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Purification Method for Achieving Low Trace Metals in Ultra-High Purity Chemicals 在超高纯度化学品中获得低痕量金属的纯化方法
IF 0.8 4区 化学 Q3 Materials Science Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.205
Mitsuaki Kobayashi, Yukihisa Okada, T. Shirai, O. Sawajiri, R. Gieger, M. Entezarian
and T. Sasaki. J. Photopolym. Sci. Technol., 25 . (2012) 389. 7. M. Ree, C-W. Chu, and M. J. Goldberg J. Appl. Phys., 75 (1994) 1410. The high purity requirements of materials used in semiconductor manufacturing are being pushed to unprecedented levels as demand for reliability in computer processors over increasingly longer lifetimes continues to rise. The production of these high purity chemicals requires new purification methods and technologies where the metal concentrations of low parts per billion (ppb) were effectively reduced to low parts per trillion (ppt). The new approach discussed in this paper would present a method for dividing the fluid through micro-channels that form tortuous pathways. These micro-channels allow for further dividing and converging of the fluid thereby presenting the metal species to the purifying surfaces throughout the porous matrix. The ion exchange capability was a function of the concentration and the presence of the species in the solution. Two ion exchange chemistries of strong acid and chelating were made into these structures and their purification performances were assessed and compared in terms of removal efficiencies. Furthermore, these two chemistries were evaluated in series to demonstrate the overall synergistic purification capabilities.
和佐佐木。j . Photopolym。科学。抛光工艺。25岁。(2012) 389。7. 李先生,C-W。M. J.戈德堡J.阿普尔。理论物理。, 75(1994) 1410。随着对计算机处理器可靠性的要求不断提高,半导体制造中使用的材料的高纯度要求正被推向前所未有的水平。这些高纯度化学品的生产需要新的净化方法和技术,将低十亿分之一(ppb)的金属浓度有效地降低到低万亿分之一(ppt)。本文讨论的新方法将提出一种通过形成曲折路径的微通道划分流体的方法。这些微通道允许流体的进一步分离和收敛,从而将金属物质呈现到整个多孔基质的净化表面。离子交换能力是溶液中浓度和物质存在的函数。采用强酸和螯合两种离子交换化学方法制备了这些结构,并对它们的净化性能进行了评价和比较。此外,对这两种化学物质进行了系列评估,以证明其整体协同净化能力。
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引用次数: 1
Research on a New Lithography Method Utilizing Laser Speckles for Printing Random Patterns 激光散斑印刷随机图案新方法的研究
IF 0.8 4区 化学 Q3 Materials Science Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.35
Hiroshi Kobayashi, Tomoki Iwaoka, Kazuki Oi, T. Horiuchi
A new simple and low-cost optical lithography method utilizing speckles was developed for printing random patterns on surfaces of three-dimensinal objects with various shapes, and patterning characteristics were investigated by assembling a handmade exposure system. In the system, a laser beam was irradiated on a transparent diffuser plate, and generated speckles were projected onto a wafer coated with a resist. As a result, resist patterns with random shapes were successfully formed after the development. The size and number of patterns were controllable by adjusting the exposure time. Pattern sizes were between several tens microns and a few hundred microns. It was demonstrated also that the pattern sizes were controlled by changing the wafer position from the diffuser plate. However, the sizes and numbers of patterns were varied together when the exposure time or the distance between the diffuser and the wafer was changed.
