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2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)最新文献

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Easily Adjusting Capillary Flow Rates on Nitrocellulose Membranes by a Household Laminator 很容易调整毛细管流速对硝化纤维素膜的家用层压机
Peiyi Chen, Zejingqiu Chen, Zitao Feng, Haonan Li, Muyang Zhang, Weijin Guo
Capillary flow rate control is interesting for biosensors based on nitrocellulose membranes. This paper introduces a method to control capillary flow rates on nitrocellulose membranes by simply pressing the nitrocellulose membranes using a household laminator. By applying pressure on nitrocellulose membranes, we can easily change the thickness of the nitrocellulose membrane and therefore change the pore size of the porous structure. We also notice that the pressure can break some nitrocellulose fibers. We investigate the influence by measuring the capillary flow rates on nitrocellulose membranes treated by different pressure, and also check their capacity of water absorption. We find that capillary flow rates decrease on nitrocellulose membranes with pressure treatment and the method can reduce the capillary flow rate by up to 42.3%. The water absorption capacity also decreases for nitrocellulose membranes with pressure treatment, and the maximum decrease is 44.6%. This method is promising in reducing the sample flow rates in biosensing devices made of nitrocellulose membranes.
毛细管流速控制是基于硝化纤维素膜的生物传感器的研究方向。本文介绍了一种用家用压片机对硝化棉膜进行简单按压,从而控制硝化棉膜上毛细流速的方法。通过对硝化纤维素膜施加压力,我们可以很容易地改变硝化纤维素膜的厚度,从而改变多孔结构的孔径。我们还注意到压力会使一些硝化纤维断裂。通过测定毛细管流速,考察了不同压力处理对硝化纤维素膜的吸水性能的影响。结果表明,压力处理能使硝化纤维素膜的毛细流速降低42.3%。加压处理后硝化棉膜的吸水能力也有所下降,最大降幅为44.6%。该方法在降低硝化纤维素膜生物传感装置的样品流速方面有很大的前景。
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引用次数: 0
Haptic interface with flexible self-sensing actuators for wireless touch communication 具有柔性自传感执行器的触觉接口,用于无线触摸通信
Dengfeng Li, Jingkun Zhou, Qing'ao Qu, Xinge Yu
At present, touch communication with each other mainly relies on direct physical contact. Imagine if touch communication could be realized in non-contact wireless ways just as sight and sound do, there could be a revolutionary change in the way that we feel the world. Here, we developed a haptic interface with self-sensing actuators for wireless touch communication. The flexible self-sensing actuator owns the functions in both tactile sensing and haptic feedback. When this soft haptic interface is conformally worn on the skin and dynamically pressed, the actuators on the interface will generate a response sensing voltage as tactile signal. When the actuator is actuated by an alternating voltage, the magnet in the actuator will generate a mechanical vibration as the haptic feedback. Via wireless Bluetooth transmission, one haptic interface could receive the tactile signal from the other haptic interface and then run synchronized haptic feedback. Thus, the touch communication is realized between two users in bidirectional way. This wireless touch communication also makes remote touch video possible, which will greatly enrich human social experience and shorten the social distance.
