Pub Date : 2023-05-14DOI: 10.1109/NEMS57332.2023.10190939
Yiyang Li, Weigao Wang, Hua An, Zhengchun Peng
In this work, a flexible and transparent composite electrode of graphene-silver nanowires prepared by spray coating is proposed. The spraying method is easy to operate, low-cost, high-efficiency and can be used to prepare flexible electrodes in a large scale. The sprayed silver nanowires on graphene film can overcome the poor electrical contact behavior of the pristine silver nanowire network due to the high roughness and weak physical contact between the film and the underlying substrate. This results in a conductivity of composite electrode four times that of the silver nanowire film. After 10,000 mechanical bending cycles, the resistance of the silver nanowire film increases about 92%, while the change in the composite electrode is only 4%, indicating a dramatically improved mechanical flexibility. The presence of the graphene film prevents the oxidation of silver nanowires and the failure caused by external forces. The composite electrode demonstrates excellent moisture resistance and their electrical resistance remains stable in a wide humidity condition from 35% to 95% relative humidity. In contrast, the resistance of the pristine silver nanowire film almost doubled because of wetness. Moreover, the composite electrode possesses better light transmission compared to commercial indium tin oxide electrodes. The combined good conductivity and high transmittance show great advantages in flexible display applications and potentiality for replacing the commercialized ITO film.
{"title":"Flexible and Transparent Composite Electrode of Graphene−Silver nanowires for Quantum-Dot Light-Emitting Diodes","authors":"Yiyang Li, Weigao Wang, Hua An, Zhengchun Peng","doi":"10.1109/NEMS57332.2023.10190939","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190939","url":null,"abstract":"In this work, a flexible and transparent composite electrode of graphene-silver nanowires prepared by spray coating is proposed. The spraying method is easy to operate, low-cost, high-efficiency and can be used to prepare flexible electrodes in a large scale. The sprayed silver nanowires on graphene film can overcome the poor electrical contact behavior of the pristine silver nanowire network due to the high roughness and weak physical contact between the film and the underlying substrate. This results in a conductivity of composite electrode four times that of the silver nanowire film. After 10,000 mechanical bending cycles, the resistance of the silver nanowire film increases about 92%, while the change in the composite electrode is only 4%, indicating a dramatically improved mechanical flexibility. The presence of the graphene film prevents the oxidation of silver nanowires and the failure caused by external forces. The composite electrode demonstrates excellent moisture resistance and their electrical resistance remains stable in a wide humidity condition from 35% to 95% relative humidity. In contrast, the resistance of the pristine silver nanowire film almost doubled because of wetness. Moreover, the composite electrode possesses better light transmission compared to commercial indium tin oxide electrodes. The combined good conductivity and high transmittance show great advantages in flexible display applications and potentiality for replacing the commercialized ITO film.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125275555","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-05-14DOI: 10.1109/NEMS57332.2023.10190855
Lingchong Xue, Hongze Zhang, Zhi Zhou, Kedong Bi
The advancement of fifth-generation (5G) mobile communication technologies has led to an exponential increase in the utilization of electronic devices, thereby necessitating the development of lightweight and thin electromagnetic interference (EMI) shielding materials to mitigate the associated electromagnetic (EM) pollution. A multilayered EMI shielding composite was synthesized through an elaborate multistep process, with the epoxy resin positioned in the upper and lower layers as the protective coating and a multilayered nanocomposite film, composed of Fe3O4 nanoparticles, polythiophene (PTh) nanofiber arrays, and an Au nanofilm, embedded in the middle layer. The favorable combination of magnetic nanoparticles and conducting polymer (CP) nanofiber arrays resulted in an EMI shielding effect (EMI SE) of over 30 dB when Fe3O4 was used in moderate amounts, surpassing the EMI SE of the PTh nanofiber arrays/Au/epoxy resin EMI shielding composite (~23 dB) prepared through a similar process, but without the immersion in Fe3O4 nanoparticle dispersion. The improved EMI SE is attributed to the incorporation of magnetic nanoparticles, which enhanced the impedance mismatch between the arrays and air, and introduced magnetic losses that further attenuate the EM waves. This novel, lightweight, thin, multilayered EMI shielding nanocomposite film exhibits excellent EMI shielding performance and holds great potential for use in EMI shielding and protection for high-powered electronic devices.
