M. Karamehmedović, Kenneth Scheel, F. Pedersen, P. Hansen
The lateral and vertical resolution in conventional optical microscopy is restricted by fundamental diffraction limits. One direction towards super-resolution optical microscopy is the use of photonic nanojets (PNJs) for sample illumination. Here, the aim is to exploit the high spatial localization of PNJs to allow measurements of sub-classical particles and features in spite of their small size compared to the operating wavelength. The applications of super-resolution methods include fluorescence and Raman microscopy, scatterometric measurements, and optical imaging. As a step towards PNJ scanning microscopy, we here apply our recently proposed method for fast and precise steering of PNJs over a large dynamical range in the near field. In a proof-of-concept computation, we use the steerable optical probe to extract information on structures beyond the classical lateral and vertical resolution limits.
{"title":"Imaging with a steerable photonic nanojet probe","authors":"M. Karamehmedović, Kenneth Scheel, F. Pedersen, P. Hansen","doi":"10.1117/12.2633442","DOIUrl":"https://doi.org/10.1117/12.2633442","url":null,"abstract":"The lateral and vertical resolution in conventional optical microscopy is restricted by fundamental diffraction limits. One direction towards super-resolution optical microscopy is the use of photonic nanojets (PNJs) for sample illumination. Here, the aim is to exploit the high spatial localization of PNJs to allow measurements of sub-classical particles and features in spite of their small size compared to the operating wavelength. The applications of super-resolution methods include fluorescence and Raman microscopy, scatterometric measurements, and optical imaging. As a step towards PNJ scanning microscopy, we here apply our recently proposed method for fast and precise steering of PNJs over a large dynamical range in the near field. In a proof-of-concept computation, we use the steerable optical probe to extract information on structures beyond the classical lateral and vertical resolution limits.","PeriodicalId":13820,"journal":{"name":"International Conference on Nanoscience, Engineering and Technology (ICONSET 2011)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82978258","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A modification of the traditional layer by layer process where the substrate is irradiated with laser light during the polycation and/or polyanion dipping cycles is described. By adjusting the laser irradiation time during dipping, irradiation power, number of bilayers, and the location and speed of laser irradiation, a variety of structures with controlled thicknesses can be fabricated. Laser patterned multilayer PAH/PTEBS polymer thin films were fabricated and characterized with absorbance mapping to demonstrate several patterning approaches. Results for 1) two laser patterned tracks, 2) single laser patterned track with varied average laser power across the sample from a continuously variable neutral density filter, and 3) laser patterning using a beam sent through multiple circular apertures are described. Based on the variable neutral density filter laser pattern, for 20 bilayer PAH/PTEBS films, an absorbance difference between off and on pattern of 0.1 requires an average laser power of less than 15 mW at 405 nm. The patterns produced are on the scale of several millimeters, though they could be made much smaller by focusing the laser used for patterning.
{"title":"Layer by layer thin film fabrication with in-process laser patterning","authors":"K. Leake, Alexandria Carter, H. Yochum","doi":"10.1117/12.2632090","DOIUrl":"https://doi.org/10.1117/12.2632090","url":null,"abstract":"A modification of the traditional layer by layer process where the substrate is irradiated with laser light during the polycation and/or polyanion dipping cycles is described. By adjusting the laser irradiation time during dipping, irradiation power, number of bilayers, and the location and speed of laser irradiation, a variety of structures with controlled thicknesses can be fabricated. Laser patterned multilayer PAH/PTEBS polymer thin films were fabricated and characterized with absorbance mapping to demonstrate several patterning approaches. Results for 1) two laser patterned tracks, 2) single laser patterned track with varied average laser power across the sample from a continuously variable neutral density filter, and 3) laser patterning using a beam sent through multiple circular apertures are described. Based on the variable neutral density filter laser pattern, for 20 bilayer PAH/PTEBS films, an absorbance difference between off and on pattern of 0.1 requires an average laser power of less than 15 mW at 405 nm. The patterns produced are on the scale of several millimeters, though they could be made much smaller by focusing the laser used for patterning.","PeriodicalId":13820,"journal":{"name":"International Conference on Nanoscience, Engineering and Technology (ICONSET 2011)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79942711","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Ipsita Chakraborty, Daiki Matsubayashi, Tomoki Omachi, Yasushi Hasegawa, H. Kano
In this proceeding, we search an optimized substrate for live cell imaging in culture medium with surface plasmon microscopy with high sensitivity. Coverslips coated with nano-metric bimetallic gold and silver best serves the purpose.
