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Formation techniques for upper active channel in monolithic 3D integration: an overview 单片三维集成中的上部主动通道形成技术:概述。
IF 11.7 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-01-29 DOI: 10.1186/s40580-023-00411-4
An Hoang-Thuy Nguyen, Manh-Cuong Nguyen, Anh-Duy Nguyen, Seung Joon Jeon, Noh-Hwal Park, Jeong-Hwan Lee, Rino Choi

The concept of three-dimensional stacking of device layers has attracted significant attention with the increasing difficulty in scaling down devices. Monolithic 3D (M3D) integration provides a notable benefit in achieving a higher connection density between upper and lower device layers than through-via-silicon. Nevertheless, the practical implementation of M3D integration into commercial production faces several technological challenges. Developing an upper active channel layer for device fabrication is the primary challenge in M3D integration. The difficulty arises from the thermal budget limitation for the upper channel process because a high thermal budget process may degrade the device layers below. This paper provides an overview of the potential technologies for forming active channel layers in the upper device layers of M3D integration, particularly for complementary metal-oxide-semiconductor devices and digital circuits. Techniques are for polysilicon, single crystal silicon, and alternative channels, which can solve the temperature issue for the top layer process.

随着缩小器件规模的难度不断增加,器件层三维堆叠的概念引起了广泛关注。与硅通孔相比,单片三维(M3D)集成在实现上下器件层之间更高的连接密度方面具有显著优势。然而,将 M3D 集成实际应用于商业生产还面临着一些技术挑战。开发用于器件制造的上有源沟道层是 M3D 集成的主要挑战。困难来自于上层沟道工艺的热预算限制,因为高热预算工艺可能会降低下面器件层的性能。本文概述了在 M3D 集成上层器件层中形成有源沟道层的潜在技术,特别是用于互补金属氧化物半导体器件和数字电路的技术。技术包括多晶硅、单晶硅和替代沟道,这些技术可以解决顶层工艺的温度问题。
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引用次数: 0
How to improve the structural stabilities of halide perovskite quantum dots: review of various strategies to enhance the structural stabilities of halide perovskite quantum dots 如何提高卤化物包晶量子点的结构稳定性:综述提高卤化物包晶量子点结构稳定性的各种策略。
IF 11.7 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-01-27 DOI: 10.1186/s40580-024-00412-x
Dokyum Kim, Taesun Yun, Sangmin An, Chang-Lyoul Lee

Halide perovskites have emerged as promising materials for various optoelectronic devices because of their excellent optical and electrical properties. In particular, halide perovskite quantum dots (PQDs) have garnered considerable attention as emissive materials for light-emitting diodes (LEDs) because of their higher color purities and photoluminescence quantum yields compared to conventional inorganic quantum dots (CdSe, ZnSe, ZnS, etc.). However, PQDs exhibit poor structural stabilities in response to external stimuli (moisture, heat, etc.) owing to their inherent ionic nature. This review presents recent research trends and insights into improving the structural stabilities of PQDs. In addition, the origins of the poor structural stabilities of PQDs and various methods to overcome this drawback are discussed. The structural degradation of PQDs is mainly caused by two mechanisms: (1) defect formation on the surface of the PQDs by ligand dissociation (i.e., detachment of weakly bound ligands from the surface of PQDs), and (2) vacancy formation by halide migration in the lattices of the PQDs due to the low migration energy of halide ions. The structural stabilities of PQDs can be improved through four methods: (1) ligand modification, (2) core–shell structure, (3) crosslinking, and (4) metal doping, all of which are presented in detail herein. This review provides a comprehensive understanding of the structural stabilities and opto-electrical properties of PQDs and is expected to contribute to future research on improving the device performance of perovskite quantum dot LEDs (PeLEDs).

