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2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)最新文献

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A novel electrodes design for in-plane measurement of single-structure multi-axis MEMS inertial devices 一种用于单结构多轴MEMS惯性器件平面内测量的新型电极设计
Jianjun Ma, Bowen Xing, Jiayang Sun, Bin Zhou, Qi Wei, Rong Zhang
In this paper, a novel electrodes design for in-plane measurement of single-structure quadruple mass multi-axis MEMS inertial devices is proposed to achieve the closed-loop x/y-axis acceleration measurement. The designed 45 ° tilting comb electrodes combine synovial comb electrodes and laminated comb electrodes and meet the same electrostatic force coefficient on quadruple mass, with structural symmetry design ensured. Theoretical formula is analyzed in detail, which provides guidance for simulation and design.
本文提出了一种用于单结构四重质量多轴MEMS惯性器件平面内测量的新型电极设计,以实现x/y轴加速度闭环测量。所设计的45°倾斜梳状电极结合了滑膜梳状电极和层状梳状电极,在四重质量上满足相同的静电力系数,保证了结构的对称设计。对理论公式进行了详细分析,为仿真和设计提供指导。
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引用次数: 0
Influence of microstructure parameters and magnetic intensity on flexible pressure sensor with variable stiffness 微结构参数和磁场强度对变刚度柔性压力传感器的影响
Xinying Li, Tian Xie, Wenjun Xu, Wei Zhou
This paper systematically studies the Influence of microstructure parameters and magnetic intensity on flexible pressure sensor with variable stiffness. As for the fabrication, we firstly fabricate the microstructure array with magnetic induction characteristic by 3D dynamic laser, and than sputter and pattern a pair of 80 nm thick Au electrodes on PET film. Finally, we package the microstructure array and PET film to get a variable stiffness flexible pressure sensor. The stiffness of the magnetically induced microstructure can be increased by applying a magnetic field. The performance of the sensor was tested under different magnetic intensity. The experimental results show that when the magnetic intensity is 0 mT, the sensor had higher sensitivity under low pressure load, but the linearity became worse with the continuous increase of pressure load. When the magnetic intensity is 250 mT, the sensitivity of the sensor decreases under low pressure load, but it had good linearity under both low and high pressure load.
系统地研究了微结构参数和磁场强度对变刚度柔性压力传感器的影响。在制备方面,我们首先利用三维动态激光制备具有磁感应特性的微结构阵列,然后在PET薄膜上溅射并刻划一对80 nm厚的Au电极。最后,将微结构阵列与PET薄膜进行封装,得到可变刚度柔性压力传感器。施加磁场可以提高磁致微观结构的刚度。对传感器在不同磁场强度下的性能进行了测试。实验结果表明,当磁场强度为0 mT时,传感器在低压负载下具有较高的灵敏度,但随着压力负载的不断增大,线性度变差。当磁场强度为250 mT时,传感器的灵敏度在低压负载下下降,但在低压和高压负载下都有良好的线性关系。
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引用次数: 0
A Vital Sign Monitoring System Using a MEMS Microphone for Dog 基于MEMS麦克风的犬类生命体征监测系统
Masanao Taniguchi, T. Kageyama, Y. Okamoto, T. Matsunaga, Sang-Seok Lee
We propose a vital sign monitoring system to use for health monitoring of the dog. To diagnose dog’s disease or to check dog’s health status, veterinarian firstly investigate the most basic vital signs such as body temperature, heart rate and respiratory rate. Remote and wireless acquisition systems of those vital signs have been paid attention at present time for animal’s continuous health monitoring. To use widely the remote and wireless vital sign monitoring system even to animal, the system have to be implemented cheaply. To achieve a cheap system, which can acquire vital signs remotely and wirelessly, we propose a vital sign monitoring system for the dog using a MEMS microphone and Raspberry pi based wireless system. To apply the vital sign monitoring system to the dog, harness has to be developed. In this paper, we demonstrate that heart rate and respiratory rate acquisition using the proposed system. Moreover, we show the harness developed for the proposed system.