提出了一种简单、低成本的光学光刻方法,利用散斑在不同形状的三维物体表面上印刷随机图案,并通过组装手工曝光系统研究了图案特性。在该系统中,激光束照射在透明扩散板上,产生的斑点被投射到涂有抗蚀剂的晶圆上。因此,开发后成功形成了具有随机形状的抗蚀剂图案。通过调整曝光时间,可以控制图案的大小和数量。图案尺寸在几十微米到几百微米之间。通过改变晶圆在扩散板上的位置,可以控制图案的大小。但是,随着曝光时间和扩散器与晶圆之间距离的改变,图案的大小和数目会同时发生变化。
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引用次数: 0
Polymerizable Olefins Groups in Antimony EUV Photoresists 锑极紫外光刻胶中的可聚合烯烃基团
IF 0.8 4区 化学 Q3 Materials Science Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.117
M. Murphy, N. Upadhyay, Munsaf Ali, James V. Passarelli, Jodi Grzeskowiak, Maximillian Weires, R. Brainard
Many antimony-carboxylate complexes containing polymerizable olefins are highly sensitive EUV photoresists. Herein we report two approaches by which we explored the reactivity of polymerizable olefin antimony carboxylate photoresists to improve lithographic performance. First, we explored the effect of replacing three phenyl groups with methyl groups in an effort to increase the relative concentration of olefins vs. size of the molecule. Second, we explored the effect of increasing the number of polymerizable olefins from two to five. This approach examines the use of tris(4-vinylphenyl)antimony-dicarboxylate complexes as photoresists and the developer chemistry capable of patterning highly crosslinked substrates.
许多含有可聚合烯烃的羧酸锑配合物是高度敏感的EUV光抗胶剂。在这里,我们报告了两种方法,我们探索了可聚合烯烃锑羧酸光抗剂的反应性,以提高光刻性能。首先,我们探索了用甲基取代三个苯基以增加烯烃相对浓度与分子大小的影响。其次,我们探索了将可聚合烯烃的数量从2个增加到5个的效果。该方法考察了三(4-乙烯基苯基)锑二羧酸盐配合物作为光阻剂和显影剂化学的使用,这些显影剂能够对高度交联的底物进行图像化。
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引用次数: 0
Novel Effective Photoinitiators for the Production of Dental Fillings 新型有效的牙补材料光引发剂
IF 0.8 4区 化学 Q3 Materials Science Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.259
Monika Topa, J. Ortyl
Photopolymerization is an environmentally-friendly, non-destructive, safe and solvent-free method. Moreover it guarantees low energy consumption. Therefore the photopolymerization is used in many scientific disciplines, including dentistry for production photocurable dental materials. In this work, the new photoinitiating systems based on camphoroquinone (CQ) and iodonium salts with tosyl anion for initiation of photopolymerization of the acrylates monomers bisphenol A - glycidyl methacrylate (BisGMA) and triethyleneglycol dimethacrylate (TEGDMA) was studied. As a reference, camphorquinone (CQ) and ethyl 4-(dimethylamino)benzoate (EDB) photoinitiating system was used.
光聚合是一种环保、无损、安全、无溶剂的方法。此外,它保证了低能耗。因此,光聚合被用于许多科学学科,包括牙科用于生产光固化牙科材料。本文研究了以樟脑醌(CQ)和甲酰阴离子碘盐为基料的新型光引发体系,用于引发丙烯酸酯单体双酚A -甲基丙烯酸甘油酯(BisGMA)和三乙二醇二甲基丙烯酸酯(TEGDMA)的光聚合。以樟醌(CQ)和4-(二甲氨基)苯甲酸乙酯(EDB)光引发体系为参考。
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引用次数: 6
Affinity Analysis of Photoacid Generator in the Thin Film of Chemical Amplification Resist by Contact Angle Measurement 用接触角测量法分析化学放大阻光刻膜中光酸产生源的亲和力
IF 0.8 4区 化学 Q3 Materials Science Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.111
Shinji Yamakawa, Ako Yamamoto, S. Yasui, Takeo Watanabe, T. Harada