卤化物过氧化物因其优异的光学和电学特性,已成为各种光电器件的理想材料。特别是卤化物包晶量子点(PQDs),与传统的无机量子点(CdSe、ZnSe、ZnS 等)相比,具有更高的色纯度和光致发光量子产率,因此作为发光二极管(LEDs)的发光材料备受关注。然而,由于其固有的离子性质,PQDs 在受到外部刺激(潮湿、高温等)时表现出很差的结构稳定性。本综述介绍了提高 PQDs 结构稳定性的最新研究趋势和见解。此外,还讨论了 PQDs 结构稳定性差的原因以及克服这一缺点的各种方法。PQDs 结构退化主要由两种机制引起:(1) 配体解离(即弱结合配体从 PQDs 表面脱离)在 PQDs 表面形成缺陷;(2) 由于卤离子迁移能较低,卤化物在 PQDs 晶格中迁移形成空位。PQDs 的结构稳定性可以通过四种方法得到改善:(1) 配体修饰;(2) 核壳结构;(3) 交联;(4) 金属掺杂。本综述提供了对 PQDs 结构稳定性和光电特性的全面了解,预计将有助于未来提高包晶体量子点 LED(PeLED)器件性能的研究。
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引用次数: 0
Advances in nanobiosensors during the COVID-19 pandemic and future perspectives for the post-COVID era COVID-19 大流行期间纳米生物传感器的进展以及后 COVID 时代的未来展望。
IF 11.7 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-01-11 DOI: 10.1186/s40580-023-00410-5
Young Jun Kim, Junhong Min

The unprecedented threat of the highly contagious virus, severe acute respiratory syndrome coronavirus 2 (SARS-CoV-2), which causes exponentially increased infections of coronavirus disease 2019 (COVID-19), highlights the weak spots of the current diagnostic toolbox. In the midst of catastrophe, nanobiosensors offer a new opportunity as an alternative tool to fill a gap among molecular tests, rapid antigen tests, and serological tests. Nanobiosensors surpass the potential of antigen tests because of their enhanced sensitivity, thus enabling us to see antigens as stable and easy-to-access targets. During the first three years of the COVID-19 pandemic, a substantial number of studies have reported nanobiosensors for the detection of SARS-CoV-2 antigens. The number of articles on nanobiosensors and SARS-CoV-2 exceeds the amount of nanobiosensor research on detecting previous infectious diseases, from influenza to SARS-CoV and MERS-CoV. This unprecedented publishing pace also implies the significance of SARS-CoV-2 and the present pandemic. In this review, 158 studies reporting nanobiosensors for detecting SARS-CoV-2 antigens are collected to discuss the current challenges of nanobiosensors using the criteria of point-of-care (POC) diagnostics along with COVID-specific issues. These advances and lessons during the pandemic pave the way for preparing for the post-COVID era and potential upcoming infectious diseases.

Graphical Abstract

传染性极强的病毒--严重急性呼吸系统综合征冠状病毒 2(SARS-CoV-2)--造成 2019 年冠状病毒病(COVID-19)感染呈指数级增长,这种前所未有的威胁凸显了当前诊断工具箱的薄弱环节。在这场灾难中,纳米生物传感器提供了一个新的机会,作为一种替代工具,填补了分子检测、快速抗原检测和血清学检测之间的空白。纳米生物传感器因其更高的灵敏度而超越了抗原检测的潜力,从而使我们能够将抗原视为稳定且易于获取的目标。在 COVID-19 大流行的头三年,大量研究报告了用于检测 SARS-CoV-2 抗原的纳米生物传感器。有关纳米生物传感器和 SARS-CoV-2 的文章数量超过了以前检测传染病(从流感到 SARS-CoV 和 MERS-CoV)的纳米生物传感器研究数量。这种前所未有的发表速度也意味着 SARS-CoV-2 和当前流行病的重要性。在本综述中,收集了 158 篇报道用于检测 SARS-CoV-2 抗原的纳米生物传感器的研究报告,讨论了纳米生物传感器目前面临的挑战,这些挑战采用的是护理点 (POC) 诊断的标准,同时还涉及 COVID 的特定问题。这些进展和大流行期间的经验教训为后 COVID 时代和即将到来的潜在传染病做好了准备。
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引用次数: 0
Rapid assays of SARS-CoV-2 virus and noble biosensors by nanomaterials 用纳米材料快速检测 SARS-CoV-2 病毒和贵族生物传感器。
IF 11.7 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-01-08 DOI: 10.1186/s40580-023-00408-z
Yang Liu, Yilong Li, Yuteng Hang, Lei Wang, Jinghan Wang, Ning Bao, Youngeun Kim, Ho Won Jang

The COVID-19 outbreak caused by SARS-CoV-2 in late 2019 has spread rapidly across the world to form a global epidemic of respiratory infectious diseases. Increased investigations on diagnostic tools are currently implemented to assist rapid identification of the virus because mass and rapid diagnosis might be the best way to prevent the outbreak of the virus. This critical review discusses the detection principles, fabrication techniques, and applications on the rapid detection of SARS-CoV-2 with three categories: rapid nuclear acid augmentation test, rapid immunoassay test and biosensors. Special efforts were put on enhancement of nanomaterials on biosensors for rapid, sensitive, and low-cost diagnostics of SARS-CoV-2 virus. Future developments are suggested regarding potential candidates in hospitals, clinics and laboratories for control and prevention of large-scale epidemic.