目前,人与人之间的触摸交流主要依靠直接的身体接触。想象一下,如果触摸通信可以像视觉和声音一样以非接触的无线方式实现,我们感知世界的方式可能会发生革命性的变化。在这里,我们开发了一个带有自传感驱动器的触觉接口,用于无线触摸通信。柔性自传感执行器具有触觉感应和触觉反馈功能。当这种柔软的触觉界面在皮肤上共形佩戴并动态按压时,界面上的致动器会产生响应传感电压作为触觉信号。当执行器被交变电压驱动时,执行器中的磁体会产生机械振动作为触觉反馈。通过无线蓝牙传输,一个触觉接口接收到另一个触觉接口发出的触觉信号,并进行同步的触觉反馈。从而实现了两个用户之间的双向触摸通信。这种无线触控通信也使远程触控视频成为可能,将极大地丰富人类的社交体验,缩短社交距离。
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引用次数: 0
NEMS 2023 Cover Page NEMS 2023封面
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引用次数: 0
Sphygmopalpation of Pulse Waves with Variable Applied Fingertip Pressure using a MEMS Flexible Tactile Sensor Array 基于MEMS柔性触觉传感器阵列的可变指尖压力下脉搏波的触觉感应
Senlin Hou, Donghai Yang, Xiaotong Chen, Qingjiu Chen, Jiangang Shen, Wen Jung Li
With the advancement of Digital Chinese Medicine (DCM) using micro/nano sensors and AI technologies, researchers have invested significant efforts in acquiring pulse wave information and relating them to disease symptoms. Many flexible sensors have been developed in the past decade attempting to improve and digitize Traditional Chinese Medicine Pulse Sphygmopalpation (TCMPS) data. Typically, TCM doctors use their fingers to obtain physiological information from the wrist radial artery and determine a patient’s physical condition by sensing temporal and spatial information of the pulse waves. However, an important element in the TCMPS method is that the fingertips must apply three different pressure levels onto a patient’s wrist in order to properly obtain the wave patterns described by TCM doctors. Unfortunately, past work failed at addressing this fundamental problem for TCMPS – existing flexible sensors have not reported the capability of measuring the truly applied pressure onto a patient’s skin while measuring temporal variations of the pulse waves. We present here a method that allows TCM doctors to record a patient’s pulse in real-time using a tactile sensor array while the fingertip pressure applied to the skin can also be recorded. We believe our work will significantly advance TCM by providing a repeatable and stable pulse wave collection methodology incorporating the vital concept of sphygmopalpation with variable applied fingertip pressures.
随着使用微纳传感器和人工智能技术的数字中医(DCM)的发展,研究人员在获取脉搏波信息并将其与疾病症状联系起来方面投入了大量努力。在过去的十年中,许多柔性传感器被开发出来,试图改进和数字化中医脉搏脉管触诊(TCMPS)数据。通常,中医医生用手指从腕部桡动脉获取生理信息,通过感知脉搏波的时空信息来判断患者的身体状况。然而,中医按摩法的一个重要因素是,指尖必须对患者的手腕施加三种不同的压力水平,才能正确地获得中医医生描述的波浪模式。不幸的是,过去的工作未能解决TCMPS的这个基本问题——现有的柔性传感器在测量脉冲波的时间变化的同时,还没有报告测量病人皮肤上真正施加的压力的能力。我们在这里提出了一种方法,允许中医医生使用触觉传感器阵列实时记录患者的脉搏,同时也可以记录指尖施加在皮肤上的压力。我们相信,我们的工作将通过提供一种可重复和稳定的脉搏波收集方法,结合指尖压力变化的脉搏触诊的重要概念,显著推进中医。
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引用次数: 0
Microfabricated Aluminum Nitride MEMS Resonator 微加工氮化铝MEMS谐振器
Yuxin Zhang, Tianren Feng, Hui Chen, Yangyang Chai, Yuxuan Wu, Quan Yuan
In this paper, a piezoelectric MEMS resonator is presented working as laterally vibrating resonator. The device is microfabricated with the SOI silicon wafer and piezoelectric aluminum nitride (A1N) thin films. The rectangular resonant plate was supported with two beams and the gap from the silicon substrate is 2 $mu$m. Molybdenum (Mo) interdigitated electrodes (IDEs) is fabricated on the top of A1N piezoelectric film. The resonant frequency of the resonator is 276 MHz, Q factor is 362.
本文提出了一种作为横向振动谐振器的压电式MEMS谐振器。该器件由SOI硅片和压电氮化铝(A1N)薄膜制成。矩形谐振板由两根梁支撑,与硅衬底的间隙为2 $mu$m。在A1N压电薄膜上制备了钼(Mo)互指电极。谐振器的谐振频率为276 MHz, Q因子为362。
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引用次数: 0
Experimental investigations of manifold structure on cooling performance in embedded microfluidic cooling 嵌入式微流控冷却中流形结构冷却性能的实验研究
Wei Li, Yuxin Ye, Yingzhang Yan, Xiangbin Du, Yanmei Kong, Ruiwen Liu, Zhiqiang Wang, Binbin Jiao
For embedded microfluidics cooling, the morphology of the microfluidics structure and the liquid injection mode have a great impact on the cooling performance. Manifold structure can adjust the flow direction of the coolant before heat convection, reducing pumping power and improving cooling efficiency of embedded cooling. In this work, four manifold structures for embedded cooling are designed and fabricated, the cooling performance and hydraulic performance of different structures is compared through experimental investigations. The results show that compared with the horizontal cooling, the manifold structure based on vertical cooling not only reduces the temperature by 20.8%, but also reduces the pressure loss by 43.5%.
