Pub Date : 2012-08-01DOI: 10.1109/3M-NANO.2012.6472996
T. Roinila, Lei Lihui, M. Vilkko, G. Dandan, Xiong Wenming, P. Kallio
The ability to measure the force order of micronewtons with high accuracy is highly important in various applications of micromanipulation. Past studies have indicated that polyvinylidene fluoride (PVDF) piezoelectric sensors are the most promising tools with which to measure such forces. This paper presents fast and nondestructive frequency-domain methods with which to electrically characterize and analyze the properties of PVDF piezoelectric sensors. The maximum-length binary sequence (MLBS) is used as an excitation and the system-characterizing responses are measured through cross-correlation techniques. The results can be used to verify the feasibility of the applied PVDF in terms of resonance frequency, bandwidth, and other characterizing properties, which provides tools for more accurate force measurements. Experimental results are shown from a commercial PVDF polymer film.
{"title":"Pseudo-random sequences in analysis of polyvinylidene fluoride piezoelectric sensors","authors":"T. Roinila, Lei Lihui, M. Vilkko, G. Dandan, Xiong Wenming, P. Kallio","doi":"10.1109/3M-NANO.2012.6472996","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472996","url":null,"abstract":"The ability to measure the force order of micronewtons with high accuracy is highly important in various applications of micromanipulation. Past studies have indicated that polyvinylidene fluoride (PVDF) piezoelectric sensors are the most promising tools with which to measure such forces. This paper presents fast and nondestructive frequency-domain methods with which to electrically characterize and analyze the properties of PVDF piezoelectric sensors. The maximum-length binary sequence (MLBS) is used as an excitation and the system-characterizing responses are measured through cross-correlation techniques. The results can be used to verify the feasibility of the applied PVDF in terms of resonance frequency, bandwidth, and other characterizing properties, which provides tools for more accurate force measurements. Experimental results are shown from a commercial PVDF polymer film.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128267017","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-08-01DOI: 10.1109/3M-NANO.2012.6472962
S. Shen, Fang Zhou, D. Pu, G. Wei, Yun Zhou
Microlens arrays film fabricated by UV roll-to-roll nanoimprinting lithography is introduced on glass substrate to improve the out-coupling efficiency of organic light-emitting devices. The microlenses suppress wave guiding loss in the substrate and a theoretical model, based on Monto-Carlo model, is developed to simulate the enhancement effects. The numerical results show that ellipsoidal-like microlens array can increase the efficiency by a factor of more than 35% and the luminance density distribution along the orthogonal directions can be compressed by 10 degree. Such a microlens array mold is fabricated by a combination of DMD-based laser direct writing lithography and thermal reflow method, followed by electroforming for transferring the surface structure to a nickel plate. The obtained mold is wrapped on a roller for the mass production of microlens array film by UV roll-to-roll nanoimprinting process. OLED attached with such microlens array film with a maximum increase of 35% in efficiency is achieved and directional out-coupling phenomenon can be observed experimentally. Such a directional out-coupling microlens array film can be used to OLED to enhance the luminous intensity efficiency and save power consumption for future lighting and display application.
{"title":"Microlens array film fabricated by UV roll-to-roll nanoimprinting for enhancing out-coupling efficiency of organic light-emitting devices","authors":"S. Shen, Fang Zhou, D. Pu, G. Wei, Yun Zhou","doi":"10.1109/3M-NANO.2012.6472962","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472962","url":null,"abstract":"Microlens arrays film fabricated by UV roll-to-roll nanoimprinting lithography is introduced on glass substrate to improve the out-coupling efficiency of organic light-emitting devices. The microlenses suppress wave guiding loss in the substrate and a theoretical model, based on Monto-Carlo model, is developed to simulate the enhancement effects. The numerical results show that ellipsoidal-like microlens array can increase the efficiency by a factor of more than 35% and the luminance density distribution along the orthogonal directions can be compressed by 10 degree. Such a microlens array mold is fabricated by a combination of DMD-based laser direct writing lithography and thermal reflow method, followed by electroforming for transferring the surface structure to a nickel plate. The obtained mold is wrapped on a roller for the mass production of microlens array film by UV roll-to-roll nanoimprinting process. OLED attached with such microlens array film with a maximum increase of 35% in efficiency is achieved and directional out-coupling phenomenon can be observed experimentally. Such a directional out-coupling microlens array film can be used to OLED to enhance the luminous intensity efficiency and save power consumption for future lighting and display application.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125683528","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-08-01DOI: 10.1109/3M-NANO.2012.6472942
A. Jordan, S. Buttgenbach
The purpose of this paper is to present a new material concept to develop highly sensitive three-dimensional tactile force sensors. Conventional three-dimensional force sensors are based on silicon with integrated diffused silicon piezoresistors. Micromechanical force sensors using a soft material instead, e. g. SU-8 resist, would be more sensitive for static deflection measurements. As a characteristic factor for the sensitivity, the ratio of the gauge factor k to the Young's modulus E is presented for different sensor types. Beside silicon, especially gold, carbon black particles, and diamond-like carbon is taken into consideration as piezoresistive material. In addition four different SU-8 sensor prototypes are mechanically characterized with regard to their bending stiffness, probing forces at different deflections, and breaking points.
