Pub Date : 2018-05-21DOI: 10.1109/FCS.2018.8597506
S. Shahraini, R. Abdolvand, Hedy Fatemi
Temperature coefficient of frequency (TCF) is studied in silicon-based cross-sectional quasi Lamé modes (CQLMs). Such modes are demonstrated in thin-film piezoelectric-on-silicon (TPoS) resonators and the TCF curves are modeled using eigenfrequency analysis in COMSOL for highly n-type doped silicon. It is shown that the ratio between the finger-pitch and the resonator thickness affects the turnover temperature of these resonators which could be predicted using this model. The CQLM-TPoS resonators fabricated on a $40mumathbf{m}$ thick SOI substrate, are characterized and the measured TCF values are confirmed to be in close agreement with the prediction. A relatively high turnover temperature of >100°C is reported for a third-order CQLM-TPoS resonator aligned to <100> silicon plane while a turnover temperature of <20°C is recorded for the <110> counterpart.
{"title":"Temperature Coefficient of Frequency in Silicon-Based Cross-Sectional Quasi Lam e; Mode Resonators","authors":"S. Shahraini, R. Abdolvand, Hedy Fatemi","doi":"10.1109/FCS.2018.8597506","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597506","url":null,"abstract":"Temperature coefficient of frequency (TCF) is studied in silicon-based cross-sectional quasi Lamé modes (CQLMs). Such modes are demonstrated in thin-film piezoelectric-on-silicon (TPoS) resonators and the TCF curves are modeled using eigenfrequency analysis in COMSOL for highly n-type doped silicon. It is shown that the ratio between the finger-pitch and the resonator thickness affects the turnover temperature of these resonators which could be predicted using this model. The CQLM-TPoS resonators fabricated on a $40mumathbf{m}$ thick SOI substrate, are characterized and the measured TCF values are confirmed to be in close agreement with the prediction. A relatively high turnover temperature of >100°C is reported for a third-order CQLM-TPoS resonator aligned to <100> silicon plane while a turnover temperature of <20°C is recorded for the <110> counterpart.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"69 7","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133587831","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-05-21DOI: 10.1109/FCS.2018.8597585
F. Ascarrunz, Y. Dudin, M.C. Delgado Aramburo, L. Ascarrunz, J. Savory, Alessandro L. Banducci, S. Jefferts
We present a small portable cold8 7Rubidium atomic clock with frequency uncertainty of less than $3times 10^{-15}$ in one day of averaging time. The clock is under development at SpectraDynamics for the Defense Advanced Research Projects Agency (DARPA) Portable Microwave Cold Atomic Clock Small Business Innovation Research (SBIR) effort. The portable clock is about the size of a desktop computer (22×37×32 cm) and weighs 28kg.
{"title":"A Portable Cold 87Rb Atomic Clock with Frequency Instability at One Day in the 10−15Range","authors":"F. Ascarrunz, Y. Dudin, M.C. Delgado Aramburo, L. Ascarrunz, J. Savory, Alessandro L. Banducci, S. Jefferts","doi":"10.1109/FCS.2018.8597585","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597585","url":null,"abstract":"We present a small portable cold8 7Rubidium atomic clock with frequency uncertainty of less than $3times 10^{-15}$ in one day of averaging time. The clock is under development at SpectraDynamics for the Defense Advanced Research Projects Agency (DARPA) Portable Microwave Cold Atomic Clock Small Business Innovation Research (SBIR) effort. The portable clock is about the size of a desktop computer (22×37×32 cm) and weighs 28kg.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"119 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134294385","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-05-21DOI: 10.1109/FCS.2018.8597471
John D. EIgin, T. Heavner, J. Kitching, E. Donley, Jayson Denney, Evan A. Salim
We have developed a cold atomic beam coherent population trapping clock with the goal of creating a compact, low power device. The clock employs traditional two-zone Ramsey interrogation performed on the D2 line of an atomic beam of 87Rb generated from a 2D+-MOT. The current fractional frequency instability is $2.5 times 10^{-11}tau^{-1/2}$. A preliminary evaluation of systematics and noise limiting the current performance is presented.
