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2008 IEEE 35th International Conference on Plasma Science最新文献

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An ab initio approximation for the modified Paschen's curve for breakdown in microscale electrode gaps 微尺度电极间隙击穿的修正Paschen曲线的从头近似
Pub Date : 2010-06-20 DOI: 10.1109/PLASMA.2010.5534412
D. Go, R. Tirumala
Summary form only given. Over the past decade, the nature of breakdown in microscale electrode gaps has begun receiving significant attention both because of the potential impact breakdown could have on MEMS devices and as the development of plasma devices trends to smaller and smaller scales. It has been shown that the traditional description of breakdown called Paschen's curve holds true for larger electrode gaps, in the range of approximately 3-15 u m, breakdown deviates significantly from this form. It is now generally accepted that electron field emission is the physical mechanism that causes this deviation to form the so-called modified Paschen's curve. While a simple mathematical formulation exists for Paschen's curve, there is no simple formulation for modified Paschen's curve. A form that includes the effect of ion-enhanced field emission has been previously suggested, but this form relies heavily on a fitting factor. In this work, the underlying physics and parameters of the fitting factor are investigated to formulate an ab initio form of the modified Paschen's curve. This formulation includes the factors of the Fowler-Nordheim equation, and an electrostatics approximation for the impact an ion approaching the cathode has on the electric field. The implications of this approximation, how well it compares to experimental data, and how it may be used for parameteric design are all discussed.
只提供摘要形式。在过去的十年中,微尺度电极间隙击穿的性质已经开始受到极大的关注,因为击穿可能对MEMS器件产生潜在的影响,并且随着等离子体器件的发展趋势越来越小。研究表明,传统的称为Paschen曲线的击穿描述适用于较大的电极间隙,在大约3-15 μ m的范围内,击穿明显偏离这种形式。现在普遍认为,电子场发射是导致这种偏差形成所谓修正Paschen曲线的物理机制。对于Paschen曲线,存在一个简单的数学公式,但对于修改后的Paschen曲线,没有一个简单的公式。一种包含离子增强场发射效应的形式已经被提出,但是这种形式在很大程度上依赖于一个拟合因子。在这项工作中,研究了拟合因子的基本物理特性和参数,以制定修改的Paschen曲线的从头开始形式。该公式包括Fowler-Nordheim方程的因素,以及接近阴极的离子对电场的影响的静电近似。讨论了这种近似的含义,它与实验数据的比较,以及如何将其用于参数化设计。
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引用次数: 0
Numerical simulation of an rf driven micro-plasmajet at atmospheric pressure 大气压下射频驱动微等离子体的数值模拟
Pub Date : 2010-06-20 DOI: 10.1109/PLASMA.2010.5534160
T. Hemke, A. Wollny, M. Gebhardt, R. Brinkmann, T. Mussenbrock
Summary form only given. An increasing number of different microplasma sources were developed over the last years. These sources differ in the underlying application, hence different types of geometry and discharge configuration, DC or RF discharges and the used chemistry exist. The variety of applications contains - among others - the wide field of surface modifications, light sources, steriliztation and display panels.
只提供摘要形式。近年来,越来越多的不同微等离子体源被开发出来。这些源在潜在的应用中有所不同,因此存在不同类型的几何形状和放电配置,直流或射频放电以及使用的化学物质。各种各样的应用包括-除其他外-广泛的表面修饰,光源,灭菌和显示面板。
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引用次数: 0
Field emission from low-work function cathode coatings 低功函数阴极涂层的场发射
Pub Date : 2010-06-20 DOI: 10.1109/PLASMA.2010.5534214
N. Sule, M. Kirley, B. Novaković, J. Scharer, I. Knezevic, J. Booske
We report experiments and analysis of field emission from copper knife-edge (CKE) cathodes, both bare and coated with low work function (2.6 eV) Lanthanum hexaboride (LaB6) thin films. The bare CKE cathode exhibits evidence of space charge limited emission currents at high field strengths. The LaB6 coated cathodes exhibit a nonlinear Fowler-Nordhiem (FN) type emission. An intermediate saturation region is observed from field emission data, which is more prominent at elevated (185 C) temperature. Surprisingly, the LaB6 coated cathodes are observed to emit less current than the higher work function (> 4 eV) bare CKE cathode. A hypothesis and corresponding model including both field emission and solid state electron transport from the Cu substrate, through the LaB6 thin film, is proposed to explain the experimental observations.
