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2016 IEEE International Conference on Semiconductor Electronics (ICSE)最新文献

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Comparison of latch-based charge pumps using low voltage strategies in energy harvesting applications 利用低电压策略的锁存式电荷泵在能量收集应用中的比较
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573594
Michelle Lim, M. Islam, S. Jahariah, K. H. Yeo, S. Ali
This paper provides a comparison of low voltage design strategies in charge pumps that may be used with micro-power energy harvesters. The focus is on low input voltage (<; 500 mV) for possible cold start in monolithic integration. An overview of published low voltage techniques in charge pump designs are presented in four perspectives: body effect, gate voltages, MOS threshold voltage and power losses. Based on these four perspectives, latch-based charge pumps are constructed to compare the effects of several low voltage strategies on the charge pumps' performances. These charge pumps are simulated in two-stages using the common TSMC180nm CMOS technology. This results in the enhanced gate voltage (also lower conduction losses) and threshold lowering schemes having the fastest ramp-up of 10-20ms while zero-body effect scheme providing best voltage pumping efficiency > 90% for 100-500mV input voltage ranges. The results will help designers to achieve optimum low voltage operation in specific charge pump performance metrics.
本文对可用于微功率能量采集器的电荷泵的低压设计策略进行了比较。重点是低输入电压(90%为100-500mV输入电压范围)。结果将有助于设计人员在特定电荷泵性能指标中实现最佳的低压操作。
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引用次数: 3
Shallow Trench Isolation stress effect on CMOS transistors with different channel orientations 不同通道取向CMOS晶体管的浅沟槽隔离应力效应
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573633
Chiew Ching Tan, P. Tan
In this paper, we studied the effect of mechanical stress due to Shallow Trench Isolation (STI) on the channel length direction (x-stress) and channel width direction (y-stress) by adopting two different channel orientations; <;110> and <;100>. When change from <;110> to <;100> channel orientation, PMOS sensitivity to both STI x-stress and y-stress reduces. For NMOS, both the channel orientations show the similar STI x-stress and y-stress effects. STI x-stress effects of NMOS and PMOS is contradicting. Hence, by adopting <;100> channel, the performance of PMOS can be improved without degrading the NMOS performance. The STI x-stress and y-stress effects on NMOS and PMOS transistors with <;110> and <;100> channel orientation are explained by using the electron and hole energy valleys diagrams.
本文采用两种不同的通道朝向,研究了浅沟隔离(STI)引起的机械应力对通道长度方向(x应力)和通道宽度方向(y应力)的影响;和。当从通道方向改变时,PMOS对STI x-应力和y-应力的敏感性都降低。对于NMOS,两个通道方向都表现出相似的STI x应力和y应力效应。NMOS和PMOS的应力效应是相互矛盾的。因此,通过采用信道,可以在不降低NMOS性能的前提下提高PMOS的性能。利用电子和空穴能谷图解释了不同通道取向下NMOS和PMOS晶体管的x-应力和y-应力效应。
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引用次数: 3
Modelling of 2-D Gallium Nitride (GaN) photonic crystal 二维氮化镓光子晶体的建模
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573589
N. Zamani, A. Zain, B. Majlis
This paper presents the simulation of a photonic crystal (PhC) cavity in low index contrast materials- Gallium Nitride on the sapphire substrate using two-dimensional (2D) Finite Difference Time Domain method (FDTD). We have performed the simulation based on H1 PhC configurations with the variation of lattice constant. We have obtained the quality factor of approximately 2200 and 1700 at the wavelength in the range of 486 and 483 nm respectively, which are suitable for operation of the blue laser. This configuration will be used as a basic building block for Lab-on-Chip (LoC) biosensors.