我们提出了一种用于犬类健康监测的生命体征监测系统。为了诊断狗的疾病或检查狗的健康状况,兽医首先要调查狗的最基本的生命体征,如体温、心率和呼吸频率。动物生命体征的远程和无线采集系统是目前对动物健康状况进行持续监测的研究热点。要使远程无线生命体征监测系统广泛应用于动物,就必须实现低成本的监测系统。为了实现一个廉价的系统,可以远程和无线采集生命体征,我们提出了一个基于MEMS麦克风和树莓派无线系统的狗生命体征监测系统。为了将生命体征监测系统应用到犬身上,必须研制出相应的安全装置。在本文中,我们演示了使用该系统进行心率和呼吸频率的采集。此外,我们还展示了为所提出的系统开发的线束。
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引用次数: 0
Effect of Hexafluoropropylene (HFP) doping on Poly(vinylidenefluoride) (PVDF) Electrospun Nanofibers 六氟丙烯(HFP)掺杂对聚偏氟乙烯(PVDF)静电纺纳米纤维的影响
Zhiyuan Zhou, Hongze Zhang, Lingchong Xue, Yin Zhang, Kedong Bi
In this paper, we investigate the effects of doping on the morphology, mechanical properties, and contact angle of Polyvinylidene fluoride(PVDF) nanofibers prepared by electrospinning. The nanofibers were characterized by Scanning Electron Microscope (SEM), X-ray diffractometer analysis, Contact angle tester and a homemade Microtensile test device. The experimental results showed that by doping Hexafluoropropylene(HFP), the diameters of the electrospun nanofibers became finer and the degree of crystallinity of nanofibers became better. This improves the molecular orientation of PVDF nanofibers, resulting in enhanced Young’s modulus and elongation. XRD analysis revealed that $beta$-crystal were the main crystal form in both electrospun PVDF and PVDF-HFP nanofibers, indicating high hydrophobic performance.
研究了静电纺丝法制备的聚偏氟乙烯(PVDF)纳米纤维中掺杂对其形貌、力学性能和接触角的影响。采用扫描电镜(SEM)、x射线衍射仪(xrd)、接触角测试仪(Contact angle测试仪)和自制微拉伸测试装置对纳米纤维进行了表征。实验结果表明,掺杂六氟丙烯(HFP)后,电纺丝纳米纤维的直径变细,结晶度变好。这改善了PVDF纳米纤维的分子取向,从而提高了杨氏模量和伸长率。XRD分析表明,静电纺PVDF和PVDF- hfp纳米纤维均以$ β $-晶型为主,具有较高的疏水性能。
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引用次数: 0
Facile Fabrication of Highly Sensitive Flexible Humidity Sensors by Laser Induced Graphene 激光诱导石墨烯制备高灵敏度柔性湿度传感器
Sirui Liu, Rui Chen, Rui Chen, Yu Xie, Wei Zhou, Tao Luo
In this paper, a facile method for the preparation of highly sensitive humidity sensor is studied. The laser induced graphene (LIG) is used as electrodes. Polyimide (PI) film is used as both the substrate and humidity sensing material of the sensor. PI film is scanned by a picosecond infrared laser with controlled laser power and frequency to induce porous graphene electrodes. The micromorphology of the blank PI film and the PI between electrodes are visualized by the scanning electron microscope, showing that the number of pore cracks on the surface of polyimide between the LIG electrodes increased significantly compared with that of blank PI film, which enhance the ionic conductivity of PI, thus increasing the sensitivity of the sensor. This work allows rapid and low-cost mass production of highly sensitive humidity sensors for applications such as smart agriculture and healthcare monitoring.
