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2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)最新文献

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A Tunable Dual-mode Lamb Wave Resonator with Floating Electrodes 具有浮动电极的可调谐双模兰姆波谐振器
Zhiwei Wen, Xiyu Gu, Yao Cai, T. Luo, Xin-Yi Tong, Wenjuan Liu, Yuanhang Qu, Yan Liu, Chengliang Sun
In this paper, we present a tunable dual-mode Lamb wave resonator (LWR) based on Aluminum nitride thin films. The dual-mode LWR consists of floating electrodes positioned between interdigital electrodes (IDTs), which results in two resonant peaks, operating at 1.69GHz and 1.757 GHz when the height (H) of floating electrodes is $0.05 mu mathrm{m}$ and the width W is $0.7 mu mathrm{m}$, respectively. The resonant frequency and impedance ratio of the two peaks are tuned by the size of the floating electrodes. When the H is from $0.05 mu mathrm{m}$ to 0.25 $mu mathrm{m}$ and the W is $0.7 mu mathrm{m}$, the distance between the two peaks $(Delta f)$ is adjusted from 67MHz to 455MHz. Furthermore, as W increases, the impedance ratio of the first peak is amplified while the second peak is attenuated. The coupling strength of the two peaks is close to that of conventional single-peak resonators. The tunable LWR with optimized floating electrodes shows great potential in fabricating high-frequency dual-passband filters.
本文提出了一种基于氮化铝薄膜的可调谐双模兰姆波谐振器(LWR)。双模LWR由位于数字间电极(idt)之间的浮动电极组成,当浮动电极的高度(H)为$0.05 mu mathrm{m}$,宽度W为$0.7 mu mathrm{m}$时,产生两个谐振峰,分别工作在1.69GHz和1.757 GHz。两个峰值的谐振频率和阻抗比由浮电极的大小来调节。当H为$0.05 mu mathrm{m}$ ~ 0.25 $mu mathrm{m}$, W为$0.7 mu mathrm{m}$时,两个峰值之间的距离$(Delta f)$从67MHz调整到455MHz。此外,随着W的增大,第一个峰值的阻抗比被放大,而第二个峰值的阻抗比被衰减。双峰耦合强度接近传统的单峰谐振器。优化后的浮动电极可调谐LWR在制造高频双通带滤波器方面显示出巨大的潜力。
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引用次数: 0
The Frequency Avoid-Crossing Effect Induced by the Hybrid Modal Coupling in a Disk MEMS Resonator Gyroscope 盘式MEMS谐振陀螺仪中混合模态耦合引起的避频效应
Kuo Lu, Kai Wu, Qingsong Li, Xuezhong Wu, D. Xiao
This paper reports the frequency avoid-crossing effect induced by the hybrid modal coupling in a disk resonator gyroscope. In the case of stiffness mismatch, the orthogonal response signals of hybrid modes can be simultaneously detected due to the existence of stiffness axis deflection angle. With the changing bias voltage, the hybrid modal coupling between the same-order eigenmodes can be described theoretically and experimentally. When two hybrid modal frequencies are gradually approximated, the frequency avoid-crossing effect appears under the influence of the stiffness axis declination. It demonstrates that the avoid-crossing region is determined by the stiffness axis declination, which reflects the hybrid modal coupling strength and provides guidelines for the tunable hybrid couplings.
本文报道了圆盘谐振陀螺仪中由混合模态耦合引起的避频交叉效应。在刚度失配的情况下,由于刚度轴转角的存在,混合模态的正交响应信号可以同时被检测到。随着偏置电压的变化,同阶本征模之间的混合模态耦合可以从理论上和实验上得到描述。当两个混合模态频率逐渐逼近时,在刚度轴偏角的影响下,出现了频率避免交叉效应。结果表明,避免交叉区域由刚度轴倾角决定,反映了混合模态耦合的强度,为可调混合模态耦合提供了指导。
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引用次数: 0
Detection of Different Structural Proteins Using Solid-state Nanopores 利用固态纳米孔检测不同结构蛋白
Lichun Zou, Peifu Bian, Haiyan Wang, Jingjie Sha
As a crucial biomolecule of life, protein has diverse three-dimensional structural and functional properties, typically with various $alpha$-helix and $beta$-fold ratios. Its structure in living organisms provides important information for the study of normal or pathological physiological processes. And the nanopore technology, as a novel single-molecule sensor, has been used extensively in protein molecular detection and structural identification, because of its advantages such as label-free and easy operation. Here, we use solid-state nanopores to detect two kinds of structural proteins. The results show that since different proteins cause different blocking current signals when passing through solid-state nanopores, so we confirmed that solid-state nanopores enable protein characterization and the $beta$-fold-rich proteins have more structural possibilities.
