In microprocessing with laser beam such as laser texturing, quality of processing is influenced significantly by flow of molten pool. It is useful for improvement of processing quality to elucidate both flow of molten pool and mechanism of processing. Theoretical analysis or computer simulation is effective, but there are many problems to be solved in modeling and numerical calculations. One of them is treatment of free surface of molten pool. In this study, a simple method of thermohydrodynamics analysis of molten pool with free surface accompanied with evaporation was proposed. Latent heat of evaporation, movement of gas and liquid interface, evaporation recoil force and surface tension caused by temperature gradient, that is, Marangoni force which accelerates the flow were considered systematically. Free surface of molten pool was treated in this study by introducing VOF method where volume fraction of liquid phase is considered. The present simulation method was applied to the analysis of flow of molten metal in laser texturing.In microprocessing with laser beam such as laser texturing, quality of processing is influenced significantly by flow of molten pool. It is useful for improvement of processing quality to elucidate both flow of molten pool and mechanism of processing. Theoretical analysis or computer simulation is effective, but there are many problems to be solved in modeling and numerical calculations. One of them is treatment of free surface of molten pool. In this study, a simple method of thermohydrodynamics analysis of molten pool with free surface accompanied with evaporation was proposed. Latent heat of evaporation, movement of gas and liquid interface, evaporation recoil force and surface tension caused by temperature gradient, that is, Marangoni force which accelerates the flow were considered systematically. Free surface of molten pool was treated in this study by introducing VOF method where volume fraction of liquid phase is considered. The present simulation method was applied to the analysis of flow of molt...
{"title":"Thermohydrodynamics Analysis of Fusion Phenomena Accompanied by Evaporation Due to Laser Irradiation","authors":"E. Ohmura, H. Hayashi, I. Miyamoto","doi":"10.2351/1.5059743","DOIUrl":"https://doi.org/10.2351/1.5059743","url":null,"abstract":"In microprocessing with laser beam such as laser texturing, quality of processing is influenced significantly by flow of molten pool. It is useful for improvement of processing quality to elucidate both flow of molten pool and mechanism of processing. Theoretical analysis or computer simulation is effective, but there are many problems to be solved in modeling and numerical calculations. One of them is treatment of free surface of molten pool. In this study, a simple method of thermohydrodynamics analysis of molten pool with free surface accompanied with evaporation was proposed. Latent heat of evaporation, movement of gas and liquid interface, evaporation recoil force and surface tension caused by temperature gradient, that is, Marangoni force which accelerates the flow were considered systematically. Free surface of molten pool was treated in this study by introducing VOF method where volume fraction of liquid phase is considered. The present simulation method was applied to the analysis of flow of molten metal in laser texturing.In microprocessing with laser beam such as laser texturing, quality of processing is influenced significantly by flow of molten pool. It is useful for improvement of processing quality to elucidate both flow of molten pool and mechanism of processing. Theoretical analysis or computer simulation is effective, but there are many problems to be solved in modeling and numerical calculations. One of them is treatment of free surface of molten pool. In this study, a simple method of thermohydrodynamics analysis of molten pool with free surface accompanied with evaporation was proposed. Latent heat of evaporation, movement of gas and liquid interface, evaporation recoil force and surface tension caused by temperature gradient, that is, Marangoni force which accelerates the flow were considered systematically. Free surface of molten pool was treated in this study by introducing VOF method where volume fraction of liquid phase is considered. The present simulation method was applied to the analysis of flow of molt...","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"421 1","pages":"196-197"},"PeriodicalIF":0.0,"publicationDate":"1998-09-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86843253","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1998-06-30DOI: 10.1007/978-1-4615-6379-2_17
Nobuhiko Henmi, R. Murata
{"title":"Vibration Control in Cutting Process by an Active Work-Rest","authors":"Nobuhiko Henmi, R. Murata","doi":"10.1007/978-1-4615-6379-2_17","DOIUrl":"https://doi.org/10.1007/978-1-4615-6379-2_17","url":null,"abstract":"","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"1 1","pages":"133-134"},"PeriodicalIF":0.0,"publicationDate":"1998-06-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79606911","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Takahiro Someji, Masaru Sasaki, M. Yoshida, N. Akiyama
The basic technology to measure rapidly the surface roughness of 3-dimensional cast metals using an optical non-contact method has been developed. In the experiment, the standard plates with surface roughness ranging from 100 μm to 400 μm for the evaluation of cast metal has been used. The standard plate is illuminated obliquely with the incident angle θi (=60°) and detected by CCD camera perpendicularly. An evaluated value F is calculated using the detected image. F is proportional to the surface roughness Ry when the standard plate is illuminated from both side at a right angle to inclined direction, and the plate is inclined with angles ranging from +25° to -25°. The surface roughness Ryis obtained by F with the error less than ±18% according to the proportional relationship between F and Ry.
