Pub Date : 2015-04-12DOI: 10.1109/FCS.2015.7138802
S. Varadan, G. Pan, Zhao Zhao, T. Alford
An analysis to determine the complex permittivity of arsenic-doped silicon wafer at 2.45 GHz is presented based on closed-form analytical expressions for cylindrical symmetry. Experimental results in support with the numerical analysis and simulation results are also presented. This analysis will further help analyze the capacitive heating of doped and undoped silicon wafer at microwave frequency; hence, this paper is a precursor to elucidation of capacitive heating of silicon substrates placed between susceptors. This study indicates that when the dopant is added to the silicon the loss tangent decreases with increase in concentration but upon annealing the loss tangent becomes constant with respect to concentration of the dopant.
{"title":"As-doped Si's complex permittivity and its effects on heating curve at 2.45 GHz frequency","authors":"S. Varadan, G. Pan, Zhao Zhao, T. Alford","doi":"10.1109/FCS.2015.7138802","DOIUrl":"https://doi.org/10.1109/FCS.2015.7138802","url":null,"abstract":"An analysis to determine the complex permittivity of arsenic-doped silicon wafer at 2.45 GHz is presented based on closed-form analytical expressions for cylindrical symmetry. Experimental results in support with the numerical analysis and simulation results are also presented. This analysis will further help analyze the capacitive heating of doped and undoped silicon wafer at microwave frequency; hence, this paper is a precursor to elucidation of capacitive heating of silicon substrates placed between susceptors. This study indicates that when the dopant is added to the silicon the loss tangent decreases with increase in concentration but upon annealing the loss tangent becomes constant with respect to concentration of the dopant.","PeriodicalId":57667,"journal":{"name":"时间频率公报","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77326362","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-04-12DOI: 10.1109/FCS.2015.7138854
F. Vernotte, M. Lenczner, P. Bourgeois, E. Rubiola
This work is motivated by the wish to have the most precise measurement of a frequency ν and of the variance σy2 of its fractional fluctuations in a given time τ, out of high-end general-purpose instruments. Thanks to the progress of digital electronics, new time-interval analyzers have been made available in the last few years. Such instruments measure the time stamp of the input events at high sampling speed (MS/s), and with high resolution (10-100 ps). We propose the linear regression as a means to estimate the frequency from time stamps of the input signal. The frequency counter based on the linear regression is called Ω counter. The linear regression is interpreted as a finite impulse response filter which takes the frequency samples as the input, and delivers the estimated frequency at the output. We derive the transfer function of such filter, which turns out to be parabolic shaped. As compared to the H and Λ counters, the Ω counter features better rejection of the background noise. We define the quadratic variance (QVAR), a wavelet variance similar to the Allan variance, and we derive its statistical properties. The QVAR is superior to the AVAR and MVAR in the rejection of the background noise.
{"title":"Least-square fit, Ω counters, and quadratic variance","authors":"F. Vernotte, M. Lenczner, P. Bourgeois, E. Rubiola","doi":"10.1109/FCS.2015.7138854","DOIUrl":"https://doi.org/10.1109/FCS.2015.7138854","url":null,"abstract":"This work is motivated by the wish to have the most precise measurement of a frequency ν and of the variance σy2 of its fractional fluctuations in a given time τ, out of high-end general-purpose instruments. Thanks to the progress of digital electronics, new time-interval analyzers have been made available in the last few years. Such instruments measure the time stamp of the input events at high sampling speed (MS/s), and with high resolution (10-100 ps). We propose the linear regression as a means to estimate the frequency from time stamps of the input signal. The frequency counter based on the linear regression is called Ω counter. The linear regression is interpreted as a finite impulse response filter which takes the frequency samples as the input, and delivers the estimated frequency at the output. We derive the transfer function of such filter, which turns out to be parabolic shaped. As compared to the H and Λ counters, the Ω counter features better rejection of the background noise. We define the quadratic variance (QVAR), a wavelet variance similar to the Allan variance, and we derive its statistical properties. The QVAR is superior to the AVAR and MVAR in the rejection of the background noise.","PeriodicalId":57667,"journal":{"name":"时间频率公报","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1109/FCS.2015.7138854","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72536401","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-04-12DOI: 10.1109/FCS.2015.7138873
P. Morley
Optimization of the acceleration sensitivity of quartz crystal resonators has been a challenging problem for resonator designers for decades. The structural symmetry of the resonator and mount combination has been shown in past work, both theoretical and practical, to have a strong influence on acceleration sensitivity, and specialized structures have been developed [1], [2], [3] that have greatly improved performance. However, with applications such as airborne radar systems, there is a persistent demand for further improvement. The design of many of the practical high-stability resonator products that have a need for good acceleration sensitivity is also constrained by other attributes, such as high quality factor, and these constraints typically result in a low-frequency overtone device with a fully contoured resonator element design. In this paper, the effect of the concentricity of the contour shape on the quartz disk in contoured resonators is considered, and results are presented that demonstrate a strong correlation between the contour offset from the blank center and the acceleration sensitivity of the resonator. Methods are also described for measurement of the contour position relative to the perimeter of the disk.