{"title":"Fabrication and Electromagnetic Interference Shielding Properties of a Fe3O4/Polythiophene/Au Nanocomposite Film Coated by Epoxy Resin","authors":"Lingchong Xue, Hongze Zhang, Zhi Zhou, Kedong Bi","doi":"10.1109/NEMS57332.2023.10190855","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190855","url":null,"abstract":"The advancement of fifth-generation (5G) mobile communication technologies has led to an exponential increase in the utilization of electronic devices, thereby necessitating the development of lightweight and thin electromagnetic interference (EMI) shielding materials to mitigate the associated electromagnetic (EM) pollution. A multilayered EMI shielding composite was synthesized through an elaborate multistep process, with the epoxy resin positioned in the upper and lower layers as the protective coating and a multilayered nanocomposite film, composed of Fe3O4 nanoparticles, polythiophene (PTh) nanofiber arrays, and an Au nanofilm, embedded in the middle layer. The favorable combination of magnetic nanoparticles and conducting polymer (CP) nanofiber arrays resulted in an EMI shielding effect (EMI SE) of over 30 dB when Fe3O4 was used in moderate amounts, surpassing the EMI SE of the PTh nanofiber arrays/Au/epoxy resin EMI shielding composite (~23 dB) prepared through a similar process, but without the immersion in Fe3O4 nanoparticle dispersion. The improved EMI SE is attributed to the incorporation of magnetic nanoparticles, which enhanced the impedance mismatch between the arrays and air, and introduced magnetic losses that further attenuate the EM waves. This novel, lightweight, thin, multilayered EMI shielding nanocomposite film exhibits excellent EMI shielding performance and holds great potential for use in EMI shielding and protection for high-powered electronic devices.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121182892","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-05-14DOI: 10.1109/NEMS57332.2023.10190881
Qiongfeng Shi, Zhongda Sun, Xianhao Le, J. Xie, Chengkuo Lee
Here we report an intelligent soft robotic gripper enabled by the integration of an ultrasonic remote sensor and triboelectric sensors. Due to the noncontact distance sensing ability, the ultrasonic sensor is used to find the object’s visual information including position and height by lateral scanning. The information is then used for adjusting the robotic gripper to an appropriate grasp location, after which grasp operation is performed to obtain the object’s tactile information through triboelectric bending and tactile sensors. To efficiently analyze the multimodal information, a deep-learning neural network based on feature-level data fusion is constructed, which is able to achieve a high accuracy of 99.3% in classifying 14 objects, enabling the intelligent soft robotic gripper for various smart applications.
