Microresonator Integrated with a Microheater 集成微加热器的高q微谐振器谐振波长的片上调谐
IF 5.5 3区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2014-11-18 DOI: 10.1080/15599612.2015.1034905
Jialei Tang, Jintian Lin, Jiangxin Song, Z. Fang, Min Wang, Y. Liao, L. Qiao, Ya Cheng
We report on fabrication of a microtoroid resonator of a high-quality (high-Q) factor integrated with an on-chip microheater. Both the microresonator and microheater are fabricated using femtosecond laser three-dimensional (3-D) micromachining. The microheater, which is located about 200 µm away from the microresonator, has a footprint size of 200 µm × 400 µm. Tuning of the resonant wavelength in the microresonator has been achieved by varying the voltage applied on the microheater. The response time of the integrated chip is less than 10 seconds.
我们报道了一种高质量(高q)因子与片上微加热器集成的微环形谐振器的制造。微谐振器和微加热器均采用飞秒激光三维微加工技术制造。微加热器位于距离微谐振器约200 μ m的地方,占地面积为200 μ m × 400 μ m。通过改变施加在微加热器上的电压,实现了微谐振器中谐振波长的调谐。集成芯片的响应时间小于10秒。
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引用次数: 11
Editorial Board EOV 编辑委员会EOV
IF 5.5 3区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2014-10-02 DOI: 10.1080/15599612.2014.980670
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引用次数: 0
Editorial: Special Issue on Advances in Optical Imaging and Metrology-Selected Papers From the Conference Fringe 2013 社论:光学成像与计量学进展特刊- 2013年边缘会议论文选集
IF 5.5 3区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2014-10-02 DOI: 10.1080/15599612.2014.970842
W. Osten
Twenty-six years ago it was a joint idea with Hans Rottenkolber, a pioneer of holographic metrology, to organize a workshop dedicated to the discussion of the latest results in automatic processing of fringe patterns. This idea was promoted by the insight that automatic and high precision phase measurement techniques will play a key role in all future industrial and scientific applications of optical imaging and metrology. In the stimulating atmosphere of the first workshop conducted in 1989, the proposal came up to organize that event in an Olympic schedule. Meanwhile 7 workshops have been successfully organized and their main topics were always adapted to the most interesting subjects of the current cycle. For the Fringe 2013 the scope was markedly extended by accentuating the bridge between imaging and metrology. On the one hand, both disciplines are self-standing topics with a long tradition. On the other hand, the current trends in both disciplines show increasing dynamics and fusion stimulated by many fascinating innovations such as high resolution microscopy, computational imaging, 3D imaging, sensor fusion and nano-metrology. Consequently, modern topics like computational imaging, compressed sensing, high-resolution digital wavefront engineering and sensor fusion were included in the program and presented by internationally leading experts. The complete content of all contributions can be found in the proceedings. This special issue offers a selection of 13 papers addressing different topics of the latest Fringe workshop and fitting to the scope of the International Journal of Optomechatronics. All papers highlight their special topic in a more extended way as already presented in the above mentioned proceedings. The given selection conveys a comprehensive overview of the wide bandwidth of topics which was addressed at the workshop and reports about the latest achievements in optical imaging and metrology such as:
26年前,他与全息计量学的先驱汉斯·罗滕科尔伯(Hans Rottenkolber)共同提出了一个想法,组织了一个研讨会,专门讨论条纹图案自动处理的最新成果。自动和高精度相位测量技术将在光学成像和计量的所有未来工业和科学应用中发挥关键作用,这一见解促进了这一想法。在1989年举办的第一次研讨会的鼓舞人心的气氛中,提出了将该活动安排在奥运会日程中的建议。与此同时,已经成功组织了7个研讨会,他们的主题总是适应当前周期中最有趣的主题。2013年艺穗节的范围通过强调成像和计量之间的桥梁而显著扩展。一方面,这两个学科都是具有悠久传统的独立学科。另一方面,在高分辨率显微镜、计算成像、3D成像、传感器融合和纳米计量等许多令人着迷的创新的刺激下,这两个学科的当前趋势显示出越来越多的动态和融合。因此,计算成像、压缩传感、高分辨率数字波前工程和传感器融合等现代主题被纳入该计划,并由国际领先的专家介绍。所有投稿的完整内容可在会议记录中找到。这期特刊提供了13篇论文的选择,涉及最新边缘研讨会的不同主题,并适合于国际光机电杂志的范围。所有的论文都以一种更广泛的方式突出了他们的专题,就像上面提到的会议记录一样。所给的选择传达了在研讨会上讨论的广泛主题的全面概述,并报告了光学成像和计量学方面的最新成就,例如:
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引用次数: 0
Survivability of MEMS Packages at High-G Loads MEMS封装在高g负载下的生存性
IF 5.5 3区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2014-10-02 DOI: 10.1080/15599612.2014.972600
R. Pryputniewicz
Advances in emerging technology of microelectromechanical systems (MEMS) are one of the most challenging tasks in today's experimental mechanics. More specifically, development of these miniature devices requires sophisticated design, analysis, fabrication, testing, and characterization tools that have multiphysics and multiscale capabilities, especially as MEMS are being developed for use at harsh conditions. In harsh-environment and high-performance (e.g., military) guidance applications inertial sensors must be sensitive to low rates of rotation yet survive the high blast loads associated with the initial launch. In this multi-year study, a set of tuning fork gyroscopes were subjected to a series of increasing g-loads (culminating at approximately 60,000 g's) with measurements of shape made after each test. A custom set of test sample packages (aka articles) were hermetically sealed with glass lids to allow optical inspection of components while preserving the operating environment (i.e., vacuum). Initial test measurements were made upon fabrication of the articles. Optical and interferometric measurements have been made prior to and after each shock g-loading. The shape of the tuning fork gyroscope (TFG) test articles was measured using a phase shifting Michelson interferometer with compensation for package cover glass. Full field shape was determined and traces of pertinent structures were extracted for comparison. Failure of the die was observed in the form of fractures below the chip surface as well as fractures in the glass lid sealing the package. Potential causes of the failure are discussed as well as a recommendation for modified packaging techniques to mitigate future component failures.
微机电系统(MEMS)新兴技术的发展是当今实验力学中最具挑战性的任务之一。更具体地说,这些微型器件的开发需要复杂的设计、分析、制造、测试和表征工具,这些工具具有多物理场和多尺度功能,特别是当MEMS正在开发用于恶劣条件下使用时。在恶劣环境和高性能(例如,军事)制导应用中,惯性传感器必须对低旋转速率敏感,并且能够承受与初始发射相关的高爆炸载荷。在这项多年的研究中,一组音叉陀螺仪承受了一系列不断增加的g载荷(最终达到约60,000 g),每次测试后都测量了形状。一套定制的测试样品包装(又名物品)用玻璃盖密封,以便在保持操作环境(即真空)的同时对组件进行光学检查。最初的测试测量是在制作物品时进行的。在每次冲击载荷之前和之后都进行了光学和干涉测量。采用带包盖玻璃补偿的相移迈克尔逊干涉仪测量了音叉陀螺仪(TFG)测试件的形状。确定了整个场的形状,并提取了相关结构的痕迹进行比较。观察到模具的失效形式为芯片表面以下的断裂以及密封封装的玻璃盖的断裂。讨论了故障的潜在原因,并提出了改进包装技术以减轻未来组件故障的建议。
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引用次数: 2
Problems and Solutions in 3-D Analysis of Phase Biological Objects by Optical Diffraction Tomography 光学衍射层析技术在相生物物体三维分析中的问题及解决方法
IF 5.5 3区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2014-10-02 DOI: 10.1080/15599612.2014.942934
M. Kujawińska, W. Krauze, A. Kuś, J. Kostencka, T. Kozacki, B. Kemper, M. Dudek
Optical Diffraction Tomography is a technique for retrieving a 3-dimensional refractive index distribution from phase objects without destroying the structure of the samples. In the article we discuss the selection and implementation of full and limited angle version of tomographic reconstruction processes together with the analysis of different methods for gathering projections. We present two efficient implementations of full and limited angle tomographic systems including total processing paths and providing the examplary results of 3-D refractive index determination measurements of biological samples.
