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2017 IEEE International Conference on Plasma Science (ICOPS)最新文献

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Absolute Instability at the Lower Band Edge in a Traveling Wave Tube 行波管下带边缘的绝对不稳定性
Pub Date : 2017-05-01 DOI: 10.1109/PLASMA.2017.8496064
F. Antoulinakis, Y. Lau, P. Wong, A. Jassem
We provide a close examination of the beam mode and its interaction with the circuit mode in the immediate vicinity of the lower band edge in a traveling wave tube. We model the circuit mode as a hyperbola in the (w, k) plane in the immediate vicinity of the lower band edge, where w is the frequency and k is the wavenumber. We find that an absolute instability may arise, according to the Briggs-Bers criterion [1], if the beam current is sufficiently high, even if the beam mode intersects with the circuit mode at a point in the (w, k) plane with a positive group velocity. This threshold condition is deduced analytically and confirmed by numerical calculations. When the threshold current is exceeded, the Green’s function [1], at a fixed position, exponentiates in time as t to the 1/3 power initially, but as (wi*t) at later time, where wi is the imaginary part of the unstable polepinch root of w according to the Briggs-Bers criterion [1]. This finding differs from some previous works [2, 3]on absolute instabilities at the lower band edge, and points to the vulnerability to absolute instabilities at both the upper and lower band edges of a TWT.
我们提供了在行波管的下带边缘附近的光束模式及其与电路模式的相互作用的密切检查。我们将电路模式建模为(w, k)平面上紧邻下带边缘的双曲线,其中w为频率,k为波数。我们发现,根据布里格斯-伯斯准则[1],如果光束电流足够高,即使光束模式与电路模式在(w, k)平面上以正群速度相交,也可能产生绝对不稳定性。对该阈值条件进行了解析推导,并通过数值计算进行了验证。当超过阈值电流时,Green函数[1]在固定位置上,最初以t的1/3次方为指数,后来以(wi*t)为指数,其中根据Briggs-Bers判据[1],wi为w的不稳定极尖根的虚部。这一发现不同于以往一些关于下带边缘绝对不稳定性的研究[2,3],它指出了行波管上下带边缘都存在绝对不稳定性的脆弱性。
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引用次数: 0
The Influence of Carrier Gas on Nanosecond-Pulsed Plasma Discharge Generated in a Water Film Plasma Reactor 载气对水膜等离子体反应器中纳秒脉冲等离子体放电的影响
Pub Date : 2017-05-01 DOI: 10.1109/PLASMA.2017.8496199
Huihui Wang, R. Wandell, B. Locke
Plasma discharge with liquid water has been widely studied due to its potential application in water treatment and chemical synthesis. Hydrogen peroxide, mainly formed by the recombination of hydroxyl radicals, is the major stable product of the plasma discharge with liquid water. The production rate of hydrogen peroxide is affected by operating conditions such as reactor type and input power1 2. In our previous work3, a nanosecond power supply with adjustable pulse width, input voltage and pulse frequency, was used to investigate how input power influences the hydrogen peroxide production in the water film reactor. In the present study we expand upon the previous work with this nanosecond pulsed plasma discharge by considering the influence of carrier gas (argon and helium) on the plasma properties and the formation of hydrogen peroxide. We hypothesize that the carrier gas influences the plasma properties that in turn affect the hydrogen peroxide production rate. The plasma properties, including electron density, gas temperature, and plasma volume, and the hydrogen peroxide production rate are measured in argon, helium, and argon/helium mixtures. We found that the helium plasma is more diffusive compared with the argon plasma. In addition, the helium plasma has a larger volume and lower electron density and gas temperature. These results may be due to the higher thermal conductivity of helium compared to argon. We also found that by combining helium with argon, thus increasing the thermal conductivity over that of pure argon, the plasma became more diffusive with the increasing percentage of helium in the gas mixture.