{"title":"Intelligent Soft Robotic Gripper Enabled by Multimodal Sensors and Deep Learning","authors":"Qiongfeng Shi, Zhongda Sun, Xianhao Le, J. Xie, Chengkuo Lee","doi":"10.1109/NEMS57332.2023.10190881","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190881","url":null,"abstract":"Here we report an intelligent soft robotic gripper enabled by the integration of an ultrasonic remote sensor and triboelectric sensors. Due to the noncontact distance sensing ability, the ultrasonic sensor is used to find the object’s visual information including position and height by lateral scanning. The information is then used for adjusting the robotic gripper to an appropriate grasp location, after which grasp operation is performed to obtain the object’s tactile information through triboelectric bending and tactile sensors. To efficiently analyze the multimodal information, a deep-learning neural network based on feature-level data fusion is constructed, which is able to achieve a high accuracy of 99.3% in classifying 14 objects, enabling the intelligent soft robotic gripper for various smart applications.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"306 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122310366","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-05-14DOI: 10.1109/NEMS57332.2023.10190890
Chen Zhang, Rui Chen, Wenliya Luo, Yu Xie, Wei Zhou, Tao Luo
This paper describes a rapid method for batch fabrication of flexible paper-based pressure sensors. The processes involve printing silver electrodes on PET film using large-area screen printing, and soaking flexible papers in PEDOT: PSS aqueous dispersion. Then, papers are cut into square shaped pieces with a specific size using UV laser after drying to serve as the pressure sensing layer. The pressure sensing layers are laminated by the upper and lower electrodes to form a sandwich structure and sealed using a heat-sealing roller for thermoplastic packing. Multiple sensors are then cut and separated using UV laser. The process yields approximately 48 sensors per hour with a thickness of 0.16 mm, providing great flexibility for conformal attachment. These sensors have piecewise linearities over a pressure sensing range up to 325 kPa. They also exhibit fast excellent response time (25 ms) and recovery time (40 ms), good stability under the conditions of 2.5 Hz frequency response and 1000 cycles of loading and unloading. The simple and rapid manufacturing process makes these sensors highly promising for various applications such as robotic tactile sensing and wearable healthcare.
{"title":"Batch Fabrication of Flexible Paper-Based Pressure Sensors via Thermoplastic Self-Packaging","authors":"Chen Zhang, Rui Chen, Wenliya Luo, Yu Xie, Wei Zhou, Tao Luo","doi":"10.1109/NEMS57332.2023.10190890","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190890","url":null,"abstract":"This paper describes a rapid method for batch fabrication of flexible paper-based pressure sensors. The processes involve printing silver electrodes on PET film using large-area screen printing, and soaking flexible papers in PEDOT: PSS aqueous dispersion. Then, papers are cut into square shaped pieces with a specific size using UV laser after drying to serve as the pressure sensing layer. The pressure sensing layers are laminated by the upper and lower electrodes to form a sandwich structure and sealed using a heat-sealing roller for thermoplastic packing. Multiple sensors are then cut and separated using UV laser. The process yields approximately 48 sensors per hour with a thickness of 0.16 mm, providing great flexibility for conformal attachment. These sensors have piecewise linearities over a pressure sensing range up to 325 kPa. They also exhibit fast excellent response time (25 ms) and recovery time (40 ms), good stability under the conditions of 2.5 Hz frequency response and 1000 cycles of loading and unloading. The simple and rapid manufacturing process makes these sensors highly promising for various applications such as robotic tactile sensing and wearable healthcare.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116483001","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-05-14DOI: 10.1109/NEMS57332.2023.10190901
Chushu Zhu, Peitao Dong, Xuezhong Wu
Virus identification has great significance to respond appropriately to pandemic disease threats. Therefore, an amplification-free DNA detection method based on surfaceenhanced Raman scattering (SERS) for severe acute respiratory syndrome-coronavirus-2 (SARS-CoV-2) N gene was proposed. Herein, Au nanobipyramids (AuNBPs) are coupled with Ag Nanorod Array (AgNRA) to create plasmonic “hot spots” in the presence of target DNA, which enables a large density of Raman labels to experience an intense, spatially distributed electromagnetic field, ensures the highly sensitive DNA detection. Quantitative analysis was performed by monitoring the characteristic Raman peak intensity of Raman labels. The target DNA quantity in the range of 10 fM to 10 nM, and the limit of detection (LOD) was 3.16 fM. This approach exhibited good detection performance and is expected to be a potentially useful tool for virus detection.