本文利用二维时域有限差分法(FDTD)模拟了蓝宝石衬底上低折射率对比材料氮化镓中的光子晶体(PhC)腔。我们对晶格常数变化的H1 - PhC构型进行了模拟。在486 nm和483 nm波长范围内,质量因子分别约为2200和1700,适合于蓝色激光器的工作。该配置将用作芯片实验室(LoC)生物传感器的基本构建块。
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引用次数: 4
Analysis of memristor based ring oscillators for hardware security 基于忆阻器的环形振荡器硬件安全分析
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573621
Noor Alia Binti Nor Hashim, Fazrena Azlee binti Hamid, J. Teo, M. Hamid
Maintaining the security of communication is very crucial nowadays. It is important in cryptographic security to have strong keys and is secretive. Random number generators are used to combat this problem by producing different and unique identification for each user in a network. Memristors has been studied as a potential tool in hardware security because of its energy efficiency and the nanotechnology fabrication process variations is more unique and random than the traditional complementary metal-oxide-semiconductor (CMOS) processes. This paper analyzes a memristor based ring oscillator random number generator design and how the relationship between the frequency and resistor or memristor affects the randomness of the generator and the implementations of this device in security application. It was concluded that as the resistor values increases, frequency of the signal decreases and Vout will also increased.
如今,维护通信安全是至关重要的。在加密安全中,拥有强密钥和保密是很重要的。随机数生成器通过为网络中的每个用户生成不同且唯一的标识来解决这个问题。忆阻器由于其高能效和纳米技术制造工艺变化比传统的互补金属氧化物半导体(CMOS)工艺更具独特性和随机性,已被研究为硬件安全的潜在工具。本文分析了一种基于忆阻器的环形振荡器随机数发生器的设计,以及频率与电阻或忆阻器的关系对发生器随机性的影响,以及该装置在安全应用中的实现。结果表明,随着电阻值的增大,信号的频率减小,Vout也随之增大。
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引用次数: 2
Characterization of graphene growth using RF-PECVD on Cobalt films 利用RF-PECVD在钴膜上表征石墨烯生长
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573661
A. Khalid, M. A. Mohamed, B. Majlis, M. Azam
We report graphene growth on polycrystalline Cobalt (Co) films by using induced coupled plasma RF-PECVD at 800°C temperature with 40 W plasma power. We also do the comparison by growing with and without plasma to observe the contribution of plasma in graphene growth on Cobalt films. Results show that the existence of plasma helps graphene formation meanwhile the existence of graphene is not observed with the absence of plasma. Plasma power is proven to generate high energy for decomposing methane forming radical carbon for the graphene growth mechanism. The as-grown graphene was characterized by using Raman Spectroscopy and Atomic force microscopy (AFM). The graphene was identified as multilayer from the Raman spectra. With the aid of plasma and proper optimization of the growth condition, the number of graphene layers can be tailored for low temperature substrate.
我们报道了在800°C温度和40 W等离子体功率下,利用诱导耦合等离子体RF-PECVD在多晶钴(Co)薄膜上生长石墨烯。我们还通过有和无等离子体生长的比较,观察等离子体对钴膜上石墨烯生长的贡献。结果表明,等离子体的存在有助于石墨烯的形成,而在没有等离子体的情况下,石墨烯不存在。在石墨烯的生长机制中,等离子体功率被证明可以产生高能量来分解甲烷形成自由基碳。利用拉曼光谱和原子力显微镜(AFM)对石墨烯进行了表征。从拉曼光谱中可以看出石墨烯是多层的。在等离子体的帮助下,适当优化生长条件,可以为低温衬底定制石墨烯层数。
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引用次数: 4
Photoluminescence study of the optically active, G-centre on pre-amorphised silicon by utilizing ion implantation technique 利用离子注入技术研究预非晶硅的光致发光活性g中心
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573640
D. Berhanuddin, M. Lourenço, R. Gwilliam, K. Homewood
We report a new approach of generating the dicarbon G-centre on silicon substrates by utilizing technique that is fully compatible with the standard silicon ultra-large-scale integration (ULSI) technology. Silicon wafers were implanted with carbon and irradiated with high energy protons to produce self-interstitials that are crucial in the formation of the G-centre. Prior to that, all the samples were pre-amorphised with germanium. Photoluminescence (PL) measurements at 80 K were carried out to investigate the point defect mediated luminescence of the G-centre with a wavelength of 1280 nm. The results show a prominent, sharp luminescence at the carbon related, G centre in majority of the samples.