液态水等离子体放电在水处理和化学合成等领域具有广泛的应用前景。过氧化氢是等离子体与液态水放电的主要稳定产物,主要由羟基自由基重组形成。过氧化氢的产率受反应器类型和输入功率等操作条件的影响。在我们之前的工作中,我们使用了一种具有可调脉冲宽度、输入电压和脉冲频率的纳秒级电源来研究输入功率如何影响水膜反应器中过氧化氢的生产。在本研究中,我们通过考虑载气(氩气和氦气)对等离子体特性和过氧化氢形成的影响,在纳秒脉冲等离子体放电的基础上进行了扩展。我们假设载气影响等离子体的特性,进而影响过氧化氢的生产速率。在氩气、氦气和氩气/氦气混合物中测量了等离子体的性质,包括电子密度、气体温度、等离子体体积和过氧化氢的生成速率。我们发现氦等离子体比氩等离子体更具有弥漫性。此外,氦等离子体的体积更大,电子密度和气体温度更低。这些结果可能是由于氦的热导率比氩高。我们还发现,通过将氦气与氩气结合,从而增加热导率,而不是纯氩气,等离子体随着气体混合物中氦气含量的增加而变得更加扩散。
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引用次数: 0
Investigating a Lower Limit for the Magnetic Field in a TWT* 行波管中磁场下限的研究*
Pub Date : 2017-05-01 DOI: 10.1109/PLASMA.2017.8496118
Necati Haytural, L. Oksuz, A. Gulec, F. Bozduman, Hakan Yeşiltepe
Stable operation is one of the challenging difficulties of a traveling wave tube when it comes to designing. Mismatches at the couplers, spreading of the beam more than necessary due to space-charge forces etc. may lead to self-excitations of the tube. The spreading of the beam may also lead to backward wave oscillations[1].For this reason the beam focusing is an important matter on TWT operation and strong magnetic fields are required for the confinement of the beam.In this study a lower limit for the magnetic field will be investigated for given beam parameters. CST Studio Suite will be used for modelling and simulations of a Ku band TWT [2].
稳定运行是行波管设计的难点之一。耦合器处的不匹配,由于空间电荷力等原因,光束的扩展超过了必要的范围,可能导致管的自激。光束的扩散也可能导致反向波振荡[1]。因此,束的聚焦是行波管工作中的一个重要问题,束的聚焦需要强磁场的约束。在本研究中,将研究给定光束参数下磁场的下限。CST Studio Suite将用于Ku波段行波管的建模和模拟[2]。
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引用次数: 0
Investigation of varying end-capacitance in external antenna for inductively coupled plasma 电感耦合等离子体外天线端容变化研究
Pub Date : 2017-05-01 DOI: 10.1109/PLASMA.2017.8496033
D. H. Kim, H. Rhee, S. Nawaz, S. Yoon
Summary form only given. Modern inductively coupled plasma (ICP) gained a great interest in plasma-assisted material processing in semiconductor industry. This implied by key properties of ICP having high-density, uniform plasma at low pressure. We report the effect of endcapacitance dependency for ICP. The efficiency of ICP is normally measured via inductive coupling efficiency between antenna coil and the plasma 1. Our discharge chamber had 200mm diameter and consisted of three-turn external cylindrical antenna coil through pi-type matching network. End-capacitance is used to suppress electrostatic coupling to plasma. The suppression is one of key issue from material processing in field of semiconductor industry, as it causes sputtering of dielectric materials. In this work, the plasma density and the antenna voltages are measured by changing the end-capacitance. The end-capacitance herein is a vacuum variable capacitance (VVC) ranging from 50 pF to 500 pF. While adjusting the value of capacitor, V-I value flowing through antenna was measured. The test RF discharge parameters are 13.56 MHz, applied up to 4000 W, gas pressure was maintained constant 0.2 Torr. For changing endcapacitance we measured the voltage at two points, before and after antenna coil namely Vin and Vout, using a highvoltage probe. E-H mode transition power and ion current are measured with respect to range of end-capacitance. Ion Current was measured using a floating harmonic method. With increasing the end-capacitance, the ratio of Vout/Vin has increased simultaneously. Less RF power is required for the E-H mode transition when VVC is tuned to higher capacitance. The inductive coupling is more efficient for the case where E-H mode transition is lower. The measured ion current is 2 times higher for changing Vout/Vin ratio from 0.33 to 7.15. The plasma density of ICP is associated with the resonance of inductance and capacitance of the antenna coil. The impedance of antenna, which is adjustable by changing the end-capacitance, determines the plasma-potential oscillation, voltage and current on the coil. With endcapacitance optimization, the plasma density is increased by lowering the antenna wall loss and accelerating ions by selfbias DC voltages. Varying the end-capacitance of antenna and to find optimum capacitance for antenna design has enabled to build effective ICP system.
