Pub Date : 2017-05-21DOI: 10.1109/PLASMA.2017.8496187
F. Bozduman, Necati Haytural, A. Gulec, O. N. Asan, L. Oksuz
Dielectric support rods such as alumina, quartz, BeO and diamond have been spaced around the helix to hold the helix in place and also to remove heat from helix. Interaction efficiency of TWT also depends on these support rod's shape and material among the other parameters 1. For this purpose an homemade MPCVD 2 microwave plasma chemical vapor deposition) system has been built. The plasma characteristics and surface morphology of the rods and thermal analysis of the samples will be given.
{"title":"TWT Support Road Coating by MPCVD","authors":"F. Bozduman, Necati Haytural, A. Gulec, O. N. Asan, L. Oksuz","doi":"10.1109/PLASMA.2017.8496187","DOIUrl":"https://doi.org/10.1109/PLASMA.2017.8496187","url":null,"abstract":"Dielectric support rods such as alumina, quartz, BeO and diamond have been spaced around the helix to hold the helix in place and also to remove heat from helix. Interaction efficiency of TWT also depends on these support rod's shape and material among the other parameters 1. For this purpose an homemade MPCVD 2 microwave plasma chemical vapor deposition) system has been built. The plasma characteristics and surface morphology of the rods and thermal analysis of the samples will be given.","PeriodicalId":145705,"journal":{"name":"2017 IEEE International Conference on Plasma Science (ICOPS)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126623116","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-02DOI: 10.1109/PLASMA.2017.8496050
S. Walton, E. Gillman, D. Boris, M. Helle, S. Hernández, T. Petrova, G. Petrov
Atmospheric pressure plasmas have certain advantage in materials synthesis and processing that are not available with other approaches including low-pressure plasmas. In particular, the breadth of reactions afforded by non-equilibrium, low temperature plasmas is unique; plasmas produced in full density air allows one to extend the application space to systems and materials that are not vacuum compatible. Non-equilibrium, atmospheric pressure plasma jet devices are well-suited for such applications given their relatively simple design and modest power requirements. However, their size tends to limit their utility to small scale processes and treatments. In this work, we describe approaches to extend the volume of non-equilibrium, atmospheric pressure plasma jets and thus, surface area that can be treated. In particular, we consider geometric and gas flow solutions to increase volume. We use high-speed cameras, optical emission spectroscopy (OES), current and voltage measurements, and simulations to characterize the results and understand the potential for and/or limitations to scale-up. This work is supported by the Naval Research Laboratory base program.
{"title":"Extending the volume and processing area of atmospheric pressure plasma jets","authors":"S. Walton, E. Gillman, D. Boris, M. Helle, S. Hernández, T. Petrova, G. Petrov","doi":"10.1109/PLASMA.2017.8496050","DOIUrl":"https://doi.org/10.1109/PLASMA.2017.8496050","url":null,"abstract":"Atmospheric pressure plasmas have certain advantage in materials synthesis and processing that are not available with other approaches including low-pressure plasmas. In particular, the breadth of reactions afforded by non-equilibrium, low temperature plasmas is unique; plasmas produced in full density air allows one to extend the application space to systems and materials that are not vacuum compatible. Non-equilibrium, atmospheric pressure plasma jet devices are well-suited for such applications given their relatively simple design and modest power requirements. However, their size tends to limit their utility to small scale processes and treatments. In this work, we describe approaches to extend the volume of non-equilibrium, atmospheric pressure plasma jets and thus, surface area that can be treated. In particular, we consider geometric and gas flow solutions to increase volume. We use high-speed cameras, optical emission spectroscopy (OES), current and voltage measurements, and simulations to characterize the results and understand the potential for and/or limitations to scale-up. This work is supported by the Naval Research Laboratory base program.","PeriodicalId":145705,"journal":{"name":"2017 IEEE International Conference on Plasma Science (ICOPS)","volume":"144 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122859863","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/plasma.2017.8496093
A. Dória, Gislene S. Liberato, F. R. Figueira, C. A. Carvalho, J. B. S. Lima, R. Pessoa, S. Khouri
Reverse osmosis water is one of the main components of hemodialysis treatment and its chemical and microbiological qualities are vital to avoid additional risks to the patient. A study conducted in the United States between 2009-2011 showed a mortality rate of patients in the first 180 days of dialysis, due to infections, of around 9.6% 1. The technology of non-thermal plasmas, operated under atmospheric pressure, is gaining a potential approach in the eradication and control of bacterial and fungal contamination 2. The aim of this work is to evaluate the efficiency of different atmospheric plasma jet on the disinfection of reverse osmosis water contaminated with standard strains ATCC (American Type Culture Collection) of Escherichia coli(10798), Proteus Mirabilis(35659) and Klebsiella pneumoniae(31488). In the methodology, were prepared bacterial inoculums with reverse osmosis water on the 0.5 of Mac Farland scale. The samples were divided into three groups: (A) control; (B) treated with 5L / min plasma of Argon and water vapor; (C) treated with 5L / min plasma of Argon and hydrogen peroxide. Treatments were performed in triplicate for 10 minutes and at a distance of 1 cm between the nozzle and the liquid surface. A gliding arc discharge reactor was used to generate the plasma jet. For the analysis of the plasma, we used the optical emission spectroscopy (OES) technique, in order to characterize its chemistry. The two plasma compositions used were efficient in the disinfection of the reverse osmosis water contaminated with the different microorganisms, reaching 99.9% reduction of CFU / mL. OES spectra show an increase of 2 orders of magnitude in the OH intensity.