Graphical Abstract

2019 年末,由 SARS-CoV-2 引起的 COVID-19 疫情在全球迅速蔓延,形成了一场全球性的呼吸道传染病疫情。目前正在加强对诊断工具的研究,以帮助快速识别病毒,因为大规模快速诊断可能是防止病毒爆发的最佳途径。本综述从快速核酸增强试验、快速免疫测定试验和生物传感器三个方面探讨了快速检测 SARS-CoV-2 的检测原理、制造技术和应用。特别是在生物传感器上改进纳米材料,以实现快速、灵敏和低成本的 SARS-CoV-2 病毒诊断。就医院、诊所和实验室控制和预防大规模流行病的潜在候选方案提出了未来发展建议。
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引用次数: 0
Upconverting-photon quenching-mediated perforation influx as an intracellular delivery method using posAuNP@UCNPs nanocomposites for osteoarthritis treatment 利用posAuNP@UCNPs纳米复合材料的上转换-光子淬灭介导的穿孔流入作为细胞内给药方法治疗骨关节炎
IF 11.7 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-01-03 DOI: 10.1186/s40580-023-00409-y
Hye Jin Kim, Hui Bang Cho, Hye-Ryoung Kim, Sujeong Lee, Ji-in Park, Keun-Hong Park

Photoporation techniques based on plasmonic nanoparticles such as gold nanoparticles have been extensively studied for the intracellular delivery of substances via cell membrane disruption. However, the clinical application of AuNP is challenging due to its absorption in the 500 nm region of the light spectrum. To overcome this challenge, upconversion nanoparticles were employed to stimulate AuNP at NIR wavelengths. posAuNP@UCNPs nanocomposites were produced by coating 30 nm UCNPs on 80 nm AuNPs using DOPA-PEI, which were then irradiated with 980 nm NIR light to facilitate their intracellular delivery. TEM and DLS confirmed that posAuNP and UCNP combine to form nanocomposites. Additionally, multiphysics simulation was used to analyze the distribution of the posAuNP electric field based on morphological differences that change as the UCNP ratio increases. Next, effective LED irradiation conditions were established by applying upconverting-photon quenching-mediated perforation influx to C28/I2 cells as suspensions or spheroids. posAuNP@UCNP nanocomposites were confirmed to be effective for the delivery of baricitinib as a treatment for osteoarthritis in a three-dimensional osteoarthritis model. Finally, chondrocyte differentiation was induced through intracellular delivery of baricitinib using posAuNP@UCNPs. The findings suggest that posAuNP@UCNPs have great potential as a tool for non-invasive drug delivery via UCPPin.

Graphical Abstract

人们广泛研究了基于金纳米粒子等质子纳米粒子的光穿透技术,该技术可通过破坏细胞膜在细胞内输送物质。然而,由于金纳米粒子在光谱的 500 纳米区域有吸收,其临床应用具有挑战性。使用 DOPA-PEI 将 30 nm 的 UCNPs 涂覆在 80 nm 的 AuNPs 上,制成 posAuNP@UCNPs 纳米复合材料,然后用 980 nm 的近红外光照射,促进其细胞内递送。TEM 和 DLS 证实,posAuNP 和 UCNP 结合形成纳米复合材料。此外,还利用多物理场模拟分析了 posAuNP 电场的分布,这种分布基于形态差异,随着 UCNP 比例的增加而变化。接下来,通过将上转换光子淬灭介导的穿孔流入应用于 C28/I2 细胞悬浮液或球形细胞,建立了有效的 LED 照射条件。在三维骨关节炎模型中,posAuNP@UCNP 纳米复合材料被证实可有效递送巴利昔尼(baricitinib),用于治疗骨关节炎。最后,使用 posAuNP@UCNPs 通过细胞内递送巴利替尼诱导了软骨细胞分化。研究结果表明,posAuNP@UCNPs 作为一种通过 UCPPin 进行非侵入性给药的工具具有巨大潜力。
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引用次数: 0
Nanoscale inhomogeneity and the evolution of correlation strength in FeSe(_{1-x})S(_x) FeSe[式中:见正文]S[式中:见正文]中的纳米级不均匀性和相关强度的演变。
IF 11.7 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2023-12-22 DOI: 10.1186/s40580-023-00405-2
Yu Liu, Aifeng Wang, Qianheng Du, Lijun Wu, Yimei Zhu, Cedomir Petrovic