{"title":"Study of an Optical Measuring Method for Surface Roughness of Cast Metals","authors":"Takahiro Someji, Masaru Sasaki, M. Yoshida, N. Akiyama","doi":"10.2493/JJSPE.64.231","DOIUrl":"https://doi.org/10.2493/JJSPE.64.231","url":null,"abstract":"The basic technology to measure rapidly the surface roughness of 3-dimensional cast metals using an optical non-contact method has been developed. In the experiment, the standard plates with surface roughness ranging from 100 μm to 400 μm for the evaluation of cast metal has been used. The standard plate is illuminated obliquely with the incident angle θi (=60°) and detected by CCD camera perpendicularly. An evaluated value F is calculated using the detected image. F is proportional to the surface roughness Ry when the standard plate is illuminated from both side at a right angle to inclined direction, and the plate is inclined with angles ranging from +25° to -25°. The surface roughness Ryis obtained by F with the error less than ±18% according to the proportional relationship between F and Ry.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"28 1","pages":"127-132"},"PeriodicalIF":0.0,"publicationDate":"1998-06-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86033161","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Kurobe, Yoshinori Yamada, Keiichiro Yamamoto, Takehiko Miura
Stainless steel pipe with fine hole and long size has recently needed for the flow line of pure gas and liquid, which is used in the field of precision machinery. Inner wall of such a pipe should be finished with high precision. Stainless steel pipes with different size of inner diameter are polished by flowing slurry at high velocity through the capillary. Finishing modes are examined in detail by scanning electron microscopy and profilometry. It is found from the experiments that the surface roughness of inner wall of as-received stainless steel pipe is reduced gradually with slurry passes, in which larger inner diameter of pipe has very enormous reduction rate in early stage of finishing. Usage of larger grain becomes to yield higher reduction of surface roughness. It is said that concentration of grain has a great effect on small inner diameter of pipe, but less effect on larger ones. Optical and scanning electron micrographs of the polished surface indicate that texture pattern of the inner wall disappears with slurry pass number, in which texture disappear in early stage of low pass number in small inner diameter of pipe, but not in larger ones.
{"title":"High Speed Slurry Flow Finishing of Inner Wall of Stainless Steel Capillary","authors":"T. Kurobe, Yoshinori Yamada, Keiichiro Yamamoto, Takehiko Miura","doi":"10.2493/jjspe.64.1325","DOIUrl":"https://doi.org/10.2493/jjspe.64.1325","url":null,"abstract":"Stainless steel pipe with fine hole and long size has recently needed for the flow line of pure gas and liquid, which is used in the field of precision machinery. Inner wall of such a pipe should be finished with high precision. Stainless steel pipes with different size of inner diameter are polished by flowing slurry at high velocity through the capillary. Finishing modes are examined in detail by scanning electron microscopy and profilometry. It is found from the experiments that the surface roughness of inner wall of as-received stainless steel pipe is reduced gradually with slurry passes, in which larger inner diameter of pipe has very enormous reduction rate in early stage of finishing. Usage of larger grain becomes to yield higher reduction of surface roughness. It is said that concentration of grain has a great effect on small inner diameter of pipe, but less effect on larger ones. Optical and scanning electron micrographs of the polished surface indicate that texture pattern of the inner wall disappears with slurry pass number, in which texture disappear in early stage of low pass number in small inner diameter of pipe, but not in larger ones.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"41 1","pages":"39-40"},"PeriodicalIF":0.0,"publicationDate":"1998-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76370272","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The Canon EF 75-300 mm IS USM lens is the world's first interchangeable lens equipped with an image stabilizer. The production of this lens entailed the development of technologies to resolve the problems inherent to SLR cameras, including measures for ensuring optical performance even during image stabilization, for obtaining a wider range for image stabilization, and for normal photography without the image stabilizer turned on. A direct-drive image stabilizer mechanism and an image stabilizer locking mechanism with two actuators have been developed.
