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Synergizing intrinsic symmetry breaking with spin–orbit torques for field-free perpendicular magnetic tunnel junction 无磁场垂直磁隧道结的本征对称性破缺与自旋轨道力矩协同作用
IF 6.1 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-08-30 DOI: 10.1063/5.0221776
Jing Zhou, Lisen Huang, Sherry Lee Koon Yap, Dennis Jing Xiong Lin, Bingjin Chen, Shaohai Chen, Seng Kai Wong, Jinjun Qiu, James Lourembam, Anjan Soumyanarayanan, Sze Ter Lim
Current-induced spin–orbit torque (SOT) facilitates the ultrafast electrical manipulation of magnetic tunnel junction (MTJ), which is a leading non-volatile technology for the microelectronic industry. The key bottleneck to the commercial application of SOT-MTJ is the absence of a practicable symmetry-breaking scheme to switch perpendicular magnetization without an external magnetic field. Here, we demonstrate the wafer-scale realization of internalized field-free switching in perpendicular SOT-MTJ using conventional materials and device structure. We utilize a dual-function tungsten (W) spacer, which generates sizable SOT while concomitantly breaking symmetry via interlayer exchange coupling (IEC). Tuning the W thickness enables field-free switching with two types of IEC. An optimized combination of SOT and IEC ensures competitive switching performance, with our device exhibiting excellent thermal stability, low switching current density, and fast operating speed. This work builds the long-sought bridge between SOT manipulation of magnetization and wafer-scale field-free perpendicular MTJ. It underscores the urgent need to incorporate perpendicular SOT-MTJ in integrated circuits for applications in logic, memory, and unconventional computing.
电流诱导的自旋轨道力矩(SOT)促进了磁性隧道结(MTJ)的超快电气操控,而磁性隧道结是微电子行业的一项领先非易失性技术。SOT-MTJ 商业化应用的关键瓶颈在于缺乏一种可行的对称性破坏方案,无法在没有外部磁场的情况下切换垂直磁化。在这里,我们展示了利用传统材料和器件结构在晶圆级实现垂直 SOT-MTJ 内化无磁场开关的方法。我们利用双重功能的钨(W)间隔物,在产生可观的 SOT 的同时,通过层间交换耦合(IEC)打破对称性。调整钨的厚度可以实现两种 IEC 的无场切换。SOT 和 IEC 的优化组合确保了具有竞争力的开关性能,我们的器件具有出色的热稳定性、较低的开关电流密度和较快的工作速度。这项工作在 SOT 磁化操纵和晶圆级无磁场垂直 MTJ 之间架起了一座长期寻求的桥梁。它强调了将垂直 SOT-MTJ 集成到逻辑、存储器和非传统计算应用的集成电路中的迫切需要。
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引用次数: 0
Unveiling charge transport in monolayer and few-layer CoPS3/metal contact: Insight from C-AFM 揭示单层和少层 CoPS3/金属接触中的电荷传输:C-AFM 的洞察力
IF 6.1 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-08-28 DOI: 10.1063/5.0222472
Mouhui Yan, Haotian Wang, Wenqi Wei, Tianxiang Zhu, Guanghui Cao, Jianxin Zhong, Wei Ren
Monolayer and few-layer CoPS3 have been successfully synthesized via an Au-assisted exfoliation technique, with their transport properties subsequently investigated by conductive atomic force microscopy. Rectification effects can be observed in CoPS3 nanosheets due to the Schottky junction formation at the Au/CoPS3 interface, especially in configurations comprising two or more layer flakes. The distinct transport properties between monolayer and few-layer samples demonstrate that the charge transport behavior in the vertical direction is associated with the van der Waals gap. The calculated electron affinity for CoPS3 is about 4.84 eV, as revealed by the thermionic emission model. The results obtained contribute to the knowledge base concerning the transport characteristics of ultrathin MPX3, facilitating further exploration of the transport behavior of these materials and their potential applications in novel electronic devices.
