首页 > 最新文献

2016 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)最新文献

英文 中文
Recent advances in low temperature process in view of 3D VLSI integration 三维VLSI集成低温工艺研究进展
C. Fenouillet-Béranger, P. Batude, L. Brunet, V. Mazzocchi, C-M. V. Lu, F. Deprat, J. Micout, M.-P. Samson, B. Previtali, P. Besombes, N. Rambal, V. Lapras, F. Andrieu, O. Billoint, M. Brocard, S. Thuries, G. Cibrario, P. Acosta-Alba, B. Mathieu, S. Kerdilès, F. Nemouchi, C. Arvet, P. Besson, V. Loup, R. Gassilloud, X. Garros, C. Leroux, V. Beugin, C. Guérin, D. Benoit, L. Pasini, J. Hartmann, M. Vinet
In this paper, the recent advances in low temperature process in view of 3D VLSI integration are reviewed. Thanks to the optimization of each low temperature process modules (dopant activation, gate stack, epitaxy, spacer deposition) and silicide stability improvement, the top layer thermal budget fabrication has been decreased in order to satisfy the requirements for 3D VLSI integration.
本文从三维VLSI集成的角度,综述了低温工艺的最新进展。由于优化了每个低温工艺模块(掺杂激活、栅极堆叠、外延、间隔层沉积)和硅化物稳定性,减少了顶层热预算制造,以满足3D VLSI集成的要求。
{"title":"Recent advances in low temperature process in view of 3D VLSI integration","authors":"C. Fenouillet-Béranger, P. Batude, L. Brunet, V. Mazzocchi, C-M. V. Lu, F. Deprat, J. Micout, M.-P. Samson, B. Previtali, P. Besombes, N. Rambal, V. Lapras, F. Andrieu, O. Billoint, M. Brocard, S. Thuries, G. Cibrario, P. Acosta-Alba, B. Mathieu, S. Kerdilès, F. Nemouchi, C. Arvet, P. Besson, V. Loup, R. Gassilloud, X. Garros, C. Leroux, V. Beugin, C. Guérin, D. Benoit, L. Pasini, J. Hartmann, M. Vinet","doi":"10.1109/S3S.2016.7804404","DOIUrl":"https://doi.org/10.1109/S3S.2016.7804404","url":null,"abstract":"In this paper, the recent advances in low temperature process in view of 3D VLSI integration are reviewed. Thanks to the optimization of each low temperature process modules (dopant activation, gate stack, epitaxy, spacer deposition) and silicide stability improvement, the top layer thermal budget fabrication has been decreased in order to satisfy the requirements for 3D VLSI integration.","PeriodicalId":145660,"journal":{"name":"2016 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126392441","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Charge plasma based partial-ground-plane-MOSFET on selective buried oxide (SELBOX) 选择性埋藏氧化物(SELBOX)上基于电荷等离子体的部分地平面mosfet
F. Bashir, S. Loan, Asim M. Murshid, A. Alamoud
In this work, we propose a novel charge plasma based partial ground plane selective buried oxide MOSFET (CP-PGP-SELBOX-MOSFET). In the proposed device source, drain regions and the partial ground planes (PGPs) have been realized by using metals of different work-functions and not by the conventional method of doping. A two dimensional (2D) simulation study has revealed that the magnitude of the short-channel effects (SCEs) have got significantly reduced in the proposed device in comparison to the conventional one. Further, it has been observed that ION/IOFF ratio and subthreshold slope (SS) in the proposed device has been improved significantly in comparison to conventional SELBOX MOSFET. Further, the proposed device is free from doping related issues and can be fabricated at low temperature, as it does not employ the conventional ion implantation for realizing various regions.