Photopolym. Sci. Technol., 27 (2014) 623. 6. A. Sekiguchi, Y. Kono, and Y. Sensu, J. Photopolym. Sci. Technol., 16 (2003) 209. 7. M. Yanagihara, J. Cao, M. Yamamoto, A. Arai, S. Nakayama, T. Mizuide, and T. Namioka, Applied Optics, 30 (1991) 2807. 8. M. Yoshifuji, S. Niihara, T. Harada, and T. Watanabe. Jpn. J. Appl. Phys., 58 (2019). 9. Y. Fukushima, T. Watanabe, T. Harada, and H. Kinoshita. J. Photopolym. Sci. Technol., 22 (2009) 85. 10. T. Ishiguro, J. Tanaka, T. Harada, and T. Watanabe. J. Photopolym. Sci. Technol., 32 (2019) 333. 11. B. Cardineau, R. D. Re, H. Al-Mashat, M. Marnell, M. Vockenhuber, Y. Ekinci, C. Sarma, M. Neisser, D. A. Freedman, and R. L. Brainard, Proc. SPIE, 9051 (2014). 12. A. Sekiguchi, T. Harada, and T. Watanabe, Proc. SPIE, 10143 (2017). 13. A. Sekiguchi, Y. Matsumoto, M. Isono, M. Naito, Y. Utsumi, T. Harada, and T. Watanabe, Proc. SPIE, 10583 (2018). 14. F. H. Dill, W. P. Hornberger, P. S. Hauge, and J. M. Shaw, IEEE Trans. Electron Devices, 22 (1975) 445. 15. F. H. Dill, IEEE Trans. Electron Devices, 22 (1975) 440. Affinity Analysis of Photoacid Generator in the Thin Film of Chemical Amplification Resist by Contact Angle Measurement
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引用次数: 1
Multifunctional Top-Coats Strategy for DSA of High-χ Block Copolymers 高χ嵌段共聚物DSA的多功能面漆策略
IF 0.8 4区 化学 Q3 Materials Science Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.11
X. Chevalier, Cindy Gomes Correia, Gwenaelle Pound-Lana, P. Bézard, M. Sérégé, C. Petit-Etienne, G. Gay, G. Cunge, Benjamin Cabannes-Boué, C. Nicolet, C. Navarro, I. Cayrefourcq, Marcus Müller, G. Hadziioannou, I. Iliopoulos, G. Fleury, M. Zelsmann
A concept of patternable top-coats dedicated to directed self-assembly of high- χ block copolymers is detailed, where the design enables a crosslinking reaction triggered by thermal or photo-activation. Nanostructured BCP areas with controlled domains orientation are selected through a straightforward top-coat lithography step with unique integration pathways. Additionally, the crosslinked nature of the material enables the suppression of the BCP dewetting, while exhibiting exceptional capabilities for the construction of 3D stacks.
详细介绍了用于高χ嵌段共聚物定向自组装的可图案面漆的概念,其中设计可以通过热或光激活触发交联反应。通过具有独特集成路径的简单面涂层光刻步骤,选择具有可控畴方向的纳米结构BCP区域。此外,材料的交联特性能够抑制BCP脱湿,同时表现出构建3D堆栈的卓越能力。
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引用次数: 2
Fabrication of Moth-eye Antireflective Nanostructures via Oxygen Ion-beam Etching on a UV-curable Polymer 氧离子束蚀刻在紫外光固化聚合物上制备蛾眼抗反射纳米结构
IF 0.8 4区 化学 Q3 Materials Science Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.133
T. Okabe, Katsuyuki Yatagawa, K. Fujiwara, J. Taniguchi
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引用次数: 1
Synthesis of Amino Acid-derived Curing Reagents Containing a Disulfide Bond and Their Application to Anionic UV Curing Materials 含二硫键氨基酸衍生固化剂的合成及其在阴离子UV固化材料中的应用
IF 0.8 4区 化学 Q3 Materials Science Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.529
M. Furutani, Kako Maeno, Arata Tanaka
4. Conclusion We have designed and synthesized of a novel molecule, BFBZA, and found that the hybrid amorphous film of BFBZA with BA exhibited reversible change in emission color in response to exhaled breath whereas BFBZA–PFBA film did not change the emission color. In our previous paper [21,23], acidity levels of organic acids were the important factor for providing hybrid films that exhibit reversible changes in object colors and emission colors in response to moisture. The present study suggested that the basicity level of emitting material was also the important factors, that is, the balance of acidity level of organic acid and basicity level of emitting amorphous molecular materials plays a role for exhibiting reversible change in emission color. Further studies are in progress.