{"title":"A Cold Atomic Beam Ramsey CPT Clock","authors":"John D. EIgin, T. Heavner, J. Kitching, E. Donley, Jayson Denney, Evan A. Salim","doi":"10.1109/FCS.2018.8597471","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597471","url":null,"abstract":"We have developed a cold atomic beam coherent population trapping clock with the goal of creating a compact, low power device. The clock employs traditional two-zone Ramsey interrogation performed on the D2 line of an atomic beam of 87Rb generated from a 2D+-MOT. The current fractional frequency instability is $2.5 times 10^{-11}tau^{-1/2}$. A preliminary evaluation of systematics and noise limiting the current performance is presented.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"63 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123485998","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-05-21DOI: 10.1109/FCS.2018.8597526
Hakhamanesh Mansoorzare, R. Abdolvand, Hedy Fatemi
In this work, a technique is introduced for isolating the energy loss associated with the interaction of charge carriers with acoustic phonons in thin film piezoelectric-on-silicon (TPoS) MEMS resonators. This method facilitates the investigation of acoustoelectric loss mechanism. The variation in quality factor (Q) and insertion loss of high frequency TPoS resonators is reported while the surface carrier concentration of the silicon layer is varied through application of a voltage to the metal-dielectric-silicon capacitor that is intrinsically formed during the conventional fabrication of TPoS resonators. A maximum of 3% improvement in the insertion loss (IL~9 dB) of a ~926 MHz resonance mode is recorded when a 4 V bias is applied to the said capacitance which is believed to stem from a reduction in interaction of acoustic phonons with carriers.
{"title":"Investigation of Phonon-Carrier Interactions in Silicon-Based MEMS Resonators","authors":"Hakhamanesh Mansoorzare, R. Abdolvand, Hedy Fatemi","doi":"10.1109/FCS.2018.8597526","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597526","url":null,"abstract":"In this work, a technique is introduced for isolating the energy loss associated with the interaction of charge carriers with acoustic phonons in thin film piezoelectric-on-silicon (TPoS) MEMS resonators. This method facilitates the investigation of acoustoelectric loss mechanism. The variation in quality factor (Q) and insertion loss of high frequency TPoS resonators is reported while the surface carrier concentration of the silicon layer is varied through application of a voltage to the metal-dielectric-silicon capacitor that is intrinsically formed during the conventional fabrication of TPoS resonators. A maximum of 3% improvement in the insertion loss (IL~9 dB) of a ~926 MHz resonance mode is recorded when a 4 V bias is applied to the said capacitance which is believed to stem from a reduction in interaction of acoustic phonons with carriers.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124875591","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-05-21DOI: 10.1109/FCS.2018.8597475
Yansong Yang, Ruochen Lu, T. Manzaneque, S. Gong
This work presents a new class of micro-electro-mechanical system (MEMS) resonators toward Ka band (26.5-40 GHz) for fifth-generation (5G) wireless communication. Resonant frequencies of 21.4 and 29.9 GHz have been achieved using the fifth and seventh order asymmetric (A5 and A7) Lamb-wave modes in a suspended Z-cut lithium niobate (LiNbO3) thin film. The fabricated device has demonstrated an electromechanical coupling $(k_{t}^{2})$ of 1.5% and 0.94% and extracted mechanical $Qs$ of 406 and 474 for A5 and A7 respectively. The quality factors are the highest reported for piezoelectric MEMS resonators operating at this frequency range. The demonstrated performance has shown the strong potential of LiNbO3 asymmetric mode devices to meet the front-end filtering requirements of 5G.
{"title":"Toward Ka Band Acoustics: Lithium Niobate Asymmetrical Mode Piezoelectric MEMS Resonators","authors":"Yansong Yang, Ruochen Lu, T. Manzaneque, S. Gong","doi":"10.1109/FCS.2018.8597475","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597475","url":null,"abstract":"This work presents a new class of micro-electro-mechanical system (MEMS) resonators toward Ka band (26.5-40 GHz) for fifth-generation (5G) wireless communication. Resonant frequencies of 21.4 and 29.9 GHz have been achieved using the fifth and seventh order asymmetric (A5 and A7) Lamb-wave modes in a suspended Z-cut lithium niobate (LiNbO3) thin film. The fabricated device has demonstrated an electromechanical coupling $(k_{t}^{2})$ of 1.5% and 0.94% and extracted mechanical $Qs$ of 406 and 474 for A5 and A7 respectively. The quality factors are the highest reported for piezoelectric MEMS resonators operating at this frequency range. The demonstrated performance has shown the strong potential of LiNbO3 asymmetric mode devices to meet the front-end filtering requirements of 5G.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"67 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130135348","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-05-21DOI: 10.1109/FCS.2018.8597575
S. Bedair, R. Rudy, Lain Kierzewskr, J. Pulskamp, B. Power, J. Martin, Raphael Luo, Ryan Cable, V. Tseng, R. Benoit
This paper documents an architecture approach using extensional mode harmonics to improve the figures of merit (TxFoM) of thin-film piezoelectric MEMS transformers. Modeling of this approach reveals multi-fold improvements in TxFoM as well as the significance and impact of transducer electrical quality factor. Experimental results with PZT-on· $4mu mathrm{m}$ Si and AlN transformers verify this architecture approach and show up to 4.3X and 4.4X TxFoM improvements, respectively. These are demonstrated with −63MHz PZT-on-Si and ~69 MHz AlN piezoelectric transformers. Measurement results also reveal the importance of routing resistance and parasitics and their impact on electrical quality factor $Q_{elec}$.
