Structural, magnetic, and electrical transport properties of discontinuous metal–insulator multilayers [Fe/SiO2]10/Sub with dFe = 2–7 nm and dSiO2 = 3 nm under heat treatment up to 400 °C have been studied with the purpose of determining the possibilities of their practical application as a material for thermally stable magnetic devices or high-ohmic resistance for various electronic applications. The samples have granular structures with randomly distributed Fe nanoparticles, as shown by electron microscopy. The low (almost zero) and stable coercivity values under heat treatment indicate that the investigated systems could be used as a magnetic material for thermally stable magnetic devices. According to the results of the study of the temperature dependence of the magnetisation, there are no Fe atoms in the insulator matrix and very small particles of ferromagnetic material. It was demonstrated that the value of the blocking temperatures depends on the effective thickness of ferromagnetic layers. Even an insignificant increase of dFe from 5 to 7 nm leads to a significant growth of the blocking temperatures from 55 to 180 K. The structural changes can explain the blocking temperatures’ dependence on the Fe layer’s effective thickness and the annealing temperature.Experimental results demonstrate that the system [Fe(6)/SiO2(3)]10/Sub, annealed at a temperature of 300 °C, is characterised by the low temperature coefficients of resistance of − 35 ppm/°C and relatively high resistivity of 6⋅10−5 Ohm⋅m. The system [Fe(7)/SiO2(3)]10/Sub shows thermal stability after annealing up to 400 °C. Namely, in comparison with the as-deposited state, the temperature coefficients of resistance stay practically unchanged (250 ppm/°C), with an insignificant growth in resistivity value.