本文报道了铜刀口阴极(CKE)裸阴极和涂覆低功函数(2.6 eV)六硼化镧(LaB6)薄膜的场发射实验和分析。裸CKE阴极在高场强下表现出空间电荷限制发射电流的特征。LaB6涂层阴极表现出非线性的Fowler-Nordhiem (FN)型发射。从场发射数据中观察到一个中间饱和区,在升高(185℃)时更为突出。令人惊讶的是,LaB6涂层阴极比高功函数(> 4 eV)的裸CKE阴极发射更少的电流。提出了一个假设和相应的模型,包括场发射和Cu衬底通过LaB6薄膜的固态电子传输,以解释实验结果。
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引用次数: 0
Microbicidal efficacy evaluation using plasma: International standards and recommended practices 血浆杀菌效果评价:国际标准和推荐做法
Pub Date : 2010-06-20 DOI: 10.1109/PLASMA.2010.5534313
O. Yardimci, Youwen Pan
Summary form only given. Microbicidal efficacy of plasma processing has been investigated as a possible alternative to conventional sterilization/decontamination methods for heat sensitive materials by a number of researchers from academia and industry. The disparity regarding the approaches to validating microbicidal efficacy makes study comparisons difficult. This review offers guidance on recommended practices for the evaluation of the microbicidal efficacy of plasma or any other sterilizing agent or process based on international industry standards and guidance documents.
只提供摘要形式。学术界和工业界的一些研究人员已经研究了等离子体处理的杀微生物效果,作为热敏性材料传统灭菌/去污方法的可能替代方法。关于验证杀菌剂功效的方法的差异使得研究比较困难。本综述根据国际工业标准和指导性文件,为评价血浆或任何其他灭菌剂或工艺的杀微生物效果提供了推荐做法指南。
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引用次数: 0
Low pressure semiconductor processing transport property modeling using direct simulation Monte Carlo 利用蒙特卡罗直接模拟低压半导体加工输运特性建模
Pub Date : 2010-01-04 DOI: 10.1109/PLASMA.2010.5534189
Zheng Li, Hao Deng, D. Levin
Summary form only given. In order to extend the capability of the Hybrid Plasma Equipment Model (HPEM)1 simulation code to increasingly lower operating pressure conditions, the direct simulation Monte Carlo (DSMC)2 method is used to improve the modeling of the heavy particle species in a hollow cathode magnetron (HCM) plasma reactor, a device used to implement the Ionized Metal Physical Vapor Deposition (IMPVD) technology.The DSMC, at the current stage, is inserted between the fluid kinetics-Poisson module (FKPM) and plasma chemistry Monte Carlo module (PCMCM) module of HPEM as an correction to the FKPM at the low-pressure condition. The DSMC module initializes a large number of simulated particles (each represents 109 real atoms) at different computation cells in the plasma reactor with positions and instantaneous velocities according to the number density, temperature, flux from the FPKM. The continuous process of particle movement and interaction is uncoupled, i. e., at each time step every particle is moved according to its velocity subjecting to the electric and magnetic fields, then, the interaction between the particles is modeled by appropriate by collision and reaction models where the heavy-heavy particle reactions are implemented by total collision energy model while the electron impact reactions are introduced by the electron impact rate coefficients and source functions. In each HPEM iteration, the time-accurate DSMC calculation will be performed for a physical time of 1 μ, same as the FKPM module, with 10,000 DSMC steps. Sampling will be performed after 9,000 steps and the number density, temperature, and flux will be obtained by averaging the sampled particles at difference cells for different species. These properties along with the electric field will be output to the PCMCM module. Detailed models and simulation results will be presented in the conference paper.
