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Multilayer WS2 for low-power visible and near-infrared phototransistors. 用于低功耗可见光和近红外光电晶体管的多层 WS2。
Pub Date : 2024-03-25 DOI: 10.1186/s11671-024-04000-0
Aniello Pelella, Kimberly Intonti, Ofelia Durante, Arun Kumar, Loredana Viscardi, Sebastiano De Stefano, Paola Romano, Filippo Giubileo, Hazel Neill, Vilas Patil, Lida Ansari, Brendan Roycroft, Paul K Hurley, Farzan Gity, Antonio Di Bartolomeo

Mechanically exfoliated multilayer WS2 flakes are used as the channel of field effect transistors for low-power photodetection in the visible and near-infrared (NIR) spectral range. The electrical characterization as a function of the temperature reveals devices with n-type conduction and slightly different Schottky barriers at the drain and source contacts. The WS2 phototransistors can be operated in self-powered mode, yielding both a current and a voltage when exposed to light. The spectral photoresponse in the visible and the NIR ranges shows a high responsivity (4.5 μA/W) around 1250 nm, making the devices promising for telecommunication applications.

机械剥离的多层 WS2 片被用作场效应晶体管的沟道,用于可见光和近红外光谱范围内的低功率光电探测。随温度变化而进行的电学特性分析表明,该器件具有 n 型传导,漏极和源极接触处的肖特基势垒略有不同。WS2 光晶体管可在自供电模式下工作,在光照下可产生电流和电压。可见光和近红外波段的光谱光响应在 1250 纳米附近显示出很高的响应率(4.5 μA/W),这使得该器件在电信应用中大有可为。
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引用次数: 0
Asymmetric voltage amplification using a capacitive load energy management circuit in a triboelectric nanogenerator. 利用三电纳米发电机中的电容负载能量管理电路实现非对称电压放大。
Pub Date : 2024-03-19 DOI: 10.1186/s11671-024-03997-8
Jiwon Jeong, Jiyoung Ko, Jinhee Kim, Jongjin Lee

We investigated the polarity dependence of a capacitive energy management circuit in a triboelectric nanogenerator (TENG) power system. In a half-wave rectifying circuit, the Simulation Program with Integrated Circuit Emphasis and analytical models show that the charge dump to the load varied depending on the polarity of the rectifying circuit even with the same charge output from TENG. Depending on the polarity of the rectifying circuit, a fast saturation of the direct current (DC) output voltage or a high DC output voltage was obtained. Experiments with a half-wave rectifier and Bennet doubler confirmed our simulation and theoretical results. The charge dump from the minimum capacitance of the separated TENG to the load capacitance and the charge dump from the maximum capacitance of the contacted TENG to the load resulted in asymmetric charging behavior. We concluded that it is necessary to analyze the TENG and the capacitive energy management circuit as a single system rather than considering them as independent units in the rectifying circuit of the TENG. This work can provide insights for the design of triboelectric energy harvesting systems.

我们研究了三电纳米发电机(TENG)电源系统中电容式能量管理电路的极性依赖性。在半波整流电路中,集成电路仿真程序和分析模型显示,即使在 TENG 输出相同电荷的情况下,向负载倾倒的电荷也会随整流电路的极性而变化。根据整流电路的极性,可获得快速饱和的直流(DC)输出电压或较高的直流输出电压。使用半波整流器和贝内特倍增器进行的实验证实了我们的模拟和理论结果。从分离式 TENG 的最小电容到负载电容的电荷倾泻和从接触式 TENG 的最大电容到负载的电荷倾泻导致了不对称充电行为。我们得出结论,有必要将 TENG 和电容式能量管理电路作为一个系统进行分析,而不是将它们视为 TENG 整流电路中的独立单元。这项工作可为三电能量收集系统的设计提供启示。
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引用次数: 0
Exploring sustainable management by using green nano-silver to combat three post-harvest pathogenic fungi in crops. 利用绿色纳米银防治作物收获后的三种病原真菌,探索可持续管理。
Pub Date : 2024-03-19 DOI: 10.1186/s11671-024-03986-x
Sudhir S Shende, Aniket K Gade, Tatiana M Minkina, Pramod U Ingle, Vishnu D Rajput, Svetlana N Sushkova, Saglara S Mandzhieva, Mahendra Rai, Ming H Wong

