Pub Date : 2024-06-03DOI: 10.1038/s41377-024-01466-6
Yoav Dana, Yehudit Garcia, Aleksei Kukin, Lauren Dallachiesa, Sterenn Guerrier, Nicolas K Fontaine, Dan M Marom
Photonic lantern (PL) spatial multiplexers show great promise for a range of applications, such as future high-capacity mode division multiplexing (MDM) optical communication networks and free-space optical communication. They enable efficient conversion between multiple single-mode (SM) sources and a multimode (MM) waveguide of the same dimension. PL multiplexers operate by facilitating adiabatic transitions between the SM arrayed space and the single MM space. However, current fabrication methods are forcing the size of these devices to multi-millimeters, making integration with micro-scale photonic systems quite challenging. The advent of 3D micro and nano printing techniques enables the fabrication of freestanding photonic structures with a high refractive index contrast (photopolymer-air). In this work we present the design, fabrication, and characterization of a 6-mode mixing, 375 µm long PL that enables the conversion between six single-mode inputs and a single six-mode waveguide. The PL was designed using a genetic algorithm based inverse design approach and fabricated directly on a 7-core fiber using a commercial two-photon polymerization-based 3D printer and a photopolymer. Although the waveguides exhibit high index contrast, low insertion loss (-2.6 dB), polarization dependent (-0.2 dB) and mode dependent loss (-4.4 dB) were measured.
光子灯笼(PL)空间多路复用器在未来的大容量模分多路复用(MDM)光通信网络和自由空间光通信等一系列应用中大有可为。它们能在多个单模(SM)光源和同一尺寸的多模(MM)波导之间实现高效转换。PL 多路复用器的工作原理是促进 SM 阵列空间和单一 MM 空间之间的绝热转换。然而,目前的制造方法迫使这些器件的尺寸达到数毫米,使得与微尺度光子系统的集成变得相当具有挑战性。三维微米和纳米打印技术的出现,使具有高折射率对比(光聚合物-空气)的独立光子结构的制造成为可能。在这项工作中,我们介绍了一种 6 模混合、375 微米长 PL 的设计、制造和特性分析,它可以在六个单模输入和一个六模波导之间进行转换。该波导采用基于遗传算法的逆向设计方法进行设计,并使用基于双光子聚合的商用 3D 打印机和光聚合物直接在 7 芯光纤上进行制造。虽然波导显示出很高的指数对比度,但测量到的插入损耗(-2.6 dB)、偏振相关损耗(-0.2 dB)和模式相关损耗(-4.4 dB)都很低。
{"title":"Free-standing microscale photonic lantern spatial mode (De-)multiplexer fabricated using 3D nanoprinting.","authors":"Yoav Dana, Yehudit Garcia, Aleksei Kukin, Lauren Dallachiesa, Sterenn Guerrier, Nicolas K Fontaine, Dan M Marom","doi":"10.1038/s41377-024-01466-6","DOIUrl":"10.1038/s41377-024-01466-6","url":null,"abstract":"<p><p>Photonic lantern (PL) spatial multiplexers show great promise for a range of applications, such as future high-capacity mode division multiplexing (MDM) optical communication networks and free-space optical communication. They enable efficient conversion between multiple single-mode (SM) sources and a multimode (MM) waveguide of the same dimension. PL multiplexers operate by facilitating adiabatic transitions between the SM arrayed space and the single MM space. However, current fabrication methods are forcing the size of these devices to multi-millimeters, making integration with micro-scale photonic systems quite challenging. The advent of 3D micro and nano printing techniques enables the fabrication of freestanding photonic structures with a high refractive index contrast (photopolymer-air). In this work we present the design, fabrication, and characterization of a 6-mode mixing, 375 µm long PL that enables the conversion between six single-mode inputs and a single six-mode waveguide. The PL was designed using a genetic algorithm based inverse design approach and fabricated directly on a 7-core fiber using a commercial two-photon polymerization-based 3D printer and a photopolymer. Although the waveguides exhibit high index contrast, low insertion loss (-2.6 dB), polarization dependent (-0.2 dB) and mode dependent loss (-4.4 dB) were measured.</p>","PeriodicalId":18093,"journal":{"name":"Light, science & applications","volume":null,"pages":null},"PeriodicalIF":19.4,"publicationDate":"2024-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11144700/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141200264","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-05-29DOI: 10.1038/s41377-024-01464-8
Xinzhu Xu, Wenyi Wang, Liang Qiao, Yunzhe Fu, Xichuan Ge, Kun Zhao, Karl Zhanghao, Meiling Guan, Xin Chen, Meiqi Li, Dayong Jin, Peng Xi
Structured illumination microscopy (SIM) has emerged as a promising super-resolution fluorescence imaging technique, offering diverse configurations and computational strategies to mitigate phototoxicity during real-time imaging of biological specimens. Traditional efforts to enhance system frame rates have concentrated on processing algorithms, like rolling reconstruction or reduced frame reconstruction, or on investments in costly sCMOS cameras with accelerated row readout rates. In this article, we introduce an approach to elevate SIM frame rates and region of interest (ROI) coverage at the hardware level, without necessitating an upsurge in camera expenses or intricate algorithms. Here, parallel acquisition-readout SIM (PAR-SIM) achieves the highest imaging speed for fluorescence imaging at currently available detector sensitivity. By using the full frame-width of the detector through synchronizing the pattern generation and image exposure-readout process, we have achieved a fundamentally stupendous information spatial-temporal flux of 132.9 MPixels · s-1, 9.6-fold that of the latest techniques, with the lowest SNR of -2.11 dB and 100 nm resolution. PAR-SIM demonstrates its proficiency in successfully reconstructing diverse cellular organelles in dual excitations, even under conditions of low signal due to ultra-short exposure times. Notably, mitochondrial dynamic tubulation and ongoing membrane fusion processes have been captured in live COS-7 cell, recorded with PAR-SIM at an impressive 408 Hz. We posit that this novel parallel exposure-readout mode not only augments SIM pattern modulation for superior frame rates but also holds the potential to benefit other complex imaging systems with a strategic controlling approach.