通过金辅助剥离技术成功合成了单层和少层 CoPS3,随后利用导电原子力显微镜研究了它们的传输特性。在 CoPS3 纳米片中可以观察到整流效应,这是由于金/CoPS3 界面形成了肖特基结,尤其是在由两层或多层薄片组成的配置中。单层和少层样品之间截然不同的传输特性表明,垂直方向上的电荷传输行为与范德华间隙有关。热离子发射模型显示,计算得出的 CoPS3 电子亲和力约为 4.84 eV。所获得的结果丰富了有关超薄 MPX3 传输特性的知识库,有助于进一步探索这些材料的传输行为及其在新型电子器件中的潜在应用。
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引用次数: 0
Immunomodulatory hydrogels for tissue repair and regeneration 用于组织修复和再生的免疫调节水凝胶
IF 6.1 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-08-23 DOI: 10.1063/5.0228692
Xiangjun Liu, Yue Hu, Yikun Ju, Pu Yang, Naisi Shen, Anqi Yang, Rui Wu, Bairong Fang, Liangle Liu
Tissue repair and regeneration have long been a focus of research, with growing evidence highlighting the role played by immunomodulation. The repair of tissue cells can be significantly promoted through the localized immunomodulation of tissues. Hydrogels are increasingly used in this field due to their biocompatibility, versatility, and relative ease of fabrication. This Review highlights the critical role of inflammation and immune development in the complex process of tissue repair after injury, highlighting the dynamic interactions between immune cells that ultimately influence the outcome of tissue healing. We also summarize the precise functions of immune cells and their responses in various tissue injury scenarios, which are critical for harnessing the full potential of immunomodulatory strategies to promote tissue repair. We discuss recent advances in drug-carrying hydrogels, which offer promising avenues for tissue regeneration with precise control of the immune environment for constructive tissue repair. Further advances in our understanding of the mechanisms driving inflammation and immune cell behavior during tissue injury are expected to foster the development of increasingly effective hydrogel-based immunomodulatory strategies to promote tissue repair and regeneration.
组织修复和再生一直是研究的重点,越来越多的证据表明免疫调节发挥着重要作用。通过对组织进行局部免疫调节,可以大大促进组织细胞的修复。水凝胶因其生物相容性、多功能性和相对易于制造而越来越多地应用于这一领域。本综述强调了炎症和免疫发展在损伤后组织修复的复杂过程中的关键作用,突出了最终影响组织愈合结果的免疫细胞之间的动态相互作用。我们还总结了免疫细胞的精确功能及其在各种组织损伤情况下的反应,这对于充分发挥免疫调节策略的潜力以促进组织修复至关重要。我们讨论了载药水凝胶的最新进展,这种水凝胶为组织再生提供了前景广阔的途径,可精确控制免疫环境以实现建设性的组织修复。我们对组织损伤过程中炎症和免疫细胞行为的驱动机制的进一步了解有望促进基于水凝胶的免疫调节策略的发展,从而越来越有效地促进组织修复和再生。
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引用次数: 0
Enhancing terahertz magneto-optical effects in wafer-scale RIG single crystal thick films with anti-reflective coatings for improved transmittance 利用抗反射涂层增强晶圆级 RIG 单晶厚膜的太赫兹磁光效应,从而提高透射率
IF 6.1 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-08-19 DOI: 10.1063/5.0219811
Qiang Xue, Yuan-Jing Zhang, Qing-Hui Yang, Huai-Wu Zhang, Qi-Ye Wen
Wafer-scale rare-earth iron garnet (RIG) single crystal thick films were fabricated on 3-in. gadolinium gallium garnet (GGG) substrates using liquid phase epitaxy. The terahertz transmittance of the RIG crystals improved after removing the GGG substrate by polishing. The time-domain spectra at Terahertz (THz) frequencies indicate the existence of a magneto-optical effect in RIG samples. The results indicate that the RIG samples exhibit a high refractive index of ∼4.50 within the 0.1–1.0 THz frequency range, a transmittance of around 40%, and an absorption rate of only 10–50 cm−1. The Faraday rotation angles of the thick single-crystal films of the RIG samples were measured using a THz-TDS system. The RIG has a thickness of ∼330 μm. The Faraday rotation angles of RIG crystals at THz frequencies can reach up to 16° when an external magnetic field of 0.18 T is applied. The Verdet constants of the RIG sample were calculated to be ∼120°/mm/T. To improve the transmittance of the RIG sample, epoxy resin and polymethylpentene (TPX) were used as anti-reflective films. The transmittance of the RIG sample increased by ∼5% for the 80 μm thick epoxy and about 10% for the 320 μm thick TPX. Therefore, this RIG single crystal thick film can achieve a low loss, a high transmittance, and a strong magneto-optical effect in the terahertz region with the cooperation of a reflection-reducing film. It is expected to have wide applications in terahertz magnetic polarization conversion, non-reciprocal phase shifters, and isolators.
