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Optomechatronic Technologies (ISOT), 2010 International Symposium on : 25-27 Oct. 2010 : [Toronto, ON]. International Symposium on Optomechatronic Technologies (2010 : Toronto, Ont.)最新文献

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Autofocusing-based visual servoing: Application to MEMS micromanipulation 基于自动调焦的视觉伺服:在MEMS微操作中的应用
G. Duceux, B. Tamadazte, N. Piat, S. Dembélé, É. Marchand, G. Fortier
In MEMS microassembly areas, different methods of automatic focusing are presented in the literature. All these methods have a common point. Thus, the current autofocusing methods for microscopes need to perform a scanning on all the vertical axis of the microscope in order to find the peak corresponding to the focus (sharpen image). Those methods are time consuming. Therefore, this paper presents an original method of autofocusing based on a velocity control approach which is developed and validated on real experiments.
在MEMS微组装领域,文献中提出了不同的自动聚焦方法。所有这些方法都有一个共同点。因此,目前用于显微镜的自动聚焦方法需要对显微镜的所有垂直轴进行扫描,以找到与焦点对应的峰值(锐化图像)。这些方法都很耗时。因此,本文提出了一种新颖的基于速度控制的自动对焦方法,并在实际实验中进行了验证。
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引用次数: 4
Design and analysis of resonant drive circuit for electrostatic actuators 静电执行器谐振驱动电路的设计与分析
Sangtak Park, Yanhui Bai, J. Yeow
Most electrostatic actuators fabricated by MEMS technologies require high actuation voltage and suffer from the pull-in phenomenon in the presence of high parasitic capacitance, either driven by conventional voltage control or charge control. The resonant drive circuit presented in this paper uses much lo wer supply voltage to drive electrostatic actuators, which usually require a high actuation voltage from a high voltage am plifier, through passive amplification at its electrical resonance. Furthermore, it is shown that the resonant drive circuit is able to extend operation range of electrostatic actuators beyond the pull-in point even in the presence of high parasitic capacitance due to its inherent negative feedback. Analytical and numerical models of the resonant drive circuit are derived and built to demonstrate the advantages of the resonant drive circuit implemented with two logic gates arranged in the BTL configuration.
大多数采用MEMS技术制造的静电致动器需要高致动电压,并且在存在高寄生电容的情况下存在拉入现象,无论是由传统的电压控制还是电荷控制驱动。静电致动器通常需要高压放大器的高致动电压,本文提出的谐振驱动电路通过在其电谐振处的无源放大,使用低得多的电源电压来驱动静电致动器。此外,谐振驱动电路由于其固有的负反馈特性,即使在高寄生电容存在的情况下,也能将静电致动器的工作范围扩展到拉入点以外。推导并建立了谐振驱动电路的解析模型和数值模型,以证明采用双逻辑门在BTL结构中实现谐振驱动电路的优点。
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引用次数: 7
Design and primitive study of a cylindrical traveling wave ultrasonic motor using outer excitation 外激圆柱行波超声电机的设计与初步研究
Jun-kao Liu, S. Shi, Weishan Chen, Huijun Dong
A cylindrical traveling wave ultrasonic motor using outer excitation of two bending transducers is proposed in this paper. To avoid the drawbacks of conventional traveling wave ultrasonic motors, sandwich structure of PZT elements and d33 mode of PZT are used here. Working principle and design analysis by means of FEM method are detailed. A prototype motor has been fabricated and tested. Although the tested results of output torque was not ideal as compared with desired, the original configuration idea has great potential to obtain strong out put in our further study on it.
提出了一种采用双弯曲换能器外激励的圆柱形行波超声电机。为了避免传统行波超声电机的缺点,本文采用了PZT元件的夹层结构和PZT的d33模式。详细介绍了其工作原理,并用有限元方法进行了设计分析。一个原型电机已经制造和测试。虽然输出转矩的测试结果并不理想,但在我们进一步的研究中,原有的配置思路有很大的潜力获得强大的输出。
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引用次数: 2
Novel noncontact temperature fiber sensor for multi-spot field measurements 用于多点现场测量的新型非接触式光纤温度传感器
M. Jurca, C. Urs
The present paper shows the results of a new development in the field of industrial contactless temperature measurement typically in the range of 650 K up to 1200 K. Using fiber optics, the new sensor head has a small size matching the requirements for integration in demanding applications. The sensor delivers an irradiance dependent signal of the targeted (metallic) surface under test together with the acquired distance in the same measuring spot and the corresponding surface reflectivity. Thus a simple processing unit can calculate in realtime the emissivity and the influence of the measuring distance on the temperature measurement. The target application of this sensor is a multi-spot temperature profile acquisition for on-line monitoring of joining processes (welding, brazing, etc.) or any heat affected metal processing including the case of low-emissivity materials like Aluminum.