{"title":"Optimization of substrate to culture and image live cells for surface plasmon microscopy","authors":"Ipsita Chakraborty, Daiki Matsubayashi, Tomoki Omachi, Yasushi Hasegawa, H. Kano","doi":"10.1117/12.2637472","DOIUrl":"https://doi.org/10.1117/12.2637472","url":null,"abstract":"In this proceeding, we search an optimized substrate for live cell imaging in culture medium with surface plasmon microscopy with high sensitivity. Coverslips coated with nano-metric bimetallic gold and silver best serves the purpose.","PeriodicalId":13820,"journal":{"name":"International Conference on Nanoscience, Engineering and Technology (ICONSET 2011)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89344869","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Artificial microswimmers are active particles designed to mimic the behavior of living microorganisms. The adaptive behavior of the latter is based on the experience they gain through interactions with the environment. They are also subjected to Brownian motion at these length scales which randomizes their position and propulsion direction making it a key feature in the adaptation process. However, artificial systems are limited in their ability to adapt to such noise and environmental stimuli. In this work, we combine artificial microswimmers with a reinforcement learning algorithm to explore their adaptive behavior in a noisy environment. These self-thermophoretic active particles are propelled and steered by generating thermal gradients on their surface with a tightly focused laser beam. They are also imaged under a microscope in real-time to monitor their dynamics. With such a versatile platform capable of real-time control and monitoring, we demonstrated the solution to a standard navigation problem under the inevitable influence of Brownian motion by introducing deep reinforcement learning, specifically deep-Q-learning. We also identified different noises in the system and how they affected the learning speed and navigation strategies picked up by the microswimmer.
{"title":"Deep reinforcement learning with artificial microswimmers","authors":"Ravi Pradip, F. Cichos","doi":"10.1117/12.2633774","DOIUrl":"https://doi.org/10.1117/12.2633774","url":null,"abstract":"Artificial microswimmers are active particles designed to mimic the behavior of living microorganisms. The adaptive behavior of the latter is based on the experience they gain through interactions with the environment. They are also subjected to Brownian motion at these length scales which randomizes their position and propulsion direction making it a key feature in the adaptation process. However, artificial systems are limited in their ability to adapt to such noise and environmental stimuli. In this work, we combine artificial microswimmers with a reinforcement learning algorithm to explore their adaptive behavior in a noisy environment. These self-thermophoretic active particles are propelled and steered by generating thermal gradients on their surface with a tightly focused laser beam. They are also imaged under a microscope in real-time to monitor their dynamics. With such a versatile platform capable of real-time control and monitoring, we demonstrated the solution to a standard navigation problem under the inevitable influence of Brownian motion by introducing deep reinforcement learning, specifically deep-Q-learning. We also identified different noises in the system and how they affected the learning speed and navigation strategies picked up by the microswimmer.","PeriodicalId":13820,"journal":{"name":"International Conference on Nanoscience, Engineering and Technology (ICONSET 2011)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81647114","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Light, detection and ranging (LiDAR), has been emerging as a powerful tool for applications with accurate and reliable perception requirements, e.g., autonomous driving which needs a combination of long-range and high spatial resolution together with a real-time performance. Processing the raw LiDAR data, which is a large-dimensional unstructured 3D point cloud, is computationally costly due to the nature of the algorithms used for processing the point clouds. In particular, the neural networks employed for LiDAR data processing comprise several layers, for each of which multiplications of matrices with large sizes need to be performed. In this case, graphics processing units (GPUs) cannot be used as real-time standalone devices for hardware acceleration because they have high execution time due to their dependency on a central processing unit (CPU) for data offloading and scheduling the execution of the algorithms used to process point clouds. To address the aforementioned challenges, we propose an efficient co-design of an analog neural network (ANN) and a hybrid CMOS-Photonics platform for LiDAR systems. The proposed architecture exploits the high bandwidth and low latency of optical computation to significantly improve the computational efficiency. In particular, in our proposed architecture, a CMOS control chip integrated with a photonic broadcast-and-weight architecture is interfaced with LiDAR to perform real-time data processing and high-dimensional matrix multiplications. Moreover, by processing the raw LiDAR data in the analog domain, the proposed hybrid electro-optic computing platform minimizes the number of data converters in LiDAR systems.