只提供摘要形式。为了使混合等离子体设备模型(HPEM)1仿真代码能够适应越来越低的工作压力条件,采用直接模拟蒙特卡罗(DSMC)2方法改进了用于实现电离金属物理气相沉积(IMPVD)技术的空心阴极磁控管(HCM)等离子体反应器中重粒子的建模。现阶段,DSMC被插入到HPEM的流体动力学泊松模块(FKPM)和等离子体化学蒙特卡罗模块(PCMCM)之间,作为低压条件下FKPM的校正。DSMC模块在等离子体反应器的不同计算单元中初始化大量模拟粒子(每个代表109个真实原子),根据FPKM的数量密度、温度、通量,具有位置和瞬时速度。粒子运动和相互作用的连续过程是不耦合的,即在每个时间步,每个粒子在电场和磁场作用下按其速度运动,则:粒子间的相互作用采用适当的碰撞和反应模型,其中重粒子反应采用总碰撞能量模型,电子碰撞反应采用电子碰撞率系数和源函数。在每次HPEM迭代中,与FKPM模块相同,在1 μ的物理时间内进行时间精确的DSMC计算,并进行10,000个DSMC步长。采样将在9000步后进行,通过对不同种类的不同细胞的采样颗粒进行平均,获得数量密度、温度和通量。这些特性以及电场将输出到PCMCM模块。详细的模型和仿真结果将在会议论文中提出。
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引用次数: 1
Progress of high power gyrotron development in JAEA 日本原子能机构大功率回旋管研制进展
Pub Date : 2009-11-10 DOI: 10.1109/ICIMW.2009.5324772
K. Sakamoto, A. Kasugai, K. Kajiwara, K. Takahashi, N. Kobayashi, Y. Oda
A 1 MW 170 GHz long pulse gyrotron is required for a power source of the electron cyclotron heating and current drive (EC H&CD) system on ITER (International Thermonuclear Experimental Reactor). In the ITER gyrotron development of JAEA (Japan Atomic Energy Agency), a stable 1 MW 170 GHz oscillation has been achieved at CW-relevant pulse duration (800 s), which is a twice of burning time of ITER plasma. The efficiency was 55% with the depressed collector with the precise optimization of the oscillation parameters in the hard self-excitation region during the oscillation. The power balance is measured calorimetrically, i.e., output power from the window is 1020 kW, power deposition to the collector is 742 kW, and a stray radiation output from the relief windows is 24 kW. Total ohmic-loss power into the inner components of the gyrotron is 63 kW. The power dissipation at the cavity agreed with the design value. The attained maximum efficiency in the long pulse mode is ~60%. The gyrotron has been working since March 2006 without major trouble, and records ~150 GJ of the output energy. The results satisfy the ITER requirement. As the frequency of 170 GHz is expected for the maximum toroidal field of 5.3 T at the plasma center of ITER, it is useful to estimate a frequency tunability of the gyrotron for the operation at lower toroidal filed. A simulation indicates that a similar performance is obtained at ~137 GHz oscillation at TE27,6 mode with the 170 GHz/TE31,8 mode oscillation. Both modes penetrate the diamond window of 1.853 mm in thickness. The triode magnetron injection gun (MIG) generates the rotational electron beam of low velocity divergence for both operation parameters. As for a fast frequency control, which will be useful for profile control in the fusion plasma, a He-free magnet with an additional super conducting sweeping coil was developed. A diameter of a room temperature bore is 240 mm, and the 7 T at the center. Using a commercially available standard DC power supplies, the magnetic field sweeping was demonstrated with a speed of 0.4 T/10 sec at 7 T.
国际热核实验反应堆(ITER)的电子回旋加速器加热和电流驱动(EC H&CD)系统需要1 MW 170 GHz长脉冲回旋管作为电源。在日本原子能机构(JAEA)的ITER回旋加速器开发过程中,在微波相关脉冲持续时间(800 s)下实现了1mw 170 GHz的稳定振荡,这是ITER等离子体燃烧时间的两倍。通过对振荡过程中硬自激区振荡参数的精确优化,采用降压集热器的效率可达55%。功率平衡是用量热法测量的,即从窗口输出功率为1020 kW,到集热器的功率沉积为742 kW,从减压窗输出的杂散辐射为24 kW。进入回旋管内部元件的总欧姆损耗功率为63千瓦。空腔处的功耗符合设计值。在长脉冲模式下获得的最大效率为~60%。回旋管自2006年3月开始工作,无大故障,输出能量约150gj。实验结果满足ITER的要求。由于ITER等离子体中心的最大环面场为5.3 T,预计频率为170 GHz,因此估计回旋管在低环面场下的频率可调性是有用的。仿真结果表明,在te27,6模式下的~137 GHz振荡与170 GHz/ te31,8模式振荡具有相似的性能。两种模式都能穿透厚度为1.853 mm的金刚石窗。三极管磁控管注射枪(MIG)在两种工作参数下都能产生低速发散的旋转电子束。为了实现对聚变等离子体的快速频率控制,研制了一种带超导扫线线圈的无氦磁体。室温孔径为240mm,中心为7t。使用市售的标准直流电源,在7 T时以0.4 T/10秒的速度进行了磁场扫描。
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引用次数: 7
Polystyrene and PMMA surface modification by electron beam generated plasma in argon and oxygen - effect of increased ion energy on polymer surface characteristics 氩气和氧气中电子束产生的等离子体对聚苯乙烯和PMMA的表面改性研究离子能量增加对聚合物表面特性的影响
Pub Date : 2009-06-01 DOI: 10.1109/PLASMA.2009.5227469
E. Lock, S. Walton, R. Fernsler, M. Barakett
The present study investigates the polymer surface changes when the incident ion energy is increased to levels comparable to conventional, low pressure plasma discharges (20 eV). This allows for a study of polar groups incorporation, topography, and surface energy analysis over a range of ion energies not easily achieved in plasmas. The use of inert gas environments (Ar) would permit us to compare the influence of ion energy, while the addition of reactive gases (02) adds a chemical component to the studies.