We report a comprehensive study of the nanoscale inhomogeneity and disorder on the thermoelectric properties of FeSe(_{1-x})S(_x) ((0 le x le 1)) single crystals and the evolution of correlation strength with S substitution. A hump-like feature in temperature-dependent thermpower is enhanced for x = 0.12 and 0.14 in the nematic region with increasing in orbital-selective electronic correlations, which is strongly suppressed across the nematic critical point and for higher S content. Nanoscale Se/S atom disorder in the tetrahedral surroundings of Fe atoms is confirmed by scanning transmission electron microscopy measurements, providing an insight into the nanostructural details and the evolution of correlation strength in FeSe(_{1-x})S(_x).

我们报告了对 FeSe[式:见正文]S[式:见正文]([式:见正文])单晶热电性能的纳米级不均匀性和无序性以及相关强度随 S 取代的演变的全面研究。当 x = 0.12 和 0.14 时,在向列区,随着轨道选择性电子相关的增加,随温度变化的热功率中的驼峰状特征增强,而当跨越向列临界点和 S 含量较高时,该特征被强烈抑制。通过扫描透射电子显微镜测量证实了铁原子四面体周围的纳米级 Se/S 原子无序,从而深入了解了 FeSe[式:见正文]S[式:见正文]的纳米结构细节和相关强度的演变。
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引用次数: 0
Filament-free memristors for computing 用于计算的无灯丝忆阻器
IF 11.7 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2023-12-19 DOI: 10.1186/s40580-023-00407-0
Sanghyeon Choi, Taehwan Moon, Gunuk Wang, J. Joshua Yang

Memristors have attracted increasing attention due to their tremendous potential to accelerate data-centric computing systems. The dynamic reconfiguration of memristive devices in response to external electrical stimuli can provide highly desirable novel functionalities for computing applications when compared with conventional complementary-metal–oxide–semiconductor (CMOS)-based devices. Those most intensively studied and extensively reviewed memristors in the literature so far have been filamentary type memristors, which typically exhibit a relatively large variability from device to device and from switching cycle to cycle. On the other hand, filament-free switching memristors have shown a better uniformity and attractive dynamical properties, which can enable a variety of new computing paradigms but have rarely been reviewed. In this article, a wide range of filament-free switching memristors and their corresponding computing applications are reviewed. Various junction structures, switching properties, and switching principles of filament-free memristors are surveyed and discussed. Furthermore, we introduce recent advances in different computing schemes and their demonstrations based on non-filamentary memristors. This Review aims to present valuable insights and guidelines regarding the key computational primitives and implementations enabled by these filament-free switching memristors.

忆阻器在加速以数据为中心的计算系统方面具有巨大潜力,因此受到越来越多的关注。与传统的基于互补金属氧化物半导体(CMOS)的器件相比,忆阻器在响应外部电刺激时的动态重新配置可以为计算应用提供非常理想的新功能。迄今为止,文献中研究得最深入、评论得最广泛的忆阻器是丝状忆阻器,这种忆阻器在不同器件和不同开关周期之间通常表现出相对较大的变异性。另一方面,无灯丝开关忆阻器显示出更好的均匀性和诱人的动态特性,可以实现各种新的计算范式,但很少有人对其进行评述。本文综述了各种无灯丝开关忆阻器及其相应的计算应用。文章调查并讨论了无灯丝忆阻器的各种结结构、开关特性和开关原理。此外,我们还介绍了基于无灯丝忆阻器的不同计算方案及其演示的最新进展。本综述旨在就这些无灯丝开关忆阻器所支持的关键计算基元和实现方法提出有价值的见解和指导。
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引用次数: 0
Recent progress of exciton transport in two-dimensional semiconductors 二维半导体中激子输运的最新进展
IF 11.7 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2023-12-15 DOI: 10.1186/s40580-023-00404-3
Hyeongwoo Lee, Yong Bin Kim, Jae Won Ryu, Sujeong Kim, Jinhyuk Bae, Yeonjeong Koo, Donghoon Jang, Kyoung-Duck Park