{"title":"The effect of contour concentricity on the acceleration sensitivity of quartz crystal resonators","authors":"P. Morley","doi":"10.1109/FCS.2015.7138873","DOIUrl":"https://doi.org/10.1109/FCS.2015.7138873","url":null,"abstract":"Optimization of the acceleration sensitivity of quartz crystal resonators has been a challenging problem for resonator designers for decades. The structural symmetry of the resonator and mount combination has been shown in past work, both theoretical and practical, to have a strong influence on acceleration sensitivity, and specialized structures have been developed [1], [2], [3] that have greatly improved performance. However, with applications such as airborne radar systems, there is a persistent demand for further improvement. The design of many of the practical high-stability resonator products that have a need for good acceleration sensitivity is also constrained by other attributes, such as high quality factor, and these constraints typically result in a low-frequency overtone device with a fully contoured resonator element design. In this paper, the effect of the concentricity of the contour shape on the quartz disk in contoured resonators is considered, and results are presented that demonstrate a strong correlation between the contour offset from the blank center and the acceleration sensitivity of the resonator. Methods are also described for measurement of the contour position relative to the perimeter of the disk.","PeriodicalId":57667,"journal":{"name":"时间频率公报","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75712807","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-04-12DOI: 10.1109/FCS.2015.7138919
D. Pan, Xiaobo Xue, Xiang Peng, Jingbiao Chen, Hong Guo, Bin Luo
We realize a Faraday anomalous dispersion optical filter (FADOF) operating on the 88Sr (5s2)1S0-(5s5p)1P1 transition, utilizing a strontium hollow cathode lamp (HCL). At the magnetic field strength of 1460 G and the HCL discharge current of 22 mA, a single transmission peak with a maximum transmission of 28.8% is obtained. The dependence of transmission on magnetic field and HCL discharge current is qualitatively studied. This demonstration will be used to build a Faraday laser, which will be applied in the Sr optical clock.
{"title":"Faraday anomalous dispersion optical filter at 461nm utilizing a strontium hollow cathode lamp","authors":"D. Pan, Xiaobo Xue, Xiang Peng, Jingbiao Chen, Hong Guo, Bin Luo","doi":"10.1109/FCS.2015.7138919","DOIUrl":"https://doi.org/10.1109/FCS.2015.7138919","url":null,"abstract":"We realize a Faraday anomalous dispersion optical filter (FADOF) operating on the <sup>88</sup>Sr (5s<sup>2</sup>)<sup>1</sup>S<sub>0</sub>-(5s5p)<sup>1</sup>P<sub>1</sub> transition, utilizing a strontium hollow cathode lamp (HCL). At the magnetic field strength of 1460 G and the HCL discharge current of 22 mA, a single transmission peak with a maximum transmission of 28.8% is obtained. The dependence of transmission on magnetic field and HCL discharge current is qualitatively studied. This demonstration will be used to build a Faraday laser, which will be applied in the Sr optical clock.","PeriodicalId":57667,"journal":{"name":"时间频率公报","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73330640","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-04-12DOI: 10.1109/FCS.2015.7138800
M. Allani, X. Vacheret, A. Clairet, T. Baron, J. Boy, C. Reibel, O. Cambon, J. Lesage, O. Bel, H. Cabane, C. Pécheyran
Before using any piezoelectric crystal to realize acoustic devices (sensors, transducers, actuators or ultra-stable resonators) and beyond its mechanical properties, the crystal material itself has to be characterized. Whether the very interesting properties of the LGT crystal make it the best candidate to substitute quartz crystal for frequency output devices, we must take into account the crystal quality. Indeed, applications require homogeneous crystals with reproducible physical properties.