光学衍射层析成像是一种在不破坏样品结构的情况下从相对象中获取三维折射率分布的技术。本文讨论了全角度和有限角度层析成像重建过程的选择和实现,并对不同的投影采集方法进行了分析。我们提出了全角度和有限角度层析成像系统的两种有效实现,包括总的处理路径,并提供了生物样品的三维折射率测定测量的示例结果。
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引用次数: 27
3-D Optical Interference Microscopy at the Lateral Resolution 横向分辨率的三维光学干涉显微镜
IF 5.5 3区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2014-10-02 DOI: 10.1080/15599612.2014.942924
P. Lehmann, J. Niehues, S. Tereschenko
For applications in micro- and nanotechnologies the lateral resolution of optical 3-D microscopes becomes an issue of increasing relevance. However, lateral resolution of 3-D microscopes is hard to define in a satisfying way. Therefore, we first study the measurement capabilities of a highly resolving white-light interference (WLI) microscope close to the limit of lateral resolution. Results of measurements and simulations demonstrate that better lateral resolution seems to be achievable based on the envelope evaluation of a WLI signal. Unfortunately, close to the lateral resolution limit errors in the measured amplitude of micro-structures appear. On the other hand, results of interferometric phase evaluation seem to be strongly low-pass filtered in this case. Furthermore, the instrument transfer characteristics and the lateral resolution capabilities of WLI instruments are also affected by polarization. TM polarized light is less sensitive to edge diffraction and thus systematic errors can be avoided. However, apart from ghost steps due to fringe order errors, the results of phase evaluation seem to be closer to the real surface topography if TE polarized light is used. The lateral resolution can be further improved by combining WLI and structured illumination microscopy. Since the measured height of rectangular profiles close to the lateral resolution limit is generally too small compared to the real height, we introduce a method based on phase evaluation which characterizes the heights of barely laterally resolved rectangular gratings correctly.
在微纳米技术的应用中,光学三维显微镜的横向分辨率成为一个日益重要的问题。然而,三维显微镜的横向分辨率很难以令人满意的方式定义。因此,我们首先研究了接近横向分辨率极限的高分辨率白光干涉显微镜的测量能力。测量和模拟结果表明,基于对WLI信号的包络评估,可以实现更好的横向分辨率。不幸的是,在接近横向分辨率极限时,测量的微结构振幅出现误差。另一方面,在这种情况下,干涉相位评估的结果似乎是强低通滤波的。此外,偏振光还会影响WLI仪器的传输特性和横向分辨能力。TM偏振光对边缘衍射不太敏感,可以避免系统误差。然而,如果使用TE偏振光,除了由于条纹阶数误差导致的鬼步外,相位评估的结果似乎更接近真实的表面形貌。结合WLI和结构照明显微镜可以进一步提高横向分辨率。由于接近横向分辨极限的矩形光栅的测量高度与实际高度相比通常太小,本文提出了一种基于相位评估的方法来准确表征勉强横向分辨的矩形光栅的高度。
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引用次数: 13
Phase Maps Retrieval from Sequences of Phase Shifted Images with Unknown Phase Steps Using Generalized N-Dimensional Lissajous Figures—Principles and Applications 用广义n维利萨图从相位步长未知的相移图像序列中提取相图——原理与应用
IF 5.5 3区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2014-09-25 DOI: 10.1080/15599612.2014.942933
A. Albertazzi, A. Fantin, D. Willemann, M. Benedet
This article presents an alternative approach for retrieving phase information from a sequence of images with unknown phase shifts. A sequence of five or more discrete interferograms with unknown and different phase shifts are used to determine the parameters of N-dimensional Lissajous figures. A set of N-dimensional discrete points are used to calculate the relative phase shifts. Once zthe phase shifts are determined, the phase values for each image pixel are determined from a generalized phase calculation equation for irregular phase shifts. The article presents the physical and mathematical basis of the developed approach and discusses some results obtained from simulated data and real data from controlled experiments.