在这项工作中,我们提出了一种新的基于电荷等离子体的部分地平面选择性埋地氧化MOSFET (CP-PGP-SELBOX-MOSFET)。在该器件中,源极区、漏极区和局部地平面(PGPs)是通过使用不同功函数的金属而不是传统的掺杂方法来实现的。二维仿真研究表明,与传统器件相比,该器件的短通道效应(SCEs)幅度显著降低。此外,与传统的SELBOX MOSFET相比,所提出器件的离子/IOFF比和亚阈值斜率(SS)得到了显着改善。此外,该装置不存在掺杂相关问题,并且可以在低温下制造,因为它不采用传统的离子注入来实现各种区域。
{"title":"Charge plasma based partial-ground-plane-MOSFET on selective buried oxide (SELBOX)","authors":"F. Bashir, S. Loan, Asim M. Murshid, A. Alamoud","doi":"10.1109/S3S.2016.7804385","DOIUrl":"https://doi.org/10.1109/S3S.2016.7804385","url":null,"abstract":"In this work, we propose a novel charge plasma based partial ground plane selective buried oxide MOSFET (CP-PGP-SELBOX-MOSFET). In the proposed device source, drain regions and the partial ground planes (PGPs) have been realized by using metals of different work-functions and not by the conventional method of doping. A two dimensional (2D) simulation study has revealed that the magnitude of the short-channel effects (SCEs) have got significantly reduced in the proposed device in comparison to the conventional one. Further, it has been observed that ION/IOFF ratio and subthreshold slope (SS) in the proposed device has been improved significantly in comparison to conventional SELBOX MOSFET. Further, the proposed device is free from doping related issues and can be fabricated at low temperature, as it does not employ the conventional ion implantation for realizing various regions.","PeriodicalId":145660,"journal":{"name":"2016 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132964573","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
High density SRAM bitcell architecture in 3D sequential CoolCube™ 14nm technology 采用 3D sequential CoolCube™ 14 纳米技术的高密度 SRAM 位元结构
M. Brocard, R. Boumchedda, J. Noel, K. Akyel, B. Giraud, E. Beigné, D. Turgis, S. Thuries, G. Berhault, O. Billoint
In this paper, we present a high density 4T SRAM bitcell designed with 3D sequential CoolCube™ technology based on FD-SOI transistors in 14nm node. An in-house SPICE characterization testbench is used to optimize the critical operations (read and hold) of a 4T SRAM bitcell through post layout simulations. Results show that the proposed 3D 4T Bitcell offers 30% footprint reduction compared to the planar 6T SRAM bitcell in 14nm FD-SOI technology.
本文介绍了采用基于 FD-SOI 晶体管的三维连续 CoolCube™ 技术设计的 14nm 节点高密度 4T SRAM 位元组。通过布局后仿真,使用内部 SPICE 特性测试平台优化了 4T SRAM 位元组的关键操作(读取和保持)。结果表明,与采用 14 纳米 FD-SOI 技术的平面 6T SRAM 位元组相比,拟议的 3D 4T 位元组可减少 30% 的占位面积。
{"title":"High density SRAM bitcell architecture in 3D sequential CoolCube™ 14nm technology","authors":"M. Brocard, R. Boumchedda, J. Noel, K. Akyel, B. Giraud, E. Beigné, D. Turgis, S. Thuries, G. Berhault, O. Billoint","doi":"10.1109/S3S.2016.7804376","DOIUrl":"https://doi.org/10.1109/S3S.2016.7804376","url":null,"abstract":"In this paper, we present a high density 4T SRAM bitcell designed with 3D sequential CoolCube™ technology based on FD-SOI transistors in 14nm node. An in-house SPICE characterization testbench is used to optimize the critical operations (read and hold) of a 4T SRAM bitcell through post layout simulations. Results show that the proposed 3D 4T Bitcell offers 30% footprint reduction compared to the planar 6T SRAM bitcell in 14nm FD-SOI technology.","PeriodicalId":145660,"journal":{"name":"2016 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130010372","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Down to 15nm BOX: SOI extendability for planar fully depleted application beyond 22FD BOX: SOI可扩展,可用于22FD以上的平面全耗尽应用
W. Schwarzenbach, F. Allibert, C. Le Royer, L. Grenouillet, C. Malaquin, C. Bertrand-Giuliani, F. Boedt, S. Loubriat, C. Michau, D. Parissi, B. Nguyen
SOI wafers have been used for digital applications for 2 decades. Historically separated between the high-performance, Partially Depleted (PDSOI) [1] and ultra-low power Fully Depleted (FDSOI) [2], the two architectures merged more recently into the UTBB-FDSOI (Ultra-Thin Body & BOX) technology [3]. In order to maintain optimum device performance, the buried oxide (BOX) thickness has been scaled from 25nm (28nm node) to 20nm (22nm node). In this paper we present the benefits of further scaling the BOX to 15nm for the next node and describe the process used to fabricate such SOI wafers along with their physical and electrical properties.
