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Improvement of surface quality in simultaneous machining of multiple workpieces on a single machine 提高单台机床同时加工多个工件的表面质量
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.040

Process integration and automation are becoming increasingly important for improving productivity. When two workpieces are parallelly machined on a single machine, vibration transmission by multiple machining points makes it difficult to select optimal cutting conditions, achieving both accuracy and efficiency. This study presents a method to introduce the optimal condition in simultaneous machining with different processes. The developed simulation includes machine dynamics and simultaneous machining process model. Vibration transmissibility between the processes is calculated and the cutting condition with less roundness is proposed. An experimental result shows the proposed method can determine cutting condition the higher accuracy in short time.

工艺集成和自动化对提高生产率越来越重要。当两件工件在一台机床上平行加工时,多个加工点的振动传递会导致难以选择最佳切削条件,从而无法同时实现精度和效率。本研究提出了一种在不同工序的同步加工中引入最佳条件的方法。所开发的仿真包括机床动力学和同步加工过程模型。计算了工序间的振动传递率,并提出了圆度较小的切削条件。实验结果表明,所提出的方法能在短时间内确定精度更高的切削条件。
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引用次数: 0
Changes in edge shape during silicon wafer polishing: Roll-off and roll-up formation 硅晶片抛光过程中边缘形状的变化:卷边和卷起的形成
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.032

The edge shape of a silicon wafer is crucial for optimal device manufacturing. In polishing processes, it is necessary to form wafers into either a flat or roll-up shape, depending on the specific requirements of the process. However, the conventional process typically results in a roll-off shape. This study identifies the factors that influence a change in the edge shape during polishing. Polishing experiments were conducted to examine the effects of the initial edge shape and contact state between the wafer and polishing pad on the removal distribution. An approach for adjusting the resulting edge shapes was proposed.

硅晶片的边缘形状对于优化设备制造至关重要。在抛光工艺中,必须根据工艺的具体要求,将硅片加工成平面或卷边形状。然而,传统工艺通常会产生卷边形状。本研究确定了影响抛光过程中边缘形状变化的因素。通过抛光实验,研究了初始边缘形状以及晶片和抛光垫之间的接触状态对去除分布的影响。并提出了调整所产生的边缘形状的方法。
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引用次数: 0
Functional specification of complex assemblies using projective geometric algebra 使用投影几何代数对复杂组件进行功能说明
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.059

In geometric tolerancing, functional specification is becoming challenging as the complex mutual situations of geometrical features increase and the requisites for complex assembly accuracy escalate. A computational representation of sets of situation features is proposed in this paper to manage functional specification of complex assemblies. A minimum triplet set of a point, a straight line and a plane called ToLiP, is introduced to represent situation features. Functional specification operations can thus be mathematically established using projective geometric algebra (PGA). The effectiveness of the proposed approach is highlighted through a case study using quadrupole magnets of a particle accelerator.

在几何公差中,随着几何特征的复杂相互情况的增加和复杂装配精度要求的提高,功能规范变得越来越具有挑战性。本文提出了一种情况特征集计算表示法,用于管理复杂装配的功能规范。本文引入了由点、直线和平面组成的最小三元组(称为 ToLiP)来表示情况特征。因此,可以使用投影几何代数(PGA)在数学上建立功能规范操作。通过使用粒子加速器的四极磁体进行案例研究,强调了所提方法的有效性。
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引用次数: 0
Oxidation mechanism of 4H-SiC in slurry-less ECMP with weak alkaline electrolyte 4H-SiC 在弱碱性电解质无浆 ECMP 中的氧化机理
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.037

4H-SiC is crucial for high-temperature, high-power semiconductors, yet its processing encounters challenges due to its high hardness and chemical inertness. The three-step slurry-less Electrochemical Mechanical Polishing (ECMP) with NaCl electrolyte ensured efficient and damage-free polishing for 4H-SiC. However, the final step of slurry-less ECMP required sacrificing removal efficiency to prevent oxide layer breakdown and achieve an atomically smooth SiC surface. Additionally, the use of NaCl in practical industrial applications often resulted in equipment rusting easily. This study explored the substituting of a weak alkaline KOH electrolyte for NaCl in slurry-less ECMP, detailing oxidation mechanism of 4H-SiC. This alternative achieved an ultra-smooth surface without compromising the oxidation rate, laying a theoretical foundation for efficient slurry-less ECMP process.