{"title":"Integrated photonic-electronic platform for real-time analog data processing in LiDARs","authors":"Mahsa Salmani, Sreenil Saha, A. Eshaghi","doi":"10.1117/12.2633086","DOIUrl":"https://doi.org/10.1117/12.2633086","url":null,"abstract":"Light, detection and ranging (LiDAR), has been emerging as a powerful tool for applications with accurate and reliable perception requirements, e.g., autonomous driving which needs a combination of long-range and high spatial resolution together with a real-time performance. Processing the raw LiDAR data, which is a large-dimensional unstructured 3D point cloud, is computationally costly due to the nature of the algorithms used for processing the point clouds. In particular, the neural networks employed for LiDAR data processing comprise several layers, for each of which multiplications of matrices with large sizes need to be performed. In this case, graphics processing units (GPUs) cannot be used as real-time standalone devices for hardware acceleration because they have high execution time due to their dependency on a central processing unit (CPU) for data offloading and scheduling the execution of the algorithms used to process point clouds. To address the aforementioned challenges, we propose an efficient co-design of an analog neural network (ANN) and a hybrid CMOS-Photonics platform for LiDAR systems. The proposed architecture exploits the high bandwidth and low latency of optical computation to significantly improve the computational efficiency. In particular, in our proposed architecture, a CMOS control chip integrated with a photonic broadcast-and-weight architecture is interfaced with LiDAR to perform real-time data processing and high-dimensional matrix multiplications. Moreover, by processing the raw LiDAR data in the analog domain, the proposed hybrid electro-optic computing platform minimizes the number of data converters in LiDAR systems.","PeriodicalId":13820,"journal":{"name":"International Conference on Nanoscience, Engineering and Technology (ICONSET 2011)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76572122","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Amita Rawat, Ahasan Ahamed, Lisa N. Mcphillips, Busra Ergul-Yilmaz, Cesar Bartolo-Perez, Shih-Yuan Wang, M. Islam
Silicon avalanche photodiodes (Si-APD) are widely explored due to their high sensitivity, rapid response time, high quantum efficiency, intrinsic multiplication gain, and low signal-to-noise ratio. We present an experimental demonstration of a wavelength selective APD stack epitaxially grown in two different doping orders:–1) N-on-P and 2) P-on-N.We present a performance comparison between N-on-P and P-on-N based on the quantum external efficiency (EQE), Ion/Ioff ratio, and the reverse biased dark state leakage current. By reversing the doping from P-on-N to N-on-P, we show a 40% increase in the EQE. By introducing the photon-trapping hole array we show a 60% improvement in the EQE. We have utilized a low temperature (450oC) forming gas (5% H2 and 95% N2) annealing process to passivate the surface states and show a dark state leakage current improvement from sub- 10nA to sub-1nA current range. The proposed devices are complementary metal oxide semiconductor process compatible and can enable ‘detectors-on-chip’ technology for numerous applications such as internet-of-things, data communication, biomedical imaging, high-speed cloud computing, remote sensing, as well as single-photon detection.