蛋白质作为生命的重要生物分子,具有多种三维结构和功能特性,通常具有不同的$alpha$ -螺旋比和$beta$ -折叠比。它在生物体中的结构为正常或病理生理过程的研究提供了重要信息。而纳米孔技术作为一种新型的单分子传感器,由于其无需标记、操作简单等优点,在蛋白质分子检测和结构鉴定中得到了广泛的应用。在这里,我们使用固态纳米孔来检测两种结构蛋白。结果表明,由于不同的蛋白质在通过固态纳米孔时会产生不同的阻断电流信号,因此我们证实了固态纳米孔能够表征蛋白质,并且富含$beta$ -fold的蛋白质具有更多的结构可能性。
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引用次数: 0
Dual-Arm Nanorobotic System for Measuring Embryo with Minimum Disturbances 最小干扰双臂纳米机器人胚胎测量系统
Yuxuan Xue, Yichen Wang, Xinyu Liu, Yin-Lau Lee, Jiawei Zhang, W. Yeung, Ning Xi
The understanding of the embryo behavior, especially the early-stage development was hampered by the lack of proper diagnostic tools for clinical assessment before embryo implantation. Mechanical properties are label free biomarkers for the cells/embryo differentiation, as the atomic force microscopy (AFM) based experiment could simultaneously derive the surface morphological and mechanical information without damage to the cells. However, for the measurement of floating embryo, the lack of the constraint from the substrate will induce fluctuation and movement in lateral direction, causing failure in accurate measurement. Traditionally, researchers rely on the physical or chemical bounds to constrict the floating objects which may alter the objects’ properties and decrease the measurable region. Thus, it’s significant to implement the micromanipulator-based robot with AFM system to accomplish multiple tasks in the manipulation and measurement of single embryo. The system established in the current study could precisely manipulate and sense the living floating embryo without any extra treatment.
由于在胚胎植入前缺乏适当的临床评估诊断工具,对胚胎行为,特别是早期发育的理解受到阻碍。力学性能是细胞/胚胎分化的无标记生物标志物,因为基于原子力显微镜(AFM)的实验可以在不损伤细胞的情况下同时获得表面形态和力学信息。然而,对于浮动胚胎的测量,缺乏来自基材的约束,会引起波动和横向运动,导致无法精确测量。传统上,研究人员依靠物理或化学边界来压缩漂浮物,这可能会改变物体的性质,减少可测量的区域。因此,在单个胚胎的操作和测量中,利用AFM系统实现基于微机械臂的机器人来完成多项任务具有重要意义。本研究建立的系统可以精确地操纵和感知活体漂浮胚胎,而无需任何额外的处理。
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引用次数: 0
Simulation of A Bidirectional Microfluidic Pump Actuated by Ultrasound Based on Microcantilever Arrays 基于微悬臂阵列的超声驱动双向微流控泵仿真
Dongyang Chen, Lican Zheng, Jincheng Wang, Yu Xie, Wei Zhou, Tao Luo
In this work, we propose a novel design of a microfluidic pump that can pump flow bidirectionally by changing the frequency of the external remote ultrasound. Finite element analysis (FEA) is used to analyze the feasibility of our design. The bidirectional microfluidic pumping fundamentally relies on the utilization of microcantilevers with different dimensions for achieving distinct resonance frequencies. In this way, ultrasound with different frequencies can be used to induce bidirectional acoustic streaming flow in the microchannel by selective actuation of two microcantilever arrays. The simulation presented in this work shows that the direction of pumping flow can be changed by changing the frequency of the ultrasound, which lays a strong foundation for us to develop an fully implantable bidirectional micropump for applications such as implantable drug delivery and biopsy.
在这项工作中,我们提出了一种新的微流体泵的设计,可以通过改变外部远程超声的频率来双向泵送流动。采用有限元分析(FEA)对设计的可行性进行了分析。双向微流控泵送从根本上依赖于利用不同尺寸的微悬臂梁来实现不同的共振频率。这样,不同频率的超声可以通过选择性驱动两个微悬臂阵列来诱导微通道内的双向声流流动。本研究的模拟结果表明,通过改变超声频率可以改变泵送流的方向,这为我们开发一种完全可植入的双向微泵,用于植入式药物输送和活检等应用奠定了坚实的基础。
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引用次数: 0
The anodic aluminum oxide (AAO) template fabricated Localized Surface Plasmon Resonance (LSPR) sensor for the plasmonic coupling effect study 采用阳极氧化铝(AAO)模板制备局部表面等离子体共振(LSPR)传感器,研究等离子体耦合效应
Chia-Chin Hsieh, Wang-Jiun Lee, Kuan-Chun Yeh, N. Huang
The localized surface plasmon resonance (LSPR) sensing has drawn significant attention in biosensing fields due to its label-free, dynamic, sensitive, and ease-of-operation sensing capability. In our study, we utilized an anodic aluminum oxide (AAO) template to fabricate a large-area LSPR sensor with adjustable nanostructure parameters such as period and diameter. By using different nanostructure patterns, we investigated the plasmonic coupling effect and optimized the nanostructure geometry. Our research demonstrates the real-time and multipoint detection of pathogen DNA sequences. Based on the above features, we believe that this platform has the potential for point-of-care (POC) biosensing applications.