{"title":"How to qualify LGT crystal for acoustic devices?","authors":"M. Allani, X. Vacheret, A. Clairet, T. Baron, J. Boy, C. Reibel, O. Cambon, J. Lesage, O. Bel, H. Cabane, C. Pécheyran","doi":"10.1109/FCS.2015.7138800","DOIUrl":"https://doi.org/10.1109/FCS.2015.7138800","url":null,"abstract":"Before using any piezoelectric crystal to realize acoustic devices (sensors, transducers, actuators or ultra-stable resonators) and beyond its mechanical properties, the crystal material itself has to be characterized. Whether the very interesting properties of the LGT crystal make it the best candidate to substitute quartz crystal for frequency output devices, we must take into account the crystal quality. Indeed, applications require homogeneous crystals with reproducible physical properties.","PeriodicalId":57667,"journal":{"name":"时间频率公报","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1109/FCS.2015.7138800","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72508898","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-04-12DOI: 10.1109/FCS.2015.7138829
Shinn-Yan Lin, Yi-Jiun Huang, Wen-Hung Tseng
We targeting analyzed the UTC link delay of GPS station PTBB of PTB to TWTF of TL and expressed it as 3 groups: the uncompensated GPS common clock difference measurements, cable delay measurement, and the total delay variations of fixed GPS stations and travelling calibrator used in this METODE calibration tour. The total delay variation of fixed GPS stations PTBB and TWTF was evaluated by monitoring their long-term CCD of the same type receiver more than 350 days. For the BIPM travelling calibrator BP1C and BP0U, we used a moving cesium clock method to evaluate their instability of total delay in different antenna position. Our study was helpful for clarifying the uncertainty composition of the current PTB-TL link and could reduce it.
{"title":"Uncertainty evaluation of 2013 TL METODE link calibration tour","authors":"Shinn-Yan Lin, Yi-Jiun Huang, Wen-Hung Tseng","doi":"10.1109/FCS.2015.7138829","DOIUrl":"https://doi.org/10.1109/FCS.2015.7138829","url":null,"abstract":"We targeting analyzed the UTC link delay of GPS station PTBB of PTB to TWTF of TL and expressed it as 3 groups: the uncompensated GPS common clock difference measurements, cable delay measurement, and the total delay variations of fixed GPS stations and travelling calibrator used in this METODE calibration tour. The total delay variation of fixed GPS stations PTBB and TWTF was evaluated by monitoring their long-term CCD of the same type receiver more than 350 days. For the BIPM travelling calibrator BP1C and BP0U, we used a moving cesium clock method to evaluate their instability of total delay in different antenna position. Our study was helpful for clarifying the uncertainty composition of the current PTB-TL link and could reduce it.","PeriodicalId":57667,"journal":{"name":"时间频率公报","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75967234","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-04-12DOI: 10.1109/FCS.2015.7138789
T. Schuldt, S. Saraf, A. Stochino, K. Doringshoff, S. Buchman, G. Cutler, J. Lipa, Si Tan, J. Hanson, B. Jaroux, C. Braxmaier, N. Gurlebeck, S. Herrmann, C. Lammerzahl, A. Peters, A. Alfauwaz, Abdulaziz Alhussien, Badr N. Alsuwaidan, T. Al Saud, H. Dittus, U. Johann, S. P. Worden, R. Byer
The proposed space mission mini Space-Time Asymmetry Research (mSTAR) aims at a test of special relativity by performing a clock-clock comparison experiment in a low-Earth orbit. Using clocks with instabilies at or below the 1·10-15 level at orbit time, the Kennedy-Thorndike coefficient will be measured with an up to two orders of magnitude higher accuracy than the current limit set by ground-based experiments. In the current baseline design, mSTAR utilizes an optical absolute frequency reference based on molecular iodine and a length-reference based on a high-finesse optical cavity. Current efforts aim at a space compatible design of the two clocks and improving the long-term stability of the cavity reference. In an ongoing Phase A study, the feasibility of accommodating the experiment on a SaudiSat 4 bus is investigated.