{"title":"Development of Telephoto Lens with Image Stabilizer for Camera","authors":"Koichi Washisu","doi":"10.2493/JJSPE.64.1113","DOIUrl":"https://doi.org/10.2493/JJSPE.64.1113","url":null,"abstract":"The Canon EF 75-300 mm IS USM lens is the world's first interchangeable lens equipped with an image stabilizer. The production of this lens entailed the development of technologies to resolve the problems inherent to SLR cameras, including measures for ensuring optical performance even during image stabilization, for obtaining a wider range for image stabilization, and for normal photography without the image stabilizer turned on. A direct-drive image stabilizer mechanism and an image stabilizer locking mechanism with two actuators have been developed.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"53 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"1998-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73073351","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Syuji Ueda, Masayuki Takahashi, T. Nakagawa, Noriyuki Inagaki, T. Yamada
Hard and brittle thin-plate materials used in fabricating electronic components such as filters and oscillators have conventionally been subjected to a lapping process in order to achieve the required thickness within 1 μm. The lapping process, however, requires an operator's high level of skill; in addition, it is difficult to conduct automatic processing. We have developed double-wheel grinding equipment (through-feed grinder) with the purpose of obtaining the accuracy normally obtained with lapping. This equipment is structured by mounting a magnetic bearing in which a unique microactuator function, specifically developed for hard and brittle thin-plate materials, is incorporated. With continuous processing of the hard and brittle thin-plate materials, a thickness accuracy of ±0.5 μm was achieved from data obtained with on-machine thickness measurement.
{"title":"Development of a high precision through-feed grinder","authors":"Syuji Ueda, Masayuki Takahashi, T. Nakagawa, Noriyuki Inagaki, T. Yamada","doi":"10.2493/JJSPE.64.1122","DOIUrl":"https://doi.org/10.2493/JJSPE.64.1122","url":null,"abstract":"Hard and brittle thin-plate materials used in fabricating electronic components such as filters and oscillators have conventionally been subjected to a lapping process in order to achieve the required thickness within 1 μm. The lapping process, however, requires an operator's high level of skill; in addition, it is difficult to conduct automatic processing. We have developed double-wheel grinding equipment (through-feed grinder) with the purpose of obtaining the accuracy normally obtained with lapping. This equipment is structured by mounting a magnetic bearing in which a unique microactuator function, specifically developed for hard and brittle thin-plate materials, is incorporated. With continuous processing of the hard and brittle thin-plate materials, a thickness accuracy of ±0.5 μm was achieved from data obtained with on-machine thickness measurement.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"10 1","pages":"9-12"},"PeriodicalIF":0.0,"publicationDate":"1998-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74321479","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. Kasuga, A. Iino, Kenji Suzuki, Makoto Suzuki, Susumu Kotanagi
We have focused on and developed an ultrasonic motor to be used as a microactuator in place of an electromagnetic motor. We have established a new ultrasonic motor principle which allows a self-oscillating circuit to be easily constructed and simplifies the drive circuit. We have also simplified the motor structure, which is easy to mass-produce and miniaturize. We applied this motor, with a diameter of 8 mm and a thickness of 4.5 mm, to a vibration alarm in a watch at a price similar to conventional watches. Additionally, we further miniaturized this motor to 4.5 mm in diameter and 2.5 mm in thickness and confirmed the possibility and effectiveness as a microactuator. This ultrasonic micromotor is expected to be a new drive source in a broad range of fields.