局部表面等离子体共振(LSPR)传感技术以其无标记、动态、灵敏、易操作等特点在生物传感领域受到广泛关注。在我们的研究中,我们利用阳极氧化铝(AAO)模板制作了一个具有可调节纳米结构参数(如周期和直径)的大面积LSPR传感器。采用不同的纳米结构模式,研究了等离子体耦合效应,优化了纳米结构的几何形状。我们的研究展示了病原体DNA序列的实时和多点检测。基于上述特点,我们认为该平台具有点护理(POC)生物传感应用的潜力。
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引用次数: 0
Research on the Temperature-dependent Performance Improvement of Butterfly Gyroscope with Stress Isolation 利用应力隔离技术改善蝶形陀螺仪温度依赖性性能的研究
Yunbin Kuang, D. Xiao, Z. Hou, Xuezhong Wu, Gao Liu
The temperature-dependent performance of the x/y-axis MEMS gyroscopes still becomes a limit for high precision. This paper theoretically analyzed the zero offset output and scale factor of the butterfly gyroscope influenced by thermal stress and the hysteresis of strain. And the stress isolated structure was designed to integrate with the gyroscope for relieving the thermal stress. The pre-buried etched mask process was proposed for its fabrication. Tested in variable-temperature environment, the zero offset output difference between heating and cooling process of optimized butterfly gyroscope was declined from 0.08°/s to 0.01°/s. Moreover, the zero-bias stability and instability after compensation were also improved from 32.16°/h to 8.67°/h and 3.04°/h to 0.78°/h respectively, which demonstrate the effectiveness of optimization design. At the same time, the reported temperature-dependent performance reached a high level in the x/y-axis MEMS gyroscopes.
x/y轴MEMS陀螺仪的温度依赖性能仍然成为高精度的限制。本文从理论上分析了热应力和应变滞后对蝶形陀螺仪零偏输出和比例系数的影响。并设计了与陀螺仪相结合的隔应力结构,以消除热应力。提出了预埋蚀刻掩膜的制备方法。在变温环境下测试,优化后的蝶形陀螺仪加热和冷却过程的零偏输出差由0.08°/s降至0.01°/s。补偿后的零偏稳定性和不稳定性也分别从32.16°/h和3.04°/h提高到8.67°/h和0.78°/h,证明了优化设计的有效性。同时,报告的温度依赖性能在x/y轴MEMS陀螺仪中达到了很高的水平。
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引用次数: 0
Carbon nanotubes grown on sputtered copper islands using atmospheric pressure chemical vapor deposition for biosensor applications 用常压化学气相沉积法在溅射铜岛上生长碳纳米管,用于生物传感器
Anis Amirah Alim, Roharsyafinaz Roslan, Sh. Nadzirah, M. Nassir, Weihong Zhang, A. Ismail, Dee Chang Fu, Mohd Ambri Mohammed, J. Yunas, M. R. Buyong, A. A. Hamzah
As-deposited copper on silicon wafer by sputtering and subsequent thermal annealing at atmospheric pressure enables the formation of copper islands. Dewetting of copper catalyst by annealing promotes the growth of self-assembly carbon nanotubes (CNT) on the copper islands. A few nanometers sputtered copper thin film was annealed with the presence of argan gas in vacuum-less chamber under 1000$^{circ}C$ to promote the dewetting process of copper thin film. $40 cm^{3}$/min of methane gas was supplied inside the chamber to grow the CNT. Due to this fabrication simplicity with the potential for mass production, dewetting technique was chosen compared to other preparation of catalyst nanoparticles method. Atomic Force Microscopy (AFM) and Field Emission Scanning Electron (FESEM) were done to study the morphology of the sample. Raman analysis was done to identify the quality of CNT with the presence of D,G, G’ and D peaks. The current obtained in the measurement was 55.3 $mu A$ in DC mode. Thus, CNT has garnered much attention as one of the most potential building blocks for high sensitivity and rapid detection sensing system.
