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Surface conditioning in cutting and abrasive processes 切削和研磨工艺中的表面处理
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.05.004
Volker Schulze (2) , Jan Aurich (1) , I.S. Jawahir (1) , Bernhard Karpuschewski (1) , Jiwang Yan (2)

Cutting and abrasive processes affect the surface layer state of the components treated. This determines their performance in service. An adjustment of the surface layer properties would allow for enhanced performance. This paper introduces the influences of named processes on the surface layer state and their systematics. Models and sensor concepts for surface conditioning are described and combined to soft sensors which are the basis for active control within the processes. A validation study and actual applications of the conditioning concept are shown, allowing for further technological and scientific understanding of surface conditioning and its contribution to material and energy efficiency.

切削和研磨过程会影响所处理部件的表层状态。这决定了部件的使用性能。调整表层特性可提高性能。本文介绍了命名过程对表层状态的影响及其系统性。文中介绍了表面调节的模型和传感器概念,并将其与软传感器相结合,作为在工艺流程中进行主动控制的基础。本文还展示了调理概念的验证研究和实际应用,以便进一步从技术和科学角度了解表面调理及其对材料和能源效率的贡献。
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引用次数: 0
Optimizing lightweight lattice structures through integrated parameterized design and fiber-reinforced additive manufacturing 通过综合参数化设计和纤维增强增材制造优化轻质晶格结构
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.005

Lattice structures offer advantages in load-bearing applications in terms of structural efficiency and strength-to-weight ratio. Previous structure optimization methods were mainly based on discretized structures without incorporating manufacturing capabilities, thus ad-hoc treatments or redesigns were required to enable fabrication. This paper presents a ‘rotation vector’ based method that parameterizes lattice structures and directly generates curved printing paths, which is particularly suitable for multi-axis additive manufacturing using fiber-reinforced filaments. The proposed method simultaneously considers structure-stress alignment and layer-wise fabrication to achieve optimized design with enhanced strength-to-weight ratio, which is parametrically adaptable to different printing configurations and infill densities.

晶格结构在承重应用中具有结构效率和强度重量比方面的优势。以往的结构优化方法主要基于离散化结构,没有结合制造能力,因此需要进行临时处理或重新设计才能实现制造。本文提出了一种基于 "旋转矢量 "的方法,该方法可将晶格结构参数化,并直接生成曲线打印路径,尤其适用于使用纤维增强丝的多轴增材制造。所提出的方法同时考虑了结构-应力对齐和分层制造,从而实现了优化设计,提高了强度-重量比,在参数上可适应不同的打印配置和填充密度。
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引用次数: 0
Improvement of surface quality in simultaneous machining of multiple workpieces on a single machine 提高单台机床同时加工多个工件的表面质量
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.040

Process integration and automation are becoming increasingly important for improving productivity. When two workpieces are parallelly machined on a single machine, vibration transmission by multiple machining points makes it difficult to select optimal cutting conditions, achieving both accuracy and efficiency. This study presents a method to introduce the optimal condition in simultaneous machining with different processes. The developed simulation includes machine dynamics and simultaneous machining process model. Vibration transmissibility between the processes is calculated and the cutting condition with less roundness is proposed. An experimental result shows the proposed method can determine cutting condition the higher accuracy in short time.

工艺集成和自动化对提高生产率越来越重要。当两件工件在一台机床上平行加工时,多个加工点的振动传递会导致难以选择最佳切削条件,从而无法同时实现精度和效率。本研究提出了一种在不同工序的同步加工中引入最佳条件的方法。所开发的仿真包括机床动力学和同步加工过程模型。计算了工序间的振动传递率,并提出了圆度较小的切削条件。实验结果表明,所提出的方法能在短时间内确定精度更高的切削条件。
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引用次数: 0
Changes in edge shape during silicon wafer polishing: Roll-off and roll-up formation 硅晶片抛光过程中边缘形状的变化:卷边和卷起的形成
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.032

The edge shape of a silicon wafer is crucial for optimal device manufacturing. In polishing processes, it is necessary to form wafers into either a flat or roll-up shape, depending on the specific requirements of the process. However, the conventional process typically results in a roll-off shape. This study identifies the factors that influence a change in the edge shape during polishing. Polishing experiments were conducted to examine the effects of the initial edge shape and contact state between the wafer and polishing pad on the removal distribution. An approach for adjusting the resulting edge shapes was proposed.

