A novel end-point detection technique is proposed for planarization of semiconductor wafers by chemical mechanical polishing. In this technique, a local thickness variation of polished layer is observed in-situ in detail, instead of observing a mean thickness value of the whole layer with conventional technique. The detection head owns two sensors, and mounted on a rotating platen for polishing. The first sensor is a fluid gap gage for measuring a surface position of the polished layer. The second one is an optical pick-up for measuring a bottom position of the layer. A residual thickness value of the polished layer, which is a target of this end-point detection, can be known as difference of the both values. A prototype detector was constructed. The experimental results show a 0.1μm sensitivity and a capability for manufacturing use.
{"title":"An end-point detector for planarization of semiconductor devices by chemical mechanical polishing","authors":"S. Moriyama, K. Yamaguchi, Y. Honma, K. Yasui","doi":"10.2493/JJSPE.61.854","DOIUrl":"https://doi.org/10.2493/JJSPE.61.854","url":null,"abstract":"A novel end-point detection technique is proposed for planarization of semiconductor wafers by chemical mechanical polishing. In this technique, a local thickness variation of polished layer is observed in-situ in detail, instead of observing a mean thickness value of the whole layer with conventional technique. The detection head owns two sensors, and mounted on a rotating platen for polishing. The first sensor is a fluid gap gage for measuring a surface position of the polished layer. The second one is an optical pick-up for measuring a bottom position of the layer. A residual thickness value of the polished layer, which is a target of this end-point detection, can be known as difference of the both values. A prototype detector was constructed. The experimental results show a 0.1μm sensitivity and a capability for manufacturing use.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"34 1","pages":"55-58"},"PeriodicalIF":0.0,"publicationDate":"1995-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75304727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
From the economical efficiency, the manufacturing system in which the mentality and flexibility of human operators are utilized positively is occasionally superior to a fully-automated system. In order to take the manual operation into a manufacturing system reasonably, the operation should be rightly appreciated and the arrangement in the system should be fully investigated. In the well-arranged system, the operators can become swiftly accustomed to their job, their performance can be high and their fatigue can be low. The purpose of this research is to clarify the characteristics of the manual operation systematically. To do this, a virtual manually-operated-machine or simulator has been developed. By using the simulator, it is possible to monitor the behavior of the operator precisely. In the present paper, as the first step to the research, operating efficiency and fatigue of the operators have been analyzed experimentally, when they got operating force as auditory information besides force perception. The examined operation is a cut-off turning with a virtual lathe. As the results, the auditory feedback is significantly effective in improvement of efficiency and reduction of fatigue, though the effectiveness is different according to timbre of the feedback sound.
{"title":"Effect of Auditory Feedback on Operating Efficiency and Fatigue -In the Case of Manual Cut-Off Turning with Virtual Lathe-","authors":"H. Kato, Tadakazu Sato","doi":"10.2493/JJSPE.61.1317","DOIUrl":"https://doi.org/10.2493/JJSPE.61.1317","url":null,"abstract":"From the economical efficiency, the manufacturing system in which the mentality and flexibility of human operators are utilized positively is occasionally superior to a fully-automated system. In order to take the manual operation into a manufacturing system reasonably, the operation should be rightly appreciated and the arrangement in the system should be fully investigated. In the well-arranged system, the operators can become swiftly accustomed to their job, their performance can be high and their fatigue can be low. The purpose of this research is to clarify the characteristics of the manual operation systematically. To do this, a virtual manually-operated-machine or simulator has been developed. By using the simulator, it is possible to monitor the behavior of the operator precisely. In the present paper, as the first step to the research, operating efficiency and fatigue of the operators have been analyzed experimentally, when they got operating force as auditory information besides force perception. The examined operation is a cut-off turning with a virtual lathe. As the results, the auditory feedback is significantly effective in improvement of efficiency and reduction of fatigue, though the effectiveness is different according to timbre of the feedback sound.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"23 1","pages":"325-330"},"PeriodicalIF":0.0,"publicationDate":"1995-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80382551","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Y. Hara, H. Doi, K. Karasaki, Tadashi Iida, Norihiro Minatani, Minoru Nohara
This paper describes a method for thresholding gray-scale images to produce binary images in real time. It is specifically designed for thresholding images that contain both small, low-contrast defect patterns and relatively large, high-contrast circuit patterns without image deformation. This method analyzes peaks and troughs in the detected signal waveforms to threshold the low-contrast patterns ; it applies the constant threshold technique to the high-contrast circuit patterns. Experiments show that this method can properly threshold images containing both small defect patterns of approximately 20% contrast and circuit patterns of approximately 90% contrast.