对于嵌入式微流控冷却,微流控结构的形态和液体注入方式对冷却性能有很大影响。流形结构可以在热对流前调整冷却剂的流动方向,降低泵送功率,提高预埋式冷却的冷却效率。本文设计制作了四种不同的嵌入式冷却结构,并通过实验研究比较了不同结构的冷却性能和水力性能。结果表明,与水平冷却相比,基于垂直冷却的流形结构不仅降低了20.8%的温度,而且降低了43.5%的压力损失。
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引用次数: 0
Integrated Circuit of an Intelligent Reflecting Surface for sub-THz Wireless Communication 一种用于亚太赫兹无线通信的智能反射面集成电路
A. Shurakov, A. Prikhodko, I. Belikov, Anita Razakova, G. Gol’tsman
Next-generation networks demand efficient hardware solutions for wireless communication channels with carrier frequencies beyond 100 GHz. In particular, beamforming in reflected light is suggested to reduce signal attenuation due to blockages and to enhance overall quality of a wireless connection. This task can be solved with the aid of a network of intelligent reflecting surfaces placed in optical path between transmitter and receiver. In this work, we propose design of such a surface operated at 140 GHz which is fully compatible with clean room fabrication processes.
下一代网络需要针对载波频率超过100ghz的无线通信信道的高效硬件解决方案。特别是,建议在反射光中进行波束成形,以减少由于阻塞而导致的信号衰减,并提高无线连接的整体质量。通过在发射端和接收端之间的光路中设置智能反射面网络,可以解决这一问题。在这项工作中,我们提出设计这样一个工作在140 GHz的表面,它与洁净室制造工艺完全兼容。
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引用次数: 0
Study on Complementary Auxiliary Cathode Method for Improving the Microstructure Uniformity of Electroplated Thick Metal Film 提高电镀厚金属膜组织均匀性的互补辅助阴极法研究
T. Yin, Yunna Sun, Yan Wang, G. Ding, Mingyu Zhang
The uniformity of electroplating thick metal film in microstructure devices is an important factor affecting the surface quality, dimensional accuracy, performance and yield of devices. There are few studies on the traditional electroplating assisted cathode to improve the thickness uniformity of metal coating, and most of them use a single surrounding structure, which is difficult to adapt to the thickness uniformity improving of thick metal coating in complex microstructure devices. This paper presents a method for improving the uniformity of coating thickness by using complementary auxiliary cathode structure. A cross-shaped on-chip auxiliary cathode structure complementary to the mask pattern is designed to disperse the local over-concentrated current density. At the same time, the annular off-chip auxiliary cathode is combined to improve the uniformity of the same batch and single module at the wafer level and module level. A FEM model is established to optimize the structure, size and position distribution of the auxiliary cathode. The simulation results show that compared with the structure without auxiliary cathode, the uniformity between the components and inside the components of film thickness are improved by 90.1% and 55.9% respectively. This is of great significance to ensure the processing consistency and performance stability of thick metal film microstructure devices.