{"title":"Enhancing Piezo-MEMS Transformer Performance","authors":"S. Bedair, R. Rudy, Lain Kierzewskr, J. Pulskamp, B. Power, J. Martin, Raphael Luo, Ryan Cable, V. Tseng, R. Benoit","doi":"10.1109/FCS.2018.8597575","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597575","url":null,"abstract":"This paper documents an architecture approach using extensional mode harmonics to improve the figures of merit (TxFoM) of thin-film piezoelectric MEMS transformers. Modeling of this approach reveals multi-fold improvements in TxFoM as well as the significance and impact of transducer electrical quality factor. Experimental results with PZT-on· $4mu mathrm{m}$ Si and AlN transformers verify this architecture approach and show up to 4.3X and 4.4X TxFoM improvements, respectively. These are demonstrated with −63MHz PZT-on-Si and ~69 MHz AlN piezoelectric transformers. Measurement results also reveal the importance of routing resistance and parasitics and their impact on electrical quality factor $Q_{elec}$.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127269041","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-05-21DOI: 10.1109/FCS.2018.8597580
M. Underhill
The underlying processes causing random-spurs and spectrum-collapse for phase noise spectrum measurements are here investigated using low-cost SDR (Software-Defined-Radio) signal processing techniques. Suitable windowing and long-record-averaging for the SDR FFT, with and without phase-locking, provides a substantial cure. Metastability-theory is derived and found to explain long term persistence of spurs and collapse, and when they are likely to occur. For oscillator phase noise measurement, the dynamic-range is limited by the noise figure of the SDR ADC and not by its number of bits, provided that sufficient oversampling is used. Micro-hertz phase noise can be measured up to one hundred times faster by measuring carrier phase-difference against a free-running stable reference source suitably tuned to the source under test. A novel method of signal compression promises ~20 to 30 dB increase of dynamic range for phase-noise measurement of oscillators. The target > 150dbc at 0.lHz offset, using a low-cost SDR, has so far been achieved.
{"title":"Theory of Random Spurs and Spectrum-Collapse from SDR Phase-Noise and Carrier-Phase Measurements","authors":"M. Underhill","doi":"10.1109/FCS.2018.8597580","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597580","url":null,"abstract":"The underlying processes causing random-spurs and spectrum-collapse for phase noise spectrum measurements are here investigated using low-cost SDR (Software-Defined-Radio) signal processing techniques. Suitable windowing and long-record-averaging for the SDR FFT, with and without phase-locking, provides a substantial cure. Metastability-theory is derived and found to explain long term persistence of spurs and collapse, and when they are likely to occur. For oscillator phase noise measurement, the dynamic-range is limited by the noise figure of the SDR ADC and not by its number of bits, provided that sufficient oversampling is used. Micro-hertz phase noise can be measured up to one hundred times faster by measuring carrier phase-difference against a free-running stable reference source suitably tuned to the source under test. A novel method of signal compression promises ~20 to 30 dB increase of dynamic range for phase-noise measurement of oscillators. The target > 150dbc at 0.lHz offset, using a low-cost SDR, has so far been achieved.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132824426","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-05-21DOI: 10.1109/FCS.2018.8597462
J. Bon, K. Rosenziveig, P. Abbé, C. Rocher, S. Galliou, L. Neuhaus, S. Deleglise, T. Briant, P. Cohadon
Plano-convex quartz crystal resonators can exhibit quality-factors close to a billion at $4mathbf{K}$. They are also suitable to operate as optical cavities. As a consequence they are good candidates for optomechanic experiments including quartz-based cryogenic clocks. The paper is focused on the latter application and demonstrates its feasability.