SOI晶圆已用于数字应用20年。这两种架构历来分为高性能部分耗尽(PDSOI)[1]和超低功耗完全耗尽(FDSOI)[2],最近合并为UTBB-FDSOI(超薄机身和盒子)技术[3]。为了保持最佳的器件性能,埋地氧化物(BOX)厚度从25nm (28nm节点)扩展到20nm (22nm节点)。在本文中,我们介绍了下一个节点进一步将BOX缩放到15nm的好处,并描述了用于制造这种SOI晶圆的工艺及其物理和电气性能。
{"title":"Down to 15nm BOX: SOI extendability for planar fully depleted application beyond 22FD","authors":"W. Schwarzenbach, F. Allibert, C. Le Royer, L. Grenouillet, C. Malaquin, C. Bertrand-Giuliani, F. Boedt, S. Loubriat, C. Michau, D. Parissi, B. Nguyen","doi":"10.1109/S3S.2016.7804377","DOIUrl":"https://doi.org/10.1109/S3S.2016.7804377","url":null,"abstract":"SOI wafers have been used for digital applications for 2 decades. Historically separated between the high-performance, Partially Depleted (PDSOI) [1] and ultra-low power Fully Depleted (FDSOI) [2], the two architectures merged more recently into the UTBB-FDSOI (Ultra-Thin Body & BOX) technology [3]. In order to maintain optimum device performance, the buried oxide (BOX) thickness has been scaled from 25nm (28nm node) to 20nm (22nm node). In this paper we present the benefits of further scaling the BOX to 15nm for the next node and describe the process used to fabricate such SOI wafers along with their physical and electrical properties.","PeriodicalId":145660,"journal":{"name":"2016 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)","volume":"59 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121807381","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Silicon thickness variation of FD-SOI wafers investigated by differential reflective microscopy 用差示反射显微镜研究FD-SOI晶圆的硅厚度变化
J. Auerhammer, C. Hartig, K. Wendt, R. van Oostrum, G. Pfeiffer, S. Bayer, B. Srocka
Fully depleted silicon-on-insulator (FD-SOI) wafers with very thin Si top layers in the range of ten nanometers have to fulfill very strict uniformity requirements in the Å range across the wafer for the latest CMOS technologies based on 22nm technology. Hereby, the thickness variation of the complete Si layer defining the body thickness of the transistor and thus the device properties have to be determined at not only a few locations of the wafer but a full lateral characterization is desirable. We have used differential reflective microscopy (DRM) in low-resolution mode for full-wafer maps and high-resolution mode at discrete locations to characterize the SOI thickness variation. Full wafer maps with DRM provide higher resolution than ellipsometry and can be used to control SOI manufacturing processes. We compare SOI thickness variation obtained from high-resolution measurements to ITRS roadmap requirements.
完全耗尽的绝缘体上硅(FD-SOI)晶圆具有10纳米范围内的非常薄的硅顶层,必须在基于22nm技术的最新CMOS技术的Å范围内满足非常严格的均匀性要求。因此,定义晶体管体厚度的完整硅层的厚度变化以及器件性能不仅必须在晶圆片的几个位置确定,而且需要完整的横向表征。我们使用差分反射显微镜(DRM)在低分辨率模式下绘制全晶圆图,并在离散位置使用高分辨率模式来表征SOI厚度变化。具有DRM的全晶圆图提供比椭偏仪更高的分辨率,可用于控制SOI制造过程。我们将高分辨率测量得到的SOI厚度变化与ITRS路线图要求进行了比较。
{"title":"Silicon thickness variation of FD-SOI wafers investigated by differential reflective microscopy","authors":"J. Auerhammer, C. Hartig, K. Wendt, R. van Oostrum, G. Pfeiffer, S. Bayer, B. Srocka","doi":"10.1109/S3S.2016.7804378","DOIUrl":"https://doi.org/10.1109/S3S.2016.7804378","url":null,"abstract":"Fully depleted silicon-on-insulator (FD-SOI) wafers with very thin Si top layers in the range of ten nanometers have to fulfill very strict uniformity requirements in the Å range across the wafer for the latest CMOS technologies based on 22nm technology. Hereby, the thickness variation of the complete Si layer defining the body thickness of the transistor and thus the device properties have to be determined at not only a few locations of the wafer but a full lateral characterization is desirable. We have used differential reflective microscopy (DRM) in low-resolution mode for full-wafer maps and high-resolution mode at discrete locations to characterize the SOI thickness variation. Full wafer maps with DRM provide higher resolution than ellipsometry and can be used to control SOI manufacturing processes. We compare SOI thickness variation obtained from high-resolution measurements to ITRS roadmap requirements.","PeriodicalId":145660,"journal":{"name":"2016 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)","volume":"227 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124510795","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Stability optimization of monolithic 3-D MoS2-n/WSe2-p SRAM cells for superthreshold and near-/sub-threshold applications 用于超阈值和近/亚阈值应用的单片三维MoS2-n/WSe2-p SRAM单元的稳定性优化
Chang-Hung Yu, P. Su, C. Chuang
2-D transition metal dichalcogenides (TMDs) such as MoS2 and WSe2 (Fig. 1(a)) are very attractive for future ultimately scaled low-power CMOS devices owing to their atomic-scale thickness, adequate band-gap, and pristine surface (without dangling bonds) [1-3]. Our previous study [4] has evaluated the stability of MoS2-n/WSe2-p SRAMs with planar technology. However, the process complexity of heterogeneous integration of distinct materials for n/p-FETs can become a concern. Monolithic 3-D integration [5] offers the possibility to independently optimize the n-FETs and p-FETs at distinct tiers. It has also been envisioned [6] that monolithic 3-D integration combined with the extremely scaled TMD devices may offer the ultimate solution for future ultra-high density ICs and SRAMs (Fig. 1(c)).
二维过渡金属二硫族化合物(TMDs),如MoS2和WSe2(图1(a)),由于其原子尺度的厚度、足够的带隙和原始的表面(没有悬空键),对于未来最终规模化的低功耗CMOS器件非常有吸引力[1-3]。我们之前的研究[4]用平面技术评估了MoS2-n/WSe2-p sram的稳定性。然而,不同材料的n/p- fet异质集成的工艺复杂性可能成为一个问题。单片三维集成[5]提供了在不同层独立优化n- fet和p- fet的可能性。人们还设想,单片3d集成与极规模化TMD器件相结合,可能为未来的超高密度ic和sram提供最终解决方案(图1(c))。
{"title":"Stability optimization of monolithic 3-D MoS2-n/WSe2-p SRAM cells for superthreshold and near-/sub-threshold applications","authors":"Chang-Hung Yu, P. Su, C. Chuang","doi":"10.1109/S3S.2016.7804396","DOIUrl":"https://doi.org/10.1109/S3S.2016.7804396","url":null,"abstract":"2-D transition metal dichalcogenides (TMDs) such as MoS2 and WSe2 (Fig. 1(a)) are very attractive for future ultimately scaled low-power CMOS devices owing to their atomic-scale thickness, adequate band-gap, and pristine surface (without dangling bonds) [1-3]. Our previous study [4] has evaluated the stability of MoS2-n/WSe2-p SRAMs with planar technology. However, the process complexity of heterogeneous integration of distinct materials for n/p-FETs can become a concern. Monolithic 3-D integration [5] offers the possibility to independently optimize the n-FETs and p-FETs at distinct tiers. It has also been envisioned [6] that monolithic 3-D integration combined with the extremely scaled TMD devices may offer the ultimate solution for future ultra-high density ICs and SRAMs (Fig. 1(c)).","PeriodicalId":145660,"journal":{"name":"2016 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126654500","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Monolithic 3D IC vs. TSV-based 3D IC in 14nm FinFET technology 单片3D集成电路与14nm FinFET技术中基于tsv的3D集成电路
S. Samal, D. Nayak, M. Ichihashi, S. Banna, S. Lim
In this paper, we conduct a comprehensive design comparison of 2D ICs, monolithic 3D ICs and TSV-based 3D ICs using a silicon-validated 14nm FinFET foundry technology and commercial quality designs. Through full-chip layouts and sign-off analysis using commercial-grade tools, the potential of monolithic 3D IC is explored and validated in terms of power, performance and area against that of TSV-based 3D ICs and 2D ICs.