4H-SiC 对高温、大功率半导体至关重要,但由于其硬度高、化学惰性强,其加工过程面临着诸多挑战。使用氯化钠电解液的三步无浆电化学机械抛光(ECMP)确保了 4H-SiC 的高效和无损抛光。但是,无浆料 ECMP 的最后一步需要牺牲去除效率,以防止氧化层破裂,并获得原子级光滑的 SiC 表面。此外,在实际工业应用中使用 NaCl 往往会导致设备容易生锈。本研究探讨了在无浆 ECMP 中用弱碱性 KOH 电解液替代 NaCl 的方法,并详细介绍了 4H-SiC 的氧化机理。这种替代方法在不影响氧化率的情况下实现了超光滑表面,为高效的无浆 ECMP 工艺奠定了理论基础。
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引用次数: 0
Estimation of kinematic errors of rotary axis with wide indexing range 估算大分度范围旋转轴的运动误差
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.065

Since compensation for rotation centers is insufficient for accurate 5-axis manufacturing, compensation for kinematic errors of the rotary axis is demanded. Although touch trigger probes are widely used, interference with other components often limits their measurement range and accuracy. This article proposes a method to identify kinematic parameters for the entire stroke of the swiveling axis at once from a measured dataset taken at different measurement locations depending on the indexing angle of the swiveling axis. The proposed method is experimentally evaluated on a horizontal 5-axis machining center.

由于旋转中心的补偿不足以实现精确的五轴制造,因此需要对旋转轴的运动误差进行补偿。虽然触发式探头得到了广泛应用,但由于受到其他部件的干扰,其测量范围和精度往往受到限制。本文提出了一种方法,可根据旋转轴的分度角,从不同测量位置获取的测量数据集中一次性确定旋转轴整个行程的运动学参数。所提出的方法在卧式五轴加工中心上进行了实验评估。
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引用次数: 0
Mechanical and thermal processing of wire-arc additively deposited stainless steel 线弧加沉积不锈钢的机械和热加工
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.068

Mechanical and thermal processing of wire-arc additively deposited stainless steel is investigated with the purpose of improving its microstructure, surface morphology, formability, and stress response. Microscopy helps identifying the processing conditions that permit full recrystallization of the as-built columnar microstructure. Combination with strain loading paths, topography and fractography in tensile tests show that mechanical processing consisting of 20 % thickness reduction followed by annealing at 1100 °C under 4 h eliminates anisotropy and increases the fracture forming limits by 30 %. The work is a step forward to consolidate the hybridization of wire-arc additive manufacturing with metal forming as an alternative to conventional manufacturing.

为了改善不锈钢的微观结构、表面形态、成型性和应力响应,研究了线弧添加沉积不锈钢的机械和热加工工艺。显微镜有助于确定加工条件,从而使已形成的柱状微观结构得以充分再结晶。结合拉伸试验中的应变加载路径、形貌和断裂图显示,机械加工包括减薄 20%的厚度,然后在 1100 °C 下退火 4 小时,可消除各向异性,并将断裂成形极限提高 30%。这项工作为巩固线弧快速成型制造与金属成型的混合,以替代传统制造迈出了一步。
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引用次数: 0
Accuracy evaluation of squareness identification by vision-based circular tests for machine tools 通过基于视觉的机床圆周测试对方正度识别进行精度评估
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.089

The accuracy of the identification of machine tool squareness by the vision-based circular test was evaluated. The uncertainty in the squareness identification was evaluated to clarify the accuracy criteria for camera calibration and setup. The simulation and experimental results revealed that the uncertainty owing to the skew factor of the camera was dominant. The conventional calibration performed using a checkerboard plate was insufficient. In contrast, the experimental setup did not require a high accuracy because the alignment error was not significant. The obtained results demonstrated the potential of the vision-based test for an approximate and rapid identification of squareness.

