Pub Date : 2024-02-06DOI: 10.1134/s1063774522600636
G. Q. Xie, G. Jin, H. Y. Wang
Abstract—
Patterned sapphire substrate technology can improve the growth performance and luminous efficiency of light-emitting diodes. In this work, dry etching by inductively coupled plasma is studied and adjusted. The advantages of dry etching are good uniformity and high stability in a single chip. By changing the parameters of electromagnetic field power (etching power, bias power) and temperature, the influence of each parameter on uniformity and etching rate was studied. Controlling the power of inductively coupled plasma etching at a critical value of 1200 W can ensure stability at the maximum etching rate. The higher the temperature, the higher the pattern height and the smaller the bottom width. It is best to control the temperature around 13°C. By changing the etching power, bias power, and temperature, the bias power was found to have a greater impact on the uniformity. If it is too large, the uniformity will become worse.
摘要-图案化蓝宝石衬底技术可以提高发光二极管的生长性能和发光效率。本文对电感耦合等离子体干法刻蚀进行了研究和调整。干法刻蚀的优点是在单个芯片中具有良好的均匀性和较高的稳定性。通过改变电磁场功率(蚀刻功率、偏置功率)和温度参数,研究了各参数对均匀性和蚀刻速率的影响。将电感耦合等离子体刻蚀的功率控制在 1200 W 的临界值,可确保最大刻蚀速率下的稳定性。温度越高,图案高度越高,底部宽度越小。最好将温度控制在 13°C 左右。通过改变蚀刻功率、偏置功率和温度,发现偏置功率对均匀性的影响更大。如果偏置功率过大,均匀性会变差。
{"title":"Influence of Electromagnetic Field Power and Temperature of Inductively Coupled Plasma Etching on the Uniformity of a Patterned Sapphire Substrate","authors":"G. Q. Xie, G. Jin, H. Y. Wang","doi":"10.1134/s1063774522600636","DOIUrl":"https://doi.org/10.1134/s1063774522600636","url":null,"abstract":"<h3 data-test=\"abstract-sub-heading\">Abstract—</h3><p>Patterned sapphire substrate technology can improve the growth performance and luminous efficiency of light-emitting diodes. In this work, dry etching by inductively coupled plasma is studied and adjusted. The advantages of dry etching are good uniformity and high stability in a single chip. By changing the parameters of electromagnetic field power (etching power, bias power) and temperature, the influence of each parameter on uniformity and etching rate was studied. Controlling the power of inductively coupled plasma etching at a critical value of 1200 W can ensure stability at the maximum etching rate. The higher the temperature, the higher the pattern height and the smaller the bottom width. It is best to control the temperature around 13°C. By changing the etching power, bias power, and temperature, the bias power was found to have a greater impact on the uniformity. If it is too large, the uniformity will become worse.</p>","PeriodicalId":527,"journal":{"name":"Crystallography Reports","volume":null,"pages":null},"PeriodicalIF":0.7,"publicationDate":"2024-02-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139759908","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-02-06DOI: 10.1134/s1063774523600692
T. P. Tkachenko, A. A. Zhukov, S. I. Torgova, E. P. Pozhidaev
Abstract
The problem of formation a reproducible spatially-uniform alignment of smectic С* ferroelectric liquid crystals (FLCs) in liquid-crystal (LC) cells has not been completely solved yet. We investigated aligning layers (anisotropic coatings) of different types (island and continuous). These layers contact with FLC in LC cells and form a selected direction for molecular orientation. It was investigated the influence of mechanical cycles numbers of rubbing polymer alignment layers made of polyvinyl alcohol and polyamide 66 on the optical quality of FLC cells to which electric field was not applied. It is shown that there is an optimal number of rubbing cycles for obtaining the best optical quality of FLC cells; the number of cycles is individual for each polymer alignment layer and coating type.