{"title":"Disinfection Of Reverse Osmosis Water By Atmospheric Plasma Rich In Oh Radical","authors":"A. Dória, Gislene S. Liberato, F. R. Figueira, C. A. Carvalho, J. B. S. Lima, R. Pessoa, S. Khouri","doi":"10.1109/plasma.2017.8496093","DOIUrl":"https://doi.org/10.1109/plasma.2017.8496093","url":null,"abstract":"Reverse osmosis water is one of the main components of hemodialysis treatment and its chemical and microbiological qualities are vital to avoid additional risks to the patient. A study conducted in the United States between 2009-2011 showed a mortality rate of patients in the first 180 days of dialysis, due to infections, of around 9.6% 1. The technology of non-thermal plasmas, operated under atmospheric pressure, is gaining a potential approach in the eradication and control of bacterial and fungal contamination 2. The aim of this work is to evaluate the efficiency of different atmospheric plasma jet on the disinfection of reverse osmosis water contaminated with standard strains ATCC (American Type Culture Collection) of Escherichia coli(10798), Proteus Mirabilis(35659) and Klebsiella pneumoniae(31488). In the methodology, were prepared bacterial inoculums with reverse osmosis water on the 0.5 of Mac Farland scale. The samples were divided into three groups: (A) control; (B) treated with 5L / min plasma of Argon and water vapor; (C) treated with 5L / min plasma of Argon and hydrogen peroxide. Treatments were performed in triplicate for 10 minutes and at a distance of 1 cm between the nozzle and the liquid surface. A gliding arc discharge reactor was used to generate the plasma jet. For the analysis of the plasma, we used the optical emission spectroscopy (OES) technique, in order to characterize its chemistry. The two plasma compositions used were efficient in the disinfection of the reverse osmosis water contaminated with the different microorganisms, reaching 99.9% reduction of CFU / mL. OES spectra show an increase of 2 orders of magnitude in the OH intensity.","PeriodicalId":145705,"journal":{"name":"2017 IEEE International Conference on Plasma Science (ICOPS)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123067366","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/plasma.2017.8496195
R. Terry
The goal of this analysis was not to create the most complex and definitive hydrogen breakdown model, but rather to gain enough insight from the substantial existing literature to winnow down the chemistry set to the point that it is easily manageable within a more complex 1D or 2D transport code that can really assess the prompt breakdown process in a typical pulse power machine.
{"title":"Species Dynamics In Prompt Cyclical Hydrogen Discharges","authors":"R. Terry","doi":"10.1109/plasma.2017.8496195","DOIUrl":"https://doi.org/10.1109/plasma.2017.8496195","url":null,"abstract":"The goal of this analysis was not to create the most complex and definitive hydrogen breakdown model, but rather to gain enough insight from the substantial existing literature to winnow down the chemistry set to the point that it is easily manageable within a more complex 1D or 2D transport code that can really assess the prompt breakdown process in a typical pulse power machine.","PeriodicalId":145705,"journal":{"name":"2017 IEEE International Conference on Plasma Science (ICOPS)","volume":"153 2","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120855503","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/PLASMA.2017.8496026
A. Shashurin
Conventional diagnostics cannot be used to measure plasma parameters of atmospheric pressure plasmas if plasma size is small (<1 mm) and density is low (<1013 cm−3). Microwave interferometry fails due to necessity to choose high testing frequency because of small plasma size, which leads to undetectable phase shift. Laser Thomson scattering has limited sensitivity for measuring plasmas with low ionization degree, namely minimal plasma ionization degree is about 10−6 (~1013 cm−3 for atmospheric pressure discharges), and it requires very significant accumulation of the signal (105–106 pulses) which is problematic in case of rapidly evolving non-reproducible plasmas.