评估了通过基于视觉的圆形测试识别机床垂直度的准确性。对方正度识别的不确定性进行了评估,以明确相机校准和设置的精度标准。模拟和实验结果表明,照相机偏斜系数造成的不确定性占主导地位。使用棋盘格板进行的传统校准是不够的。与此相反,由于校准误差不大,实验装置对精度要求不高。获得的结果表明,基于视觉的测试具有近似快速识别方正度的潜力。
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引用次数: 0
Data-driven feedforward control of inertial dampers for accuracy improvement 提高惯性阻尼器精度的数据驱动前馈控制
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.007

This paper presents a novel control strategy to minimize residual vibrations and overshoot using inertial dampers in repetitive tasks. In this work, vibration data collected during repeating task is utilized to generate a fully pre-scheduled feedforward compensation signal that assists the inertial damper's original feedback controller to further enhance its vibration mitigation capability. Optimal feedforward signal is determined iteratively over successive operations considering the actuator stroke and force limits. Numerical and experimental results validate the approach demonstrating significant (up to 87%) reduction in peak vibration while using equal or less actuator force as compared to the conventional control.

本文提出了一种新颖的控制策略,利用惯性阻尼器在重复性任务中最大限度地减少残余振动和过冲。在这项工作中,重复性任务期间收集的振动数据被用来生成完全预定的前馈补偿信号,以协助惯性阻尼器的原始反馈控制器进一步增强其振动缓解能力。最佳前馈信号是在连续操作中反复确定的,其中考虑到了执行器的行程和力限制。数值和实验结果验证了这种方法,与传统控制相比,在使用相同或更小的致动器力时,峰值振动显著降低(最高达 87%)。
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引用次数: 0
Ontology-integrated tuning of large language model for intelligent maintenance 本体集成调整大型语言模型,实现智能维护
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.012

As new AI technologies such as Large Language Models (LLM) quickly evolve, the need for enhancing general-purpose LLMs with physical knowledge to better serve the manufacturing community has been increasingly recognized. This paper presents a method that tailors GPT-3.5 with domain-specific knowledge for intelligent aircraft maintenance. Specifically, aircraft ontology is investigated to curate maintenance logs with encoded component hierarchical structure to fine-tune GPT-3.5. Experimental results demonstrate the effectiveness of the developed method in accurately identifying defective components and providing consistent maintenance action recommendations, outperforming general-purpose GPT-3.5 and GPT-4.0. The method can be adapted to other domains in manufacturing and beyond.

随着大型语言模型(LLM)等新型人工智能技术的快速发展,人们越来越认识到需要利用物理知识增强通用 LLM,以便更好地服务于制造业。本文介绍了一种利用特定领域知识为飞机智能维护量身定制 GPT-3.5 的方法。具体来说,本文研究了飞机本体,通过编码组件分层结构来整理维护日志,从而对 GPT-3.5 进行微调。实验结果表明,所开发的方法在准确识别缺陷部件和提供一致的维护行动建议方面非常有效,优于通用的 GPT-3.5 和 GPT-4.0。该方法可适用于制造业及其他领域。
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引用次数: 0
Impact of directionality and heat treatment on machining of additively manufactured Inconel 718 定向性和热处理对快速成型 Inconel 718 加工的影响
IF 3.2 3区 工程技术 Q2 ENGINEERING, INDUSTRIAL Pub Date : 2024-01-01 DOI: 10.1016/j.cirp.2024.04.057
Joseph Betts , Sarah Glanvill , Alborz Shokrani (2)

Additive manufacturing (AM) can be used to produce near-net-shape Inconel 718 parts to minimise the material consumption and the machining required for fabricating parts. Compared to wrought Inconel 718, there are certain characteristics inherent to AM process. These are elongated microstructural grains in the build direction, skin effect and the possibility of semi-finish machining prior to heat treatment. Micro-scratch and end milling tests were used to investigate the impact of these AM specific characteristics on machining performance and compare it with wrought alloy. The analysis demonstrated that directionality, skin effect and heat treatment affect cutting forces and tool wear within the material. Using lubrication can minimise these variations.

快速成型制造(AM)可用于生产近净成形的铬镍铁合金 718 零件,从而最大限度地减少零件制造所需的材料消耗和机械加工。与锻造的 Inconel 718 相比,AM 工艺具有某些固有的特点。这些特点包括在构建方向上的细长微结构晶粒、集肤效应以及在热处理前进行半精加工的可能性。微划痕和端面铣削测试用于研究这些 AM 特性对加工性能的影响,并与锻造合金进行比较。分析表明,方向性、趋肤效应和热处理会影响材料内的切削力和刀具磨损。使用润滑剂可以最大限度地减少这些变化。
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引用次数: 0
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Cirp Annals-Manufacturing Technology
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