Global crop protection and food security have become critical issues to achieve the 'Zero Hunger' goal in recent years, as significant crop damage is primarily caused by biotic factors. Applying nanoparticles in agriculture could enhance crop yield. Nano-silver, or AgNPs, have colossal importance in many fields like biomedical, agriculture, and the environment due to their antimicrobial potential. In this context, nano-silver was fabricated by Citrus medica L. (Cm) fruit juice, detected visually and by UV-Vis spectrophotometric analysis. Further, AgNPs were characterized by advanced techniques. UV-Vis spectroscopic analysis revealed absorbance spectra at around 487 nm. The zeta potential measurement value was noted as -23.7 mV. Spectral analysis by FT-IR proved the capping of the acidic groups. In contrast, the XRD analysis showed the Miller indices like the face-centered cubic (fcc) crystalline structure. NTA revealed a mean size of 35 nm for nano-silver with a 2.4 × 108 particles mL-1 concentration. TEM analysis demonstrated spherical Cm-AgNPs with 20-30 nm sizes. The focus of this research was to evaluate the antifungal activity of biogenic AgNPs against post-harvest pathogenic fungi, including Aspergillus niger, A. flavus, and Alternaria alternata. The Cm-AgNPs showed significant antifungal activity in the order of A. niger > A. flavus > A. alternata. The biogenic Cm-AgNPs can be used for the inhibition of toxigenic fungi.

近年来,全球作物保护和粮食安全已成为实现 "零饥饿 "目标的关键问题,因为严重的作物损害主要是由生物因素造成的。在农业中应用纳米粒子可以提高作物产量。纳米银(或 AgNPs)因其抗菌潜力,在生物医学、农业和环境等许多领域都具有巨大的重要性。在此背景下,利用柑橘(Cm)果汁制造了纳米银,并通过肉眼和紫外可见分光光度法进行了检测。此外,还采用先进技术对 AgNPs 进行了表征。紫外可见分光光度分析显示,吸光度光谱在 487 纳米左右。zeta 电位测量值为 -23.7 mV。傅立叶变换红外光谱分析证明了酸性基团的封盖作用。与此相反,XRD 分析显示米勒指数为面心立方(ccc)晶体结构。NTA 显示,纳米银的平均粒径为 35 纳米,颗粒浓度为 2.4 × 108 mL-1。TEM 分析表明,Cm-AgNPs 为球形,大小为 20-30 纳米。这项研究的重点是评估生物银纳米粒子对收获后致病真菌(包括黑曲霉、黄曲霉和交替孢霉)的抗真菌活性。Cm-AgNPs 显示出显著的抗真菌活性,其顺序为黑曲霉 > 黄曲霉 > 交替孢霉。生物 Cm-AgNPs 可用于抑制致毒真菌。
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引用次数: 0
Unveiling heterogeneity of hysteresis in perovskite thin films. 揭示包晶体薄膜滞后的异质性。
Pub Date : 2024-03-18 DOI: 10.1186/s11671-024-03996-9
Zhouyiao Zou, Haian Qiu, Zhibin Shao