在本文中,我们使用硅验证的14nm FinFET代工技术和商业质量设计对2D ic,单片3D ic和基于tsv的3D ic进行了全面的设计比较。通过使用商业级工具进行全芯片布局和签字分析,探索并验证了单片3D IC与基于tsv的3D IC和2D IC在功耗、性能和面积方面的潜力。
{"title":"Monolithic 3D IC vs. TSV-based 3D IC in 14nm FinFET technology","authors":"S. Samal, D. Nayak, M. Ichihashi, S. Banna, S. Lim","doi":"10.1109/S3S.2016.7804405","DOIUrl":"https://doi.org/10.1109/S3S.2016.7804405","url":null,"abstract":"In this paper, we conduct a comprehensive design comparison of 2D ICs, monolithic 3D ICs and TSV-based 3D ICs using a silicon-validated 14nm FinFET foundry technology and commercial quality designs. Through full-chip layouts and sign-off analysis using commercial-grade tools, the potential of monolithic 3D IC is explored and validated in terms of power, performance and area against that of TSV-based 3D ICs and 2D ICs.","PeriodicalId":145660,"journal":{"name":"2016 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131533273","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 49
Bonding based channel transfer and low temperature process for monolithic 3D integration platform development 基于键合的通道转移和低温工艺的单片三维集成平台开发
R. Choi, Hyun‐Yong Yu, Hyungsub Kim, H. Ryu, H. Bae, K. K. Choi, Yong-Won Cha, C. Choi
We have studied low temperature processes for monolithic 3D integration platform development including hydrogen/helium ion implantation-based wafer cleavage & bonding (<; 450°C), low temperature (<; 550°C) in-situ doped S/D selective SiGe epi process, low temperature (<; 200°C) gate stack on the chemical-mechanical polished (CMP) wafer, and green-lased annealing. These unit technologies can be adopted to achieve 3D integration platform technology for the high performance and low power applications.
我们研究了单片3D集成平台开发的低温工艺,包括基于氢/氦离子注入的晶圆解理和键合(<;450℃),低温(<;550℃)原位掺杂S/D选择性SiGe外延工艺,低温(<;在化学-机械抛光(CMP)晶圆片上进行200°C的栅极叠加,并进行绿激光退火。这些单元技术可用于实现高性能、低功耗应用的3D集成平台技术。
{"title":"Bonding based channel transfer and low temperature process for monolithic 3D integration platform development","authors":"R. Choi, Hyun‐Yong Yu, Hyungsub Kim, H. Ryu, H. Bae, K. K. Choi, Yong-Won Cha, C. Choi","doi":"10.1109/S3S.2016.7804407","DOIUrl":"https://doi.org/10.1109/S3S.2016.7804407","url":null,"abstract":"We have studied low temperature processes for monolithic 3D integration platform development including hydrogen/helium ion implantation-based wafer cleavage & bonding (<; 450°C), low temperature (<; 550°C) in-situ doped S/D selective SiGe epi process, low temperature (<; 200°C) gate stack on the chemical-mechanical polished (CMP) wafer, and green-lased annealing. These unit technologies can be adopted to achieve 3D integration platform technology for the high performance and low power applications.","PeriodicalId":145660,"journal":{"name":"2016 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129384069","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Ultra low energy FDSOI asynchronous reconfiguration network for an IoT wireless sensor network node 面向物联网无线传感器网络节点的超低能耗FDSOI异步重构网络
Soundous Chairat, E. Beigné, Florent Berthier, I. Miro-Panadès, M. Belleville
The paper describes a new asynchronous communication network for reconfiguration of adaptive Wireless Sensor Network (WSN) nodes. The use of adaptive blocks is motivated by the need to increase the performance of the node while being energy efficient. They are able to adapt their performance to the environment, the energy budget and the task. The purpose of the proposed communication network is to handle control signals, both in sleep and working mode of the node at a low energy cost. We show that we can achieve a 0.07pJ/bit in energy per bit and 1.1ns/bit in latency in a 28nm FDSOI technology at 0.6V in asynchronous QDI logic.