{"title":"Rayleigh Microwave Scattering for Diagnostics of Atmospheric-Pressure Microplasmas*","authors":"A. Shashurin","doi":"10.1109/PLASMA.2017.8496026","DOIUrl":"https://doi.org/10.1109/PLASMA.2017.8496026","url":null,"abstract":"Conventional diagnostics cannot be used to measure plasma parameters of atmospheric pressure plasmas if plasma size is small (<1 mm) and density is low (<10<sup>13</sup> cm<sup>−3</sup>). Microwave interferometry fails due to necessity to choose high testing frequency because of small plasma size, which leads to undetectable phase shift. Laser Thomson scattering has limited sensitivity for measuring plasmas with low ionization degree, namely minimal plasma ionization degree is about 10<sup>−6</sup> (~10<sup>13</sup> cm<sup>−3</sup> for atmospheric pressure discharges), and it requires very significant accumulation of the signal (10<sup>5</sup>–10<sup>6</sup> pulses) which is problematic in case of rapidly evolving non-reproducible plasmas.","PeriodicalId":145705,"journal":{"name":"2017 IEEE International Conference on Plasma Science (ICOPS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125864969","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/PLASMA.2017.8496186
C. Moore, A. Fierro, R. Jorgenson, H. Hjalmarson, A. Jindal, M. Hopkins, P. Clem, L. Biedermann
Summary form only given, as follows. The complete presentation was not made available for publication as part of the conference proceedings. Breakdown simulations typically resort to initiation by artificially seeding part of the domain with an initial plasma. or by adding a trickle current orders of magnitude larger than what is physical. In order to simulate observed variations in breakdown voltages and times in pulsed voltage experiments with dielectric particles, we present here a more physical model for the generation of the initial plasma. In an upcoming set of experiments on a 250μm air-filled gap with. and without a dielectric present, breakdown voltages will be measured after applying a short UV light pulse just before the anode voltage is ramped up at 200 kV/μs.
{"title":"Kinetic simulation of breakdown time variation for gaps filled with dielectric particles","authors":"C. Moore, A. Fierro, R. Jorgenson, H. Hjalmarson, A. Jindal, M. Hopkins, P. Clem, L. Biedermann","doi":"10.1109/PLASMA.2017.8496186","DOIUrl":"https://doi.org/10.1109/PLASMA.2017.8496186","url":null,"abstract":"Summary form only given, as follows. The complete presentation was not made available for publication as part of the conference proceedings. Breakdown simulations typically resort to initiation by artificially seeding part of the domain with an initial plasma. or by adding a trickle current orders of magnitude larger than what is physical. In order to simulate observed variations in breakdown voltages and times in pulsed voltage experiments with dielectric particles, we present here a more physical model for the generation of the initial plasma. In an upcoming set of experiments on a 250μm air-filled gap with. and without a dielectric present, breakdown voltages will be measured after applying a short UV light pulse just before the anode voltage is ramped up at 200 kV/μs.","PeriodicalId":145705,"journal":{"name":"2017 IEEE International Conference on Plasma Science (ICOPS)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125372514","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/plasma.2017.8496276
H. Cho, K. Rhee
For this study, we investigated the effects of atmospheric-pressure plasma on the hydrophilic properties of polyamide-imide (PAI) fabric mats. PAI fabric mats were treated with atmospheric-pressure plasma. The surface characteristics that underwent different durations of plasma treatment were performed to investigate the effect of plasma treatment on the hydrophilic properties of the PAI fabric mats. FT-IR, X-ray photoelectron spectroscopy, and contact angle analysis were carried out for the verification of the hydrophilicity of the PAI fabric mats after plasma treatment. From the analysis results, the hydrophilicity of the PAI fabric mats increased when the introduction of hydrophilic group by plasma treatment. The concentration of functional groups, including oxygen, and surface roughness of the PAI fabric mats were increased as plasma treatment time increased. Under the atmospheric-pressure conditions, the optimal time of plasma treatment for the PAI fabric mats was approximately 120 seconds.