只提供摘要形式。现代电感耦合等离子体(ICP)在半导体工业中引起了人们对等离子体辅助材料加工的极大兴趣。这是由ICP在低压下具有高密度、均匀等离子体的关键特性所暗示的。我们报告了端电容依赖性对ICP的影响。ICP的效率通常通过天线线圈和等离子体之间的电感耦合效率来测量。放电室直径为200mm,通过pi型匹配网络由三匝外圆柱形天线线圈组成。端电容用于抑制与等离子体的静电耦合。抑制介电材料的溅射是半导体工业材料加工领域的关键问题之一。在这项工作中,通过改变端电容来测量等离子体密度和天线电压。端电容为50pf ~ 500pf的真空可变电容(VVC),在调整电容值的同时,测量流经天线的V-I值。测试射频放电参数为13.56 MHz,施加功率高达4000 W,气体压力保持恒定0.2 Torr。为了改变端容,我们使用高压探头测量了天线线圈前后两点的电压,即Vin和Vout。测量了E-H模式转换功率和离子电流与端电容范围的关系。离子电流采用浮动谐波法测量。随着端电容的增大,Vout/Vin的比值也随之增大。当VVC调至高电容时,E-H模式转换所需的射频功率更少。在E-H模式跃迁较低的情况下,电感耦合效率更高。当Vout/Vin比从0.33变为7.15时,测量到的离子电流增加了2倍。ICP的等离子体密度与天线线圈电感和电容的共振有关。天线的阻抗决定了线圈上的等离子体电位振荡、电压和电流,可以通过改变端电容来调节。端容优化通过降低天线壁损耗和自偏置直流电压加速离子来提高等离子体密度。通过改变天线的端电容,寻找最优电容进行天线设计,可以构建有效的ICP系统。
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引用次数: 0
Modeling of an Electron-Beam Pumped Arf Excimer Laser * 电子束抽运Arf准分子激光器的建模*
Pub Date : 2017-05-01 DOI: 10.1109/PLASMA.2017.8496233
T. Petrova, G. Petrov, M. Wolford, A. Schmitt, J. Giuliani, S. Obenschain
We present here initial efforts to advance the modeling of electron-beam-pumped ArF lasers. These efforts will be tested against experiments using the NRLElectrafacility. The advantages of using ArF as a driver for direct drive laser fusion compared to KrF [1]are: shorter wavelength (193 nm for ArF* vs. 248 nm for KrF*) and broader bandwidth. Use of ArF driver should lead to more robust higher-energy-gain fusion implosions than KrF, with an even larger advantage over the 351 nm laser technology used on NIF. The smaller absorption cross section by F2 with ArF [2]is an advantage in constructing large, high-energy amplifiers. In addition, it may have higher intrinsic efficiency than KrF [3]. A theoretical model of an e-beam pumped ArF* excimer laser is under development. One of the goals of this work is to understand the energy deposition in Ar-F2mixture for ArF lasers and compare to Ar-Kr-F2mixture for KrF lasers [4, 5]. The collisional rates with electrons are obtained as a function of F2concentration and power deposition by solving the steady-state Boltzmann equation for the electron energy distribution function. We use the concept of excitation-to-ionization ratios to obtain slowly varying rates over a wide range of input parameters such as beam power, gas pressure, and initial gas composition. These rates are coupled to a 1D time-dependent plasma chemistry based on NRLOrestessuite of numerical models. It includes plasma chemistry reactions and vibrational population kinetics of ArF* molecules, coupled to a 3D-radiation transport for the amplified spontaneous emission (ASE). The input parameters are the e-beam temporal profile, gas composition, and system geometry (type of laser amplifier configuration with initial laser seed characteristics). Measurable plasma parameters, such as species concentrations, electron and gas temperatures, as well as laser parameters, such as small signal gain, non-saturable absorption, saturated laser intensity, and AES are calculated as a function of input power and gas composition in the e-beam high-power regime. The model results are compared with the limited experimental measurement literature for ArF lasers.