The phenomenon of current-voltage hysteresis observed in perovskite-based optoelectronic devices is a critical issue that complicates the accurate assessment of device parameters, thereby impacting performance and applicability. Despite extensive research efforts aimed at deciphering the origins of hysteresis, its underlying causes remain a subject of considerable debate. By employing nanoscale investigations to elucidate the relationship between hysteresis and morphological characteristics, this study offers a detailed exploration of photocurrent-voltage hysteresis at the nanoscale within perovskite optoelectronic devices. Through the meticulous analysis of localized I-V curve arrays, our research identifies two principal hysteresis descriptors, uncovering a predominantly inverted hysteresis pattern in 87% of the locations examined. This pattern is primarily attributed to the energetic barrier encountered at the interface between the probe and the perovskite material. Our findings underscore the pronounced heterogeneity and grain-dependent variability inherent in hysteresis behavior, evidenced by an average Hysteresis Index value of 0.24. The investigation suggests that the localized hysteresis phenomena cannot be exclusively attributed to either photocharge collection processes or organic cation migration at grain boundaries. Instead, it appears significantly influenced by localized surface trap states, which play a pivotal role in modulating electron and hole current dynamics. By identifying the key factors contributing to hysteresis, such as localized surface trap states and their influence on electron and hole current dynamics, our findings pave the way for targeted strategies to mitigate these effects. This includes the development of novel materials and device architectures designed to minimize energy barriers and enhance charge carrier mobility, thereby improving device performance and longevity. This breakthrough in understanding the microscale mechanisms of hysteresis underscores the critical importance of surface/interface defect trap passivation in mitigating hysteretic effects, offering new pathways for enhancing the performance of perovskite solar cells.

在基于包晶石的光电设备中观察到的电流-电压滞后现象是一个关键问题,它使设备参数的准确评估变得复杂,从而影响了设备的性能和适用性。尽管研究人员为破译磁滞的起源做出了大量努力,但其根本原因仍是一个颇具争议的话题。通过采用纳米尺度的研究来阐明滞后与形态特征之间的关系,本研究详细探讨了包晶体光电器件中纳米尺度的光电流-电压滞后。通过对局部 I-V 曲线阵列的细致分析,我们的研究确定了两个主要的滞后描述因子,在 87% 的受检位置发现了主要的反向滞后模式。这种模式主要归因于探针与包晶材料之间的界面所遇到的能量障碍。我们的研究结果强调了磁滞行为中固有的明显异质性和随晶粒而变化的特性,平均磁滞指数值为 0.24。调查表明,局部磁滞现象不能完全归因于光电荷收集过程或晶界的有机阳离子迁移。相反,它似乎受到局部表面陷阱态的重要影响,而陷阱态在调节电子和空穴电流动力学方面起着关键作用。通过确定造成磁滞的关键因素,如局部表面陷阱态及其对电子和空穴电流动力学的影响,我们的研究结果为采取有针对性的策略减轻这些影响铺平了道路。这包括开发新型材料和器件架构,旨在最大限度地减少能量障碍和提高电荷载流子迁移率,从而提高器件性能和寿命。在理解滞后的微观机制方面取得的这一突破强调了表面/界面缺陷阱钝化在减轻滞后效应方面的极端重要性,为提高过氧化物太阳能电池的性能提供了新的途径。
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引用次数: 0
A comparative study on biosynthesized silver nanoparticles from H. undatus fruit peel and their therapeutic applications. 从 H. undatus 果皮中生物合成银纳米粒子及其治疗应用的比较研究。
Pub Date : 2024-03-18 DOI: 10.1186/s11671-024-03995-w
Aswini Anguraj, Helan Soundra Rani Michael, Sathish Sugumaran, Gogul Ramnath Madhusudhanan, Rathish Kumar Sivaraman