本文研究了一种制备高灵敏度湿度传感器的简便方法。采用激光诱导石墨烯(LIG)作为电极。聚酰亚胺(PI)薄膜作为传感器的衬底和湿度传感材料。采用皮秒红外激光扫描PI膜,控制激光功率和频率,诱导多孔石墨烯电极。通过扫描电镜观察空白PI膜和电极间PI的微观形貌,发现与空白PI膜相比,LIG电极间聚酰亚胺表面的孔隙裂纹数量明显增加,从而增强了PI的离子电导率,从而提高了传感器的灵敏度。这项工作可以快速、低成本地批量生产高灵敏度湿度传感器,用于智能农业和医疗保健监测等应用。
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引用次数: 0
Real-time Stereoscopic Display of Atomic Force Microscopy Images for Nano Robotic Manipulation 用于纳米机器人操作的原子力显微镜图像的实时立体显示
Xinyu Liu, Chun Ho So, Yuxuan Xue, Yichen Wang, Jiawei Zhang, K. Lai, Ning Xi
We developed a nano-operating system that features a stereoscopic display of AFM images that is updated in real time. In order to accurately judge the positional relationship between the nanoparticles and carry out operations, the operator is able to use this system to not only observe the change process of the nano-environment in real time while the AFM is operating, but also obtain depth information with the help of a real-time stereoscopic display. At the same time, we give the operator with a corresponding perspective in real time by obtaining the changes in the operator’s head posture. This helps to increase the sense of presence and improves operational efficiency.
我们开发了一种纳米操作系统,具有实时更新的AFM图像的立体显示。为了准确判断纳米颗粒之间的位置关系并进行操作,操作人员不仅可以使用该系统实时观察AFM运行时纳米环境的变化过程,还可以借助实时立体显示器获得深度信息。同时,通过获取操作者头部姿态的变化,实时给操作者提供相应的视角。这有助于增加存在感并提高操作效率。
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引用次数: 0
Detection of short peptides and dimers using silicon nitride nanopores 利用氮化硅纳米孔检测短肽和二聚体
Peifu Bian, Lichun Zou, Haiyan Wang, Jingjie Sha
Solid-state nanopores have previously been applied to the recognition and detection of DNA and proteins as a powerful tool for single-molecule detection. Here, we use silicon nitride nanopores to identify short peptides of six amino acids in length and their dimers. The experimental results show that the blocking current of the dimer is close to twice as large as that of the monomer. Due to the lower charge, the probability of the dimer passing through the pore at voltages below 100mV is low. In addition, the results of the mass spectrometry assay provide evidence for a translocation event of the short peptides and their dimers.
固态纳米孔作为单分子检测的有力工具,已被应用于DNA和蛋白质的识别和检测。在这里,我们使用氮化硅纳米孔来鉴定长度为6个氨基酸的短肽及其二聚体。实验结果表明,二聚体的阻断电流接近单体的两倍。由于电荷较低,二聚体在低于100mV的电压下通过孔的概率较低。此外,质谱分析的结果为短肽及其二聚体的易位事件提供了证据。
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引用次数: 0
A Wearable Brain-Computer Interface System based on Flexible and Air-Permeable Electronic Skin 基于柔性透气性电子皮肤的可穿戴脑机接口系统
Ze-Ming Xing, Tianrui Cui, Ying-Fen Zeng, Yezhou Yang, Tian-Ling Ren
In this paper, a wearable brain-computer interface system based on flexible and air-permeable electronic skin is implemented. Wearable brain-computer interfaces need to be expanded into more aspects of daily life. Research in these areas requires devices that are closer to life. The flexible electronic skin has the advantages of high permeability (1.904 kg $cdot mathrm{m}^{-2} cdot$ day $^{-1}$ at body temperature) and low skin contact impedance ($4.683 mathrm{k} Omega$ at 1 kHz), and can be used to expand the research of single lead brain computer interface in the field of appetite. Because the orbitofrontal cortex plays an important role in food decisions, the device placed electrodes on the forehead to collect electrical signals from people when they were presented with images of different delicacies. Watching their brain activity as they made judgments about their food choices. Found that it was possible to distinguish between delicious pictures and boring ones. To look at the brain’ s attraction and rejection decisions when faced with food cues.