硅晶片的边缘形状对于优化设备制造至关重要。在抛光工艺中,必须根据工艺的具体要求,将硅片加工成平面或卷边形状。然而,传统工艺通常会产生卷边形状。本研究确定了影响抛光过程中边缘形状变化的因素。通过抛光实验,研究了初始边缘形状以及晶片和抛光垫之间的接触状态对去除分布的影响。并提出了调整所产生的边缘形状的方法。
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引用次数: 0
Functional specification of complex assemblies using projective geometric algebra 使用投影几何代数对复杂组件进行功能说明
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.059

In geometric tolerancing, functional specification is becoming challenging as the complex mutual situations of geometrical features increase and the requisites for complex assembly accuracy escalate. A computational representation of sets of situation features is proposed in this paper to manage functional specification of complex assemblies. A minimum triplet set of a point, a straight line and a plane called ToLiP, is introduced to represent situation features. Functional specification operations can thus be mathematically established using projective geometric algebra (PGA). The effectiveness of the proposed approach is highlighted through a case study using quadrupole magnets of a particle accelerator.

在几何公差中,随着几何特征的复杂相互情况的增加和复杂装配精度要求的提高,功能规范变得越来越具有挑战性。本文提出了一种情况特征集计算表示法,用于管理复杂装配的功能规范。本文引入了由点、直线和平面组成的最小三元组(称为 ToLiP)来表示情况特征。因此,可以使用投影几何代数(PGA)在数学上建立功能规范操作。通过使用粒子加速器的四极磁体进行案例研究,强调了所提方法的有效性。
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引用次数: 0
Oxidation mechanism of 4H-SiC in slurry-less ECMP with weak alkaline electrolyte 4H-SiC 在弱碱性电解质无浆 ECMP 中的氧化机理
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.037

4H-SiC is crucial for high-temperature, high-power semiconductors, yet its processing encounters challenges due to its high hardness and chemical inertness. The three-step slurry-less Electrochemical Mechanical Polishing (ECMP) with NaCl electrolyte ensured efficient and damage-free polishing for 4H-SiC. However, the final step of slurry-less ECMP required sacrificing removal efficiency to prevent oxide layer breakdown and achieve an atomically smooth SiC surface. Additionally, the use of NaCl in practical industrial applications often resulted in equipment rusting easily. This study explored the substituting of a weak alkaline KOH electrolyte for NaCl in slurry-less ECMP, detailing oxidation mechanism of 4H-SiC. This alternative achieved an ultra-smooth surface without compromising the oxidation rate, laying a theoretical foundation for efficient slurry-less ECMP process.

4H-SiC 对高温、大功率半导体至关重要,但由于其硬度高、化学惰性强,其加工过程面临着诸多挑战。使用氯化钠电解液的三步无浆电化学机械抛光(ECMP)确保了 4H-SiC 的高效和无损抛光。但是,无浆料 ECMP 的最后一步需要牺牲去除效率,以防止氧化层破裂,并获得原子级光滑的 SiC 表面。此外,在实际工业应用中使用 NaCl 往往会导致设备容易生锈。本研究探讨了在无浆 ECMP 中用弱碱性 KOH 电解液替代 NaCl 的方法,并详细介绍了 4H-SiC 的氧化机理。这种替代方法在不影响氧化率的情况下实现了超光滑表面,为高效的无浆 ECMP 工艺奠定了理论基础。
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引用次数: 0
Estimation of kinematic errors of rotary axis with wide indexing range 估算大分度范围旋转轴的运动误差
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.065

Since compensation for rotation centers is insufficient for accurate 5-axis manufacturing, compensation for kinematic errors of the rotary axis is demanded. Although touch trigger probes are widely used, interference with other components often limits their measurement range and accuracy. This article proposes a method to identify kinematic parameters for the entire stroke of the swiveling axis at once from a measured dataset taken at different measurement locations depending on the indexing angle of the swiveling axis. The proposed method is experimentally evaluated on a horizontal 5-axis machining center.