{"title":"Development of Self-oscillating Ultrasonic Micromotor","authors":"M. Kasuga, A. Iino, Kenji Suzuki, Makoto Suzuki, Susumu Kotanagi","doi":"10.2493/JJSPE.64.1117","DOIUrl":"https://doi.org/10.2493/JJSPE.64.1117","url":null,"abstract":"We have focused on and developed an ultrasonic motor to be used as a microactuator in place of an electromagnetic motor. We have established a new ultrasonic motor principle which allows a self-oscillating circuit to be easily constructed and simplifies the drive circuit. We have also simplified the motor structure, which is easy to mass-produce and miniaturize. We applied this motor, with a diameter of 8 mm and a thickness of 4.5 mm, to a vibration alarm in a watch at a price similar to conventional watches. Additionally, we further miniaturized this motor to 4.5 mm in diameter and 2.5 mm in thickness and confirmed the possibility and effectiveness as a microactuator. This ultrasonic micromotor is expected to be a new drive source in a broad range of fields.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"39 1","pages":"5-8"},"PeriodicalIF":0.0,"publicationDate":"1998-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73995340","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In various manufacturing processes, manual tasks by human operators are reviewed from a new viewpoint of flexible handling ability to a wide range of object. For this ability, the information acquired through their sense organs during operation is considered to play an important role. Conversely, when the sensory information acquired is insufficient, or sensory feedback does not work well, the operators cannot fully show their ability, In this research, Tocusing on fine machining operation with a manual machine tool, a device which translates machining situation detected through industrial sensors into human sensory information has been developed and its effectiveness in improving operating efficiency, recovering fatigue and reducing tool failure has been investigated ergonomically. The authors call the sensory feedback by using this device active sensory feedback. This paper deals with active auditory feedback, active force sensory feedback and combined one. The cutting operations examined are to make a groove on a steel bar with a lathe and to make a small-diameter deep hole on an aluminum block with a milling machine. These are known as difficult and skilled machining operations, because the operators must adjust cutting force delicately so as not to break a cutting tool. So, the cutting force is adopted as the information fed back to the operator through their sensory organs. As the results, active auditory feedback was effective to improve the productivity, especially for unskilled operators. Active force sensory feedback was also effective, but not as good as active auditory one. On the contrary, any active sensory feedback was scarcely effective for very skilled operators, who could make up in the other sense what they lacked in auditory and force senses.
{"title":"Active sensory feedback in manual machine tool operation : Effect of auditory and force sensory feedback of cutting force in fine machining","authors":"H. Kato, N. Taoka","doi":"10.2493/JJSPE.64.455","DOIUrl":"https://doi.org/10.2493/JJSPE.64.455","url":null,"abstract":"In various manufacturing processes, manual tasks by human operators are reviewed from a new viewpoint of flexible handling ability to a wide range of object. For this ability, the information acquired through their sense organs during operation is considered to play an important role. Conversely, when the sensory information acquired is insufficient, or sensory feedback does not work well, the operators cannot fully show their ability, In this research, Tocusing on fine machining operation with a manual machine tool, a device which translates machining situation detected through industrial sensors into human sensory information has been developed and its effectiveness in improving operating efficiency, recovering fatigue and reducing tool failure has been investigated ergonomically. The authors call the sensory feedback by using this device active sensory feedback. This paper deals with active auditory feedback, active force sensory feedback and combined one. The cutting operations examined are to make a groove on a steel bar with a lathe and to make a small-diameter deep hole on an aluminum block with a milling machine. These are known as difficult and skilled machining operations, because the operators must adjust cutting force delicately so as not to break a cutting tool. So, the cutting force is adopted as the information fed back to the operator through their sensory organs. As the results, active auditory feedback was effective to improve the productivity, especially for unskilled operators. Active force sensory feedback was also effective, but not as good as active auditory one. On the contrary, any active sensory feedback was scarcely effective for very skilled operators, who could make up in the other sense what they lacked in auditory and force senses.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"91 1","pages":"307-312"},"PeriodicalIF":0.0,"publicationDate":"1998-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84858860","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In order to improve the positioning time of stage, base-plate acceleration feedback was proposed as described in the literature, and the effect of disturbance rejection was experimentally demonstrated. Since an explanation for the theoretical background of its feedback was insufficient, the disturbance rejection mechanism was clarified in our literature based on the mathematical model of stage including the base-plate dynamics. However, there is the question that what kind of controller can be derive by modern control theory. In this paper, the zeroing control theory, which is well-known as the disturbance rejection technique, is applied to the above mentioned mathematical model. As a result, it is clear that the zeroing using the state feedback is impossible from the theoretical point of view. However, we can recognize through this examine that the base-plate acceleration feedback is equivalent to Master-Slave synchronization control. Since this analogical relationship is useful to progress the control performance, we describe the formulation and these relationship in detail.