本文介绍了电子束抽运ArF激光器建模的初步工作。这些努力将在nrlelectrafility的实验中进行测试。与KrF[1]相比,使用ArF作为直接驱动激光聚变的驱动器的优点是:波长更短(ArF*为193 nm, KrF*为248 nm),带宽更宽。使用ArF驱动器应该比KrF产生更强大的高能量增益聚变内爆,甚至比用于NIF的351nm激光技术具有更大的优势。F2与ArF[2]的较小吸收截面在构建大型高能放大器时具有优势。此外,它可能具有比KrF更高的本征效率[3]。电子束抽运ArF*准分子激光器的理论模型正在研制中。这项工作的目标之一是了解ArF激光器的ar - f2混合物中的能量沉积,并与KrF激光器的ar - kr - f2混合物进行比较[4,5]。通过求解电子能量分布函数的稳态玻尔兹曼方程,得到了与电子的碰撞率作为f2浓度和功率沉积的函数。我们使用激发电离比的概念来获得在大范围输入参数(如束流功率、气体压力和初始气体成分)下缓慢变化的速率。这些速率与基于NRLOrestessuite数值模型的一维时间依赖等离子体化学相耦合。它包括等离子体化学反应和ArF*分子的振动种群动力学,以及用于放大自发发射(ASE)的3d辐射输运。输入参数是电子束时间剖面、气体成分和系统几何形状(具有初始激光种子特性的激光放大器配置类型)。可测量的等离子体参数,如物质浓度、电子和气体温度,以及激光参数,如小信号增益、不饱和吸收、饱和激光强度和AES,作为输入功率和电子束高功率状态下气体成分的函数来计算。将模型结果与有限的ArF激光器实验测量文献进行了比较。
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引用次数: 1
Dynamic 3D Microplasma Photonic Crystal By 3D Printing 动态3D微等离子体光子晶体的3D打印
Pub Date : 2017-05-01 DOI: 10.1109/PLASMA.2017.8496314
P. P. Sun, P. P. Sun, S. Zhong, J. Eden, Runyu Zhang, P. Braun, Wenyuan Chen
Three dimensional microplasma photonic crystal (3D MPPhC) is first time realized through 3D printing method. The layerlayer building method is only one embodiment for building the microstructures to confine the plasma. The 3D MPPhC proposed here for achieving highly tunable and reconfigurable material systems for electromagnetic responses in the millimeter wave or extremely high frequency regimes. The plasma crystal periodic structure arrays confined in the microstructures have been successfully realized within a volume large than 16.25 cm3, for example, can serve as a reconfigurable bandpass filter, beam splitter or router, attenuator, or phase shifter for frequencies up to and beyond 1THz. The mm-wave transmission responses from 110 – 170 GHz have been recorded with the strong responses. The dynamic tunings are demonstrated through the addressability of the microplasma array in three dimensions, including electron density, collisional frequency and crystal latter constants. We believe the capability of controlling the arrays of microplasma as dynamic material in three dimensions, in combination of the isotropic geometry, provide the versatile abilities to control the electromagnetic responses including but not limited to photonic band gap. The details will be introduced in the conference.