病毒鉴定对于适当应对大流行性疾病威胁具有重要意义。为此，我们提出了一种基于表面增强拉曼散射(SERS)的非扩增DNA检测方法，用于检测SARS-CoV-2 (SARS-CoV-2) N基因。本文将金纳米金字塔(aunbp)与银纳米棒阵列(AgNRA)耦合，在靶DNA存在的情况下产生等离子体“热点”，使大密度的拉曼标签能够经历强烈的、空间分布的电磁场，确保了DNA检测的高灵敏度。通过监测拉曼标签的特征拉曼峰强度进行定量分析。目标DNA量在10 fM ~ 10 nM范围内，检测限(LOD)为3.16 fM。该方法具有良好的检测性能，有望成为一种潜在的有用的病毒检测工具。
{"title":"Amplification-Free DNA Biosensing by Surface-Enhanced Raman Scattering Based on Au Nanobipyramids Decorated Ag Nanorod Array","authors":"Chushu Zhu, Peitao Dong, Xuezhong Wu","doi":"10.1109/NEMS57332.2023.10190901","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190901","url":null,"abstract":"Virus identification has great significance to respond appropriately to pandemic disease threats. Therefore, an amplification-free DNA detection method based on surfaceenhanced Raman scattering (SERS) for severe acute respiratory syndrome-coronavirus-2 (SARS-CoV-2) N gene was proposed. Herein, Au nanobipyramids (AuNBPs) are coupled with Ag Nanorod Array (AgNRA) to create plasmonic “hot spots” in the presence of target DNA, which enables a large density of Raman labels to experience an intense, spatially distributed electromagnetic field, ensures the highly sensitive DNA detection. Quantitative analysis was performed by monitoring the characteristic Raman peak intensity of Raman labels. The target DNA quantity in the range of 10 fM to 10 nM, and the limit of detection (LOD) was 3.16 fM. This approach exhibited good detection performance and is expected to be a potentially useful tool for virus detection.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126828760","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-05-14DOI: 10.1109/NEMS57332.2023.10190862
Mengge Wu, K. Yao, Junsheng Yu, Xinge Yu
In vivo recordings of brain activity are vital for diagnostic purposes and brain science research. Organic electrochemical transistors (OECTs) are one of the most promising candidates due to their excellent signal-to-noise ratio, mechanical flexibility, and biocompatibility. Here, we propose the engineering of a multichannel, biocompatible OECT array, that is capable of laminating onto soft tissues seamlessly, monitoring neuron firing with high spatiotemporal resolution. The successful demonstrations of this device to map micro-electrocorticography in the rat model in vivo, demonstrate the great potential of this technology for clinical applications, human-brain interfaces, metaverse, etc.
{"title":"Recording of brain activity using multichannel, biocompatible organic electrochemical transistors in vivo","authors":"Mengge Wu, K. Yao, Junsheng Yu, Xinge Yu","doi":"10.1109/NEMS57332.2023.10190862","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190862","url":null,"abstract":"In vivo recordings of brain activity are vital for diagnostic purposes and brain science research. Organic electrochemical transistors (OECTs) are one of the most promising candidates due to their excellent signal-to-noise ratio, mechanical flexibility, and biocompatibility. Here, we propose the engineering of a multichannel, biocompatible OECT array, that is capable of laminating onto soft tissues seamlessly, monitoring neuron firing with high spatiotemporal resolution. The successful demonstrations of this device to map micro-electrocorticography in the rat model in vivo, demonstrate the great potential of this technology for clinical applications, human-brain interfaces, metaverse, etc.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127795816","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Many applications in micro-tissue engineering need to use concave microwells and microchannels to mimic the in vivo microenvironment, such as the culture of spheroids and construction of artificial blood vessels. Here, we propose a novel method of fabrication of concave microwells and microchannels by off-stoichiometry thiol-ene (OSTE) backside lithography. At first, we use OSTE backside lithography to fabricate convex microstructures on a solid substrate assisted by a diffusing glass. Then we use the solid substrate for replica molding of gelatin or agarose gel to get concave microwells and microchannels on a gel substrate. Our method brings convenience for the fabrication of concave microwells and microchannels, and can find potential applications in micro-tissue engineering immediately.