本文提出了一种从具有未知相移的图像序列中检索相位信息的替代方法。一个序列的五个或更多的离散干涉图与未知和不同的相移被用来确定n维利萨图的参数。一组n维离散点被用来计算相对相移。一旦确定了相移,每个图像像素的相位值由不规则相移的广义相位计算方程确定。本文介绍了该方法的物理和数学基础,并讨论了从模拟数据和控制实验的实际数据中得到的一些结果。
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引用次数: 10
Handheld 3-D Scanning with Automatic Multi-View Registration Based on Visual-Inertial Navigation 基于视觉惯性导航的手持式多视点自动配准三维扫描
IF 5.5 3区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2014-08-18 DOI: 10.1080/15599612.2014.942931
B. Kleiner, C. Munkelt, T. Thórhallsson, G. Notni, P. Kühmstedt, U. Schneider
In this article an approach to a mobile 3-D handheld scanner with additional sensory information is proposed. It fully automatically builds a multi-view 3-D scan. Conventionally complex post processing or expensive position trackers are used to realize such a process. Therefore a combination of a visual and inertial motion tracking system is developed to deal with the position tracking. Both sensors are integrated into the 3-D scanner and their data are fused for robustness during swift scanner movements and for long term stability. This article presents an overview over the system architecture, the navigation process, surface registration aspects, and measurement results.
本文提出了一种具有附加感官信息的移动三维手持扫描仪。它完全自动建立一个多视图三维扫描。通常采用复杂的后处理或昂贵的位置跟踪器来实现这一过程。为此,提出了一种视觉运动跟踪与惯性运动跟踪相结合的定位跟踪系统。这两个传感器都集成到3d扫描仪中,它们的数据被融合在一起,以保证扫描仪快速移动时的鲁棒性和长期稳定性。本文概述了系统架构、导航过程、表面配准方面和测量结果。
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引用次数: 6
Single Shot Dual-Wavelength Digital Holography: Calibration Based on Speckle Displacements 单镜头双波长数字全息:基于散斑位移的校准
IF 5.5 3区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2014-08-08 DOI: 10.1080/15599612.2014.942932
D. Khodadad, P. Bergström, E. Haellstig, M. Sjödahl
We present a calibration method which allows single shot dual wavelength online shape measurement in a disturbed environment. Effects of uncontrolled carrier frequency filtering are discussed as well. We demonstrate that phase maps and speckle displacements can be recovered free of chromatic aberrations. To our knowledge, this is the first time that a single shot dual wavelength calibration is reported by defining a criteria to make the spatial filtering automatic avoiding the problems of manual methods. The procedure is shown to give shape accuracy of 35 µm with negligible systematic errors using a synthetic wavelength of 1.1 mm.
提出了一种在扰动环境下实现单次双波长在线形状测量的标定方法。讨论了非控制载波频率滤波的影响。我们证明了相位图和散斑位移可以在没有色差的情况下恢复。据我们所知,这是第一次通过定义一个标准来实现单次双波长校准,从而使空间滤波自动化,从而避免了人工方法的问题。使用1.1 mm的合成波长,该方法的形状精度为35µm,系统误差可以忽略不计。
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引用次数: 18
期刊
International Journal of Optomechatronics
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