本文介绍了工业非接触式温度测量领域的一项新进展,测量范围通常为650 K至1200 K。新型传感器头采用光纤,尺寸小,符合苛刻应用的集成要求。传感器提供被测目标(金属)表面的辐照度相关信号,以及在同一测点获得的距离和相应的表面反射率。这样,一个简单的处理单元就可以实时计算出发射率和测量距离对温度测量的影响。该传感器的目标应用是多点温度剖面采集,用于在线监测连接过程(焊接,钎焊等)或任何受热影响的金属加工,包括铝等低发射率材料的情况。
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引用次数: 2
Open-loop adapive opics wih closed-loop conrol of deformable mirror 可变形镜开环自适应光学闭环控制
Amir Badkoubeh, G. Zhu, R. Beguenane
This paper presens a new conrol scheme for open-loop adapive opics. The considered deformable mirror is a MEMS (Micro-elecronic-mechanical Sysems) device wih coninuous face-shee In order o improve sysem performance, we inroduce a scheme based on closed-loop conrol of deformable mirror, which racks he reference signal provided by opical loop. The dynamics of he deformable mirror are modeled as a ime-dependen parial differenial equaion (PDE). To carry ou conrol design, we discreize his PDE model on space and apply he echnique of linear quadraic regulaor o his discreized model. In addiion o he advanages offered by closed-loop conrol, he proposed scheme works in a dynamic fashion, which is more computationally efficient compared to saic inversion of desired mirror shape. The simulaion resuls show he effeciveness of he proposed mehod.
提出了一种新的开环自适应控制方案。所考虑的可变形镜是一种具有连续面片的MEMS(微电子机械系统)器件。为了提高系统性能,我们提出了一种基于可变形镜闭环控制的方案,该方案利用光回路提供的参考信号进行控制。将可变形镜的动力学建模为随时间变化的偏微分方程(PDE)。为了进行控制设计,我们在空间上将PDE模型离散化,并对离散模型应用线性二次调节技术。除了闭环控制的优点外,他提出的方案以动态方式工作,与期望镜像形状的快速反演相比,计算效率更高。仿真结果表明了该方法的有效性。
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引用次数: 1
Laser-assisted active microfluidic mixer 激光辅助主动微流控混合器
P. Shiu, G. Knopf, M. Ostojic, S. Nikumb
Many analytical microsystems use molecular diffusion to mix small quantities of different liquids. However, this passive mixing process requires a relatively long microchannel which may impose design restrictions on the physical dimensions of the fluidic network. To shorten the length of the mixing channels, an active micromixer driven by a focused laser beam is described in this paper. The proposed solution improves the mixing rate by using low power laser radiation to heat the disparate fluids being transported through the channels. The operating principle is ba sed on the observation that the rate of molecular diffusion for non-reactive fluids increases with elevated temperatures. Preliminary experiments on a Y-channel micromixer were conducted using a 1mW, 670nm laser. The laser beam was focused on the microchannel using a 100mm focal length objective lens. The laser-assisted mixing of the test fluids showed a 36.4% increase in the average diffusion coefficient value with 1 to 10μL/min flow rates. The maximum percentage difference of diffusion distances had increased by approximately 7.85% over the non-laser-assisted conditions.
