Pub Date : 2022-12-16DOI: 10.2494/photopolymer.35.49
Yosuke Ohta, A. Sekiguchi, Shinji Yamakawa, T. Harada, Takeo Watanabe, Hiroki Yamamoto
{"title":"Comparison of Photoresist Sensitivity between KrF, EB and EUV Exposure","authors":"Yosuke Ohta, A. Sekiguchi, Shinji Yamakawa, T. Harada, Takeo Watanabe, Hiroki Yamamoto","doi":"10.2494/photopolymer.35.49","DOIUrl":"https://doi.org/10.2494/photopolymer.35.49","url":null,"abstract":"","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"21 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2022-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76579671","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-12-16DOI: 10.2494/photopolymer.35.313
Takashi Doi, Isao Nishimura, M. Kaneko, T. Shimokawa
{"title":"Development of Low-Residual-Stress Photosensitive Adhesive Materials for Wafer-Scale Microfluidic Device Fabrication","authors":"Takashi Doi, Isao Nishimura, M. Kaneko, T. Shimokawa","doi":"10.2494/photopolymer.35.313","DOIUrl":"https://doi.org/10.2494/photopolymer.35.313","url":null,"abstract":"","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"9 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2022-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84237988","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-12-16DOI: 10.2494/photopolymer.35.87
C. Dinh, S. Nagahara, Yuhei Kuwahara, Arnaud Dauendorffer, Keisuke Yoshida, Soichiro Okada, T. Onitsuka, S. Kawakami, S. Shimura, M. Muramatsu, Kosuke Yoshihara, J. Petersen, D. D. Simone, P. Foubert, G. Vandenberghe, L. Huli, Steven Grzeskowiak, Alexandra Krawicz, Nayoung Bae, Kanzo Kato, K. Nafus, Angélique Raley
{"title":"EUV Metal Oxide Resist Development Technology for Improved Sensitivity, Roughness and Pattern Collapse Margin for High Volume Manufacturing","authors":"C. Dinh, S. Nagahara, Yuhei Kuwahara, Arnaud Dauendorffer, Keisuke Yoshida, Soichiro Okada, T. Onitsuka, S. Kawakami, S. Shimura, M. Muramatsu, Kosuke Yoshihara, J. Petersen, D. D. Simone, P. Foubert, G. Vandenberghe, L. Huli, Steven Grzeskowiak, Alexandra Krawicz, Nayoung Bae, Kanzo Kato, K. Nafus, Angélique Raley","doi":"10.2494/photopolymer.35.87","DOIUrl":"https://doi.org/10.2494/photopolymer.35.87","url":null,"abstract":"","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"25 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2022-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78107535","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-12-16DOI: 10.2494/photopolymer.35.289
Yuichi Imai, Hiroyuki Fukue, T. Nakatani, S. Kunitsugu, K. Kanda, Tsuneo Suzuki, S. Watari, Y. Fujii, D. Ousaka, Susumu Oozawa, Tomio Uchi
{"title":"Biomimetic Diamond-like Carbon Coating on a Lumen of Small-diameter Long-sized Tube Modified Surface Uniformly with Carboxyl Group using Oxygen Plasma","authors":"Yuichi Imai, Hiroyuki Fukue, T. Nakatani, S. Kunitsugu, K. Kanda, Tsuneo Suzuki, S. Watari, Y. Fujii, D. Ousaka, Susumu Oozawa, Tomio Uchi","doi":"10.2494/photopolymer.35.289","DOIUrl":"https://doi.org/10.2494/photopolymer.35.289","url":null,"abstract":"","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"1 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2022-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85874843","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-01-01DOI: 10.2494/photopolymer.35.365
Takeshi Aizawa, Tasuku Sakurai, Khant Nyar Paing, Yusuke Kayamori, Y. Nakano, Yasunori Tanaka, T. Ishijima
{"title":"High Speed Ashing of Ion Implanted Photoresist by Microwave Excited Water Vapor Plasma with Powered Substrate","authors":"Takeshi Aizawa, Tasuku Sakurai, Khant Nyar Paing, Yusuke Kayamori, Y. Nakano, Yasunori Tanaka, T. Ishijima","doi":"10.2494/photopolymer.35.365","DOIUrl":"https://doi.org/10.2494/photopolymer.35.365","url":null,"abstract":"","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"03 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80087345","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-11DOI: 10.2494/photopolymer.34.285
Seihou Jinnai, Y. Ie
Fine-tuning physical properties by structural modification is important for developing organic semiconducting materials. In this work, we designed and synthesized new electron-accepting compounds containing or naphtho[1,2- c :5,6- c' ]bis[1,2,5]thiadiazole (NTz) groups as electron-accepting units; these units are structural isomers. The vNTz-based compounds have an arch-shaped molecular backbone with C 2v symmetry, whereas the NTz-based compound forms an S-shaped molecular backbone with C 2h symmetry. Property measurements showed unique behavior originating from the vNTz core. An organic solar cell comprising the vNTz-based compound and poly(3-hexylthiopehene) showed a power conversion efficiency of 2.06%. This result demonstrates the potential of vNTz as an electron-accepting unit in organic semiconducting materials.