利用液相外延技术在 3 英寸钆镓石榴石(GGG)衬底上制作了晶圆级稀土铁榴石(RIG)单晶厚膜。通过抛光去除 GGG 衬底后,RIG 晶体的太赫兹透射率有所提高。太赫兹(THz)频率的时域光谱表明 RIG 样品存在磁光效应。结果表明,在 0.1-1.0 太赫兹频率范围内,RIG 样品表现出 ∼4.50 的高折射率,透射率约为 40%,吸收率仅为 10-50 cm-1。使用 THz-TDS 系统测量了 RIG 样品厚单晶薄膜的法拉第旋转角。RIG 的厚度为 ∼330 μm。当施加 0.18 T 的外部磁场时,RIG 晶体在太赫兹频率下的法拉第旋转角度可达 16°。经计算,RIG 样品的维尔德常数为 ∼120°/mm/T。为了提高 RIG 样品的透射率,使用了环氧树脂和聚甲基戊烯(TPX)作为抗反射膜。80 μm 厚的环氧树脂和 320 μm 厚的 TPX 使 RIG 样品的透射率分别提高了 5%和 10%左右。因此,这种 RIG 单晶厚膜可以在太赫兹区域实现低损耗、高透射率和强磁光效应,并能与减反射膜配合使用。它有望在太赫兹磁偏振转换、非互易移相器和隔离器中得到广泛应用。
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引用次数: 0
Role of the coupling of the electronic transitions on the order of the metal-to-insulator phase transition in nickelates 电子转变耦合对镍酸盐中金属-绝缘体相变顺序的影响
IF 6.1 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-08-19 DOI: 10.1063/5.0221334
Lucia Varbaro, Lukas Korosec, Chih-Ying Hsu, Duncan T. L. Alexander, Nicolas Jaouen, Jean-Marc Triscone
Rare-earth nickelates (chemical formula RNiO3, R being a rare-earth cation) display a temperature-dependent metal-to-insulator transition (MIT) together with a breathing distortion of the NiO6 octahedra units at a temperature ranging from 0 to 600 K depending on the size of the R cation. Their rich phase diagram is also characterized by a paramagnetic to antiferromagnetic transition that occurs at the same temperature as the MIT for R = Pr, Nd, while it arises at lower temperatures for all the other members of the series. In this work, we have investigated the order of the MIT in a portion of the phase diagram spanning from SmNiO3 to NdNiO3 by means of temperature dependent transport measurements and resonant elastic x-ray scattering performed on high quality epitaxial SmxNd1−xNiO3 solid solution thin films. Our results show that the order of the metal-to-insulator transition does not depend on whether or not the MIT is coupled with the magnetic transition.
稀土镍酸盐(化学式 RNiO3,R 为稀土阳离子)显示出一种随温度变化的金属-绝缘体转变(MIT),同时根据 R 阳离子的大小,NiO6 八面体单元在 0 至 600 K 的温度范围内发生呼吸变形。它们丰富的相图还具有顺磁性向反铁磁性转变的特征,对于 R = Pr、Nd,顺磁性向反铁磁性转变发生的温度与 MIT 相同,而对于该系列的所有其他成员,顺磁性向反铁磁性转变发生的温度较低。在这项工作中,我们通过在高质量的 SmxNd1-xNiO3 外延固溶体薄膜上进行温度相关传输测量和共振弹性 X 射线散射,研究了从 SmNiO3 到 NdNiO3 相图中的部分 MIT 的阶次。我们的研究结果表明,金属到绝缘体转变的顺序并不取决于 MIT 是否与磁转变耦合。
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引用次数: 0
Surface reconstructions and electronic structure of metallic delafossite thin films 金属 delafossite 薄膜的表面重构和电子结构
IF 6.1 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-08-15 DOI: 10.1063/5.0217540
Qi Song, Zhiren He, Brendan D. Faeth, Christopher T. Parzyck, Anna Scheid, Chad J. Mowers, Yufan Feng, Qing Xu, Sonia Hasko, Jisung Park, Matthew R. Barone, Y. Eren Suyolcu, Peter A. van Aken, Betül Pamuk, Craig J. Fennie, Phil D. C. King, Kyle M. Shen, Darrell G. Schlom
The growing interest in the growth and study of thin films of low-dimensional metallic delafossites, with the general formula ABO2, is driven by their potential to exhibit electronic and magnetic characteristics that are not accessible in bulk systems. The layered structure of these compounds introduces unique surface states as well as electronic and structural reconstructions, making the investigation of their surface behavior pivotal to understanding their intrinsic electronic structure. In this work, we study the surface phenomena of epitaxially grown PtCoO2, PdCoO2, and PdCrO2 films, utilizing a combination of molecular-beam epitaxy and angle-resolved photoemission spectroscopy. Through precise control of surface termination and treatment, we discover a pronounced 3×3 surface reconstruction in PtCoO2 films and PdCoO2 films, alongside a 2 × 2 surface reconstruction observed in PdCrO2 films. These reconstructions have not been reported in prior studies of delafossites. Furthermore, our computational investigations demonstrate the BO2 surface’s relative stability compared to the A-terminated surface and the significant reduction in surface energy facilitated by the reconstruction of the A-terminated surface. These experimental and theoretical insights illuminate the complex surface dynamics in metallic delafossites, paving the way for future explorations of their distinctive properties in low-dimensional studies.