微结构器件中电镀厚金属膜的均匀性是影响器件表面质量、尺寸精度、性能和成品率的重要因素。传统的电镀辅助阴极提高金属镀层厚度均匀性的研究很少,大多采用单一的环绕结构,难以适应复杂微结构器件中厚金属镀层厚度均匀性的提高。提出了一种利用互补辅助阴极结构改善镀层厚度均匀性的方法。设计了一种与掩模图案互补的十字形片上辅助阴极结构,以分散局部过集中的电流密度。同时结合环形片外辅助阴极,在晶圆级和模组级提高了同批次和单模块的均匀性。建立了辅助阴极的有限元模型,优化了辅助阴极的结构、尺寸和位置分布。仿真结果表明,与没有辅助阴极的结构相比,元件之间和元件内部的膜厚均匀性分别提高了90.1%和55.9%。这对保证厚金属膜微结构器件的加工一致性和性能稳定性具有重要意义。
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引用次数: 0
Growing organoids and spheroids on a chip 在芯片上培育类器官和球体
Amani Ghassan, S. Sahloul, A. Orozaliev, P. Percipalle, Yong-Ak Song
Organoids have gained significant interests in the recent years to recapitulate organ development and disease progression in-vitro for personalized medicine. We propose a microfluidic chip design to grow organoids and spheroids of more uniform size and shape with minimal intervention. The hybrid design of the microfluidic chip allows to open and close culture wells using a reversibly bonded cover sheet. By combining the advantages of open wells similar to the conventional microplate wells and the sealed channel of microfluidic chips, cells can directly be pipetted into individual wells and continuously perfused after sealing. We demonstrated the concept of the hybrid chip by growing spheroids out of mouse embryonic fibroblasts and characterized the uniformity of their size and shape.
近年来,类器官获得了极大的兴趣,以概括个性化医疗的器官发育和疾病进展。我们提出了一种微流控芯片设计,可以在最小的干预下生长更均匀大小和形状的类器官和球体。微流控芯片的混合设计允许使用可逆粘合盖板打开和关闭培养井。结合传统微孔板开孔的优点和微流控芯片的密封通道,可以直接将细胞移液到单孔中,密封后连续灌注。我们通过从小鼠胚胎成纤维细胞中培养球体来证明杂交芯片的概念,并表征了它们的大小和形状的均匀性。
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引用次数: 0
Detection of Lower-Limb Motion Using a Kneepad Sensor Based on Textile Strain Sensor 基于纺织应变传感器的膝部传感器检测下肢运动
Xiaoyang Zou, Xiaoting Li, Jiaqi Xue, K. Lai
The monitoring of the knee joint angle during lower-limb motions is crucial for knee disorders patients and their rehabilitation. However, commonly used methods for lower-limb motion detection, such as inertial measurement units (IMUs) and motion capture systems, have limitations such as drift and high cost. To address these issues, we developed a wearable kneepad sensor using textile resistive strain sensors to measure knee angle during lower-limb motion. The strain sensors change in resistance signals caused by their deformation of them when the knee joint bends. To improve the accuracy of knee angle measurements, an encoder was integrated with kneepad sensor onto a prosthetic limb and used linear mapping method to calibrate the kneepad sensor with the encoder data as the ground truth. The calibrated kneepad sensor achieved an R$^{2}$ value of 0.956, MAE of 6.15°, and MSE of 64.35 while detecting the knee angle. It was demonstrated that the ability of the kneepad sensor to measure knee angles during two types of lower-limb motions, sit-to-stand (STS) and knee extension. It is shown in this work that this comfortable, wearable kneepad sensor can help detect knee angles during lower-limb motions in various environments and has broad applications in healthcare and robotics.
下肢运动时膝关节角度的监测对膝关节疾病患者及其康复至关重要。然而,常用的下肢运动检测方法,如惯性测量单元(imu)和运动捕捉系统,存在漂移和高成本等局限性。为了解决这些问题,我们开发了一种可穿戴式膝部传感器,使用纺织电阻应变传感器来测量下肢运动时的膝关节角度。当膝关节弯曲时,应变传感器由于自身的变形而产生电阻信号的变化。为了提高膝关节角度测量的精度,将编码器与膝关节传感器集成到义肢上,并以编码器数据为地面真值,采用线性映射法对膝关节传感器进行标定。标定后的膝关节传感器在检测膝关节角度时,R$^{2}$值为0.956,MAE为6.15°,MSE为64.35。实验证明,在坐姿站立和膝关节伸展两种类型的下肢运动中,膝部传感器能够测量膝关节角度。这项工作表明,这种舒适、可穿戴的护膝传感器可以帮助检测各种环境下下肢运动时的膝盖角度,在医疗保健和机器人领域具有广泛的应用。
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引用次数: 0
期刊
2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
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