{"title":"Wavelength selective silicon avalanche photodiodes with controlled wide spectral gain by integrating photon-trapping microstructures","authors":"Amita Rawat, Ahasan Ahamed, Lisa N. Mcphillips, Busra Ergul-Yilmaz, Cesar Bartolo-Perez, Shih-Yuan Wang, M. Islam","doi":"10.1117/12.2637146","DOIUrl":"https://doi.org/10.1117/12.2637146","url":null,"abstract":"Silicon avalanche photodiodes (Si-APD) are widely explored due to their high sensitivity, rapid response time, high quantum efficiency, intrinsic multiplication gain, and low signal-to-noise ratio. We present an experimental demonstration of a wavelength selective APD stack epitaxially grown in two different doping orders:–1) N-on-P and 2) P-on-N.We present a performance comparison between N-on-P and P-on-N based on the quantum external efficiency (EQE), Ion/Ioff ratio, and the reverse biased dark state leakage current. By reversing the doping from P-on-N to N-on-P, we show a 40% increase in the EQE. By introducing the photon-trapping hole array we show a 60% improvement in the EQE. We have utilized a low temperature (450oC) forming gas (5% H2 and 95% N2) annealing process to passivate the surface states and show a dark state leakage current improvement from sub- 10nA to sub-1nA current range. The proposed devices are complementary metal oxide semiconductor process compatible and can enable ‘detectors-on-chip’ technology for numerous applications such as internet-of-things, data communication, biomedical imaging, high-speed cloud computing, remote sensing, as well as single-photon detection.","PeriodicalId":13820,"journal":{"name":"International Conference on Nanoscience, Engineering and Technology (ICONSET 2011)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87583598","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The high blood glucose levels associated with diabetes affect various cells and proteins in the body. In response to high blood glucose collagen and keratin proteins experience glycation. This work aims to establish if the intrinsic fluorescence of collagen and keratin could be used to monitor the glycation of said compounds, and thus offer an alternative method to monitoring long term glycaemic control. We have studied the evolution of the intrinsic fluorescence of both compounds in response to glucose in vitro, using steady state and time-resolved fluorescence spectroscopy techniques. Changes in the intrinsic fluorescence of both collagen and keratin were observed. For collagen, contrary to the traditional fluorescence intensity decay measurement at arbitrarily selected excitation and detection wavelengths, we conducted systematic wavelength- and time-resolved measurements to achieve time-resolved emission spectra (TRES). These showed changes in the intrinsic fluorescence kinetics, caused by both collagen aggregation and glycation. In keratin, the addition of glucose caused an increase in the fluorescence intensity at the characteristic wavelength of 460 nm, due to faster formation of new cross-links. The results also suggest that glucose may cause the formation of two new fluorescent complexes with peak fluorescence at ~525 nm and ~575 nm. In conclusion, monitoring the intrinsic fluorescence of collagen or keratin could be used as a method to monitor long term glycaemic control in patients with diabetes.