{"title":"Influence of the Surface Energy of Polymer Alignment Layers on the Optical Quality of Smectic C* Liquid Crystal Cells","authors":"T. P. Tkachenko, A. A. Zhukov, S. I. Torgova, E. P. Pozhidaev","doi":"10.1134/s1063774523600692","DOIUrl":"https://doi.org/10.1134/s1063774523600692","url":null,"abstract":"<h3 data-test=\"abstract-sub-heading\">Abstract</h3><p>The problem of formation a reproducible spatially-uniform alignment of smectic С* ferroelectric liquid crystals (FLCs) in liquid-crystal (LC) cells has not been completely solved yet. We investigated aligning layers (anisotropic coatings) of different types (island and continuous). These layers contact with FLC in LC cells and form a selected direction for molecular orientation. It was investigated the influence of mechanical cycles numbers of rubbing polymer alignment layers made of polyvinyl alcohol and polyamide 66 on the optical quality of FLC cells to which electric field was not applied. It is shown that there is an optimal number of rubbing cycles for obtaining the best optical quality of FLC cells; the number of cycles is individual for each polymer alignment layer and coating type.</p>","PeriodicalId":527,"journal":{"name":"Crystallography Reports","volume":null,"pages":null},"PeriodicalIF":0.7,"publicationDate":"2024-02-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140882659","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-02-06DOI: 10.1134/s1063774523600072
N. I. Sorokin, I. I. Buchinskaya, D. N. Karimov
Abstract
Fluoride–oxide composites 99NdF3⋅1Nd2O3, 98NdF3⋅2Nd2O3, 97NdF3⋅3Nd2O3, 92NdF3⋅5SrF2⋅3Nd2O3, and 91NdF3⋅5SrF2⋅4Nd2O3 (mol %) have been fabricated in the NdF3–Nd2O3 and NdF3–SrF2–Nd2O3 systems by the directional crystallization technique. It is found that the target tysonite-type Nd(_{{1-x}})Srx(O,F)(_{{3-delta }}) solid solution is partially decomposed upon cooling with segregation of nonstoichiometric modifications based on the NdO(_{{1-x}})F(_{{1 + 2x}}) phase. The electrical conductivity of the composites has been analyzed by impedance spectroscopy in the temperature range of 294–522 K. The σdc values at 500 K are 5.2 × 10–4, 6.5 × 10–4, and 2 × 10–3 S/cm for 99NdF3⋅1Nd2O3, 97NdF3⋅3Nd2O3, and 92NdF3⋅5SrF2⋅3Nd2O3, respectively; after doping of SrF2 into the composite, the conductivity increases by a factor of 4 due to heterovalent substitutions of cations Sr2+ for Nd3+ and formation of anion vacancies. It is shown that cationic substitutions are much more efficient (in comparison with anionic substitutions) for the mechanism of ionic conduction in tysonite-type solid solutions. The σdc value of oxofluoride composite 92NdF3⋅5SrF2⋅3Nd2O3 is larger than that for fluoride composite 70NdF3⋅30SrF2 by a factor of 50 at room temperature. The composites under study can be applied as medium-temperature solid-state sensors for simultaneous detection of oxygen and fluorine.
{"title":"Synthesis and Ionic Conductivity of Fluoride–Oxide Composites in NdF3–Nd2O3 and NdF3–SrF2–Nd2O3 Systems","authors":"N. I. Sorokin, I. I. Buchinskaya, D. N. Karimov","doi":"10.1134/s1063774523600072","DOIUrl":"https://doi.org/10.1134/s1063774523600072","url":null,"abstract":"<h3 data-test=\"abstract-sub-heading\">Abstract</h3><p>Fluoride–oxide composites 99NdF<sub>3</sub>⋅1Nd<sub>2</sub>O<sub>3</sub>, 98NdF<sub>3</sub>⋅2Nd<sub>2</sub>O<sub>3</sub>, 97NdF<sub>3</sub>⋅3Nd<sub>2</sub>O<sub>3</sub>, 92NdF<sub>3</sub>⋅5SrF<sub>2</sub>⋅3Nd<sub>2</sub>O<sub>3</sub>, and 91NdF<sub>3</sub>⋅5SrF<sub>2</sub>⋅4Nd<sub>2</sub>O<sub>3</sub> (mol %) have been fabricated in the NdF<sub>3</sub>–Nd<sub>2</sub>O<sub>3</sub> and NdF<sub>3</sub>–SrF<sub>2</sub>–Nd<sub>2</sub>O<sub>3</sub> systems by the directional crystallization technique. It is found that the target tysonite-type Nd<span>(_{{1-x}})</span>Sr<sub><i>x</i></sub>(O,F)<span>(_{{3-delta }})</span> solid solution is partially