我们报道了一种利用与标准硅超大规模集成(ULSI)技术完全兼容的技术在硅衬底上产生碳g中心的新方法。硅晶片被注入碳,并被高能质子照射以产生对g中心形成至关重要的自间隙。在此之前,所有的样品都是用锗预变形的。在80 K下进行了光致发光(PL)测量,研究了波长为1280 nm的g中心的点缺陷介导发光。结果表明,在大多数样品中,碳相关的G中心有一个突出的、尖锐的发光。
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引用次数: 2
Mechanism of via residues with unique ring shape 具有独特环状结构的通孔残基机理
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573645
K. Joseph
An unique type of residues with ring shape was detected at high topography metal surface after the via etch process, which is plasma dry etching with the combination of isotropic etch and anisotropic etch. This process needs to etch through the Inter Metal Dielectric (IMD) stack consists of High Density Plasma (HDP) Undoped Silicate Glass (USG), SIlicon Oxy-Nitride (SION) and TetraEthylOrthoSilicate (TEOS). This ring shape residues formed during the isotropic etch and could not be etched away in the subsequent anisotropic etch, and it was found to be induced by the significant etch rate differences between TEOS and SION, coupled with the fluctuations in the TEOS thickness and the isotropic etch rate. The detailed mechanism on the formation of this ring shape residue and the solution to this issue are discussed in this paper. The solution has been proven to be effective with no trace of via ring shape residues since the implementation.
经孔刻蚀后,在高形貌金属表面发现了一种独特的环形残留物,即各向同性和各向异性相结合的等离子体干刻蚀。该工艺需要通过由高密度等离子体(HDP)未掺杂硅酸盐玻璃(USG)、氧氮化硅(SION)和四乙基硅酸盐(TEOS)组成的金属间介电层(IMD)进行蚀刻。这种环状残余在各向同性刻蚀过程中形成,在随后的各向异性刻蚀过程中无法被刻蚀掉,这是由于TEOS和SION的刻蚀速率存在显著差异,以及TEOS厚度和各向同性刻蚀速率的波动所引起的。本文详细讨论了这种环状残留物形成的机理及解决方法。自实施以来,该解决方案已被证明是有效的,没有任何通过环形状残留物的痕迹。
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引用次数: 0
Substrate effect on electrical properties of vanadium oxide thin film for Memristive device applications 忆阻器件用氧化钒薄膜电性能的衬底影响
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573636
A. Hassein-Bey, H. Tahi, S. Lafane, A. Djafer, A. Hassein-bey, Nadir Belgroune
This paper concerns, the comparative study of the effect of silicon and gold substrates on the electrical properties of vanadium dioxide thin films (VO2) for memristor applications. The VO2 thin films were deposited by (PLD) method, directly on a silicon for the first sample (VO2/Si) and on a 200 nm thin gold buffer layer for the second (VO2/Au.). The VO2 thin layers were characterized using current-voltage technique for different temperature. The results show a strong transition contrast which is important in the VO2/Si sample more than VO2/Au. In addition, our results indicate that the hysteresis width is larger in VO2/Au sample compared to VO2/Si sample.
本文比较研究了硅基片和金基片对用于忆阻器的二氧化钒薄膜电性能的影响。通过(PLD)方法,将VO2薄膜直接沉积在第一个样品(VO2/Si)的硅上,第二个样品(VO2/Au)的缓冲层为200 nm的薄金层。利用电流-电压技术对不同温度下的VO2薄层进行了表征。结果表明,相较于VO2/Au样品,VO2/Si样品具有较强的跃迁对比。此外,我们的结果表明,与VO2/Si样品相比,VO2/Au样品的滞后宽度更大。
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引用次数: 7
Made in Malaysia Integrated Circuits, how far can we go? 马来西亚制造集成电路,我们能走多远?