本文实现了一种基于柔性透气性电子皮肤的可穿戴脑机接口系统。可穿戴脑机接口需要扩展到日常生活的更多方面。这些领域的研究需要更贴近生活的设备。柔性电子皮肤具有高渗透性(体温时1.904 kg cdot mathrm{m}^{-2} cdot$ day $^{-1}$)和低皮肤接触阻抗(1 kHz时4.683 mathrm{k} Omega$)等优点,可用于拓展食欲领域单导联脑机接口的研究。由于眼窝额叶皮层在食物决定中起着重要作用,该装置在人们的前额上放置了电极,当人们看到不同美食的图像时,就会收集他们的电信号。观察他们对食物选择做出判断时的大脑活动。发现可以区分美味的图片和无聊的图片。观察大脑在面对食物线索时的吸引和拒绝决定。
{"title":"A Wearable Brain-Computer Interface System based on Flexible and Air-Permeable Electronic Skin","authors":"Ze-Ming Xing, Tianrui Cui, Ying-Fen Zeng, Yezhou Yang, Tian-Ling Ren","doi":"10.1109/NEMS57332.2023.10190945","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190945","url":null,"abstract":"In this paper, a wearable brain-computer interface system based on flexible and air-permeable electronic skin is implemented. Wearable brain-computer interfaces need to be expanded into more aspects of daily life. Research in these areas requires devices that are closer to life. The flexible electronic skin has the advantages of high permeability (1.904 kg $cdot mathrm{m}^{-2} cdot$ day $^{-1}$ at body temperature) and low skin contact impedance ($4.683 mathrm{k} Omega$ at 1 kHz), and can be used to expand the research of single lead brain computer interface in the field of appetite. Because the orbitofrontal cortex plays an important role in food decisions, the device placed electrodes on the forehead to collect electrical signals from people when they were presented with images of different delicacies. Watching their brain activity as they made judgments about their food choices. Found that it was possible to distinguish between delicious pictures and boring ones. To look at the brain’ s attraction and rejection decisions when faced with food cues.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123793666","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Identification of Different Protein Molecules Using MoS2-Graphene Heterostructure Nanopores 利用二硫化钼-石墨烯异质结构纳米孔鉴定不同蛋白质分子
Chaoming Gu, Zhoubin Yu, Zhi Ye, Xiaojie Li, C. Jin, Yang Liu, Xin Zhu, Zhen Cao, Xiao Yu
MoS2-graphene heterostructure nanopores have shown the potential of detecting single protein molecules with high spatial resolution and slow translocation speed. In this work, we use this new type of nanopore to identify different protein molecules including bovine serum albumin (BSA) and Immunoglobulin G (IgG). The heterostructure nanopores are drilled by FIB and TEM with diameter of ~12 nm. The statistical and single-signal analyses of the single protein molecules translocation are conducted. The results demonstrate that due to stronger interaction with the heterostructure, IgG molecules have much longer dwell time than BSA, while the complete translocation of IgG becomes harder, leading to obvious lower current blockage. Our analysis indicates that heterostructure nanopores are capable of identifying and distinguishing different types of proteins.
mos2 -石墨烯异质结构纳米孔具有较高的空间分辨率和较慢的易位速度,具有检测单个蛋白质分子的潜力。在这项工作中,我们使用这种新型纳米孔来识别不同的蛋白质分子,包括牛血清白蛋白(BSA)和免疫球蛋白G (IgG)。利用FIB和TEM对其进行了孔径约为12 nm的异质结构纳米孔的钻取。对单蛋白分子易位进行了统计分析和单信号分析。结果表明,由于与异质结构的相互作用更强,IgG分子的停留时间比BSA长得多,而IgG的完全易位变得更加困难,导致电流阻塞明显降低。我们的分析表明,异质结构纳米孔能够识别和区分不同类型的蛋白质。
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引用次数: 0
Real-Time In Situ Radiation Detection for Mitigating Injury to the Gastrointestinal Tract 实时原位辐射检测减轻胃肠道损伤
Crystan McLymore, Hen-Wei Huang, Blake R. Smith, David Werder, James D Byrne, Giovanni Traverso
Radiation therapy is a common cancer treatment method. However, injury to the gastrointestinal (GI) tract remains an unavoidable side effect, which reduces patient quality of life and increases healthcare costs. In vivo dosimetry is a treatment adaptation tool that helps reduce geometric setup uncertainties by providing real-time feedback on the patient’s absorbed dose in the local body area where the technology is positioned. Current in vivo dosimetry technology is limited to measurements in minimally invasive areas of the body. This work demonstrates the use of PIN diode-based capsule electronics placed internal to the GI tract for increased precision radiation monitoring. The diode was first characterized in vitro for response to gamma and X-ray radiation and to varying temperatures ranging from 20 °C to 40 °C. Various sources were employed for characterization, including Cesium, Cobalt, 320 kV X-ray irradiator, a thermal neutron beam sourced by a 5.7 MW nuclear reactor, and a therapeutic linear accelerator (LINAC) with 6, 10, and 18 MV beam qualities. The diode was then placed in a swine’s stomach to observe in vivo X-ray radiation detection. The diode showed repeatability within 3% during its detection of the tested range of gamma and X-ray intensities and energies. The LINAC characterization results show the diode to be energy-independent for absorbed doses below 3.0 Gy. As expected, radiation absorption by body tissue greatly influenced the differing results between the in vitro and in vivo studies. This study demonstrates successful, first-time in situ radiation detection directly from core body areas in a non-invasive manner. Clinical relevance— A real-time dosimeter, purposed for in vivo detection, has been characterized using pre-clinical and clinically used irradiators.