{"title":"Ultra-high spatio-temporal resolution imaging with parallel acquisition-readout structured illumination microscopy (PAR-SIM).","authors":"Xinzhu Xu, Wenyi Wang, Liang Qiao, Yunzhe Fu, Xichuan Ge, Kun Zhao, Karl Zhanghao, Meiling Guan, Xin Chen, Meiqi Li, Dayong Jin, Peng Xi","doi":"10.1038/s41377-024-01464-8","DOIUrl":"10.1038/s41377-024-01464-8","url":null,"abstract":"<p><p>Structured illumination microscopy (SIM) has emerged as a promising super-resolution fluorescence imaging technique, offering diverse configurations and computational strategies to mitigate phototoxicity during real-time imaging of biological specimens. Traditional efforts to enhance system frame rates have concentrated on processing algorithms, like rolling reconstruction or reduced frame reconstruction, or on investments in costly sCMOS cameras with accelerated row readout rates. In this article, we introduce an approach to elevate SIM frame rates and region of interest (ROI) coverage at the hardware level, without necessitating an upsurge in camera expenses or intricate algorithms. Here, parallel acquisition-readout SIM (PAR-SIM) achieves the highest imaging speed for fluorescence imaging at currently available detector sensitivity. By using the full frame-width of the detector through synchronizing the pattern generation and image exposure-readout process, we have achieved a fundamentally stupendous information spatial-temporal flux of 132.9 MPixels · s<sup>-1</sup>, 9.6-fold that of the latest techniques, with the lowest SNR of -2.11 dB and 100 nm resolution. PAR-SIM demonstrates its proficiency in successfully reconstructing diverse cellular organelles in dual excitations, even under conditions of low signal due to ultra-short exposure times. Notably, mitochondrial dynamic tubulation and ongoing membrane fusion processes have been captured in live COS-7 cell, recorded with PAR-SIM at an impressive 408 Hz. We posit that this novel parallel exposure-readout mode not only augments SIM pattern modulation for superior frame rates but also holds the potential to benefit other complex imaging systems with a strategic controlling approach.</p>","PeriodicalId":18093,"journal":{"name":"Light, science & applications","volume":null,"pages":null},"PeriodicalIF":19.4,"publicationDate":"2024-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11133488/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141162049","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Complex field imaging, which captures both the amplitude and phase information of input optical fields or objects, can offer rich structural insights into samples, such as their absorption and refractive index distributions. However, conventional image sensors are intensity-based and inherently lack the capability to directly measure the phase distribution of a field. This limitation can be overcome using interferometric or holographic methods, often supplemented by iterative phase retrieval algorithms, leading to a considerable increase in hardware complexity and computational demand. Here, we present a complex field imager design that enables snapshot imaging of both the amplitude and quantitative phase information of input fields using an intensity-based sensor array without any digital processing. Our design utilizes successive deep learning-optimized diffractive surfaces that are structured to collectively modulate the input complex field, forming two independent imaging channels that perform amplitude-to-amplitude and phase-to-intensity transformations between the input and output planes within a compact optical design, axially spanning ~100 wavelengths. The intensity distributions of the output fields at these two channels on the sensor plane directly correspond to the amplitude and quantitative phase profiles of the input complex field, eliminating the need for any digital image reconstruction algorithms. We experimentally validated the efficacy of our complex field diffractive imager designs through 3D-printed prototypes operating at the terahertz spectrum, with the output amplitude and phase channel images closely aligning with our numerical simulations. We envision that this complex field imager will have various applications in security, biomedical imaging, sensing and material science, among others.