{"title":"mSTAR: Testing special relativity in space using high performance optical frequency references","authors":"T. Schuldt, S. Saraf, A. Stochino, K. Doringshoff, S. Buchman, G. Cutler, J. Lipa, Si Tan, J. Hanson, B. Jaroux, C. Braxmaier, N. Gurlebeck, S. Herrmann, C. Lammerzahl, A. Peters, A. Alfauwaz, Abdulaziz Alhussien, Badr N. Alsuwaidan, T. Al Saud, H. Dittus, U. Johann, S. P. Worden, R. Byer","doi":"10.1109/FCS.2015.7138789","DOIUrl":"https://doi.org/10.1109/FCS.2015.7138789","url":null,"abstract":"The proposed space mission mini Space-Time Asymmetry Research (mSTAR) aims at a test of special relativity by performing a clock-clock comparison experiment in a low-Earth orbit. Using clocks with instabilies at or below the 1·10-15 level at orbit time, the Kennedy-Thorndike coefficient will be measured with an up to two orders of magnitude higher accuracy than the current limit set by ground-based experiments. In the current baseline design, mSTAR utilizes an optical absolute frequency reference based on molecular iodine and a length-reference based on a high-finesse optical cavity. Current efforts aim at a space compatible design of the two clocks and improving the long-term stability of the cavity reference. In an ongoing Phase A study, the feasibility of accommodating the experiment on a SaudiSat 4 bus is investigated.","PeriodicalId":57667,"journal":{"name":"时间频率公报","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76514789","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-04-12DOI: 10.1109/FCS.2015.7138933
A. C. Cárdenas-Olaya, E. Rubiola, J. Friedt, M. Ortolano, S. Micalizio, C. Calosso
The last years improvements of electronic circuits has allowed the appliance of digital systems in phase noise measurement techniques where low noise and high accuracy are required, yielding flexibility in the implementation and setup of measurement systems. By definition, any measure performed is always affected and limited by the noise of the measurement instrument itself. Considering that the Analog to Digital Converter (ADC) is the core and front end of digital systems, its residual noise has an important impact on the system performance. Consequently, the selection of the proper ADC becomes a critical issue for the system implementation. Currently, the information available in literature deeply describes the ADC features mainly at frequencies offsets far-from-carrier. Nevertheless for time and frequency applications the performance close to the carrier is an important concern as well. In this paper, a simple method for ADC characterization is proposed based on the Phase Locked Loop (PLL) definition and on Phase and Amplitude Modulation (PM/AM) measurements, focused in obtaining the relevant information of ADC noise contributions for phase noise measurement applications. The purpose of such a method is to find the parameters of a state ADC noise model using a technique which avoids the use of complex hardware and allows having a low computational costs performance.
{"title":"Simple method for ADC characterization under the frame of digital PM and AM noise measurement","authors":"A. C. Cárdenas-Olaya, E. Rubiola, J. Friedt, M. Ortolano, S. Micalizio, C. Calosso","doi":"10.1109/FCS.2015.7138933","DOIUrl":"https://doi.org/10.1109/FCS.2015.7138933","url":null,"abstract":"The last years improvements of electronic circuits has allowed the appliance of digital systems in phase noise measurement techniques where low noise and high accuracy are required, yielding flexibility in the implementation and setup of measurement systems. By definition, any measure performed is always affected and limited by the noise of the measurement instrument itself. Considering that the Analog to Digital Converter (ADC) is the core and front end of digital systems, its residual noise has an important impact on the system performance. Consequently, the selection of the proper ADC becomes a critical issue for the system implementation. Currently, the information available in literature deeply describes the ADC features mainly at frequencies offsets far-from-carrier. Nevertheless for time and frequency applications the performance close to the carrier is an important concern as well. In this paper, a simple method for ADC characterization is proposed based on the Phase Locked Loop (PLL) definition and on Phase and Amplitude Modulation (PM/AM) measurements, focused in obtaining the relevant information of ADC noise contributions for phase noise measurement applications. The purpose of such a method is to find the parameters of a state ADC noise model using a technique which avoids the use of complex hardware and allows having a low computational costs performance.","PeriodicalId":57667,"journal":{"name":"时间频率公报","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79490845","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-04-12DOI: 10.1109/FCS.2015.7138885
T. Driskell, M. Huang, J. Camparo
In alkali rf-discharge lamps used for optical pumping in atomic clocks and magnetometers, a buffer-gas (Kr or Xe) allows electrons to extract energy from an rf-field, and these energized electrons eventually produce alkali resonant light. Contrary to naïve intuition, rf-discharge lamps can lose their noble-gas buffer over time. Recently, we began a long-term experimental program to better understand the mechanism of noble-gas loss in rf-discharge lamps, and needed a non-destructive means of measuring buffer-gas pressure in sealed glass cells. For this purpose, we employ the Kazantsev, Smirnova, and Khutorshchikov (KSK) technique, which is based on inferring buffer-gas pressure from the collision shift of an alkali ground-state hyperfine transition frequency νhfs. Here, we discuss the basic the KSK technique and two modifications that we have implemented for its improvement: use of a diode laser for optical pumping, and extrapolation of νhfs to zero magnetic field. Testing our system's long-term performance with a very low pressure reference cell (i.e., 3.3 torr Xe), we find a reproducibility of 0.2% and an absolute accuracy of 5%. Further, our systematic drift is less than one mtorr/month.