对通式为 ABO2 的低维金属 delafossites 薄膜的生长和研究兴趣与日俱增,这是因为它们有可能表现出块状系统无法获得的电子和磁性特征。这些化合物的层状结构引入了独特的表面态以及电子和结构重构,因此研究它们的表面行为对了解其内在电子结构至关重要。在这项工作中,我们结合分子束外延和角度分辨光发射光谱,研究了外延生长的 PtCoO2、PdCoO2 和 PdCrO2 薄膜的表面现象。通过精确控制表面终止和处理,我们在铂钴氧化物薄膜和钯钴氧化物薄膜中发现了明显的 3×3 表面重构,同时在钯铬氧化物薄膜中观察到了 2×2 表面重构。这些重构现象在之前的三角晶研究中从未报道过。此外,我们的计算研究表明,与 A 端表面相比,BO2 表面相对稳定,而且 A 端表面的重构可显著降低表面能量。这些实验和理论见解阐明了金属三角晶复杂的表面动力学,为今后在低维研究中探索其独特性质铺平了道路。
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引用次数: 0
Interpretable machine learning for materials discovery: Predicting CO2 adsorption properties of metal–organic frameworks 用于材料发现的可解释机器学习:预测金属有机框架的二氧化碳吸附特性
IF 6.1 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-08-15 DOI: 10.1063/5.0222154
Yukun Teng, Guangcun Shan
Metal–organic frameworks (MOFs), as novel porous crystalline materials with high porosity and a large specific surface area, have been increasingly utilized for CO2 adsorption. Machine learning (ML) combined with molecular simulations is used to identify MOFs with high CO2 adsorption capacity from millions of MOF structures. In this study, 23 structural and molecular features and 765 calculated features were proposed for the ML model and trained on a hypothetical MOF dataset for CO2 adsorption at different pressures. The calculated features improved the prediction accuracy of the ML model by 15%–20% and revealed its interpretability, consistent with the analysis of the interaction potential. Subsequently, the importance of the relevant features was ranked at different pressures. Regardless of the pressure, the molecular structure and pore size were the most critical factors. van der Waals force-related descriptors gained more competitive advantages at low pressures, whereas electrical-field-related descriptors gradually dominated at high pressures. Overall, this study provides a novel perspective to guide the initial high-throughput screening of MOFs as high-performance CO2 adsorption materials.