{"title":"A new material concept for three-dimensional tactile piezoresistive force sensors","authors":"A. Jordan, S. Buttgenbach","doi":"10.1109/3M-NANO.2012.6472942","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472942","url":null,"abstract":"The purpose of this paper is to present a new material concept to develop highly sensitive three-dimensional tactile force sensors. Conventional three-dimensional force sensors are based on silicon with integrated diffused silicon piezoresistors. Micromechanical force sensors using a soft material instead, e. g. SU-8 resist, would be more sensitive for static deflection measurements. As a characteristic factor for the sensitivity, the ratio of the gauge factor k to the Young's modulus E is presented for different sensor types. Beside silicon, especially gold, carbon black particles, and diamond-like carbon is taken into consideration as piezoresistive material. In addition four different SU-8 sensor prototypes are mechanically characterized with regard to their bending stiffness, probing forces at different deflections, and breaking points.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132537886","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-08-01DOI: 10.1504/IJNM.2013.057586
Y. Son, J. Yeo, C. Ha, Sukjoon Hong, S. Ko, Dong-Yol Yang
The femtosecond laser sintering of metal nanoparticles was studied in order to fabricate submicron-sized metal patterns on flexible polymer substrates for various applications in the electronic and photonic industries. In this process, a mode-locked Ti:sapphire laser beam was tightly focused on silver nanoparticles. To achieve a homogeneous dispersion of the silver nanoparticles, the nanoparticles were prepared using a two-phase reduction method wherein the silver nanoparticles were encapsulated by functional surfactants. The key advantage of the femtosecond laser sintering process is that it reduces the heat-affected zone during sintering, as the femtosecond (10-15s) laser pulse is shorter than the heat diffusion time (picosecond: 10-12s). Therefore, sintering of metal nanoparticles is limited to the laser focal spot and the thermal diffusion effect is suppressed, enabling the realization of submicron-sized metal patterns on flexible polymer substrates. Through this process, metal conductors with submicron-sized features and high conductivity were successfully fabricated. As demonstrated by the obtained results, the femtosecond laser sintering of metal nanoparticles is a novel process that offers direct, low-temperature, ultra-high-resolution results, and which will have numerous further applications in electronics and photonics.
{"title":"Fabrication of submicron-sized metal patterns on a flexible polymer substrate by femtosecond laser sintering of metal nanoparticles","authors":"Y. Son, J. Yeo, C. Ha, Sukjoon Hong, S. Ko, Dong-Yol Yang","doi":"10.1504/IJNM.2013.057586","DOIUrl":"https://doi.org/10.1504/IJNM.2013.057586","url":null,"abstract":"The femtosecond laser sintering of metal nanoparticles was studied in order to fabricate submicron-sized metal patterns on flexible polymer substrates for various applications in the electronic and photonic industries. In this process, a mode-locked Ti:sapphire laser beam was tightly focused on silver nanoparticles. To achieve a homogeneous dispersion of the silver nanoparticles, the nanoparticles were prepared using a two-phase reduction method wherein the silver nanoparticles were encapsulated by functional surfactants. The key advantage of the femtosecond laser sintering process is that it reduces the heat-affected zone during sintering, as the femtosecond (10-15s) laser pulse is shorter than the heat diffusion time (picosecond: 10-12s). Therefore, sintering of metal nanoparticles is limited to the laser focal spot and the thermal diffusion effect is suppressed, enabling the realization of submicron-sized metal patterns on flexible polymer substrates. Through this process, metal conductors with submicron-sized features and high conductivity were successfully fabricated. As demonstrated by the obtained results, the femtosecond laser sintering of metal nanoparticles is a novel process that offers direct, low-temperature, ultra-high-resolution results, and which will have numerous further applications in electronics and photonics.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132596298","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-08-01DOI: 10.1109/3M-NANO.2012.6472927
Wang Yiliao, Sun Mingzhu, Zhao Xin, Zhao Baoquan
Embryo injection is a significant technique in molecule biology and drug discovery for zebrafish, one of the most popular model organisms. Traditional zebrafish embyo injection is manually conducted under microscope, requiring challenging coordination of hand, eye and foot and their respective precise control as well as ceaseless labour. An autonomous operating process for zebrafish embryo injection is proposed in this paper. Based on a micromanipulation robot system, the operating process integrates computer vision and micromanipulation robot control to realize batch embryo injection automatically. Successful rate of 93% and survival ratio of 89.5% at operating speed of 6-7 embryos are obtained, verifying the feasibility and effectiveness of the process. Finally, the process is applied to investigate the toxicity of a dye and receives success.