The green synthesis of nanoparticles (NPs) gained significant impacts in various fields due to the use of eco-friendly approaches. In this study, silver nanoparticles (AgNPs) were synthesized from the aqueous extract of Hylocereus undatus fruit peel. The presence of AgNPs was analysed using characterization methods such as UV‒Vis, FTIR, GCMS, XRD, EDAX, and FESEM. The synthesized AgNPs showed greater antibacterial activity against Escherichia coli than against Streptococcus pneumoniae. The antifungal activity against Candida albicans was greater than that against Candida tropicalis. The IC50 value for the antibiofilm activity of the AgNPs was 2.81 µg/mL, whereas that of the H. undatus peel extract was 1.34 µg/mL. The invitro antioxidant activity of the AgNPs was evaluated using two different methods. The DPPH radical scavenging activity of the AgNPs and fruit peel extract was observed with IC50 values of 3.8 and 2.03 µg/mL respectively. On the other hand, nitric oxide radical scavenging activities were recorded and the IC50 values were calculated to be 2.8 and 2.3 µg/mL. The AgNPs demonstrated thrombolytic activity in human blood with 10, 32.36, and 56.25% lysis. The cytotoxicity of the AgNPs was minimal, with an IC50 of 0.2 µg/mL and the peel extract had the greatest cytotoxicity with an IC50 of 0.3 µg/mL. The findings of this study demonstrated that the synthesized AgNPs from H. undatus peel extract could be potential candidates for treating prostate cancer.

纳米粒子(NPs)的绿色合成由于采用了生态友好的方法而在各个领域产生了重大影响。在这项研究中,我们从 Hylocereus undatus 果皮的水提取物中合成了银纳米粒子(AgNPs)。使用 UV-Vis、FTIR、GCMS、XRD、EDAX 和 FESEM 等表征方法分析了 AgNPs 的存在。合成的 AgNPs 对大肠杆菌的抗菌活性高于对肺炎链球菌的抗菌活性。对白色念珠菌的抗真菌活性高于对热带念珠菌的抗真菌活性。AgNPs 抗生物膜活性的 IC50 值为 2.81 微克/毫升,而 H. undatus 果皮提取物的 IC50 值为 1.34 微克/毫升。AgNPs 的体外抗氧化活性采用了两种不同的方法进行评估。AgNPs 和果皮提取物的 DPPH 自由基清除活性的 IC50 值分别为 3.8 和 2.03 µg/mL。另一方面,一氧化氮自由基清除活性的 IC50 值分别为 2.8 和 2.3 µg/mL。AgNPs 在人体血液中具有溶栓活性,溶栓率分别为 10%、32.36% 和 56.25%。AgNPs 的细胞毒性很小,IC50 为 0.2 µg/mL,果皮提取物的细胞毒性最大,IC50 为 0.3 µg/mL。这项研究结果表明,从 H. undatus 果皮提取物中合成的 AgNPs 有可能成为治疗前列腺癌的候选药物。
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引用次数: 0
Development of excitation power-responsive anti-stokes emission wavelength switching and their energy saving induced by localized surface plasmon resonance. 开发局部表面等离子体共振诱导的激发功率响应式反斯托克斯发射波长切换及其节能技术。
Pub Date : 2024-03-14 DOI: 10.1186/s11671-024-03991-0
Jotaro Honda, Kosuke Sugawa, Koki Honma, Seiya Fukumura, Ryuzi Katoh, Hironobu Tahara, Joe Otsuki

We designed an external stimulus-responsive anti-Stokes emission switching using dual-annihilator-based triplet-triplet annihilation upconversion systems. This system, which was constructed by incorporating a palladium porphyrin derivative as a sensitizer and 9,10-diphenylanthracene (DPA) and 9,10-bis(triisopropylsilyl)ethynylanthracene (TIPS) as annihilators into polymer thin films, produced TIPS- and DPA-based anti-Stokes emission under low and high excitation powers, respectively. The mechanism involves the following: under low excitation power, triplet energy transfer from triplet-excited PdOEP to DPA is induced, followed by relay to TIPS. This results in the generation of triplet-excited TIPS, and the subsequent triplet-triplet annihilation between them produces TIPS-based anti-Stokes emission. Conversely, under high excitation power, the high-density triplet-excited DPA, generated through triplet energy transfer from PdOEP, undergoes triplet-triplet annihilation among themselves, resulting in the generation of DPA-based anti-Stokes emission. Additionally, we achieved energy savings by reducing the required excitation power for switching through the utilization of plasmonic metal nanoparticles. The strong local electromagnetic fields associated with the localized surface plasmon resonance of metal nanoparticles enhance the photoexcitation efficiency of PdOEP, subsequently increasing the density of triplet-excited DPA. As a result, anti-Stokes emission switching becomes feasible at lower excitation powers.