首次利用3D打印技术实现了三维微等离子体光子晶体。层构建方法只是构建限制等离子体的微结构的一个实施例。本文提出的3D MPPhC用于实现高度可调谐和可重构的材料系统,用于毫米波或极高频率的电磁响应。微结构内的等离子体晶体周期结构阵列已成功实现在大于16.25 cm3的体积内,例如,可以作为可重构的带通滤波器、分束器或路由器、衰减器或移相器,频率高达或超过1THz。记录了110 ~ 170 GHz的毫米波传输响应,具有较强的响应。通过微等离子体阵列的电子密度、碰撞频率和晶体后期常数的三维可寻址性来证明动态调谐。我们认为,将微等离子体阵列作为动态材料进行三维控制的能力,结合各向同性几何结构,提供了控制电磁响应的多功能能力,包括但不限于光子带隙。细节将在会议上介绍。
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引用次数: 0
Experimental Study Of An Ultra-Fast Atmospheric Pressure Air Discharge In A Pin-To-Plate Geometry 针对板几何结构中超高速大气压空气放电的实验研究
Pub Date : 2017-05-01 DOI: 10.1109/PLASMA.2017.8496158
J. Pouvesle, S. Iséni, S. Dozias, É. Robert
In this work, a pin-to-plate reactor operating in air at ambient temperature and pressure is investigated. Driven with a high-voltage (HV) ns pulse generator with sub-ns rise time excitation up to 50 kV, the discharge is ignited within a gap ranging from 0.5 to 25 mm. Although pin-to-plate discharges have been widely studied over the last century, the system offers the advantage to ignite the discharge in the over-voltage regime allowing for minimizing gas heating (at least in the single shot regime) and the production of highly energetic electrons due to the intense electric field (EF). As already shown, the discharge expends in very large and homogeneous volume (up to 20 mm diameter) within the gap. This is of high interest for atmospheric pressure volume treatment concerning either degradation of pollutants, assisted combustion ignition or activation of materials 1.
在这项工作中,研究了在环境温度和压力下在空气中工作的针对板反应器。由一个高电压(HV) ns脉冲发生器驱动,具有高达50 kV的次ns上升时间激励,在0.5至25 mm的间隙内点燃放电。尽管在上个世纪对引脚到极板的放电进行了广泛的研究,但该系统的优点是可以在过电压状态下点燃放电,从而最大限度地减少气体加热(至少在单次射击状态下),并且由于强电场(EF)而产生高能量电子。如前所述,放电在间隙内以非常大且均匀的体积(直径达20毫米)消耗。这对于涉及污染物降解、辅助燃烧点火或材料活化的常压体积处理具有重要意义。
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引用次数: 1
Plasma-Liquid Interaction For Treatment Of Hydraulic Fracturing Wastewater 等离子体-液相互作用处理水力压裂废水
Pub Date : 2017-05-01 DOI: 10.1109/PLASMA.2017.8496056
J. Groele, J. Foster
Reactive species produced through plasma-liquid interaction is investigated for treatment of hydraulic fracturing wastewater. Unconventional shale gas and oil extraction has resulted in over 1.74 trillion liters of combined wastewater between 2005 and 2014, most of which has been injected into Class II disposal wells and removed from the water cycle 1. High total dissolved solid (TDS) concentrations that can exceed 260,000 mg/L limit the viability of contemporary treatment technologies due to intensive energy requirements and low throughputs, leading to the prominence of deep-well injection for wastewater management. Local water scarcity and seismic concerns motivate the need for a feasible treatment option that allows for wastewater recycling.
研究了等离子体-液体相互作用产生的反应物质对水力压裂废水的处理效果。2005年至2014年间,非常规页岩气和页岩油开采产生了超过1.74万亿升的综合废水,其中大部分已被注入II类处理井,并从水循环中移除。高总溶解固体(TDS)浓度可超过26万mg/L,由于能源需求大,处理量低,限制了现代处理技术的可行性,导致深井注入成为废水管理的突出问题。当地水资源短缺和地震问题促使人们需要一种可行的处理方案,允许废水循环利用。
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引用次数: 0
Numerical Studies on the Nonlinear Coupling in Atmospheric Dual Radio-Frequency Dielectric Barrier Discharge 大气双射频介质阻挡放电非线性耦合的数值研究
Pub Date : 2017-05-01 DOI: 10.1109/PLASMA.2017.8496196
Z. Zhang, Q. Nie, Z. Y. Wang, B. Jiang
Dielectric barrier discharges (DBD) as a common method to generate plasmas with high density, low gas temperature, and abundant active particle under atmospheric pressure have been widely investigated in the past decades. Among these researches, the investigation on plasma parameters modulation represents a novel and budding focus. According to our previous works of DBD driven by dual-frequency, it has been demonstrated to provide a possible approach of controlling both averaged electron density and gas temperature independently based on the nonlinear frequency coupling effect. In this work, we used one-dimensional fluid model with semi-kinetic method, systemically studied the nonlinear behavior of the dual radio-frequency driven DBD. In term of the results of effective electron energy distribution function (EEDF) and electron impact ionization rate, it is found that the variations of power density and phase relationship provide separate control over the electron density, mean electron energy and gas temperature. Moreover, mode transitions are discussed in this paper. It is shown that there exist three kinds of discharge modes, which are governed by the nonlinear dynamics in the plasma sheath. Among which, the ionization in α mode is determined by the nonlinear coupling electron heating and local momentary charge density. While in γ mode, the ionization is caused mainly by the electron avalanches. In summary, the dual radio-frequency applied in DBD system is found to generate a nonlinear synergistic effect between two frequencies, which can provide a possible approach to enhance control over the plasma parameters.