{"title":"A thresholding method for circuit pattern images containing low contrast signals","authors":"Y. Hara, H. Doi, K. Karasaki, Tadashi Iida, Norihiro Minatani, Minoru Nohara","doi":"10.2493/JJSPE.61.1409","DOIUrl":"https://doi.org/10.2493/JJSPE.61.1409","url":null,"abstract":"This paper describes a method for thresholding gray-scale images to produce binary images in real time. It is specifically designed for thresholding images that contain both small, low-contrast defect patterns and relatively large, high-contrast circuit patterns without image deformation. This method analyzes peaks and troughs in the detected signal waveforms to threshold the low-contrast patterns ; it applies the constant threshold technique to the high-contrast circuit patterns. Experiments show that this method can properly threshold images containing both small defect patterns of approximately 20% contrast and circuit patterns of approximately 90% contrast.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"8 1","pages":"148-154"},"PeriodicalIF":0.0,"publicationDate":"1995-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91302448","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The elastic behavior of screw thread has been studied by tensile test on the screw thread of M6-M20×1.5, and by Finite Element Method. Elastically equivalent cylinder's cross sectional areas of threaded bar approximately coincide with experimental and calculated values. Both values are small compared to the usual value called stress area, which is used to estimate the tensile strength of the screw thread. Then a new equivalent cross sectional area is proposed expressing the relation between load and elongation in the screw thread, and an empirical equation is obtained that the equivalent area of the screw thread is considered to be a function of the ratio of pitch to major diameter on the external thread.
{"title":"Sectional Area for Calculation of Deformation in Screw Thread","authors":"Shuji Hosokawa, Yoshio Umeyama, Susumu Kumakura","doi":"10.2493/JJSPE.61.1260","DOIUrl":"https://doi.org/10.2493/JJSPE.61.1260","url":null,"abstract":"The elastic behavior of screw thread has been studied by tensile test on the screw thread of M6-M20×1.5, and by Finite Element Method. Elastically equivalent cylinder's cross sectional areas of threaded bar approximately coincide with experimental and calculated values. Both values are small compared to the usual value called stress area, which is used to estimate the tensile strength of the screw thread. Then a new equivalent cross sectional area is proposed expressing the relation between load and elongation in the screw thread, and an empirical equation is obtained that the equivalent area of the screw thread is considered to be a function of the ratio of pitch to major diameter on the external thread.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"25 1","pages":"172-176"},"PeriodicalIF":0.0,"publicationDate":"1995-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74985728","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The positioning mechanism can be regarded as a simple vibration system with one degree of freedom. Generally speaking, it is difficult to identify the physical parameters of this mechanism without decomposing. In this paper, an identification method of physical parameters for positioning mechanism is described. Firstly it is shown that the viscous damping of slide mechanism can be derived by measuring the frequency response from the collocated sensor to the non-collocated sensor. Moreover, the spring constant between the mechanism also can be derived more accurately in comparison with the value based on the impulse response. Secondary the equivalent viscous damping is calculated by means of the constant velocity test or the frequency response. Then the viscous damping of rotation mechanism may easily be derived by subtracting the converted viscous damping, which is the value of slide mechanism at the position of motor axis, from the equivalent viscous damping. Finally, the proposed identification method is applied to an actual positioning mechanism.
{"title":"An Identification Method of Physical Parameters for Positioning Mechanism","authors":"S. Wakui","doi":"10.2493/JJSPE.60.211","DOIUrl":"https://doi.org/10.2493/JJSPE.60.211","url":null,"abstract":"The positioning mechanism can be regarded as a simple vibration system with one degree of freedom. Generally speaking, it is difficult to identify the physical parameters of this mechanism without decomposing. In this paper, an identification method of physical parameters for positioning mechanism is described. Firstly it is shown that the viscous damping of slide mechanism can be derived by measuring the frequency response from the collocated sensor to the non-collocated sensor. Moreover, the spring constant between the mechanism also can be derived more accurately in comparison with the value based on the impulse response. Secondary the equivalent viscous damping is calculated by means of the constant velocity test or the frequency response. Then the viscous damping of rotation mechanism may easily be derived by subtracting the converted viscous damping, which is the value of slide mechanism at the position of motor axis, from the equivalent viscous damping. Finally, the proposed identification method is applied to an actual positioning mechanism.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"92 1","pages":"211-214"},"PeriodicalIF":0.0,"publicationDate":"1994-02-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80347358","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Surface alloys which have composition similar to stainless steel are produced on mild steel substrates by traversing the substrates under electron beam irradiation. Chromium and nickel powders are fixed onto the substrates with water glass. An electro-magnetic deflection system oscillates the beam as if its cross section at the substrate surface looks like a rectangle. A mathematical model is constructed which describes diffusion of alloying elements from powders on the surface into an alloyed layer. It is assumed that the alloying elements diffuse instantaneously into an alloyed layer. The calculated results on the concentration distribution show good agree-ment with experimental results. Anti-corrosion characteristics of the alloyed layers are evaluated by anodic polarization curves measured along Japanese Industrial Standard G 0579. The anodic polarization curves of the alloys were similar to the standard curve of a stainless steel, SUS 304, but show somewhat higher peak current density for passivation. The concentration of water glass in powders should be in the range of 0.8 to 2% to attain good and stable anodic polarization curves. The anodic polarization characteristics are better when the density of chromium and nickel is higher.