许多分析微系统使用分子扩散来混合少量不同的液体。然而,这种被动混合过程需要一个相对较长的微通道,这可能会对流体网络的物理尺寸施加设计限制。为了缩短混合通道的长度,本文介绍了一种由聚焦激光束驱动的有源微混合器。提出的解决方案通过低功率激光辐射加热通过通道输送的不同流体来提高混合速率。其工作原理是基于对非反应性流体的分子扩散速率随温度升高而增加的观察。利用1mW, 670nm激光对y通道微混频器进行了初步实验。利用100mm焦距物镜将激光束聚焦在微通道上。在1 ~ 10μL/min的流量范围内,激光辅助混合实验流体的平均扩散系数提高了36.4%。与非激光辅助条件相比,扩散距离的最大百分比差增加了约7.85%。
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引用次数: 0
Utilization of full spectrum space in single-sensor-based optical dynamic measurement 全光谱空间在单传感器光学动态测量中的应用
Y. Fu, M. Guo, P. Phua
In recent years, interferometry-based dynamic measurement has been widely used in industrial area for non-contact measurement of vibration or continuous deformation. In dynamic measurement, the traditional phase extraction method, phase shifting technique, is not easily accomplished with either hig h-speed camera or single-pixel photo detector. Hence spectrum analysis becomes a predominant method to extract tran sient phases. Due to the development of high-speed cameras and photo detectors, now it is possible to encode different info rmation at separated positions in spectrum. In this paper, we will present two applications on fully utilizing spectrum space in dynamic measurement. One is a dual-wavelength image-plane digital holography using high-speed camera, and another is a spatially encoded multi-beam laser Doppler vibrometry using a single detector. The former experiment encodes information of two wavelengths at different parts of the spectrum. Two phase maps can be retrieved from one hologram. These two phase maps can generate a new phase distribution with an equivalent wavelength, so that the capturing rate of the camera can be reduced dramatically. The latter application encodes vibration information of different points on separated frequency ranges. The experiment verifies it is possible to do a precise vibration measurement on a 2×5 matrix simultaneously using a single photo detector. These results show with fully utilization of spectrum space, the capability of optical dynamic measurement will be tremendously improved.
近年来,基于干涉法的动态测量已广泛应用于工业领域,用于振动或连续变形的非接触测量。在动态测量中,传统的相位提取方法,即移相技术,无论是高速相机还是单像素光电探测器都难以实现。因此,谱分析成为提取瞬态相的主要方法。由于高速摄像机和光电探测器的发展,现在可以在光谱的不同位置对不同的信息进行编码。本文将介绍在动态测量中充分利用频谱空间的两种应用。一种是使用高速相机的双波长图像平面数字全息,另一种是使用单个探测器的空间编码多光束激光多普勒振动测量。前一种实验在光谱的不同部分编码两个波长的信息。两个相位图可以从一个全息图中检索。这两种相位图可以产生具有等效波长的新相位分布,从而大大降低相机的捕获率。后一种应用对不同频率范围内不同点的振动信息进行编码。实验验证了使用单个光电探测器同时对2×5矩阵进行精确振动测量的可能性。结果表明,充分利用光谱空间,将大大提高光动态测量的能力。
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引用次数: 0
Control of self-organization microporous honeycomb film by the irradiation of nano second laser pulse: Deliberation of heat affected and shock wave by laser irradiation 纳秒激光辐照对自组织微孔蜂窝膜的控制:热影响与激光辐照冲击波的考虑
Yukimasa Matsumura, W. Inami, Y. Kawata
We present a controlling technique of microporous structure by laser irradiation during self-organization process. Polymer solution was dropped on the substrate at high humid condition and the honeycomb structure of regularly aligned pores on the film was fabricated by attaching of water droplets on the solution surface. We demonstrated that it was possible to prevent forming of pores at the region of laser irradiation and flat surface was fabricated. We also demonstrated that a combination structure with two sizes pores by laser irradiation. Our method is a unique microfabrication processing technique that combines the advantages of bottom up and top down techniques. This method is expected that application for photonic crystals, biological cell culturing, surface science and electronics fields, etc.