{"title":"Monitoring glycation using the intrinsic fluorescence of biological fluorophores","authors":"Rhona Muir, S. Forbes, D. Birch, O. Rolinski","doi":"10.1117/12.2631649","DOIUrl":"https://doi.org/10.1117/12.2631649","url":null,"abstract":"The high blood glucose levels associated with diabetes affect various cells and proteins in the body. In response to high blood glucose collagen and keratin proteins experience glycation. This work aims to establish if the intrinsic fluorescence of collagen and keratin could be used to monitor the glycation of said compounds, and thus offer an alternative method to monitoring long term glycaemic control. We have studied the evolution of the intrinsic fluorescence of both compounds in response to glucose in vitro, using steady state and time-resolved fluorescence spectroscopy techniques. Changes in the intrinsic fluorescence of both collagen and keratin were observed. For collagen, contrary to the traditional fluorescence intensity decay measurement at arbitrarily selected excitation and detection wavelengths, we conducted systematic wavelength- and time-resolved measurements to achieve time-resolved emission spectra (TRES). These showed changes in the intrinsic fluorescence kinetics, caused by both collagen aggregation and glycation. In keratin, the addition of glucose caused an increase in the fluorescence intensity at the characteristic wavelength of 460 nm, due to faster formation of new cross-links. The results also suggest that glucose may cause the formation of two new fluorescent complexes with peak fluorescence at ~525 nm and ~575 nm. In conclusion, monitoring the intrinsic fluorescence of collagen or keratin could be used as a method to monitor long term glycaemic control in patients with diabetes.","PeriodicalId":13820,"journal":{"name":"International Conference on Nanoscience, Engineering and Technology (ICONSET 2011)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73420308","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Optical resonances of nanoparticle have been studied for a long time in various optical devices. However, the difficulties in fabrication of uniform nanoparticles hinders the applications. Herein, we formed Si nanoparticles having a uniform size via laser irradiation on an amorphous-Si thin film and found the optical resonances of red, green, and blue (RGB) colors originated from the Si nanoparticles. Two-dimensional scanning of 355-nm wavelength of nanosecond laser with a Gaussian spot beam created Si nanoparticles of 100~200 nm at laser fluences of 150~200 mJ/cm2 . We demonstrated the color resonances could be tuned to red, green, and blue adjusting the laser fluence and scan pitch. The size and distribution are characterized by scanning electron microscopy (SEM), which revealed the Si nanoparticles are ellipsoidal shape, embedded in the residual Si layer. The optical properties are measured by dark field microscopy and fiber coupled spectroscopy. The RGB samples show peak wavelengths of 628 nm, 570 nm, and 495 nm, respectively, which are attributed to the dipole resonance as predicted by the Mie theory.
{"title":"Laser-induced Si nanoparticles and the application of RGB resonance color-filters","authors":"Eui Sun Hwang, Min Jin Kang, B. Cheong","doi":"10.1117/12.2633033","DOIUrl":"https://doi.org/10.1117/12.2633033","url":null,"abstract":"Optical resonances of nanoparticle have been studied for a long time in various optical devices. However, the difficulties in fabrication of uniform nanoparticles hinders the applications. Herein, we formed Si nanoparticles having a uniform size via laser irradiation on an amorphous-Si thin film and found the optical resonances of red, green, and blue (RGB) colors originated from the Si nanoparticles. Two-dimensional scanning of 355-nm wavelength of nanosecond laser with a Gaussian spot beam created Si nanoparticles of 100~200 nm at laser fluences of 150~200 mJ/cm2 . We demonstrated the color resonances could be tuned to red, green, and blue adjusting the laser fluence and scan pitch. The size and distribution are characterized by scanning electron microscopy (SEM), which revealed the Si nanoparticles are ellipsoidal shape, embedded in the residual Si layer. The optical properties are measured by dark field microscopy and fiber coupled spectroscopy. The RGB samples show peak wavelengths of 628 nm, 570 nm, and 495 nm, respectively, which are attributed to the dipole resonance as predicted by the Mie theory.","PeriodicalId":13820,"journal":{"name":"International Conference on Nanoscience, Engineering and Technology (ICONSET 2011)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79298087","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Historically, there are many options to improve image quality that are each derived from the same raw ultrasound sensor data. However, none of these historical options combine multiple contributions in a single image formation step. This invited contribution discusses novel alternatives to beamforming raw ultrasound sensor data to improve image quality, delivery speed, and feature detection after learning from the physics of sound wave propagation. Applications include cyst detection, coherence-based beamforming, and COVID-19 feature detection. A new resource for the entire community to standardize and accelerate research at the intersection of ultrasound beamforming and deep learning is summarized (https://cubdl.jhu.edu). The connection to optics with the integration of ultrasound hardware and software is also discussed from the perspective of photoacoustic source detection, reflection artifact removal, and resolution improvements. These innovations demonstrate outstanding potential to combine multiple outputs and benefits in a single signal processing step with the assistance of deep learning.