{"title":"Recognition of Base-Plate Acceleration Feedback Embedded in Stage Positioning Control System","authors":"S. Wakui","doi":"10.2493/JJSPE.64.1017","DOIUrl":"https://doi.org/10.2493/JJSPE.64.1017","url":null,"abstract":"In order to improve the positioning time of stage, base-plate acceleration feedback was proposed as described in the literature, and the effect of disturbance rejection was experimentally demonstrated. Since an explanation for the theoretical background of its feedback was insufficient, the disturbance rejection mechanism was clarified in our literature based on the mathematical model of stage including the base-plate dynamics. However, there is the question that what kind of controller can be derive by modern control theory. In this paper, the zeroing control theory, which is well-known as the disturbance rejection technique, is applied to the above mentioned mathematical model. As a result, it is clear that the zeroing using the state feedback is impossible from the theoretical point of view. However, we can recognize through this examine that the base-plate acceleration feedback is equivalent to Master-Slave synchronization control. Since this analogical relationship is useful to progress the control performance, we describe the formulation and these relationship in detail.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"36 1","pages":"239-244"},"PeriodicalIF":0.0,"publicationDate":"1998-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75998627","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The piezo element as a representative displacement type actuator elicits a high-speed response. Recently, there has been much research carried out using this feature. In order to progress the control performance, we previously proposed the motional-mode-based decoupling control scheme for a three-degrees-of-freedom fine-motion stage with piezo elements. In the meantime, we proposed the collocation compensation method to realize the desirable positioning. As is well known, the controlled object on the condition that the actuators and sensors are collocated shows good control performance. Then, it is expected that the motional-mode-based decoupling control together with collocation compensation can realize the good performance all the more. However, this paper shows that the collocation compensation for the above control scheme has an effect on the only difference of the loop-gain for each motional mode. This result is useful for the mechanical design.
{"title":"Control Performance of Three - Degrees - of - Freedom Micro - Moving Stage Using Motional Mode Decoupling Control together with Collocation Compensator","authors":"S. Wakui","doi":"10.2493/JJSPE.64.1375","DOIUrl":"https://doi.org/10.2493/JJSPE.64.1375","url":null,"abstract":"The piezo element as a representative displacement type actuator elicits a high-speed response. Recently, there has been much research carried out using this feature. In order to progress the control performance, we previously proposed the motional-mode-based decoupling control scheme for a three-degrees-of-freedom fine-motion stage with piezo elements. In the meantime, we proposed the collocation compensation method to realize the desirable positioning. As is well known, the controlled object on the condition that the actuators and sensors are collocated shows good control performance. Then, it is expected that the motional-mode-based decoupling control together with collocation compensation can realize the good performance all the more. However, this paper shows that the collocation compensation for the above control scheme has an effect on the only difference of the loop-gain for each motional mode. This result is useful for the mechanical design.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"44 1","pages":"357-362"},"PeriodicalIF":0.0,"publicationDate":"1998-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89197403","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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