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573575
K. Ibrahim
Manufacturing contributes more than 80% of Malaysia's exports in 2016, with Integrated Circuits (IC) making-up a major portion of this. According to recent SEMI projections, semiconductors continue to grow by 17% in 2017, across various technology nodes. SilTerra, a home-grown semiconductor foundry, is a relatively small player, by global standards. However, it is a significant contributor to value-added semiconductor exports for Malaysia. So, moving forward, can smaller foundries like SilTerra sustain and be competitive to remain significant? This topic will be discussed and some proposals will be shared on how various parties can work together to ensure the industry is sustainable. Sustainability is a key factor to succeed in this highly competitive industry. This effort involves every stakeholder within the ecosystem. If this collaboration is not done in a timely fashion, the semiconductor industry in Malaysia will likely fall behind other countries that are proactively positioning themselves as more productive and efficient.
2016年,制造业占马来西亚出口的80%以上,其中集成电路(IC)占主要部分。根据SEMI最近的预测,2017年半导体在各种技术节点上继续增长17%。以全球标准衡量,本土半导体代工厂SilTerra是一家相对较小的企业。然而,它是马来西亚增值半导体出口的重要贡献者。那么,展望未来,像SilTerra这样的小型代工厂能否维持并保持竞争力以保持重要地位?会议将讨论这个话题,并就各方如何共同努力确保行业可持续发展分享一些建议。可持续发展是在这个竞争激烈的行业取得成功的关键因素。这项工作涉及到生态系统中的每个利益相关者。如果这种合作不能及时完成,马来西亚的半导体产业可能会落后于其他积极将自己定位为更高效的国家。
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引用次数: 0
Impact of gate-source/drain underlap and ground plane (GP) structures towards digital FoM of 25 nm UTBB SOI MOSFETs 栅极源极漏接层和地平面(GP)结构对25nm UTBB SOI mosfet数字FoM的影响
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573617
N. Othman, M. K. Md Arshad, S. Sabki, S. R. Kasjoo, U. Hashim
This work investigates the impact of gate-source/drain underlap (LUL) together with different ground plane (GP) structures on the digital figure-of-merit (FoM) of 25 nm UTBB FDSOI devices using two-dimensional (2D) numerical simulations. It is found for all ground plane structure, longer underlap produces 1) lower off-current (Ioff) but at a cost of lower on-current (Ion), thus a lower transconductance (gm). In terms of the impact of different GP structures, longer underlap shows 1) stronger influence on the Id-Vg characteristics 2) an improvement in the DIBL as a result of lower effect of drain potential, compared with no-underlap. In addition, DIBL dependence on various GP structures is higher at shorter underlap as compared to longer underlap. It is shown that to achieve good Short-Channel Effects (SCEs) control and optimal digital results, careful design consideration need to be done in selecting a combination of LUL and GP structures to be adopted in the device design, as there is a trade-off between Ioff and Ion, as well as on the DIBL.
本研究利用二维(2D)数值模拟研究了栅极-源极-漏极underlap (LUL)和不同地平面(GP)结构对25 nm UTBB FDSOI器件的数字性能曲线(FoM)的影响。发现对于所有地平面结构,较长的覆盖产生1)较低的断开电流(Ioff),但代价是较低的接通电流(Ion),因此较低的跨导(gm)。就不同GP结构的影响而言,与无underlap相比,较长的underlap对Id-Vg特性的影响更大;由于漏极电位的影响较小,DIBL得到改善。此外,DIBL对各种GP结构的依赖性在较短的重叠处高于较长的重叠处。结果表明,为了实现良好的短通道效应(sce)控制和最佳的数字结果,在选择器件设计中采用的LUL和GP结构的组合时需要仔细考虑,因为在Ioff和Ion以及DIBL之间存在权衡。
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引用次数: 0
期刊
2016 IEEE International Conference on Semiconductor Electronics (ICSE)
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