{"title":"Applications of ultrasound image formation in the deep learning age","authors":"M. L. Lediju Bell","doi":"10.1117/12.2631614","DOIUrl":"https://doi.org/10.1117/12.2631614","url":null,"abstract":"Historically, there are many options to improve image quality that are each derived from the same raw ultrasound sensor data. However, none of these historical options combine multiple contributions in a single image formation step. This invited contribution discusses novel alternatives to beamforming raw ultrasound sensor data to improve image quality, delivery speed, and feature detection after learning from the physics of sound wave propagation. Applications include cyst detection, coherence-based beamforming, and COVID-19 feature detection. A new resource for the entire community to standardize and accelerate research at the intersection of ultrasound beamforming and deep learning is summarized (https://cubdl.jhu.edu). The connection to optics with the integration of ultrasound hardware and software is also discussed from the perspective of photoacoustic source detection, reflection artifact removal, and resolution improvements. These innovations demonstrate outstanding potential to combine multiple outputs and benefits in a single signal processing step with the assistance of deep learning.","PeriodicalId":13820,"journal":{"name":"International Conference on Nanoscience, Engineering and Technology (ICONSET 2011)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80222130","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Y. Jourlin, N. Crespo-Monteiro, V. Vallejo Otero, M. Traynar, M. U. Usuga Higuita, E. Gamet
In this paper, a direct and cost-effective sol-gel method to produce stable titanium dioxide and titanium oxynitride photoresists is described. This approach is compatible with many photolithographic techniques. We show that laser interference lithography and nanosphere lithography can be used, respectively, to obtain homogeneous TiO2 diffraction gratings and periodic nanopillars over large areas. Further developments permit to transform TiO2 microstructured based sol-gel to TiN metallic microstructured layer, with good optical properties, by using an innovative rapid thermal nitridation process, which opens the way towards plasmonics and NIR filters based on periodic metallic microstructured layers. Further technological processes were conducted to produce micro and nanostructured TiO2 and TiN layers from a NanoImprint approach. This work demonstrates the versatility of this complete process of soft chemistry new process of patterning TiO2 and TiN thin films avoiding expensive processes (etching, lift-off…) while preserving their diffractive properties and a high thermal stability, up to 1000°C. It is thus compatible to various types of substrates (of different shape and size). These results open up the opportunity to develop a cost-effective and low time-consuming approach to address different fields of cutting-edge applications (metasurfaces, sensors, luxury and decorative industry…).
{"title":"Laser interference and nanospheres UV lithography to produce micro and nanostructured TiO2 and TiN based sol-gel layers","authors":"Y. Jourlin, N. Crespo-Monteiro, V. Vallejo Otero, M. Traynar, M. U. Usuga Higuita, E. Gamet","doi":"10.1117/12.2635170","DOIUrl":"https://doi.org/10.1117/12.2635170","url":null,"abstract":"In this paper, a direct and cost-effective sol-gel method to produce stable titanium dioxide and titanium oxynitride photoresists is described. This approach is compatible with many photolithographic techniques. We show that laser interference lithography and nanosphere lithography can be used, respectively, to obtain homogeneous TiO2 diffraction gratings and periodic nanopillars over large areas. Further developments permit to transform TiO2 microstructured based sol-gel to TiN metallic microstructured layer, with good optical properties, by using an innovative rapid thermal nitridation process, which opens the way towards plasmonics and NIR filters based on periodic metallic microstructured layers. Further technological processes were conducted to produce micro and nanostructured TiO2 and TiN layers from a NanoImprint approach. This work demonstrates the versatility of this complete process of soft chemistry new process of patterning TiO2 and TiN thin films avoiding expensive processes (etching, lift-off…) while preserving their diffractive properties and a high thermal stability, up to 1000°C. It is thus compatible to various types of substrates (of different shape and size). These results open up the opportunity to develop a cost-effective and low time-consuming approach to address different fields of cutting-edge applications (metasurfaces, sensors, luxury and decorative industry…).","PeriodicalId":13820,"journal":{"name":"International Conference on Nanoscience, Engineering and Technology (ICONSET 2011)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77560611","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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