{"title":"A study on the effect of atmospheric-pressure plasma treatment on the hydrophilicity of polyamide-imide fabric mats *","authors":"H. Cho, K. Rhee","doi":"10.1109/plasma.2017.8496276","DOIUrl":"https://doi.org/10.1109/plasma.2017.8496276","url":null,"abstract":"For this study, we investigated the effects of atmospheric-pressure plasma on the hydrophilic properties of polyamide-imide (PAI) fabric mats. PAI fabric mats were treated with atmospheric-pressure plasma. The surface characteristics that underwent different durations of plasma treatment were performed to investigate the effect of plasma treatment on the hydrophilic properties of the PAI fabric mats. FT-IR, X-ray photoelectron spectroscopy, and contact angle analysis were carried out for the verification of the hydrophilicity of the PAI fabric mats after plasma treatment. From the analysis results, the hydrophilicity of the PAI fabric mats increased when the introduction of hydrophilic group by plasma treatment. The concentration of functional groups, including oxygen, and surface roughness of the PAI fabric mats were increased as plasma treatment time increased. Under the atmospheric-pressure conditions, the optimal time of plasma treatment for the PAI fabric mats was approximately 120 seconds.","PeriodicalId":145705,"journal":{"name":"2017 IEEE International Conference on Plasma Science (ICOPS)","volume":"87 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125505845","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/plasma.2017.8496252
D. Milelli, F. Lemont, M. Marchand
Radioactive liquid organic wastes are very various and produced in different quantities. Some of them are treated through specific processes when others are still waiting from outlet to be destroyed and stabilized. An organic liquid incineration process (ELIPSE) involving a non-transferred plasmatorch working under a water column has been developed 1. The ELIPSE process destroys the pure organic liquids and reduces the amount of organic matter remaining in the aqueous solution by means of the thermal or radiative properties of plasma. Preliminary tests have shown how efficient the process is for the destruction of the organic liquids when they are directly fed in the plasma hearth. Process efficiency, during the treatment of a mixture of tributyl phosphate (TBP) and dodecane, is given by mineralization rate which is greater than 99.9% for feed rate up to 5 L/h. Extensive researches have been performed to assess the ability of the submerged plasma to destroy the remaining organic matters either by reinjecting them with the aqueous solution into the plasma or by using the UV ray coming from the plasma itself.
{"title":"Thermo- And Photo-Oxidation In A Liquid Treatment System Using Submerged Plasma","authors":"D. Milelli, F. Lemont, M. Marchand","doi":"10.1109/plasma.2017.8496252","DOIUrl":"https://doi.org/10.1109/plasma.2017.8496252","url":null,"abstract":"Radioactive liquid organic wastes are very various and produced in different quantities. Some of them are treated through specific processes when others are still waiting from outlet to be destroyed and stabilized. An organic liquid incineration process (ELIPSE) involving a non-transferred plasmatorch working under a water column has been developed 1. The ELIPSE process destroys the pure organic liquids and reduces the amount of organic matter remaining in the aqueous solution by means of the thermal or radiative properties of plasma. Preliminary tests have shown how efficient the process is for the destruction of the organic liquids when they are directly fed in the plasma hearth. Process efficiency, during the treatment of a mixture of tributyl phosphate (TBP) and dodecane, is given by mineralization rate which is greater than 99.9% for feed rate up to 5 L/h. Extensive researches have been performed to assess the ability of the submerged plasma to destroy the remaining organic matters either by reinjecting them with the aqueous solution into the plasma or by using the UV ray coming from the plasma itself.","PeriodicalId":145705,"journal":{"name":"2017 IEEE International Conference on Plasma Science (ICOPS)","volume":"132 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116075914","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/PLASMA.2017.8496109
Jin Seok Kim, H. Lee, H. J. Kim
A particle-in-cell (PIC) simulation has been usually utilized for observing plasma kinetics in low pressure [1]because of long simulation time as PIC uses a huge amount of computational particles to treat collisions with neutral gas using Monte Carlo collision (MCC) method. In order to simulate high or intermediate pressure discharges, there are three limitations which slow down the total computation time: (1) many simulation particles are needed as plasma density increases. (2) a very short time step is required in MCC process. (3) many collisional reactions should be included. To overcome these limitations, we approach in three ways: (1) parallelization of PIC simulation with Graphics Processing Units (GPUs), (2) improvement of MCC method, (3) and combination with a fluid model for heavy particle collisions. In this presentation, ion transport phenomena are investigated at the wafer edge in a capacitively coupled plasma (CCP) reactor under an intermediate pressure of a few Torr. The effects of waferfocus ring gap, focus ring height, and the dielectric constant are investigated on the neutral and the ion fluxes and the ion energy and angle distribution (IAEDF), and compared with the preceded results [2–3]for the effect of the wafer-focus ring property.