我们设计了一种外部刺激响应型反斯托克斯发射开关,它采用基于双湮灭器的三重-三重湮灭上转换系统。该系统是通过在聚合物薄膜中加入钯卟啉衍生物作为敏化剂,9,10-二苯基蒽(DPA)和 9,10-双(三异丙基硅基)乙炔基蒽(TIPS)作为湮灭剂而构建的,在低激励功率和高激励功率下分别产生基于 TIPS 和 DPA 的反斯托克斯发射。其机理如下:在低激发功率下,三重能从三重激发的 PdOEP 转移到 DPA,然后再转移到 TIPS。这就产生了三重激发的 TIPS,随后它们之间的三重-三重湮灭产生了基于 TIPS 的反斯托克斯发射。相反,在高激发功率下,通过 PdOEP 的三重态能量转移产生的高密度三重态激发 DPA 会发生三重态-三重态相互湮灭,从而产生基于 DPA 的反斯托克斯发射。此外,我们还利用等离子金属纳米粒子降低了开关所需的激发功率,从而实现了节能。与金属纳米粒子的局部表面等离子体共振相关的强局部电磁场提高了 PdOEP 的光激发效率,从而增加了三重激发 DPA 的密度。因此,在较低的激发功率下就可以实现反斯托克斯发射切换。
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引用次数: 0
A combination of logical judging circuit and water-resistant ultrathin film PEDOT: PSS electrode for noninvasive ECG measurement. 逻辑判断电路与防水超薄膜 PEDOT:PSS 电极用于无创心电图测量。
Pub Date : 2024-03-14 DOI: 10.1186/s11671-024-03988-9
Kewei Song, Kayo Hirose, Kioto Niitsu, Tsubasa Sui, Hiroto Kojima, Toshinori Fujie, Shinjiro Umezu

Heart disease-related deaths have increased in recent decades, with most patients dying of sudden cardiac arrest. In such instances, the effect of regular electrocardiogram (ECG) measurements is minimal. Therefore, long-term ECG monitoring has become increasingly important. In this paper, we report a non-adhesive high accuracy ECG monitoring system that can be used in various scenarios without interfering with daily activities. The ECG ultra-thin film electrode is made by water-resistant material based on poly(3,4-ethylenedioxythiophene) poly(4-styrenesulfonate) (PEDOT: PSS) electrode doped with ethylene glycol (EG) and xylitol, to improve the noise signal caused by sweat. The optimal ratio of the three ingredients of PEDOT: PSS/xylitol/EG was determined experimentally to accommodate the ECG monitoring. By using the proposed selectively closed multi-channel single-lead logic circuit, the noise of ECG signal received from the proposed film electrode can be successfully reduced during broad-area electrode measurements, thus to improve ECG measurement accuracy.

近几十年来,与心脏病有关的死亡人数不断增加,大多数患者死于心脏骤停。在这种情况下,定期测量心电图(ECG)的效果微乎其微。因此,长期心电图监测变得越来越重要。在本文中,我们报告了一种非粘性高精度心电图监测系统,该系统可用于各种场景,且不会影响日常活动。心电图超薄膜电极是由聚(3,4-亚乙二氧基噻吩)聚(4-苯乙烯磺酸)(PEDOT:PSS)电极掺杂乙二醇(EG)和木糖醇的防水材料制成,以改善汗液引起的噪声信号。PEDOT: PSS 三种成分的最佳比例为PSS/木糖醇/EG)三种成分的最佳比例。通过使用所提出的选择性闭合多通道单导联逻辑电路,在大面积电极测量时可成功降低从所提出的薄膜电极接收到的心电信号的噪声,从而提高心电图测量的准确性。
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引用次数: 0
Fabrication of fluidic submicron-channels by pulsed laser-induced buckling of SiOx films on fused silica. 通过脉冲激光诱导熔融石英上的氧化硅薄膜降压,制造流体亚微米通道。
Pub Date : 2024-03-14 DOI: 10.1186/s11671-024-03987-w
Nastaran Bakhtiari, Jürgen Ihlemann