通过溅射在硅片上沉积铜,然后在常压下进行热退火,可以形成铜岛。通过退火脱湿铜催化剂促进了自组装碳纳米管(CNT)在铜岛上的生长。在无真空室中,在1000$^{circ}C$的温度下,对几纳米溅射铜薄膜进行氩气退火,以促进铜薄膜的脱湿过程。在实验室内提供$40 cm^{3}$/min的甲烷气体来生长碳纳米管。由于该技术制备简单且具有批量生产的潜力,因此与其他制备纳米催化剂的方法相比,我们选择了脱湿技术。利用原子力显微镜(AFM)和场发射扫描电子显微镜(FESEM)研究了样品的形貌。通过拉曼分析来确定碳纳米管的质量与D,G, G '和D峰的存在。在直流模式下,测量得到的电流为55.3 $mu A$。因此,碳纳米管作为高灵敏度和快速检测传感系统的最有潜力的组成部分之一受到了广泛的关注。
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引用次数: 0
Loitering Missile Environment Information analysis and application in Fuze S&A 游荡导弹环境信息分析及其在引信S&A中的应用
Junlin Lu, W. Nie, Yun Cao, Xiaoyu Kong, He Wang, Jionglu Wang
As a new kind of ammunition on the battlefield in recent years, airborne loitering missile is widely used to carry out various combat tasks and has attracted extensive attention from all countries in the world. Based on the campaign mode of the airborne loitering missile, there is no strong inertial force during its launching and flight, so the fuze S&A cannot rely on the strong inertial force. In this paper, identification and processing methods are designed for the weak environment information, which includes aerodynamic and attitude information. In the launching stage, the variations of missile’s aerodynamic and attitude angle are large and frequent. In contrast, the variations are slight and stable in the straight-level flight stage. Based on MEMS sensors and the missile guidance and controlling system, the difference of the weak environment information between the two adjacent stages can be obtained. Based on this difference, the loitering missile can distinguish whether it is in the straight-level flight stage, and it can be used as the typical feature for the missile fuze S&A arming. Due to the MEMS sensors and processing circiuts, the volume of fuze S&A will be smaller and the safety distance between the launching aircraft will also be extended by this method.
机载游荡导弹作为近年来出现在战场上的一种新型弹药,被广泛用于执行各种作战任务,受到了世界各国的广泛关注。根据机载巡航导弹的作战模式,其发射和飞行过程中不存在强惯生力,引信S&A不能依赖于强惯生力。本文设计了包括气动信息和姿态信息在内的弱环境信息的识别和处理方法。在发射阶段,导弹的气动角和姿态角变化大且频繁。相比之下,这种变化在直线飞行阶段是轻微和稳定的。基于MEMS传感器和导弹制导控制系统,可以获得相邻两级弱环境信息的差异。基于这一差异,巡航导弹可以区分其是否处于直线飞行阶段,并可作为导弹引信S&A武装的典型特征。由于采用了MEMS传感器和处理电路,该方法可以减小引信S&A的体积,延长发射飞机之间的安全距离。
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引用次数: 0
Multifunctional lipopolymeric nanosystem for photothermal assisted cancer therapy 光热辅助癌症治疗的多功能脂聚合物纳米系统
Monika Pebam, A. Rengan
PTT has shown promising target cancer therapy and has been able to achieve high cancer cell death rates while rescuing normal tissue. In this article, IR-775 a less explored hydrophobic photosensitizer was used in combination with polyphenols for the treatment of cancer. The nanosystem consists of HSPC, PLA, IR-775 dye and the polyphenols constituents from Terminalia chebula. The lipopolymeric nanosystem HP pIR NPs (HSPC-PLA-polyphenols extract-IR775) exhibit size range of (142.6 ± 2nm). HP pIR NPs have shown excellent intracellular uptake when studied against A549 and zebrafish. Both the PDT/PTT trigger ROS production and enhance the cancer cell death inhibiting the growth of the remnant cell.
PTT已经显示出有希望的靶向癌症治疗,并且能够在挽救正常组织的同时实现高癌细胞死亡率。在这篇文章中,IR-775是一种较少被探索的疏水性光敏剂,它与多酚类化合物联合用于治疗癌症。该纳米体系由HSPC、PLA、IR-775染料和慈兰多酚类成分组成。脂聚合物纳米体系HP pIR NPs (hspc - pla -多酚提取物- ir775)的尺寸范围为(142.6±2nm)。在对A549和斑马鱼的研究中,HP pIR NPs显示出优异的细胞内摄取。PDT/PTT均可触发ROS的产生,增强癌细胞的死亡,抑制残余细胞的生长。
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引用次数: 0
期刊
2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
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