{"title":"Autonomous operating process for zebrafish embryo injection","authors":"Wang Yiliao, Sun Mingzhu, Zhao Xin, Zhao Baoquan","doi":"10.1109/3M-NANO.2012.6472927","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472927","url":null,"abstract":"Embryo injection is a significant technique in molecule biology and drug discovery for zebrafish, one of the most popular model organisms. Traditional zebrafish embyo injection is manually conducted under microscope, requiring challenging coordination of hand, eye and foot and their respective precise control as well as ceaseless labour. An autonomous operating process for zebrafish embryo injection is proposed in this paper. Based on a micromanipulation robot system, the operating process integrates computer vision and micromanipulation robot control to realize batch embryo injection automatically. Successful rate of 93% and survival ratio of 89.5% at operating speed of 6-7 embryos are obtained, verifying the feasibility and effectiveness of the process. Finally, the process is applied to investigate the toxicity of a dye and receives success.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130769201","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-08-01DOI: 10.1109/3M-NANO.2012.6472977
A. Shulev, I. Roussev, K. Kostadinov
This paper presents the basics idea and principles of a force sensor for cell injection and characterization of mechanical properties of cells. It utilizes fluidics, piezo resistive MEMS, and piezo actuated mechanics to provide sub-micronewton sensitivity in vertical injection mode. The prototyping, calibration and investigation of the proposed sensor are also presented in brief. Main advantages and drawbacks are also discussed.
{"title":"Force sensor for cell injection and characterization","authors":"A. Shulev, I. Roussev, K. Kostadinov","doi":"10.1109/3M-NANO.2012.6472977","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472977","url":null,"abstract":"This paper presents the basics idea and principles of a force sensor for cell injection and characterization of mechanical properties of cells. It utilizes fluidics, piezo resistive MEMS, and piezo actuated mechanics to provide sub-micronewton sensitivity in vertical injection mode. The prototyping, calibration and investigation of the proposed sensor are also presented in brief. Main advantages and drawbacks are also discussed.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133854909","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-08-01DOI: 10.1109/3M-NANO.2012.6472928
Yun Zhou, Y. Ye, S. Shen, D. Pu, Linsen Chen
A reflective-type color filter in the visible range is theoretically investigated. It consists of a transparent flexible substrate, a layer of thick metal, and two-dimensional dielectric-metal grating. The filter proposed here has the advangtages of insensitivity to incident-angle and polarization-independence. It is found that the variations of its geometric parameters can tune the selective wavelength to generate different colors. The angular dependence of the reflection spectrum for TM and TE polarized light is simulated and analyzed. The position of the reflection valley and the full-width at half-maximum (FWHM) remain almost unchanged when the incident angle is increased to 30 degree. The useful future of the structure is the low dependence of the reflection spectrum on the incident-angle and the polarizations which can be utilized for reflective display.
{"title":"Wide-angle reflective-type color filter in the visible range","authors":"Yun Zhou, Y. Ye, S. Shen, D. Pu, Linsen Chen","doi":"10.1109/3M-NANO.2012.6472928","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472928","url":null,"abstract":"A reflective-type color filter in the visible range is theoretically investigated. It consists of a transparent flexible substrate, a layer of thick metal, and two-dimensional dielectric-metal grating. The filter proposed here has the advangtages of insensitivity to incident-angle and polarization-independence. It is found that the variations of its geometric parameters can tune the selective wavelength to generate different colors. The angular dependence of the reflection spectrum for TM and TE polarized light is simulated and analyzed. The position of the reflection valley and the full-width at half-maximum (FWHM) remain almost unchanged when the incident angle is increased to 30 degree. The useful future of the structure is the low dependence of the reflection spectrum on the incident-angle and the polarizations which can be utilized for reflective display.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"149 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133516390","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-08-01DOI: 10.1109/3M-NANO.2012.6473003
X. Liang, Hongmei Xu, Yang Liu
A method is presented to monitor and analyze tumor cells' biological process by image processing techniques based on an optical microscope in this paper. Meanwhile, the hybrid operation combination of the micro and nano manipulation plays a crucial role in studying living cells' biological process and the interactions of cells and drugs. In this paper, we propose an improved image segmentation method which can be used for the recognition of living abnormal cells. We segment cell images using a threshold segmentation algorithm, combining an improved boundary breakpoint connection algorithm with an improved hole filling algorithm. The method was tested using images from an inverted light microscope. Experimental results demonstrate that the elapsed time of the whole recognition process is about 10 seconds, and the recognition rate is high.