{"title":"Synthesis, Properties, and Photovoltaic Characteristics of Arch- and S-shaped Naphthobisthiadiazole-based Acceptors","authors":"Seihou Jinnai, Y. Ie","doi":"10.2494/photopolymer.34.285","DOIUrl":"https://doi.org/10.2494/photopolymer.34.285","url":null,"abstract":"Fine-tuning physical properties by structural modification is important for developing organic semiconducting materials. In this work, we designed and synthesized new electron-accepting compounds containing or naphtho[1,2- c :5,6- c' ]bis[1,2,5]thiadiazole (NTz) groups as electron-accepting units; these units are structural isomers. The vNTz-based compounds have an arch-shaped molecular backbone with C 2v symmetry, whereas the NTz-based compound forms an S-shaped molecular backbone with C 2h symmetry. Property measurements showed unique behavior originating from the vNTz core. An organic solar cell comprising the vNTz-based compound and poly(3-hexylthiopehene) showed a power conversion efficiency of 2.06%. This result demonstrates the potential of vNTz as an electron-accepting unit in organic semiconducting materials.","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"11 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2021-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89286889","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-11DOI: 10.2494/photopolymer.34.423
Marina Doi, Koichiro Muto, Mayuko Nara, Naiqiang Liang, K. Sano, Hiroaki Mori, R. Ishige, S. Ando
The photoluminescence (PL) properties of semi-aromatic polyimide (PI) films and their model compounds (MCs) prepared from dianhydrides having a rigid naphthalene core were analyzed. The PMMA-dispersed MC and copolymerized PI (CoPI) films derived from 2,3,6,7-naphthalenetetracarboxylic dianhydride (NTDA) exhibited long-lived phosphorescence owing to the suppression of molecular motion by the rigidity of a naphthalene core. Additionally, the PMMA-dispersed MC and the CoPI films derived from 1,5-dibromo derivative of NTDA (DBrNT) exhibited room-temperature phosphorescence due to the enhancement of spin-orbit coupling by bromine atoms. The photophysical processes of the CoPI films prepared from NTDA/DBrNT and 4,4'-oxydiphtalic dianhydride (ODPA) in which the latter absorption band is located at a shorter wavelength than the former were analyzed. After UV irradiation, efficient excitation energy transfer occurs from the ODPA to NTDA/DBrNT moieties, and only the emission from the latter moieties was observed. These results demonstrate that the CoPI films derived from two dianhydrides absorbing different UV wavelengths can be used as spectral conversion films that convert a wide range of UV-light into longer wavelength visible
{"title":"Photoluminescence Properties of Copolyimides Containing Naphthalene Core and Analysis of Excitation Energy Transfer between the Dianhydride Moieties","authors":"Marina Doi, Koichiro Muto, Mayuko Nara, Naiqiang Liang, K. Sano, Hiroaki Mori, R. Ishige, S. Ando","doi":"10.2494/photopolymer.34.423","DOIUrl":"https://doi.org/10.2494/photopolymer.34.423","url":null,"abstract":"The photoluminescence (PL) properties of semi-aromatic polyimide (PI) films and their model compounds (MCs) prepared from dianhydrides having a rigid naphthalene core were analyzed. The PMMA-dispersed MC and copolymerized PI (CoPI) films derived from 2,3,6,7-naphthalenetetracarboxylic dianhydride (NTDA) exhibited long-lived phosphorescence owing to the suppression of molecular motion by the rigidity of a naphthalene core. Additionally, the PMMA-dispersed MC and the CoPI films derived from 1,5-dibromo derivative of NTDA (DBrNT) exhibited room-temperature phosphorescence due to the enhancement of spin-orbit coupling by bromine atoms. The photophysical processes of the CoPI films prepared from NTDA/DBrNT and 4,4'-oxydiphtalic dianhydride (ODPA) in which the latter absorption band is located at a shorter wavelength than the former were analyzed. After UV irradiation, efficient excitation energy transfer occurs from the ODPA to NTDA/DBrNT moieties, and only the emission from the latter moieties was observed. These results demonstrate that the CoPI films derived from two dianhydrides absorbing different UV wavelengths can be used as spectral conversion films that convert a wide range of UV-light into longer wavelength visible","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"13 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2021-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87514520","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-11DOI: 10.2494/photopolymer.34.351