本研究研究了当入射离子能量增加到与传统的低压等离子体放电(20 eV)相当的水平时,聚合物表面的变化。这允许极性基团合并,地形和表面能分析的研究,在等离子体中不容易实现的离子能量范围。使用惰性气体环境(Ar)将使我们能够比较离子能量的影响,而添加活性气体(02)则为研究增加了化学成分。
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引用次数: 0
Recent progress on the development of a multiple-beam klystron with 13% bandwidth 13%频宽多波束速调管的研制进展
Pub Date : 2009-06-01 DOI: 10.1109/PLASMA.2009.5227758
D. Abe, F. Wood, B. Levush, D. Pershing, E. Wright, K. Nguyen, R. Myers, E. Eisen
Summary form only given. We present recent progress on the development of an 18-beam multiple-beam klystron (MBK). The principal performance goals for this device include a peak rf output power of > 500 kW, an instantaneous bandwidth of 13% (1- dB), and high duty operation up to 2.5%. The detailed designs of the 18-beam electron gun and 7-cavity circuit are described in [K.T. Nguyen et. al., 2005] and [K.T. Nguyen et al., 2009], respectively. Experimental measurements of the resonant frequencies and Q's of the individual cavities comprising the circuit will be compared with 3D electromagnetics simulations using HFSS (Ansoft Corp.) and Analyst (STAAR). Final assembly of the gun and circuit is planned for April 2009 with hot-testing of the device to follow immediately. We will present comparisons of the experimentally measured voltage-current characteristics of the electron gun with 3D particle simulations using MICHELLE [J.J. Petillo, 2002], and, as available, results of high power rf performance tests.
只提供摘要形式。本文介绍了18束多速调管(MBK)的最新研究进展。该器件的主要性能目标包括峰值射频输出功率> 500 kW,瞬时带宽为13% (1- dB),高负载工作高达2.5%。18束电子枪和7腔电路的详细设计见[K.T.]阮等人,2005]和[K.T.Nguyen et al., 2009]。将使用HFSS (Ansoft Corp.)和Analyst (STAAR)对组成电路的各个腔的谐振频率和Q值进行实验测量,并与3D电磁模拟进行比较。枪和电路的最终组装计划在2009年4月进行,随后立即进行设备热测试。我们将展示实验测量的电子枪电压电流特性与三维粒子模拟的比较Petillo, 2002],以及可用的高功率射频性能测试结果。
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引用次数: 0
A steerable plasma microwave mirror 可操纵等离子体微波镜
Pub Date : 2009-06-01 DOI: 10.1109/PLASMA.2009.5227631
I. Alexeff, T. Anderson
We have developed a steerable plasma microwave mirror based on our previous work on the reflection of microwaves on a plasma slab. We have discovered that for plasma densities above microwave cutoff, the phase of the reflection varies continuously from a voltage antinode at the plasma surface when the plasma density just reaches microwave cutoff, to a voltage node at the plasma surface when the plasma density is much larger than that required for microwave cutoff. An analogy to the reflection at the end of a coaxial cable is that the first case corresponds to an open line (displacement and conduction currents equal and opposite), and the second case corresponds to a shorted line (conduction current much greater than displacement current). The operating plasma mirror as presently designed comprises a surface of plasma tubes. By programming the plasma density in the various tubes, the reflected microwaves experience a varying phase shift from tube to tube and the reflected beam is steered in analogy to the way an emitted microwave beam is steered by a phased transmission antenna array. The time required for reconfiguring the beam direction corresponds to the time required for plasma modification-in this case, a few milliseconds.