Recently, considerable attention has been drawn to the field of micro/nanofluidic channels. However, current methods for fabricating micro/nanochannels are complex, costly, and time-intensive. In the present work, we successfully fabricated transparent submicron-channels on fused silica substrates (SiO2) using a straightforward laser process. To achieve this, a single-pulse excimer laser irradiation in a rear side configuration was employed to treat a thin film of UV-absorbing silicon suboxide (SiOx) through the transparent SiO2 substrate. A polydimethylsiloxane (PDMS) superstrate (coating layer) was applied over the SiOx film before laser exposure, serving as a confinement for controlled structure formation induced by the laser. Under optimal laser fluence, the thin SiOx film buckled, leading to the formation of channels with a width ranging from 10 to 20 µm and a height of 800 to 1200 nm, exhibiting a bell-like cross-sections following the so-called Euler buckling mode. Wider channels displayed morphologies resembling varicose or telephone cord modes. Subsequent high-temperature annealing led to the oxidation of SiOx, resulting transparent SiO2 channels on the fused silica substrate. The manufactured nanochannels exhibited promising potential for effectively transporting fluids of diverse viscosities. Various fluids were conveyed through these nanochannels via capillary action and in accordance with the Lucas-Washburn equation.

最近,微/纳米流体通道领域引起了广泛关注。然而,目前制造微米/纳米通道的方法复杂、成本高、耗时长。在本研究中,我们采用一种简单的激光工艺,成功地在熔融石英基底(二氧化硅)上制造出了透明的亚微米通道。为了实现这一目标,我们采用了单脉冲准分子激光器的后侧照射方式,通过透明的二氧化硅基底处理紫外线吸收硅亚氧化物(SiOx)薄膜。在激光照射之前,在氧化硅薄膜上涂覆了一层聚二甲基硅氧烷(PDMS)基板(涂层),作为激光诱导的可控结构形成的限制层。在最佳激光通量下,氧化硅薄膜发生屈曲,形成宽度为 10 至 20 µm、高度为 800 至 1200 nm 的通道,按照所谓的欧拉屈曲模式呈现出钟形截面。更宽的通道显示出类似于曲张或电话线模式的形态。随后的高温退火导致氧化硅氧化,从而在熔融石英基底上形成透明的二氧化硅通道。制造出的纳米通道在有效输送不同粘度的流体方面表现出了巨大的潜力。根据卢卡斯-沃什伯恩方程,各种流体通过毛细作用被输送到这些纳米通道中。
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引用次数: 0
Watt-level continuous-wave antimonide laser diodes with high carrier-confined active region above 2.5 µm. 具有 2.5 µm 以上高载流子约束有源区的瓦特级连续波锑化物激光二极管。
Pub Date : 2024-03-12 DOI: 10.1186/s11671-024-03989-8
Hongguang Yu, Chengao Yang, Yihang Chen, Tianfang Wang, Jianmei Shi, Juntian Cao, Zhengqi Geng, Zhiyuan Wang, Yu Zhang, Yingqiang Xu, Haiqiao Ni, Zhichuan Niu

Thanks to high performance above room temperature, antimonide laser diodes have shown great potential for broad application in the mid-infrared spectral region. However, the laser`s performance noticeably deteriorates due to the reduction of carrier confinement with increased emission wavelength. In this paper, a novel active region with higher carrier confinements both of electron and hole, by the usage of an indirect bandgap material of Al0.5GaAs0.04Sb as the quantum barrier, was put up to address the poor carrier confinement of GaSb-based type-I multi-quantum-well (MQW) diode lasers emission wavelength above 2.5 µm. The carrier confinement and the differential gain in the designed active region are enhanced as a result of the first proposed usage of an indirect-gap semiconductor as the quantum barrier with larger band offsets in conduction and valence bands, leading to high internal quantum efficiency and low threshold current density of our lasers. More importantly, the watt-level output optical power is obtained at a low injection current compared to the state of the art. Our work demonstrates a direct and cost-effective solution to address the poor carrier confinement of the GaSb-based MQW lasers, thereby achieving high-power mid-infrared lasers.