Spatial manipulation of excitonic quasiparticles, such as neutral excitons, charged excitons, and interlayer excitons, in two-dimensional semiconductors offers unique capabilities for a broad range of optoelectronic applications, encompassing photovoltaics, exciton-integrated circuits, and quantum light-emitting systems. Nonetheless, their practical implementation is significantly restricted by the absence of electrical controllability for neutral excitons, short lifetime of charged excitons, and low exciton funneling efficiency at room temperature, which remain a challenge in exciton transport. In this comprehensive review, we present the latest advancements in controlling exciton currents by harnessing the advanced techniques and the unique properties of various excitonic quasiparticles. We primarily focus on four distinct control parameters inducing the exciton current: electric fields, strain gradients, surface plasmon polaritons, and photonic cavities. For each approach, the underlying principles are introduced in conjunction with its progression through recent studies, gradually expanding their accessibility, efficiency, and functionality. Finally, we outline the prevailing challenges to fully harness the potential of excitonic quasiparticles and implement practical exciton-based optoelectronic devices.

二维半导体中激子准粒子(如中性激子、带电激子和层间激子)的空间操纵为广泛的光电应用提供了独特的能力,包括光伏、激子集成电路和量子发光系统。然而,它们的实际应用受到中性激子缺乏电可控性、带电激子寿命短以及在室温下激子漏斗效率低的限制,这些仍然是激子传输的一个挑战。在这篇综合综述中,我们介绍了利用先进技术和各种激子准粒子的独特性质来控制激子电流的最新进展。我们主要关注诱发激子电流的四个不同的控制参数:电场、应变梯度、表面等离子激元极化和光子腔。对于每种方法,通过最近的研究,结合其进展介绍了基本原则,逐渐扩展了其可访问性、效率和功能。最后,我们概述了充分利用激子准粒子的潜力和实现实用的激子基光电器件的主要挑战。
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引用次数: 0
Tailoring tumor-recognizable hyaluronic acid–lipid conjugates to enhance anticancer efficacies of surface-engineered natural killer cells 定制可识别肿瘤的透明质酸-脂质共轭物,提高表面工程自然杀伤细胞的抗癌效果
IF 11.7 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2023-12-14 DOI: 10.1186/s40580-023-00406-1
Chae Eun Lee, Sungjun Kim, Hee Won Park, Wonjeong Lee, Ashok Kumar Jangid, Yonghyun Choi, Woo-Jin Jeong, Kyobum Kim

Natural killer (NK) cells have clinical advantages in adoptive cell therapy owing to their inherent anticancer efficacy and their ability to identify and eliminate malignant tumors. However, insufficient cancer-targeting ligands on NK cell surfaces often inhibit their immunotherapeutic performance, especially in immunosuppressive tumor microenvironment. To facilitate tumor recognition and subsequent anticancer function of NK cells, we developed hyaluronic acid (HA, ligands to target CD44 overexpressed onto cancer cells)-poly(ethylene glycol) (PEG, cytoplasmic penetration blocker)-Lipid (molecular anchor for NK cell membrane decoration through hydrophobic interaction) conjugates for biomaterial-mediated ex vivo NK cell surface engineering. Among these major compartments (i.e., Lipid, PEG and HA), optimization of lipid anchors (in terms of chemical structure and intrinsic amphiphilicity) is the most important design parameter to modulate hydrophobic interaction with dynamic NK cell membranes. Here, three different lipid types including 1,2-dimyristoyl-sn-glycero-3-phosphati-dylethanolamine (C14:0), 1,2-distearoyl-sn-glycero-3-phosphatidylethanolamine (DSPE, C18:0), and cholesterol were evaluated to maximize membrane coating efficacy and associated anticancer performance of surface-engineered NK cells (HALipid-NK cells). Our results demonstrated that NK cells coated with HA-PEG-DSPE conjugates exhibited significantly enhanced anticancer efficacies toward MDA-MB-231 breast cancer cells without an off-target effect on human fibroblasts specifically via increased NK cell membrane coating efficacy and prolonged surface duration of HA onto NK cell surfaces, thereby improving HA-CD44 recognition. These results suggest that our HALipid-NK cells with tumor-recognizable HA-PEG-DSPE conjugates could be further utilized in various cancer immunotherapies.