{"title":"Fabrication of Concave Microwells and Microchannels by Off-stoichiometry Thiol-ene (OSTE) Backside Lithography","authors":"Muyang Zhang, Haonan Li, Zhiqing Xiao, Zitao Feng, Shang-Hui Yu, Zejingqiu Chen, Huiru Zhang, Weijin Guo","doi":"10.1109/NEMS57332.2023.10190903","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190903","url":null,"abstract":"Many applications in micro-tissue engineering need to use concave microwells and microchannels to mimic the in vivo microenvironment, such as the culture of spheroids and construction of artificial blood vessels. Here, we propose a novel method of fabrication of concave microwells and microchannels by off-stoichiometry thiol-ene (OSTE) backside lithography. At first, we use OSTE backside lithography to fabricate convex microstructures on a solid substrate assisted by a diffusing glass. Then we use the solid substrate for replica molding of gelatin or agarose gel to get concave microwells and microchannels on a gel substrate. Our method brings convenience for the fabrication of concave microwells and microchannels, and can find potential applications in micro-tissue engineering immediately.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"2015 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128078137","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-05-14DOI: 10.1109/NEMS57332.2023.10190942
Lei Li, Han Qi, Wei Xu, Yujuan Wang, Kedong Bi
Graphene and molybdenum disulfide (MoS2) nanopores, with their superior characteristics and subnanometer thickness, are expected to be the next generation of rapid and low-cost methods of DNA sequencing. In this paper, focused ion beam (FIB) is employed to fabricate nanopores with similar sizes on these two-dimensional (2D) materials to compare their performance in sequencing DNA. According to our experimental results, graphene nanopores have a stronger interaction with DNA than MoS2, which contributes to a better temporal resolution. However, in the low-frequency region, the 1/f noise level of MoS2 is obviously lower than that of graphene. Furthermore, the nanopore was fabricated on graphene and MoS2 heterostructure for DNA sequencing, and the translocation events were successfully captured. It is demonstrated that the new heterostructure reduces the high noise level in the low-frequency region of graphene nanopores in DNA sequencing. It is expected that graphene and MoS2 can complement each other and facilitate the realization of single-base detection resolution in the future.
{"title":"Evaluating Graphene and Molybdenum Disulfide Nanopores for DNA Sequencing","authors":"Lei Li, Han Qi, Wei Xu, Yujuan Wang, Kedong Bi","doi":"10.1109/NEMS57332.2023.10190942","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190942","url":null,"abstract":"Graphene and molybdenum disulfide (MoS2) nanopores, with their superior characteristics and subnanometer thickness, are expected to be the next generation of rapid and low-cost methods of DNA sequencing. In this paper, focused ion beam (FIB) is employed to fabricate nanopores with similar sizes on these two-dimensional (2D) materials to compare their performance in sequencing DNA. According to our experimental results, graphene nanopores have a stronger interaction with DNA than MoS2, which contributes to a better temporal resolution. However, in the low-frequency region, the 1/f noise level of MoS2 is obviously lower than that of graphene. Furthermore, the nanopore was fabricated on graphene and MoS2 heterostructure for DNA sequencing, and the translocation events were successfully captured. It is demonstrated that the new heterostructure reduces the high noise level in the low-frequency region of graphene nanopores in DNA sequencing. It is expected that graphene and MoS2 can complement each other and facilitate the realization of single-base detection resolution in the future.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"66 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134491788","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-05-14DOI: 10.1109/NEMS57332.2023.10190859
Dayin Wang, J. Zhao, Yuan Luo
This paper proposes a novel microfluidic device based on the synergy of deterministic lateral displacement (DLD) and dielectrophoresis (DEP) techniques, which enables the differentiation of exosomes from both large extracellular vesicles (e.g. apoptotic vesicles, ectosomes) and particles that are close in size but differ in biochemical compositions (e.g. Lipoproteins, Exomeres, Retroviruses). We fabricated nanoscale pillar arrays through $gt1 ~mu$m resolution photolithography by making innovative use of thermal oxidation, which significantly reduces fabrication costs by avoiding the use of high-precision lithography. We further proceeded to optimize device design with simulation study and conduct experimental verification.