由于在室温以上具有高性能,锑化物激光二极管在中红外光谱区的广泛应用中显示出巨大的潜力。然而,随着发射波长的增加,载流子束缚力降低,激光器的性能明显下降。本文通过使用 Al0.5GaAs0.04Sb 间接带隙材料作为量子势垒,提出了一种新型有源区,该有源区具有更高的电子和空穴载流子约束能力,从而解决了基于 GaSb 的 I 型多量子阱 (MQW) 二极管激光器发射波长超过 2.5 µm 时载流子约束能力差的问题。由于首次提出使用间接隙半导体作为量子势垒,且导带和价带的带偏移较大,因此设计的有源区中的载流子束缚和差分增益得到了增强,从而使我们的激光器具有较高的内部量子效率和较低的阈值电流密度。更重要的是,与现有技术相比,我们能以较低的注入电流获得瓦级输出光功率。我们的工作展示了一种直接而经济高效的解决方案,可以解决基于 GaSb 的 MQW 激光器载流子束缚能力差的问题,从而实现高功率中红外激光器。
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引用次数: 0
Nanovoid formation mechanism in nanotwinned Cu. 纳米铜中的纳米晶形成机制
Pub Date : 2024-03-12 DOI: 10.1186/s11671-024-03984-z
Cuncai Fan, Haiyan Wang, Xinghang Zhang

Nanotwinned metals have been intensely investigated due to their unique microstructures and superior properties. This work aims to investigate the nanovoid formation mechanism in sputter-deposited nanotwinned Cu. Three different types of epitaxial or polycrystalline Cu films are fabricated by magnetron sputtering deposition technique. In the epitaxial Cu (111) films deposited on Si (110) substrates, high fractions of nanovoids and nanotwins are formed. The void size and density can be tailored by varying deposition parameters, including argon pressure, deposition rate, and film thickness. Interestingly, nanovoids become absent in the polycrystalline Cu film deposited on Si (111) substrate, but they can be regained in the epitaxial nanotwinned Cu (111) when deposited on Si (111) substrate with an Ag seed layer. The nanovoid formation seems to be closely associated with twin nucleation and film texture. Based on the comparative studies between void-free polycrystalline Cu films and epitaxial nanotwinned Cu films with nanovoids, the underlying mechanisms for the formation of nanovoids are discussed within the framework of island coalescence model.

纳米缠绕金属因其独特的微观结构和优异的性能而受到广泛研究。这项工作旨在研究溅射沉积纳米绕射铜的纳米晶形成机理。通过磁控溅射沉积技术制备了三种不同类型的外延或多晶铜薄膜。在硅 (110) 基底上沉积的外延铜 (111) 薄膜中,形成了高比例的纳米空洞和纳米细丝。通过改变沉积参数,包括氩气压力、沉积速率和薄膜厚度,可以调整空隙大小和密度。有趣的是,沉积在硅(111)基底上的多晶铜膜中不存在纳米空泡,但当沉积在带有银种子层的硅(111)基底上时,外延纳米孪晶铜(111)中又重新出现了纳米空泡。纳米形貌的形成似乎与孪晶成核和薄膜质地密切相关。根据对无空隙多晶铜薄膜和具有纳米形体的外延纳米缠绕铜薄膜的比较研究,在岛状凝聚模型的框架内讨论了纳米形体形成的基本机制。
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引用次数: 0
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