由于旋转中心的补偿不足以实现精确的五轴制造,因此需要对旋转轴的运动误差进行补偿。虽然触发式探头得到了广泛应用,但由于受到其他部件的干扰,其测量范围和精度往往受到限制。本文提出了一种方法,可根据旋转轴的分度角,从不同测量位置获取的测量数据集中一次性确定旋转轴整个行程的运动学参数。所提出的方法在卧式五轴加工中心上进行了实验评估。
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引用次数: 0
Mechanical and thermal processing of wire-arc additively deposited stainless steel 线弧加沉积不锈钢的机械和热加工
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.068

Mechanical and thermal processing of wire-arc additively deposited stainless steel is investigated with the purpose of improving its microstructure, surface morphology, formability, and stress response. Microscopy helps identifying the processing conditions that permit full recrystallization of the as-built columnar microstructure. Combination with strain loading paths, topography and fractography in tensile tests show that mechanical processing consisting of 20 % thickness reduction followed by annealing at 1100 °C under 4 h eliminates anisotropy and increases the fracture forming limits by 30 %. The work is a step forward to consolidate the hybridization of wire-arc additive manufacturing with metal forming as an alternative to conventional manufacturing.

为了改善不锈钢的微观结构、表面形态、成型性和应力响应,研究了线弧添加沉积不锈钢的机械和热加工工艺。显微镜有助于确定加工条件,从而使已形成的柱状微观结构得以充分再结晶。结合拉伸试验中的应变加载路径、形貌和断裂图显示,机械加工包括减薄 20%的厚度,然后在 1100 °C 下退火 4 小时,可消除各向异性,并将断裂成形极限提高 30%。这项工作为巩固线弧快速成型制造与金属成型的混合,以替代传统制造迈出了一步。
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引用次数: 0
Accuracy evaluation of squareness identification by vision-based circular tests for machine tools 通过基于视觉的机床圆周测试对方正度识别进行精度评估
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.089

The accuracy of the identification of machine tool squareness by the vision-based circular test was evaluated. The uncertainty in the squareness identification was evaluated to clarify the accuracy criteria for camera calibration and setup. The simulation and experimental results revealed that the uncertainty owing to the skew factor of the camera was dominant. The conventional calibration performed using a checkerboard plate was insufficient. In contrast, the experimental setup did not require a high accuracy because the alignment error was not significant. The obtained results demonstrated the potential of the vision-based test for an approximate and rapid identification of squareness.

评估了通过基于视觉的圆形测试识别机床垂直度的准确性。对方正度识别的不确定性进行了评估,以明确相机校准和设置的精度标准。模拟和实验结果表明,照相机偏斜系数造成的不确定性占主导地位。使用棋盘格板进行的传统校准是不够的。与此相反,由于校准误差不大,实验装置对精度要求不高。获得的结果表明,基于视觉的测试具有近似快速识别方正度的潜力。
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引用次数: 0
Data-driven feedforward control of inertial dampers for accuracy improvement 提高惯性阻尼器精度的数据驱动前馈控制
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.007

This paper presents a novel control strategy to minimize residual vibrations and overshoot using inertial dampers in repetitive tasks. In this work, vibration data collected during repeating task is utilized to generate a fully pre-scheduled feedforward compensation signal that assists the inertial damper's original feedback controller to further enhance its vibration mitigation capability. Optimal feedforward signal is determined iteratively over successive operations considering the actuator stroke and force limits. Numerical and experimental results validate the approach demonstrating significant (up to 87%) reduction in peak vibration while using equal or less actuator force as compared to the conventional control.

本文提出了一种新颖的控制策略,利用惯性阻尼器在重复性任务中最大限度地减少残余振动和过冲。在这项工作中,重复性任务期间收集的振动数据被用来生成完全预定的前馈补偿信号,以协助惯性阻尼器的原始反馈控制器进一步增强其振动缓解能力。最佳前馈信号是在连续操作中反复确定的,其中考虑到了执行器的行程和力限制。数值和实验结果验证了这种方法,与传统控制相比,在使用相同或更小的致动器力时,峰值振动显著降低(最高达 87%)。
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引用次数: 0
期刊
Cirp Annals-Manufacturing Technology
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