我们在研究微波在等离子体板上反射的基础上,研制了一种可操纵的等离子体微波反射镜。我们发现,对于微波截止点以上的等离子体密度,反射相位连续变化,从等离子体密度刚刚达到微波截止点时等离子体表面的电压反极,到等离子体密度远远大于微波截止点时等离子体表面的电压节点。与同轴电缆末端反射的类比是,第一种情况对应于一条开路(位移电流和传导电流相等且相反),第二种情况对应于一条短路(传导电流远大于位移电流)。目前设计的工作等离子体反射镜包括等离子体管表面。通过对不同管中的等离子体密度进行编程,反射的微波在管与管之间经历不同的相移,反射的光束被引导,类似于发射的微波光束被相控传输天线阵列引导的方式。重新配置光束方向所需的时间与等离子体修饰所需的时间相对应——在这种情况下,需要几毫秒。
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引用次数: 0
Wire array load design and optimization for short (100 ns) and long (220 ns) current rise time on the 1 MA cobra generator 1毫安眼镜蛇发电机上短(100毫安)和长(220毫安)电流上升时间的线阵负载设计和优化
Pub Date : 2008-08-08 DOI: 10.1109/PLASMA.2008.4591078
A. Esaulov, V. Kantsyrev, A. Safronova, K. Williamson, I. Shrestha, G. Osborne, R. Mcbride, P. Knapp, D. Chalenski, J. Greenly, D. Hammer
Summary form only given. Wire array implosions with different current pulse rise times have been studied on the 1 MA COBRA facility at Cornell University. The flexibility of the COBRA generator allowed switching between the short (100 ns) and long (220 ns) current pulse rise time to study the implosion of nested wire array loads in these two regimes. The load design and optimization was performed by simulations with the novel wire ablation dynamics model (WADM) code, which extended the original wire dynamics model by including the dynamics of wire ablation and precursor plasma formation on the array axis. As compared to the short current pulse, the longer current rise time allows increasing the array mass. By switching between the different pulse shapes the implosion dynamics of nested arrays made from the same wires, but with different wire numbers, have been compared. While the time of the wire core ablation is directly proportional of the array mass, the implosion time is proportional to the square root of the array mass. WADM simulations demonstrate that the implosion dynamics of the arrays with higher mass is more ablation dominated. If the process of core ablation is long enough, it causes the delay of the array implosion versus the predictions by a 0D model that does not account for ablation. Another factor that affects the result of the trade between the ablation and implosion time scales is the form of the current pulse, which can be very different from the classical sin2 shape. This factor was self-consistently taken into account in the WADM simulations. The prediction of the array implosion times by the WADM are in a very good agreement with the recent experiments on the COBRA generator.
只提供摘要形式。在美国康奈尔大学的1ma COBRA装置上研究了不同脉冲上升时间的线阵内爆。COBRA发生器的灵活性允许在短(100纳秒)和长(220纳秒)电流脉冲上升时间之间切换,以研究这两种状态下嵌套线阵列负载的内爆。利用新型导线烧蚀动力学模型(WADM)代码进行了负载设计和优化,该代码扩展了原有的导线动力学模型,包括导线烧蚀动力学和阵列轴上前体等离子体形成的动力学。与短电流脉冲相比,较长的电流上升时间允许增加阵列质量。通过在不同脉冲形状之间切换,比较了由相同导线但导线数不同的嵌套阵列的内爆动力学。线芯烧蚀时间与阵列质量成正比,而内爆时间与阵列质量的平方根成正比。WADM模拟结果表明,高质量阵列的内爆动力学更受烧蚀控制。如果核心烧蚀过程足够长,它会导致阵列内爆的延迟,而不是不考虑烧蚀的0D模型的预测。影响烧蚀和内爆时间尺度转换结果的另一个因素是电流脉冲的形式,它可能与经典的sin2形状大不相同。这一因素在WADM模拟中得到了自我一致的考虑。WADM对阵列内爆时间的预测与最近在COBRA发生器上的实验结果吻合得很好。
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引用次数: 0
期刊
2008 IEEE 35th International Conference on Plasma Science
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