由于采用蒙特卡罗碰撞(Monte Carlo collision, MCC)方法处理与中性气体的碰撞，通常采用粒子池(particle-in-cell, PIC)模拟来观察低压条件下等离子体动力学[1]，因为PIC使用了大量的计算粒子，模拟时间长。为了模拟高压或中压放电，有三个限制减慢了总计算时间:(1)随着等离子体密度的增加，需要许多模拟粒子。(2) MCC过程所需的时间步长很短。(3)应包括许多碰撞反应。为了克服这些限制，我们从三个方面着手:(1)图形处理单元(gpu)并行化PIC仿真;(2)改进MCC方法;(3)结合重粒子碰撞流体模型。本文研究了电容耦合等离子体反应器在几托中压下的离子输运现象。研究了聚焦环间隙、聚焦环高度和介电常数对中性离子通量和离子能量角分布(IAEDF)的影响，并与前人的研究结果[2-3]进行了比较。
{"title":"Advanced Pic-Mcc Simulation for an Intermediate-Pressure Capacitively Coupled Plasma for Deposition Process","authors":"Jin Seok Kim, H. Lee, H. J. Kim","doi":"10.1109/PLASMA.2017.8496109","DOIUrl":"https://doi.org/10.1109/PLASMA.2017.8496109","url":null,"abstract":"A particle-in-cell (PIC) simulation has been usually utilized for observing plasma kinetics in low pressure [1]because of long simulation time as PIC uses a huge amount of computational particles to treat collisions with neutral gas using Monte Carlo collision (MCC) method. In order to simulate high or intermediate pressure discharges, there are three limitations which slow down the total computation time: (1) many simulation particles are needed as plasma density increases. (2) a very short time step is required in MCC process. (3) many collisional reactions should be included. To overcome these limitations, we approach in three ways: (1) parallelization of PIC simulation with Graphics Processing Units (GPUs), (2) improvement of MCC method, (3) and combination with a fluid model for heavy particle collisions. In this presentation, ion transport phenomena are investigated at the wafer edge in a capacitively coupled plasma (CCP) reactor under an intermediate pressure of a few Torr. The effects of waferfocus ring gap, focus ring height, and the dielectric constant are investigated on the neutral and the ion fluxes and the ion energy and angle distribution (IAEDF), and compared with the preceded results [2–3]for the effect of the wafer-focus ring property.","PeriodicalId":145705,"journal":{"name":"2017 IEEE International Conference on Plasma Science (ICOPS)","volume":"81 1-2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116561835","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-05-01DOI: 10.1109/PLASMA.2017.8496175
A. Vlasov, J. Rodgers, J. Pasour, I. Chernyavskiy, S. Cooke, B. Levush, T. Antonsen, D. Chernin, K. Nguyen
Multiple beam vacuum electronic devices are attractive for many applications since they are able to produce high output power at moderate or low operating voltages. Multiple Beam Traveling Wave Tubes (MB-TWT) based on folded waveguide slow wave structures (FW-SWS) are new devices suitable for efficient interaction with spatially distributed multiple electron beams. At the same time, increase in the transverse size of an area occupied by the electron beams leads to reduction of starting currents of higher order modes spurious oscillations in comparison with single beam TWTs. Therefore, design of MB-TWTs should address both the interaction of the operating mode with the spatially distributed beam as well as stability with respect to spurious modes excitation. To address these issues the NRL design codes TESLA and CHRISTINE has been developed and verified to be suitable for modeling and design of MB-TWTs with FW SWS.
{"title":"Low Voltage Folded Waveguide Multiple Beam Mini-Twts: Design and Modeling","authors":"A. Vlasov, J. Rodgers, J. Pasour, I. Chernyavskiy, S. Cooke, B. Levush, T. Antonsen, D. Chernin, K. Nguyen","doi":"10.1109/PLASMA.2017.8496175","DOIUrl":"https://doi.org/10.1109/PLASMA.2017.8496175","url":null,"abstract":"Multiple beam vacuum electronic devices are attractive for many applications since they are able to produce high output power at moderate or low operating voltages. Multiple Beam Traveling Wave Tubes (MB-TWT) based on folded waveguide slow wave structures (FW-SWS) are new devices suitable for efficient interaction with spatially distributed multiple electron beams. At the same time, increase in the transverse size of an area occupied by the electron beams leads to reduction of starting currents of higher order modes spurious oscillations in comparison with single beam TWTs. Therefore, design of MB-TWTs should address both the interaction of the operating mode with the spatially distributed beam as well as stability with respect to spurious modes excitation. To address these issues the NRL design codes TESLA and CHRISTINE has been developed and verified to be suitable for modeling and design of MB-TWTs with FW SWS.","PeriodicalId":145705,"journal":{"name":"2017 IEEE International Conference on Plasma Science (ICOPS)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122577619","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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