decomposed upon cooling with segregation of nonstoichiometric modifications based on the NdO<span>(_{{1-x}})</span>F<span>(_{{1 + 2x}})</span> phase. The electrical conductivity of the composites has been analyzed by impedance spectroscopy in the temperature range of 294–522 K. The σ<sub>dc</sub> values at 500 K are 5.2 × 10<sup>–4</sup>, 6.5 × 10<sup>–4</sup>, and 2 × 10<sup>–3</sup> S/cm for 99NdF<sub>3</sub>⋅1Nd<sub>2</sub>O<sub>3</sub>, 97NdF<sub>3</sub>⋅3Nd<sub>2</sub>O<sub>3</sub>, and 92NdF<sub>3</sub>⋅5SrF<sub>2</sub>⋅3Nd<sub>2</sub>O<sub>3</sub>, respectively; after doping of SrF<sub>2</sub> into the composite, the conductivity increases by a factor of 4 due to heterovalent substitutions of cations Sr<sup>2+</sup> for Nd<sup>3+</sup> and formation of anion vacancies. It is shown that cationic substitutions are much more efficient (in comparison with anionic substitutions) for the mechanism of ionic conduction in tysonite-type solid solutions. The σ<sub>dc</sub> value of oxofluoride composite 92NdF<sub>3</sub>⋅5SrF<sub>2</sub>⋅3Nd<sub>2</sub>O<sub>3</sub> is larger than that for fluoride composite 70NdF<sub>3</sub>⋅30SrF<sub>2</sub> by a factor of 50 at room temperature. The composites under study can be applied as medium-temperature solid-state sensors for simultaneous detection of oxygen and fluorine.</p>","PeriodicalId":527,"journal":{"name":"Crystallography Reports","volume":null,"pages":null},"PeriodicalIF":0.7,"publicationDate":"2024-02-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139759884","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper reports the crystal structures of two n-tetrabutylammonium inclusion compounds of 2,2'-bis(4-hydroxyphenyl)propane (BPA) of (n-C4H9)4N+⋅C15H15O(_{2}^{ - })⋅3C15H16O2⋅C2H5OH (1) and 2(n-C4H9)4N+⋅C2O(_{4}^{{2 - }})⋅2C15H16O2 (2), which were characterized by single crystal X-ray diffraction. The experimental data show that 1 can be classified to be the triclinic crystal system of P(bar {1}) space group and 2 to be the orthorhombic system of Pna21 with higher symmetry. Interestingly, the crystal structures of the two inclusion compounds have the same point during the formation of the related structures. In these two crystals with varied symmetry, BPA molecules or ions and the bridging auxiliary molecules first form a separate hydrogen bond unit, then the hydrogen-bonded units pack to form the three-dimensional host framework by different symmetry operations. And finally the guest tetrabutylammonium cations are arranged between the varied voids of the host skeleton to yield the stable crystalline structures.
Abstract This paper reports the crystal structures of two n-tetrabutylammonium inclusion compounds of 2、2'-双(4-羟基苯基)丙烷(BPA)的两种正四丁基铵包合物的晶体结构,分别为(n-C4H9)4N+⋅C15H15O(_{2}^{ - }})⋅3C15H16O2⋅C2H5OH(1)和2(n-C4H9)4N+⋅C2O(_{4}^{2 - }})⋅2C15H16O2(2)。实验数据表明,1 可以归类为 P(bar {1})空间群的三菱晶系,而 2 则是具有更高对称性的 Pna21 正方晶系。有趣的是,这两种包合物的晶体结构在相关结构的形成过程中具有相同点。在这两种对称性不同的晶体中,双酚 A 分子或离子与桥接的辅助分子首先形成一个独立的氢键单元,然后氢键单元通过不同的对称操作打包形成三维主框架。最后,客体四丁基铵阳离子排列在主骨架的不同空隙之间,形成稳定的晶体结构。
{"title":"Synthesis and Crystal Structure of Two n-Tetrabutylammonium Inclusion Compounds with 2,2'-Bis(4-hydroxyphenyl)propane As the Main Body","authors":"Y.-X. Yang, S.-H. Fu, Y.-W. Guo, X.-N. Ma, X.-X. Wu","doi":"10.1134/s1063774523600096","DOIUrl":"https://doi.org/10.1134/s1063774523600096","url":null,"abstract":"<h3 data-test=\"abstract-sub-heading\">Abstract</h3><p>This paper reports the crystal structures of two <i>n</i>-tetrabutylammonium inclusion compounds of 2,2'-bis(4-hydroxyphenyl)propane (BPA) of (<i>n</i>-C<sub>4</sub>H<sub>9</sub>)<sub>4</sub>N<sup>+</sup>⋅C<sub>15</sub>H<sub>15</sub>O<span>(_{2}^{ - })</span>⋅3C<sub>15</sub>H<sub>16</sub>O<sub>2</sub>⋅C<sub>2</sub>H<sub>5</sub>OH (<b>1</b>) and 2(<i>n</i>-C<sub>4</sub>H<sub>9</sub>)<sub>4</sub>N<sup>+</sup>⋅C<sub>2</sub>O<span>(_{4}^{{2 - }})</span>⋅2C<sub>15</sub>H<sub>16</sub>O<sub>2</sub> (<b>2</b>), which were characterized by single crystal X-ray diffraction. The experimental data show that <b>1</b> can be classified to be the triclinic crystal system of <i>P</i><span>(bar {1})</span> space group and <b>2</b> to be the orthorhombic system of <i>Pna</i>2<sub>1</sub> with higher symmetry. Interestingly, the crystal structures of the two inclusion compounds have the same point during the formation of the related structures. In these two crystals with varied symmetry, BPA molecules or ions and the bridging auxiliary molecules first form a separate hydrogen bond unit, then the hydrogen-bonded units pack to form the three-dimensional host framework by different symmetry operations. And finally the guest tetrabutylammonium cations are arranged between the varied voids of the host skeleton to yield the stable crystalline structures.</p>","PeriodicalId":527,"journal":{"name":"Crystallography Reports","volume":null,"pages":null},"PeriodicalIF":0.7,"publicationDate":"2024-02-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140882902","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-02-06DOI: 10.1134/s1063774523600709
V. N. Naunyka
Abstract
The dependence of the change in the components of the inverse permittivity tensor of a cubic photorefractive Bi12SiO20 crystal on the direction of the wave vector of holographic grating in the crystal coordinate system has been studied. It is shown that, when recording a phase hologram, the largest change in the refractive index of Bi12SiO20 crystal is attained when the holographic grating wave vector is oriented along symmetrically equivalent 〈111〉 directions. The maximum possible modulation amplitude of the refractive index of a holographic grating with the wave vector oriented along the 〈110〉 directions is found to exceed that in the case of orientation along the 〈100〉 directions. The components of the inverse permittivity tensor of Bi12SiO20 crystal were calculated taking into account that a phase hologram is recorded under linear electro-optic, photoelastic, and inverse piezoelectric effects.
{"title":"Determination of Optimal Directions of the Wave Vector of a Phase Holographic Grating in Cubic Photorefractive Crystal","authors":"V. N. Naunyka","doi":"10.1134/s1063774523600709","DOIUrl":"https://doi.org/10.1134/s1063774523600709","url":null,"abstract":"<h3 data-test=\"abstract-sub-heading\">Abstract</h3><p>The dependence of the change in the components of the inverse permittivity tensor of a cubic photorefractive Bi<sub>12</sub>SiO<sub>20</sub> crystal on the direction of the wave vector of holographic grating in the crystal coordinate system has been studied. It is shown that, when recording a phase hologram, the largest change in the refractive index of Bi<sub>12</sub>SiO<sub>20</sub> crystal is attained when the holographic grating wave vector is oriented along symmetrically equivalent 〈111〉 directions. The maximum possible modulation amplitude of the refractive index of a holographic grating with the wave vector oriented along the 〈110〉 directions is found to exceed that in the case of orientation along the 〈100〉 directions. The components of the inverse permittivity tensor of Bi<sub>12</sub>SiO<sub>20</sub> crystal were calculated taking into account that a phase hologram is recorded under linear electro-optic, photoelastic, and inverse piezoelectric effects.</p>","PeriodicalId":527,"journal":{"name":"Crystallography Reports","volume":null,"pages":null},"PeriodicalIF":0.7,"publicationDate":"2024-02-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139760079","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-02-06DOI: 10.1134/s1063774523600783
G. D. Ilyushin
Abstract
A geometrical and topological analysis has been performed and the self-assembly of crystal structures of the Fe3(PFe3)P2-hP9, Zr3(NiAl3)Ni2-hP9, and Y3(NiAl3)Ge2