金属有机框架(MOFs)作为具有高孔隙率和大比表面积的新型多孔结晶材料,越来越多地被用于二氧化碳吸附。机器学习(ML)与分子模拟相结合,可从数百万个 MOF 结构中识别出具有高二氧化碳吸附能力的 MOF。本研究为 ML 模型提出了 23 个结构和分子特征以及 765 个计算特征,并在不同压力下吸附 CO2 的假定 MOF 数据集上进行了训练。计算出的特征将 ML 模型的预测准确率提高了 15%-20%,并揭示了其可解释性,这与相互作用位势分析是一致的。随后,对不同压力下相关特征的重要性进行了排序。与范德华力相关的描述因子在低压下更具竞争优势,而与电场相关的描述因子则在高压下逐渐占据主导地位。总之,本研究提供了一个新的视角,可指导对作为高性能二氧化碳吸附材料的 MOFs 进行初步的高通量筛选。
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引用次数: 0
Room temperature chiral magnetoresistance in a chiral-perovskite-based perpendicular spin valve 基于手性透闪石的垂直自旋阀中的室温手性磁阻
IF 6.1 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-08-15 DOI: 10.1063/5.0221834
Min-Gu Kang, In-Kook Hwang, Hee-Chang Kyung, Jaimin Kang, Donghyeon Han, Soogil Lee, Junyoung Kwon, Kyung-Jin Lee, Jihyeon Yeom, Byong-Guk Park
Chirality-induced spin selectivity (CISS) allows for the generation of spin currents without the need for ferromagnets or external magnetic fields, enabling innovative spintronic device designs. One example is a chiral spin valve composed of ferromagnetic and chiral materials, in which the resistance depends on both the magnetization direction of the ferromagnet and the chirality of the chiral material. So far, chiral spin valves have predominately employed chiral organic molecules, which have limited device applications. Chiral perovskites, which combine the properties of inorganic perovskites with chiral organic molecules, provide an excellent platform for exploring CISS-based devices. However, previous chiral perovskite-based spin valves exhibited magnetoresistance (MR) only at low temperatures. Here, we report room temperature MR in a chiral spin valve consisting of chiral perovskites/AlOx/perpendicular ferromagnet structures. It is observed that the chiral MR increases with rising temperature, suggesting the crucial role of phonon-induced enhancement of spin–orbit coupling in CISS in our device. Furthermore, we enhanced the chiral MR by introducing chiral molecules with amplified chirality. This highlights the potential of chirality engineering to improve CISS and the associated chiral MR, thereby opening possibilities for chiral spin valves tailored for cutting-edge spintronic applications.
手性诱导自旋选择性(CISS)可在无需铁磁体或外部磁场的情况下产生自旋电流,从而实现创新的自旋电子器件设计。其中一个例子是由铁磁性和手性材料组成的手性自旋阀,其电阻取决于铁磁体的磁化方向和手性材料的手性。迄今为止,手性自旋阀主要采用手性有机分子,其设备应用有限。手性包晶石结合了无机包晶石和手性有机分子的特性,为探索基于 CISS 的器件提供了一个极佳的平台。然而,以前基于手性包晶的自旋阀仅在低温下表现出磁电阻(MR)。在这里,我们报告了由手性包晶/氧化铝/垂直铁磁体结构组成的手性自旋阀的室温磁阻。据观察,手性磁共振随着温度的升高而增加,这表明在我们的器件中,声子诱导的 CISS 自旋轨道耦合增强起到了关键作用。此外,我们还通过引入具有放大手性的手性分子增强了手性磁共振。这凸显了手性工程在改善 CISS 和相关手性 MR 方面的潜力,从而为尖端自旋电子应用量身定制手性自旋阀提供了可能性。
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引用次数: 0
Elastocaloric effect and cooling performance of NiTi sheets in a continuous rotating bending elastocaloric cooler 连续旋转弯曲弹性冷却器中镍钛板的弹性热效应和冷却性能
IF 6.1 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-08-15 DOI: 10.1063/5.0217563
Siyuan Cheng, Wanju Sun, Xueshi Li, Jiongjiong Zhang
Elastocaloric cooling technology has the prospect of becoming a commercialized green alternative to current vapor-compression technology, and the systematic characterization of the elastocaloric effect and microstructure has become increasingly significant for the optimization of elastocaloric coolers and heat pumps. In this work, a comprehensive elastocaloric effect characterization for a dog-bone shaped NiTi sheet with a thickness of 0.5 mm was performed for the application in a compact continuous rotating bending elastocaloric cooler. The elastocaloric effect was found to be nearly identical under Brayton-like and sinusoidal force-controlled cyclic tensile loadings. The maximum adiabatic temperature change values of 31 and 23 K were recorded in Brayton-like cyclic loadings under maximum applied stress of 600 and 400 MPa, respectively, with an applied strain rate of 0.1 s−1. During fatigue tests, large applied stress (>600 MPa) and high applied strain rates (>0.1 s−1) tended to result in premature failure of the NiTi sheet samples. In the continuous rotating bending elastocaloric cooler, the sheets generated a temperature span of 6 K between the copper heat sink and heat source. The results of this work provide a set of thermophysical property data for the elastocaloric solid refrigerant and insights for the optimization of structural and operational parameters in elastocaloric coolers and heat pumps.