提出了一种在自组织过程中利用激光辐照控制微孔结构的方法。在高湿条件下,将聚合物溶液滴在基片上,通过在溶液表面附着水滴,在薄膜上形成有规则排列孔的蜂窝结构。我们证明了在激光照射区域防止气孔的形成是可能的,并制造了平坦的表面。我们还通过激光照射证明了具有两种孔径的组合结构。我们的方法是一种独特的微加工技术,结合了自底向上和自顶向下技术的优点。该方法有望在光子晶体、生物细胞培养、表面科学和电子学等领域得到应用。
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引用次数: 0
Some recent advance on high-speed, high-resolution 3-D shape measurement using projector defocusing 使用投影仪散焦的高速、高分辨率三维形状测量的一些最新进展
Song Zhang, Yuanzheng Gong, Yajun Wang, J. Laughner, I. Efimov
High-speed, high-resolution 3-D shape measurement becomes increasingly important, with broad applications including medicine, homeland security, and entertainment. In recent years, we have made some progress, and developed an unprecedented 60 Hz rate 3-D shape measurement system with a digital fringe projection and phase-shifting method. However, a hardware bottleneck was met to further improve its speed. Since 2009, we have been studying a new method that could potentially eliminate this speed bottleneck. This technique is essentially to generate sinusoidal fringe patterns by properly defocusing binary ones. It coincides with the operation mechanism of the digital-light-processing (DLP) technology, and thus permits some speed breakthroughs. This paper summarizes some of our recent studies with this technology. In particular, we will include three major pieces: (1) double the speed of our real-time 3-D shape measurement system without significantly increase the hardware cost; (2) reach tens-of-kHz rate 3-D shape measurement by using a relatively inexpensive and off-the-shelf DLP projector; and (3) achieve kHz rate phase shifting for superior high-speed, high-quality 3-D shape measurement with the DLP Discovery platform. We will explain the principles of the technology, show some experimental results, and discuss the advantages and shortcomings of this technology.
高速、高分辨率3-D形状测量变得越来越重要,具有广泛的应用,包括医学、国土安全和娱乐。近年来,我们取得了一些进展,开发了一种前所未有的60 Hz频率的数字条纹投影和相移法三维形状测量系统。然而,为了进一步提高其速度,遇到了硬件瓶颈。自2009年以来,我们一直在研究一种可能消除这一速度瓶颈的新方法。这种技术本质上是通过适当地散焦二进制条纹来产生正弦条纹图案。它与数字光处理(DLP)技术的运行机制一致,从而允许一些速度突破。本文综述了近年来我国在该技术方面的一些研究成果。特别是,我们将包括三个主要部分:(1)在不显着增加硬件成本的情况下,将实时三维形状测量系统的速度提高一倍;(2)使用相对便宜且现成的DLP投影仪实现数十khz速率的三维形状测量;(3)利用DLP Discovery平台实现kHz速率相移,实现超高速、高质量的三维形状测量。我们将解释该技术的原理,展示一些实验结果,并讨论该技术的优点和缺点。
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引用次数: 3
Unification of satellite and medical scan methods 卫星和医疗扫描方法的统一
T. Haylock, A. Cenko, Jeff T. Meade, Farnoud Kazemzadeh, A. Hajian
Remote sensing from an aerial platform has many similarities to medical imaging. Line, whiskbroom, and pushbroom scanning techniques are compared with scan patterns from medical imaging. Satellite imaging uses a scan mirror or sensor array to achieve across track imagery and uses its procession in orbit to achieve along track movement. Medical imaging technologies, like confocal microscopy and optical coherence tomography, use similar scanning mechanisms for across track imagery, but are not in orbit and must introduce the along track movement with a second galvanometer scan mirror or linear stage. Square, triangle, sinusoidal, and sawtooth waveform inputs to the galvanometer provide the actuation signal to control sweeping patterns across a sample. A tissue handling system for medical applications is introduced for discussion and simulation of scan mechanism implementation. The scan system uses a galvanometer and linear stage combination to provide control over light delivery and sample positioning. The synchronization r equirements and efficacy of various scan patterns are examined.
航空平台遥感与医学成像有许多相似之处。将线扫描、扫帚扫描和推扫帚扫描技术与医学成像的扫描模式进行比较。卫星成像利用扫描镜或传感器阵列实现跨轨道成像,利用其在轨道上的处理实现沿轨道运动。医学成像技术,如共聚焦显微镜和光学相干断层扫描,使用类似的扫描机制进行跨轨道成像,但不是在轨道上,必须通过第二个振镜扫描镜或线性级来引入沿轨道运动。方形,三角形,正弦和锯齿形波形输入到振镜提供驱动信号,以控制整个样品的扫描模式。介绍了一种医疗用组织处理系统,对扫描机构的实现进行了讨论和仿真。扫描系统使用振镜和线性级组合来控制光传递和样品定位。考察了各种扫描模式的同步要求和效率。
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引用次数: 1
期刊
Optomechatronic Technologies (ISOT), 2010 International Symposium on : 25-27 Oct. 2010 : [Toronto, ON]. International Symposium on Optomechatronic Technologies (2010 : Toronto, Ont.)
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