{"title":"A Microfluidic Device for Nano-scale Extracellular Vesicles Differentiation Via The Synergetic Effect of Deterministic Lateral Displacement and Dielectrophoresis","authors":"Dayin Wang, J. Zhao, Yuan Luo","doi":"10.1109/NEMS57332.2023.10190859","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190859","url":null,"abstract":"This paper proposes a novel microfluidic device based on the synergy of deterministic lateral displacement (DLD) and dielectrophoresis (DEP) techniques, which enables the differentiation of exosomes from both large extracellular vesicles (e.g. apoptotic vesicles, ectosomes) and particles that are close in size but differ in biochemical compositions (e.g. Lipoproteins, Exomeres, Retroviruses). We fabricated nanoscale pillar arrays through $gt1 ~mu$m resolution photolithography by making innovative use of thermal oxidation, which significantly reduces fabrication costs by avoiding the use of high-precision lithography. We further proceeded to optimize device design with simulation study and conduct experimental verification.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132124673","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-05-14DOI: 10.1109/NEMS57332.2023.10190938
Weihong Zhang, M. R. Buyong, M. A. Mohamed, J. Larue, A. A. Hamzah
Carbon has superior characteristics over silicon that is widely used in nano- and micro- fabrication. The carbon cantilevers in this study are converted from positive and negative photoresist materials. Three approaches were studied to measure Young’s modulus $(E)$ of carbon film. The vibration method has displayed its suitability for the pyrolyzed carbon film characterization with remarkable frequency difference of the carbon cantilevers. The carbon films derived from the two photoresist materials both have the E value lower than that of glassy carbon. The $2 mu mathrm{m}$ thick cantilever derived from AZ of length at $100 mu mathrm{m}$ and width at $50 mu mathrm{m}$ has a resonant frequency of 27KHz in air with a sharp peak. Even though initiated at a low frequency, the low E carbon cantilever has shown a series of sharp vibration response. The carbon cantilever structure is expected to be a good candidate for making energy harvesters and sensors.
碳具有比硅优越的特性，硅广泛应用于纳米和微制造。本研究中的碳悬臂梁由正负极光刻胶材料转化而成。研究了三种测量碳膜杨氏模量的方法。振动法在碳悬臂梁的频率差异显著的情况下，显示了其对热解碳膜表征的适用性。两种光刻胶制成的碳膜的E值均低于玻璃碳。2 mu mathrm{m}$厚的悬臂源自AZ，长度为$100 mu mathrm{m}$，宽度为$50 mu mathrm{m}$，其在空气中的谐振频率为27KHz，具有尖峰。低E碳悬臂梁虽然起始频率较低，但仍表现出一系列剧烈的振动响应。碳悬臂结构有望成为制造能量收集器和传感器的良好候选者。
{"title":"Fabrication and Characterization of Carbon Cantilevers Derived from Photoresists","authors":"Weihong Zhang, M. R. Buyong, M. A. Mohamed, J. Larue, A. A. Hamzah","doi":"10.1109/NEMS57332.2023.10190938","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190938","url":null,"abstract":"Carbon has superior characteristics over silicon that is widely used in nano- and micro- fabrication. The carbon cantilevers in this study are converted from positive and negative photoresist materials. Three approaches were studied to measure Young’s modulus $(E)$ of carbon film. The vibration method has displayed its suitability for the pyrolyzed carbon film characterization with remarkable frequency difference of the carbon cantilevers. The carbon films derived from the two photoresist materials both have the E value lower than that of glassy carbon. The $2 mu mathrm{m}$ thick cantilever derived from AZ of length at $100 mu mathrm{m}$ and width at $50 mu mathrm{m}$ has a resonant frequency of 27KHz in air with a sharp peak. Even though initiated at a low frequency, the low E carbon cantilever has shown a series of sharp vibration response. The carbon cantilever structure is expected to be a good candidate for making energy harvesters and sensors.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132710228","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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