提出了一种用于自适应无线传感器网络(WSN)节点重构的异步通信网络。使用自适应块的动机是需要在提高节点性能的同时提高能源效率。他们能够使自己的表现适应环境、能量预算和任务。该通信网络的目的是在节点的休眠和工作模式下以较低的能耗处理控制信号。我们表明,在异步QDI逻辑下,我们可以在0.6V下实现28nm FDSOI技术的每比特能量为0.07pJ/bit,延迟为1.1ns/bit。
{"title":"Ultra low energy FDSOI asynchronous reconfiguration network for an IoT wireless sensor network node","authors":"Soundous Chairat, E. Beigné, Florent Berthier, I. Miro-Panadès, M. Belleville","doi":"10.1109/S3S.2016.7804403","DOIUrl":"https://doi.org/10.1109/S3S.2016.7804403","url":null,"abstract":"The paper describes a new asynchronous communication network for reconfiguration of adaptive Wireless Sensor Network (WSN) nodes. The use of adaptive blocks is motivated by the need to increase the performance of the node while being energy efficient. They are able to adapt their performance to the environment, the energy budget and the task. The purpose of the proposed communication network is to handle control signals, both in sleep and working mode of the node at a low energy cost. We show that we can achieve a 0.07pJ/bit in energy per bit and 1.1ns/bit in latency in a 28nm FDSOI technology at 0.6V in asynchronous QDI logic.","PeriodicalId":145660,"journal":{"name":"2016 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114192710","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
NeuroSensor: A 3D image sensor with integrated neural accelerator 神经传感器:一种集成神经加速器的3D图像传感器
M. Amir, D. Kim, J. Kung, D. Lie, S. Yalamanchili, S. Mukhopadhyay
3D integration provides opportunities to design high-bandwidth and low-power CMOS image sensors (CIS) [1–4]. The 3D stacking of pixel tier, peripheral tier, memory tier(s), and compute tier(s) enables high degree of parallel processing. Also, each tier can be designed in different technology nodes (heterogeneous integration) to further improve power-efficiency. This paper presents a case study of a smart 3D image sensor with integrated neuro-inspired computing for intelligent vision processing. Hardware acceleration of neuro-inspired computing has received much attention in recent years for recognition and classification [5]. We present the physical design of NeuroSensor, a 3D CIS with an integrated convolutional neural network (CNN) accelerator. The rationale for our approach is that 3D integration of sensor, memory, and computing will effectively harness the inherent parallelism in neural algorithms. We design the NeuroSensor considering different complexities of CNN platform, ranging from only feature extraction to complete classification, and study the trade-offs between complexity, performance, and power.
3D集成为设计高带宽和低功耗CMOS图像传感器(CIS)提供了机会[1-4]。像素层、外设层、存储层和计算层的3D堆叠使高度并行处理成为可能。此外,可以在不同的技术节点(异构集成)中设计每个层,以进一步提高功率效率。本文介绍了一种用于智能视觉处理的集成神经启发计算的智能三维图像传感器的案例研究。近年来,神经启发计算的硬件加速在识别和分类方面受到了广泛关注[5]。我们介绍了神经传感器的物理设计,这是一个集成卷积神经网络(CNN)加速器的3D CIS。我们方法的基本原理是传感器、内存和计算的3D集成将有效地利用神经算法中固有的并行性。我们设计了神经传感器,考虑了CNN平台的不同复杂性,从只提取特征到完成分类,并研究了复杂性、性能和功耗之间的权衡。
{"title":"NeuroSensor: A 3D image sensor with integrated neural accelerator","authors":"M. Amir, D. Kim, J. Kung, D. Lie, S. Yalamanchili, S. Mukhopadhyay","doi":"10.1109/S3S.2016.7804406","DOIUrl":"https://doi.org/10.1109/S3S.2016.7804406","url":null,"abstract":"3D integration provides opportunities to design high-bandwidth and low-power CMOS image sensors (CIS) [1–4]. The 3D stacking of pixel tier, peripheral tier, memory tier(s), and compute tier(s) enables high degree of parallel processing. Also, each tier can be designed in different technology nodes (heterogeneous integration) to further improve power-efficiency. This paper presents a case study of a smart 3D image sensor with integrated neuro-inspired computing for intelligent vision processing. Hardware acceleration of neuro-inspired computing has received much attention in recent years for recognition and classification [5]. We present the physical design of NeuroSensor, a 3D CIS with an integrated convolutional neural network (CNN) accelerator. The rationale for our approach is that 3D integration of sensor, memory, and computing will effectively harness the inherent parallelism in neural algorithms. We design the NeuroSensor considering different complexities of CNN platform, ranging from only feature extraction to complete classification, and study the trade-offs between complexity, performance, and power.","PeriodicalId":145660,"journal":{"name":"2016 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127112949","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
期刊
2016 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1