Graphical Abstract

自然杀伤细胞(Natural killer, NK)因其固有的抗癌作用和识别和消除恶性肿瘤的能力,在过继细胞治疗中具有临床优势。然而,NK细胞表面的癌症靶向配体不足往往会抑制其免疫治疗性能,特别是在免疫抑制的肿瘤微环境中。为了促进NK细胞的肿瘤识别和随后的抗癌功能,我们开发了透明质酸(HA,靶向癌细胞上过表达的CD44的配体)-聚乙二醇(PEG,细胞质渗透阻滞剂)-脂质(通过疏水相互作用修饰NK细胞膜的分子锚)偶联物,用于生物材料介导的体外NK细胞表面工程。在这些主要的隔室(即脂质、PEG和HA)中,优化脂质锚点(在化学结构和固有的两亲性方面)是调节与动态NK细胞膜疏水相互作用的最重要的设计参数。在这里,我们评估了三种不同的脂质类型,包括1,2-二肉豆醇-sn-甘油-3-磷脂-二乙醇胺(C14:0)、1,2-二硬脂酰-sn-甘油-3-磷脂-乙醇胺(DSPE, C18:0)和胆固醇,以最大限度地提高表面工程NK细胞(hali脂-NK细胞)的膜涂覆效果和相关的抗癌性能。我们的研究结果表明,被HA- peg - dspe偶联物包被的NK细胞对MDA-MB-231乳腺癌细胞的抗癌效果显著增强,而对人成纤维细胞没有脱靶效应,这是通过提高NK细胞膜包被效果和延长HA在NK细胞表面的表面持续时间,从而提高HA- cd44的识别。这些结果表明,我们的具有肿瘤可识别的HA-PEG-DSPE偶联物的血脂- nk细胞可以进一步用于各种癌症免疫治疗。图形抽象
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引用次数: 0
Role of oxygen vacancies in ferroelectric or resistive switching hafnium oxide 氧空位在铁电或电阻开关氧化铪中的作用。
IF 11.7 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2023-12-01 DOI: 10.1186/s40580-023-00403-4
Jaewook Lee, Kun Yang, Ju Young Kwon, Ji Eun Kim, Dong In Han, Dong Hyun Lee, Jung Ho Yoon, Min Hyuk Park

HfO2 shows promise for emerging ferroelectric and resistive switching (RS) memory devices owing to its excellent electrical properties and compatibility with complementary metal oxide semiconductor technology based on mature fabrication processes such as atomic layer deposition. Oxygen vacancy (Vo), which is the most frequently observed intrinsic defect in HfO2-based films, determines the physical/electrical properties and device performance. Vo influences the polymorphism and the resulting ferroelectric properties of HfO2. Moreover, the switching speed and endurance of ferroelectric memories are strongly correlated to the Vo concentration and redistribution. They also strongly influence the device-to-device and cycle-to-cycle variability of integrated circuits based on ferroelectric memories. The concentration, migration, and agglomeration of Vo form the main mechanism behind the RS behavior observed in HfO2, suggesting that the device performance and reliability in terms of the operating voltage, switching speed, on/off ratio, analog conductance modulation, endurance, and retention are sensitive to Vo. Therefore, the mechanism of Vo formation and its effects on the chemical, physical, and electrical properties in ferroelectric and RS HfO2 should be understood. This study comprehensively reviews the literature on Vo in HfO2 from the formation and influencing mechanism to material properties and device performance. This review contributes to the synergetic advances of current knowledge and technology in emerging HfO2-based semiconductor devices.

Graphical Abstract

HfO2由于其优异的电学性能和与基于原子层沉积等成熟制造工艺的互补金属氧化物半导体技术的兼容性,在新兴的铁电和电阻开关(RS)存储器件中显示出前景。氧空位(Vo)是hfo2基薄膜中最常见的固有缺陷,它决定了hfo2基薄膜的物理/电学性能和器件性能。Vo影响了HfO2的多态性及其铁电性能。此外,铁电存储器的开关速度和持久性与Vo浓度和重分布密切相关。它们还强烈影响基于铁电存储器的集成电路的器件到器件和周期到周期的可变性。在HfO2中观察到的RS行为背后的主要机制是Vo的浓度、迁移和团聚,这表明器件在工作电压、开关速度、开/关比、模拟电导调制、续航和保持方面的性能和可靠性对Vo敏感。因此,有必要了解Vo的形成机理及其对铁电和RS HfO2的化学、物理和电学性能的影响。本研究从HfO2中Vo的形成及其影响机理到材料性能和器件性能等方面全面综述了相关文献。本文综述了当前基于hfo2的半导体器件的知识和技术的协同进步。
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引用次数: 0
期刊
Nano Convergence
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