放射治疗是一种常见的癌症治疗方法。然而,胃肠道损伤仍然是不可避免的副作用,它降低了患者的生活质量并增加了医疗保健费用。体内剂量测定是一种治疗适应工具,通过提供患者在该技术定位的局部身体区域的吸收剂量的实时反馈,有助于减少几何设置的不确定性。目前的体内剂量测定技术仅限于在身体的微创区域进行测量。这项工作展示了使用基于PIN二极管的胶囊电子设备放置在胃肠道内部,以提高精确的辐射监测。该二极管首先在体外对伽马和x射线辐射的响应以及从20°C到40°C的不同温度进行了表征。研究人员使用了多种材料进行表征,包括铯、钴、320 kV x射线辐照器、5.7 MW核反应堆产生的热中子束,以及具有6、10和18 MV束流质量的治疗性直线加速器(LINAC)。然后将二极管放置在猪胃中观察体内x射线辐射检测。该二极管在检测γ射线和x射线强度和能量的测试范围内具有3%以内的重复性。LINAC表征结果表明,在3.0 Gy以下的吸收剂量下,二极管是能量无关的。正如预期的那样,人体组织对辐射的吸收在很大程度上影响了体外和体内研究的不同结果。这项研究成功地证明了首次直接从核心身体区域进行非侵入性的原位辐射检测。临床相关性-一种用于体内检测的实时剂量计,已通过临床前和临床使用的辐照剂进行了表征。
{"title":"Real-Time In Situ Radiation Detection for Mitigating Injury to the Gastrointestinal Tract","authors":"Crystan McLymore, Hen-Wei Huang, Blake R. Smith, David Werder, James D Byrne, Giovanni Traverso","doi":"10.1109/NEMS57332.2023.10190941","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190941","url":null,"abstract":"Radiation therapy is a common cancer treatment method. However, injury to the gastrointestinal (GI) tract remains an unavoidable side effect, which reduces patient quality of life and increases healthcare costs. In vivo dosimetry is a treatment adaptation tool that helps reduce geometric setup uncertainties by providing real-time feedback on the patient’s absorbed dose in the local body area where the technology is positioned. Current in vivo dosimetry technology is limited to measurements in minimally invasive areas of the body. This work demonstrates the use of PIN diode-based capsule electronics placed internal to the GI tract for increased precision radiation monitoring. The diode was first characterized in vitro for response to gamma and X-ray radiation and to varying temperatures ranging from 20 °C to 40 °C. Various sources were employed for characterization, including Cesium, Cobalt, 320 kV X-ray irradiator, a thermal neutron beam sourced by a 5.7 MW nuclear reactor, and a therapeutic linear accelerator (LINAC) with 6, 10, and 18 MV beam qualities. The diode was then placed in a swine’s stomach to observe in vivo X-ray radiation detection. The diode showed repeatability within 3% during its detection of the tested range of gamma and X-ray intensities and energies. The LINAC characterization results show the diode to be energy-independent for absorbed doses below 3.0 Gy. As expected, radiation absorption by body tissue greatly influenced the differing results between the in vitro and in vivo studies. This study demonstrates successful, first-time in situ radiation detection directly from core body areas in a non-invasive manner. Clinical relevance— A real-time dosimeter, purposed for in vivo detection, has been characterized using pre-clinical and clinically used irradiators.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130371529","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
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