{"title":"Formation and anti-corrosion characteristics of electron beam alloyed layers","authors":"A. Iwata, M. Nakao","doi":"10.2493/jjspe.60.1034","DOIUrl":"https://doi.org/10.2493/jjspe.60.1034","url":null,"abstract":"Surface alloys which have composition similar to stainless steel are produced on mild steel substrates by traversing the substrates under electron beam irradiation. Chromium and nickel powders are fixed onto the substrates with water glass. An electro-magnetic deflection system oscillates the beam as if its cross section at the substrate surface looks like a rectangle. A mathematical model is constructed which describes diffusion of alloying elements from powders on the surface into an alloyed layer. It is assumed that the alloying elements diffuse instantaneously into an alloyed layer. The calculated results on the concentration distribution show good agree-ment with experimental results. Anti-corrosion characteristics of the alloyed layers are evaluated by anodic polarization curves measured along Japanese Industrial Standard G 0579. The anodic polarization curves of the alloys were similar to the standard curve of a stainless steel, SUS 304, but show somewhat higher peak current density for passivation. The concentration of water glass in powders should be in the range of 0.8 to 2% to attain good and stable anodic polarization curves. The anodic polarization characteristics are better when the density of chromium and nickel is higher.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"1 1","pages":"134-139"},"PeriodicalIF":0.0,"publicationDate":"1994-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88227249","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A cut-away or restricted contact tool for turning operations has been proposed and successfully employed to improve the machinability of an 18%Mn-18%Cr manganese steel (HB=241). Both chip contact length on the rake face and chip flow direction can be uniquely determined by the energy method after Usui and others, when the restricted length is assumed to be proportional to the real feed in the direction of chip flow. The optimum restricted length is found to be 1.25 times as large as the real feed, which is slightly wider than that of the two-dimensional cut-away tool. The predicted cutting force, cutting temperature and tool wear are all in good agreement with experiment. The restriction of the contact length reduces cutting force and heat generation on the shear plane and at the tool-chip interface, leading to a decrease in tool temperature. As a result, crater wear on the rake face of a P20 grade carbide tool is lessened by 10 % compared with the dry turning of such a high-hardness metal using a natural contact tool.
{"title":"Design of a Three-Dimensional Cut-away Tool for the Turning of High Manganese Steels","authors":"T. Kitagawa, A. Kubo, K. Maekawa","doi":"10.2493/JJSPE.60.1284","DOIUrl":"https://doi.org/10.2493/JJSPE.60.1284","url":null,"abstract":"A cut-away or restricted contact tool for turning operations has been proposed and successfully employed to improve the machinability of an 18%Mn-18%Cr manganese steel (HB=241). Both chip contact length on the rake face and chip flow direction can be uniquely determined by the energy method after Usui and others, when the restricted length is assumed to be proportional to the real feed in the direction of chip flow. The optimum restricted length is found to be 1.25 times as large as the real feed, which is slightly wider than that of the two-dimensional cut-away tool. The predicted cutting force, cutting temperature and tool wear are all in good agreement with experiment. The restriction of the contact length reduces cutting force and heat generation on the shear plane and at the tool-chip interface, leading to a decrease in tool temperature. As a result, crater wear on the rake face of a P20 grade carbide tool is lessened by 10 % compared with the dry turning of such a high-hardness metal using a natural contact tool.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"29 1","pages":"26-32"},"PeriodicalIF":0.0,"publicationDate":"1994-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78821187","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Egawa, T. Ichikizaki, H. Tsukamoto, H. Tsunoda, T. Shimoyama
With the objective of producing a ceramic tool for hardened steel cutting that is 10% the price of cBN sintered tool but with equal cutting performance, a TiN-Al2O3 ceramic tool was developed in which Al2O3 particles are dispersed throughout a matrix that uses TiN as the principal component. When bearing steel (SUJ2, HRC60) is cut, a TiN-Al2O3 ceramic tool that is 40vol% Al2O3 particles produces 25% less flank wear than does a cBN sintered tool. Furthermore, by the time the flank wear land width VB reaches 0.2mm, the surface roughness of the cBN sintered tool worsens to 4.0 μmRmax; however, that of the TiN-Al2O3 ceramic tool is maintained at a value better than 2.5 μmRmax. Also, investigation of the residual stress in the machined work found no difference between the TiN-Al2O3 ceramic tool and cBN sintered tool, Even if a cBN sintered tool were to be substituted with a TiN-Al2O3 ceramic tool, no problem would generate in the residual stress of cutting surface.