4. 结论我们设计并合成了一种新型分子BFBZA,发现BFBZA与BA的杂化非晶膜在呼气时发射色发生可逆变化,而BFBZA - pfba膜不改变发射色。在我们之前的论文[21,23]中,有机酸的酸度水平是提供杂化膜的重要因素,这些杂化膜在响应水分时表现出物体颜色和发射颜色的可逆变化。本研究表明,发光材料的碱度水平也是重要的影响因素,即有机酸的酸度水平与发光非晶态分子材料的碱度水平的平衡对发光颜色呈现可逆变化起着重要的作用。进一步的研究正在进行中。
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引用次数: 0
Fabrication of Colloidal Crystal Gel Film Using Poly(N-vinylcaprolactam) 聚n -乙烯基己内酰胺制备胶体晶体凝胶膜
IF 0.8 4区 化学 Q3 Materials Science Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.543
Takaki Kaneda, Yutaro Seki, Naoto Iwata, S. Furumi
In this report, we successfully fabricated the colloidal crystal (CC) gel films of silica microparticles combined with a temperature-responsive biocompatible hydrogel of poly(Nvinylcaprolactam) (VCL). When the CC VCL film was prepared by filling VCL precursor into the void space between silica particles of CC film, followed by the thermal polymerization, the Bragg reflection peak was red-shifted from 475 nm to 535 nm due to the change of refractive index contrast. Subsequently, immersion of the CC VCL film into an excess of water led to the formation of CC VCL gel film, wherein the VCL matrix swelled in water to form the hydrogel state. As elevating the temperature from 25 °C, this CC VCL gel film showed the reflection color changes from red to green, arising from the decrease of lattice constant induced by the shrinkage of VCL hydrogel. Moreover, the reflection color changes of CC VCL gel film were found to be fully reversible. In this way, we believe that such CC VCL gel films can be potentially applied to novel temperature sensors with biocompatibility.
在本报告中,我们成功地制备了二氧化硅微颗粒的胶体晶体(CC)凝胶膜,并结合了温度响应的生物相容性聚乙烯基己内酰胺(VCL)水凝胶。将VCL前驱体填充到CC膜二氧化硅颗粒之间的空隙中,然后进行热聚合制备CC VCL膜,由于折射率对比的变化,Bragg反射峰从475 nm红移到535 nm。随后,将CC VCL膜浸入过量的水中,形成CC VCL凝胶膜,其中VCL基质在水中膨胀形成水凝胶状态。当温度从25℃升高时,该CC VCL凝胶膜的反射颜色由红色变为绿色,这是由于VCL水凝胶收缩导致晶格常数降低所致。此外,发现CC VCL凝胶膜的反射颜色变化是完全可逆的。通过这种方式,我们相信这种CC VCL凝胶膜可以潜在地应用于具有生物相容性的新型温度传感器。
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引用次数: 2
Experimental Evaluation and Modeling of Adsorption Phenomena of Nanoliposomes on Poly(dimethylsiloxane) Surfaces 纳米脂质体在聚二甲基硅氧烷表面吸附现象的实验评价与建模
IF 0.8 4区 化学 Q3 Materials Science Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.1
Sylvan Sunny Koyagura, Virendra Majarikar, H. Takehara, T. Ichiki
Nanoparticles, such as exosomes or liposomes, have been widely studied using poly(dimethylsiloxane) (PDMS) microchannels. The interaction between nanoparticles and solid surfaces is an important subject for basic and applied research on nanoparticles, but there have been few reports on the use of microchannels for this purpose. Micro-scale systems serve as a useful platform for adsorption analysis because of their large surface-tovolume ratio. In this study, we attempted to develop a platform to study the adsorption phenomena of nanoparticles on solid surfaces using a microchannel, in which a model that analyzes dynamic (i.e., non-equilibrium) adsorption was used. This model allowed quantitative analysis of nanoliposome adsorption onto the surface of a PDMS microchannel.
利用聚二甲基硅氧烷(PDMS)微通道对外泌体或脂质体等纳米颗粒进行了广泛的研究。纳米颗粒与固体表面的相互作用是纳米颗粒基础研究和应用研究的重要课题,但利用微通道进行这方面研究的报道很少。微尺度系统由于其大的表面体积比而成为吸附分析的有用平台。在这项研究中,我们试图开发一个平台来研究纳米颗粒在固体表面上使用微通道的吸附现象,其中使用了一个分析动态(即非平衡)吸附的模型。该模型允许定量分析纳米脂质体吸附到PDMS微通道表面。
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引用次数: 0
期刊
Journal of Photopolymer Science and Technology
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