介质阻挡放电(DBD)作为一种在常压下产生高密度、低气体温度和丰富活性粒子等离子体的常用方法,在过去的几十年里得到了广泛的研究。其中,对等离子体参数调制的研究是一个新兴的研究热点。根据我们之前的双频驱动DBD的工作,已经证明了基于非线性频率耦合效应独立控制平均电子密度和气体温度的可能方法。本文采用一维流体模型和半动力学方法,系统地研究了双射频驱动DBD的非线性行为。根据有效电子能量分布函数(EEDF)和电子冲击电离率的结果,发现功率密度和相位关系的变化对电子密度、平均电子能和气体温度提供了单独的控制。此外,本文还讨论了模式转换。结果表明,等离子体鞘层中存在三种由非线性动力学控制的放电模式。其中,α模式的电离是由非线性耦合电子加热和局部瞬时电荷密度决定的。而在γ模式下,电离主要是由电子雪崩引起的。综上所述,双射频应用于DBD系统中,在两个频率之间产生非线性协同效应,为加强对等离子体参数的控制提供了一种可能的方法。
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引用次数: 0
Electron Interactions With Plasma Feed Gases 电子与等离子体供气的相互作用
Pub Date : 2017-05-01 DOI: 10.1109/PLASMA.2017.8496265
Rakesh Bhavsar, Mohit Swadia, M. Vinodkumar, C. Limbachiya
Major feed gases for plasma generation of F atoms are CF 4, SF 6 and NF 3. The etching process is determined by creation of F atoms through Dissociative Electron Attachment of CF 4 and by dissociation of CF 4 molecule through electronic excitation and ionization. Hence the estimation of excitation as well as ionization cross sections of e-molecule processes are required. Radicals of feed gases (CFx etc.) play important role in anisotropic etching. Also, restriction of emission of Perfluoro compunds and Global Warming Potential stimulates changes in feed gases. Therefore electron impact studies including computation of various cross sections and investigation of anion formation and resonances are major areas of interest. In this work we report various electron impact total cross sections, resonances and target properties for plasma feed gases and fluoro compounds over an extensive range of impact energies (0.1 eV - 5000 eV). Below 15 eV, we use ab-initio calculations with fixed nuclei approximation employing the molecular R-matrix method 1 and above the threshold of the target we employ the well-established Spherical Complex Optical Potential formalism 2.
等离子体生成F原子的主要原料气体是cf4、sf6和nf3。蚀刻过程是通过cf4的解离电子附着产生F原子和通过电子激发和电离使cf4分子解离来确定的。因此,需要估计电子分子过程的激发和电离截面。原料气自由基(CFx等)在各向异性腐蚀中起着重要的作用。此外,限制全氟化合物和全球变暖潜势的排放也刺激了原料气体的变化。因此,电子冲击研究包括各种截面的计算和阴离子形成和共振的研究是主要的兴趣领域。在这项工作中,我们报告了在广泛的冲击能量范围(0.1 eV - 5000 eV)内等离子体原料气体和氟化合物的各种电子冲击总横截面、共振和目标特性。在15 eV以下,我们采用分子r矩阵方法1,采用固定核近似的从头算方法1,在目标阈值以上,我们采用公认的球面复光势形式2。
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引用次数: 0
期刊
2017 IEEE International Conference on Plasma Science (ICOPS)
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