{"title":"Material characteristics and cutting performance of TiN-Al2O3 ceramic tool","authors":"T. Egawa, T. Ichikizaki, H. Tsukamoto, H. Tsunoda, T. Shimoyama","doi":"10.2493/JJSPE.60.1470","DOIUrl":"https://doi.org/10.2493/JJSPE.60.1470","url":null,"abstract":"With the objective of producing a ceramic tool for hardened steel cutting that is 10% the price of cBN sintered tool but with equal cutting performance, a TiN-Al2O3 ceramic tool was developed in which Al2O3 particles are dispersed throughout a matrix that uses TiN as the principal component. When bearing steel (SUJ2, HRC60) is cut, a TiN-Al2O3 ceramic tool that is 40vol% Al2O3 particles produces 25% less flank wear than does a cBN sintered tool. Furthermore, by the time the flank wear land width VB reaches 0.2mm, the surface roughness of the cBN sintered tool worsens to 4.0 μmRmax; however, that of the TiN-Al2O3 ceramic tool is maintained at a value better than 2.5 μmRmax. Also, investigation of the residual stress in the machined work found no difference between the TiN-Al2O3 ceramic tool and cBN sintered tool, Even if a cBN sintered tool were to be substituted with a TiN-Al2O3 ceramic tool, no problem would generate in the residual stress of cutting surface.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"16 1","pages":"222-228"},"PeriodicalIF":0.0,"publicationDate":"1994-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86681480","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
New method for measuring the circular interpolation errors of high precision NC grinding machine is proposed. The measuring device consists of Capacitance Ball Probes, CBP, and capacitive displacement meter. A precision steel ball A is set on the table of the NC surface grinding machine and the other ball B is mounted at the end of the wheel head.While the ball B circles the ball A, the capacitance change due to the motion errors is detected. Since the obtained data are also affected by the floating capacity, which is generated among ball A and wheel head etc., the clearance between two balls, d, has to be set at a very small value, such as d=10μm. When auxiliary poles are set beside the ball A, the floating capacity can be effectively suppressed. Two-orientation method is also proposed to improve the accuracy in measurement. In this method, two sets of data are obtained before and after the change in direction of each ball, and the differences in data between the two are Fourier transformed. The true motion errors are then determined by phase operation. The calculation error originated from this method is assessed and the effectiveness of this process is confirmed by the computer simulation.
{"title":"Study on the motion errors of NC surface grinding machine : method for measuring the motion errors under the circular interpolation","authors":"S. Okuyama, Shoichiro Watanabe, S. Kawamura","doi":"10.2493/JJSPE.60.1756","DOIUrl":"https://doi.org/10.2493/JJSPE.60.1756","url":null,"abstract":"New method for measuring the circular interpolation errors of high precision NC grinding machine is proposed. The measuring device consists of Capacitance Ball Probes, CBP, and capacitive displacement meter. A precision steel ball A is set on the table of the NC surface grinding machine and the other ball B is mounted at the end of the wheel head.While the ball B circles the ball A, the capacitance change due to the motion errors is detected. Since the obtained data are also affected by the floating capacity, which is generated among ball A and wheel head etc., the clearance between two balls, d, has to be set at a very small value, such as d=10μm. When auxiliary poles are set beside the ball A, the floating capacity can be effectively suppressed. Two-orientation method is also proposed to improve the accuracy in measurement. In this method, two sets of data are obtained before and after the change in direction of each ball, and the differences in data between the two are Fourier transformed. The true motion errors are then determined by phase operation. The calculation error originated from this method is assessed and the effectiveness of this process is confirmed by the computer simulation.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"29 18 1","pages":"343-348"},"PeriodicalIF":0.0,"publicationDate":"1994-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76449358","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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