{"title":"Measuring buffer-gas pressure in sealed glass cells","authors":"T. Driskell, M. Huang, J. Camparo","doi":"10.1109/FCS.2015.7138885","DOIUrl":"https://doi.org/10.1109/FCS.2015.7138885","url":null,"abstract":"In alkali rf-discharge lamps used for optical pumping in atomic clocks and magnetometers, a buffer-gas (Kr or Xe) allows electrons to extract energy from an rf-field, and these energized electrons eventually produce alkali resonant light. Contrary to naïve intuition, rf-discharge lamps can lose their noble-gas buffer over time. Recently, we began a long-term experimental program to better understand the mechanism of noble-gas loss in rf-discharge lamps, and needed a non-destructive means of measuring buffer-gas pressure in sealed glass cells. For this purpose, we employ the Kazantsev, Smirnova, and Khutorshchikov (KSK) technique, which is based on inferring buffer-gas pressure from the collision shift of an alkali ground-state hyperfine transition frequency νhfs. Here, we discuss the basic the KSK technique and two modifications that we have implemented for its improvement: use of a diode laser for optical pumping, and extrapolation of νhfs to zero magnetic field. Testing our system's long-term performance with a very low pressure reference cell (i.e., 3.3 torr Xe), we find a reproducibility of 0.2% and an absolute accuracy of 5%. Further, our systematic drift is less than one mtorr/month.","PeriodicalId":57667,"journal":{"name":"时间频率公报","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80867109","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-04-12DOI: 10.1109/FCS.2015.7138823
Jung-Hao Chang, Cheng-Syun Li, Cheng-Chi Chen, Sheng-Shian Li
In this work, we report a thermally driven and piezoresistively sensed (a.k.a. thermal-piezoresistive) CMOS-MEMS resonator with high quality factor in ambient pressure and with decent power handling capability. The combination of (i) no need of tiny capacitive transducer's gap spacing thanks to thermal-piezoresistive transduction, (ii) the use of high-Q SiO2/polysilicon structural materials from CMOS back-end-of-line (BEOL), and (iii) the bulk-mode resonator design leads to resonator Q more than 2,000 in ambient pressure and 10,000 in vacuum. Key to attaining sheer Q in ambient pressure relies on significant attenuation of the air damping effect through thermal-piezoresistive transduction as compared to conventional capacitive resonators which necessitate tiny transducer's gap for reasonable electromechanical coupling. With such high Q and inherent circuit integration capability, the proposed CMOS-MEMS thermal-piezoresistive resonators can potentially be implemented as high sensitivity mass/gas sensors based on resonant transducers. The resonators with center frequency around 5.1 MHz were fabricated using a standard 0.35 μm 2-poly-4-metal (2P4M) CMOS process, thus featuring low cost, batch production, fast turnaround time, easy prototyping, and MEMS/IC integration.
{"title":"Performance evaluation of CMOS-MEMS thermal-piezoresistive resonators in ambient pressure for sensor applications","authors":"Jung-Hao Chang, Cheng-Syun Li, Cheng-Chi Chen, Sheng-Shian Li","doi":"10.1109/FCS.2015.7138823","DOIUrl":"https://doi.org/10.1109/FCS.2015.7138823","url":null,"abstract":"In this work, we report a thermally driven and piezoresistively sensed (a.k.a. thermal-piezoresistive) CMOS-MEMS resonator with high quality factor in ambient pressure and with decent power handling capability. The combination of (i) no need of tiny capacitive transducer's gap spacing thanks to thermal-piezoresistive transduction, (ii) the use of high-Q SiO2/polysilicon structural materials from CMOS back-end-of-line (BEOL), and (iii) the bulk-mode resonator design leads to resonator Q more than 2,000 in ambient pressure and 10,000 in vacuum. Key to attaining sheer Q in ambient pressure relies on significant attenuation of the air damping effect through thermal-piezoresistive transduction as compared to conventional capacitive resonators which necessitate tiny transducer's gap for reasonable electromechanical coupling. With such high Q and inherent circuit integration capability, the proposed CMOS-MEMS thermal-piezoresistive resonators can potentially be implemented as high sensitivity mass/gas sensors based on resonant transducers. The resonators with center frequency around 5.1 MHz were fabricated using a standard 0.35 μm 2-poly-4-metal (2P4M) CMOS process, thus featuring low cost, batch production, fast turnaround time, easy prototyping, and MEMS/IC integration.","PeriodicalId":57667,"journal":{"name":"时间频率公报","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76099707","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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