D. Xue, M. Saito, I. Osaka, K. Marumoto
phenomenon, we hypothesize that energy transfer from 1,2-dioxetanedione to DNSE occurred momentarily in the THF and water solution because of their miscibility. Note that, in highly polar solvents, the emission of DNSE was not visualized, probably because the rate of chemiluminescent reaction is too fast to visually detect the emission caused by the miscibility of their solvents with water in comparison with the case observed using low-polarity solvents. Moreover, no emission was observed with ethyl acetate, although it is immiscible with water. This is probably because the reaction of ethyl acetate with hydrogen peroxide was faster than the oxidation of bis(2,4,6-trichlorophenyl) oxalate. As a result, DNSE was not excited because 1,2-dioxetanedione was not produced.
{"title":"Analyses of Charge Accumulation of PTzBT Ternary Polymer Solar Cells Using ESR Spectroscopy","authors":"D. Xue, M. Saito, I. Osaka, K. Marumoto","doi":"10.2494/photopolymer.34.351","DOIUrl":"https://doi.org/10.2494/photopolymer.34.351","url":null,"abstract":"phenomenon, we hypothesize that energy transfer from 1,2-dioxetanedione to DNSE occurred momentarily in the THF and water solution because of their miscibility. Note that, in highly polar solvents, the emission of DNSE was not visualized, probably because the rate of chemiluminescent reaction is too fast to visually detect the emission caused by the miscibility of their solvents with water in comparison with the case observed using low-polarity solvents. Moreover, no emission was observed with ethyl acetate, although it is immiscible with water. This is probably because the reaction of ethyl acetate with hydrogen peroxide was faster than the oxidation of bis(2,4,6-trichlorophenyl) oxalate. As a result, DNSE was not excited because 1,2-dioxetanedione was not produced.","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"13 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2021-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78503331","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-11DOI: 10.2494/photopolymer.34.381
D. Sato, F. Tsumori
We propose a new method to fabricate complicated 3-dimensional glass microchannels. We employed mycelium for this purpose. Mycelium possesses a complicated, fine and three-dimensional network structure. We cultivated mycelium in silica compounds, and subsequently silica compounds were heated to be sintered. During this heating process, all the mycelium was burned off and remained a fine network channel structure in a transparent glass chip. We also tried to control of the growth of this mycelium. The growth could be changed by growth conditions. In this work, we used cyclic mechanical stimuli for this purpose. We set cyclic tensile strain to the sample under growing mycelium. This cyclic strain caused anisotropic growth of the mycelium in some condition.
{"title":"Glass Microchannel Formation by Mycelium","authors":"D. Sato, F. Tsumori","doi":"10.2494/photopolymer.34.381","DOIUrl":"https://doi.org/10.2494/photopolymer.34.381","url":null,"abstract":"We propose a new method to fabricate complicated 3-dimensional glass microchannels. We employed mycelium for this purpose. Mycelium possesses a complicated, fine and three-dimensional network structure. We cultivated mycelium in silica compounds, and subsequently silica compounds were heated to be sintered. During this heating process, all the mycelium was burned off and remained a fine network channel structure in a transparent glass chip. We also tried to control of the growth of this mycelium. The growth could be changed by growth conditions. In this work, we used cyclic mechanical stimuli for this purpose. We set cyclic tensile strain to the sample under growing mycelium. This cyclic strain caused anisotropic growth of the mycelium in some condition.","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"46 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2021-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76239773","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
扫码关注我们
求助内容：
应助结果提醒方式：