{"title":"Optomechanical Coupling in a Quartz Crystal Resonator for Cryogenic Clocks","authors":"J. Bon, K. Rosenziveig, P. Abbé, C. Rocher, S. Galliou, L. Neuhaus, S. Deleglise, T. Briant, P. Cohadon","doi":"10.1109/FCS.2018.8597462","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597462","url":null,"abstract":"Plano-convex quartz crystal resonators can exhibit quality-factors close to a billion at $4mathbf{K}$. They are also suitable to operate as optical cavities. As a consequence they are good candidates for optomechanic experiments including quartz-based cryogenic clocks. The paper is focused on the latter application and demonstrates its feasability.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127768001","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-05-21DOI: 10.1109/FCS.2018.8597567
Karthick Sothivelr, F. Bender, F. Josse, E. Yaz, A. Ricco
This work reports the development and experimental verification of a sensor signal processing technique for online identification and quantification of aqueous mixtures of benzene, toluene, ethylbenzene, xylenes (BTEX) and 1, 2, 4-trimethylbenzene (TMB) at ppb concentrations using time-dependent frequency responses from a single polymer-coated shear-horizontal surface acoustic wave sensor. Signal processing based on multi-stage exponentially weighted recursive leastsquares estimation (EW-RLSE) is utilized for estimating the concentrations of the analytes in the mixture that are most likely to have produced a given sensor response. The initial stages of EW-RLSE are used to eliminate analyte(s) that are erroneously identified as present in the mixture; the final stage of EW-RLSE with the corresponding sensor response model representing the analyte(s) present in the mixture is used to obtain a more accurate quantification result of the analyte(s). The success of this method in identifying and quantifying analytes in real-time with high accuracy using the response of just a single sensor device demonstrates an effective, simpler, lower-cost alternative to a sensor array that includes the advantage of not requiring a complex training protocol.
{"title":"Detection and Quantification of Multi-Analyte Mixtures Using a Single Sensor and Multi-Stage Data-Weighted RLSE","authors":"Karthick Sothivelr, F. Bender, F. Josse, E. Yaz, A. Ricco","doi":"10.1109/FCS.2018.8597567","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597567","url":null,"abstract":"This work reports the development and experimental verification of a sensor signal processing technique for online identification and quantification of aqueous mixtures of benzene, toluene, ethylbenzene, xylenes (BTEX) and 1, 2, 4-trimethylbenzene (TMB) at ppb concentrations using time-dependent frequency responses from a single polymer-coated shear-horizontal surface acoustic wave sensor. Signal processing based on multi-stage exponentially weighted recursive leastsquares estimation (EW-RLSE) is utilized for estimating the concentrations of the analytes in the mixture that are most likely to have produced a given sensor response. The initial stages of EW-RLSE are used to eliminate analyte(s) that are erroneously identified as present in the mixture; the final stage of EW-RLSE with the corresponding sensor response model representing the analyte(s) present in the mixture is used to obtain a more accurate quantification result of the analyte(s). The success of this method in identifying and quantifying analytes in real-time with high accuracy using the response of just a single sensor device demonstrates an effective, simpler, lower-cost alternative to a sensor array that includes the advantage of not requiring a complex training protocol.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121404381","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-05-21DOI: 10.1109/FCS.2018.8597501
F.S. Peng, Xian-he Huang, Yimei Li, Jianguo Hu
The implementation of a voltage controlled temperature compensated crystal oscillator (VCTCXO) with a single varactor is presented. The proposed technique can overcome deficiencies of complicated nonlinear frequency calculation formula and temperature-frequency curve rotation caused by the oscillating circuit composed of multi capacitance diodes. With this technique, the VCTCXO has achieved the frequency stability up to $pm 1mathbf{ppm}$ with nearly $pm 100mathbf{ppm}$ output frequency variation range when the ambient temperature ranges from −30 °C to +70 °C by using 12.8 MHz fundamental AT-cut crystal resonator.
{"title":"Realization of Voltage Controlled Temperature Compensated Crystal Oscillator with Single Varactor","authors":"F.S. Peng, Xian-he Huang, Yimei Li, Jianguo Hu","doi":"10.1109/FCS.2018.8597501","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597501","url":null,"abstract":"The implementation of a voltage controlled temperature compensated crystal oscillator (VCTCXO) with a single varactor is presented. The proposed technique can overcome deficiencies of complicated nonlinear frequency calculation formula and temperature-frequency curve rotation caused by the oscillating circuit composed of multi capacitance diodes. With this technique, the VCTCXO has achieved the frequency stability up to $pm 1mathbf{ppm}$ with nearly $pm 100mathbf{ppm}$ output frequency variation range when the ambient temperature ranges from −30 °C to +70 °C by using 12.8 MHz fundamental AT-cut crystal resonator.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121583722","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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