{"title":"Recognition of living abnormal cells based on an optical microscope","authors":"X. Liang, Hongmei Xu, Yang Liu","doi":"10.1109/3M-NANO.2012.6473003","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6473003","url":null,"abstract":"A method is presented to monitor and analyze tumor cells' biological process by image processing techniques based on an optical microscope in this paper. Meanwhile, the hybrid operation combination of the micro and nano manipulation plays a crucial role in studying living cells' biological process and the interactions of cells and drugs. In this paper, we propose an improved image segmentation method which can be used for the recognition of living abnormal cells. We segment cell images using a threshold segmentation algorithm, combining an improved boundary breakpoint connection algorithm with an improved hole filling algorithm. The method was tested using images from an inverted light microscope. Experimental results demonstrate that the elapsed time of the whole recognition process is about 10 seconds, and the recognition rate is high.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114669881","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-08-01DOI: 10.1109/3M-NANO.2012.6473009
Tian-mu Zhang, Changli Li, Lihui Zhao, Yu Ren, G. Mo-ran, Xi-he Zhang, H. Cai
In this paper, the progress in cancer diagnosis and treatment were reviewed which is based on gold nanorods (Au-NRs). Synthesis and properties of Au-NRs were described, more specifically on typical methods of surface modification, surface active agent selection, as well as biological image and cancer treatment which are based on Au-NRs. Also current difficulty and future development were discussed.
{"title":"Progress in cancer diagnosis and treatment based on gold nanorods","authors":"Tian-mu Zhang, Changli Li, Lihui Zhao, Yu Ren, G. Mo-ran, Xi-he Zhang, H. Cai","doi":"10.1109/3M-NANO.2012.6473009","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6473009","url":null,"abstract":"In this paper, the progress in cancer diagnosis and treatment were reviewed which is based on gold nanorods (Au-NRs). Synthesis and properties of Au-NRs were described, more specifically on typical methods of surface modification, surface active agent selection, as well as biological image and cancer treatment which are based on Au-NRs. Also current difficulty and future development were discussed.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122610542","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-08-01DOI: 10.1109/3M-NANO.2012.6472979
M. Zadražil, J. Jiruše, B. Lencová, J. Dluhoš, T. Hrncír, M. Rudolf, L. Sedláček, T. Šamořil
The need for a combination of a number of observation and analytical methods in a single instrument minimizes the time consuming moving of the studied sample among several devices for different applications and avoids the navigation to the studied object with features in nanometer dimensions. The high-resolution Schottky FE SEM and Ga FIB that allow imaging in different signals were combined with SPM, which adds complementary surface images in-situ. The system can be equipped with a number of detectors for electrons, secondary ions, cathodoluminescence as well as analytical detectors for X-rays and time-of-flight spectrometer of secondary ions. Electron and ion lithography, electron and ion beam induced deposition, and FIB sputtering and slicing for 3D tomography can be performed. Several application examples illustrate the use of the tool.
需要在一台仪器中结合多种观察和分析方法，最大限度地减少了在不同应用的几个设备之间移动研究样品的时间，并避免了导航到具有纳米尺寸特征的研究对象。可以在不同信号下成像的高分辨率Schottky FE SEM和Ga FIB与SPM相结合，增加了原位互补表面图像。该系统可配备多个电子、二次离子、阴极发光探测器以及x射线分析探测器和二次离子飞行时间光谱仪。可以进行电子和离子光刻，电子和离子束诱导沉积，FIB溅射和三维断层扫描切片。几个应用程序示例说明了该工具的使用。
{"title":"The step towards an ultimate multifunctional tool for nanotechnology","authors":"M. Zadražil, J. Jiruše, B. Lencová, J. Dluhoš, T. Hrncír, M. Rudolf, L. Sedláček, T. Šamořil","doi":"10.1109/3M-NANO.2012.6472979","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472979","url":null,"abstract":"The need for a combination of a number of observation and analytical methods in a single instrument minimizes the time consuming moving of the studied sample among several devices for different applications and avoids the navigation to the studied object with features in nanometer dimensions. The high-resolution Schottky FE SEM and Ga FIB that allow imaging in different signals were combined with SPM, which adds complementary surface images in-situ. The system can be equipped with a number of detectors for electrons, secondary ions, cathodoluminescence as well as analytical detectors for X-rays and time-of-flight spectrometer of secondary ions. Electron and ion lithography, electron and ion beam induced deposition, and FIB sputtering and slicing for 3D tomography can be performed. Several application examples illustrate the use of the tool.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123782083","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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