弹性冷却技术有望成为当前蒸汽压缩技术的商业化绿色替代技术,而弹性效应和微观结构的系统表征对于优化弹性冷却器和热泵越来越重要。本研究对厚度为 0.5 毫米的狗骨形镍钛片进行了全面的弹性热效应表征,以应用于紧凑型连续旋转弯曲弹性热冷却器。研究发现,在布雷顿式和正弦力控制的循环拉伸负荷下,弹性热效应几乎相同。在最大外加应力为 600 兆帕和 400 兆帕,外加应变速率为 0.1 秒-1 的情况下,记录到的最大绝热温度变化值分别为 31 千帕和 23 千帕。在疲劳试验中,大的外加应力(>600 兆帕)和高的外加应变率(>0.1 s-1)往往会导致镍钛板样品过早失效。在连续旋转弯曲弹性冷却器中,板材在铜散热器和热源之间产生了 6 K 的温度跨度。这项工作的结果为弹性固体制冷剂提供了一组热物理性质数据,并为优化弹性冷却器和热泵的结构和运行参数提供了启示。
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引用次数: 0
Enhanced electrical performance in graphene field-effect transistors through post-annealing of high-k HfLaO gate dielectrics 通过对高 K HfLaO 栅极电介质进行后退火处理提高石墨烯场效应晶体管的电气性能
IF 6.1 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-08-14 DOI: 10.1063/5.0207559
Chunlin Liu, Xuesong Li, Ling-Xuan Qian, Jing Tian, Xiping Zhang
High-k gate dielectrics have attracted a great deal of attention in the investigation of transistors due to their unique properties such as superior gate controllability. However, their integration into graphene field-effect transistors (GFETs) remains problematic and the physical mechanisms governing the performance of these devices are still not fully understood. In this study, the effects of post-annealing on GFETs utilizing the high-k HfLaO ternary oxide as the gate dielectric were comprehensively investigated. The HfLaO film was deposited on top of graphene by magnetron sputtering, and the device performance with various post-annealing temperatures was conducted. It was found that post-annealing temperature can effectively increase the dielectric constant through balancing the oxygen-vacancy defects and moisture absorption. Both the surface morphology of HfLaO and performance of GFETs were investigated, and the fabricated GFETs exhibit notable electrical performance enhancements. Specifically, GFETs with a 200 °C post-annealed HfLaO gate dielectric demonstrate the optimal device performance, featuring a minimal Dirac point voltage (VDirac) of 1.1 V and a minimal hysteresis (ΔVDirac) of 0.5 V. The extracted hole and electron mobilities are 4012 and 1366 cm2/V · s, respectively, nearly one order of magnitude higher than that of GFETs with as-deposited HfLaO. This work outperforms other existing GFETs utilizing high-k gate dielectric and chemical vapor deposition grown graphene in terms of both carrier mobility and on–off ratio. It is also noted that the excessive post-annealing temperature can negatively impact the GFET performance through introducing oxygen vacancies, increasing the surface roughness, lowering the breakdown voltage, and inducing recrystallization.
高 k 栅极电介质因其独特的性能(如出色的栅极可控性)而在晶体管研究中备受关注。然而,将它们集成到石墨烯场效应晶体管(GFET)中仍存在问题,而且人们对这些器件性能的物理机制仍不完全了解。本研究全面考察了退火后对使用高k HfLaO三元氧化物作为栅电介质的石墨烯场效应晶体管的影响。通过磁控溅射将 HfLaO 薄膜沉积在石墨烯上,并在不同的后退火温度下对器件性能进行了测试。研究发现,后退火温度可以通过平衡氧空位缺陷和吸湿性来有效提高介电常数。对 HfLaO 的表面形貌和 GFET 的性能都进行了研究,制备出的 GFET 具有显著的电性能提升。具体来说,采用 200 °C 后退火 HfLaO 栅极电介质的 GFET 具有最佳的器件性能,其最小狄拉克点电压 (VDirac) 为 1.1 V,最小滞后 (ΔVDirac) 为 0.5 V。提取的空穴和电子迁移率分别为 4012 cm2/V - s 和 1366 cm2/V - s,比采用原沉积 HfLaO 的 GFET 高出近一个数量级。就载流子迁移率和通断比而言,这项研究成果优于其他使用高 K 栅极电介质和化学气相沉积生长石墨烯的现有 GFET。研究还指出,过高的退火后温度会引入氧空位、增加表面粗糙度、降低击穿电压并诱发再结晶,从而对 GFET 的性能产生负面影响。
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