{"title":"All-optical complex field imaging using diffractive processors.","authors":"Jingxi Li, Yuhang Li, Tianyi Gan, Che-Yung Shen, Mona Jarrahi, Aydogan Ozcan","doi":"10.1038/s41377-024-01482-6","DOIUrl":"10.1038/s41377-024-01482-6","url":null,"abstract":"<p><p>Complex field imaging, which captures both the amplitude and phase information of input optical fields or objects, can offer rich structural insights into samples, such as their absorption and refractive index distributions. However, conventional image sensors are intensity-based and inherently lack the capability to directly measure the phase distribution of a field. This limitation can be overcome using interferometric or holographic methods, often supplemented by iterative phase retrieval algorithms, leading to a considerable increase in hardware complexity and computational demand. Here, we present a complex field imager design that enables snapshot imaging of both the amplitude and quantitative phase information of input fields using an intensity-based sensor array without any digital processing. Our design utilizes successive deep learning-optimized diffractive surfaces that are structured to collectively modulate the input complex field, forming two independent imaging channels that perform amplitude-to-amplitude and phase-to-intensity transformations between the input and output planes within a compact optical design, axially spanning ~100 wavelengths. The intensity distributions of the output fields at these two channels on the sensor plane directly correspond to the amplitude and quantitative phase profiles of the input complex field, eliminating the need for any digital image reconstruction algorithms. We experimentally validated the efficacy of our complex field diffractive imager designs through 3D-printed prototypes operating at the terahertz spectrum, with the output amplitude and phase channel images closely aligning with our numerical simulations. We envision that this complex field imager will have various applications in security, biomedical imaging, sensing and material science, among others.</p>","PeriodicalId":18093,"journal":{"name":"Light, science & applications","volume":null,"pages":null},"PeriodicalIF":19.4,"publicationDate":"2024-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11130282/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141158562","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Near-infrared (NIR) hyperspectral imaging is a powerful technique that enables the capture of three-dimensional (3D) spectra-spatial information within the NIR spectral range, offering a wide array of applications. However, the high cost associated with InGaAs focal plane array (FPA) has impeded the widespread adoption of NIR hyperspectral imaging. Addressing this challenge, in this study, we adopt an alternative approach-single-pixel detection for NIR hyperspectral imaging. Our investigation reveals that single-pixel detection outperforms conventional FPA, delivering a superior signal-to-noise ratio (SNR) for both spectral and imaging reconstruction. To implement this strategy, we leverage self-assembled colloidal quantum dots (CQDs) and a digital micromirror device (DMD) for NIR spectral and spatial information multiplexing, complemented by single-pixel detection for simultaneous spectral and image reconstruction. Our experimental results demonstrate successful NIR hyperspectral imaging with a detection window about 600 nm and an average spectral resolution of 8.6 nm with a pixel resolution of 128 × 128. The resulting spectral and spatial data align well with reference instruments, which validates the effectiveness of our approach. By circumventing the need for expensive and bulky FPA and wavelength selection components, our solution shows promise in advancing affordable and accessible NIR hyperspectral imaging technologies, thereby expanding the range of potential applications.
{"title":"Quantum dot-enabled infrared hyperspectral imaging with single-pixel detection.","authors":"Heyan Meng, Yuan Gao, Xuhong Wang, Xianye Li, Lili Wang, Xian Zhao, Baoqing Sun","doi":"10.1038/s41377-024-01476-4","DOIUrl":"10.1038/s41377-024-01476-4","url":null,"abstract":"<p><p>Near-infrared (NIR) hyperspectral imaging is a powerful technique that enables the capture of three-dimensional (3D) spectra-spatial information within the NIR spectral range, offering a wide array of applications. However, the high cost associated with InGaAs focal plane array (FPA) has impeded the widespread adoption of NIR hyperspectral imaging. Addressing this challenge, in this study, we adopt an alternative approach-single-pixel detection for NIR hyperspectral imaging. Our investigation reveals that single-pixel detection outperforms conventional FPA, delivering a superior signal-to-noise ratio (SNR) for both spectral and imaging reconstruction. To implement this strategy, we leverage self-assembled colloidal quantum dots (CQDs) and a digital micromirror device (DMD) for NIR spectral and spatial information multiplexing, complemented by single-pixel detection for simultaneous spectral and image reconstruction. Our experimental results demonstrate successful NIR hyperspectral imaging with a detection window about 600 nm and an average spectral resolution of 8.6 nm with a pixel resolution of 128 × 128. The resulting spectral and spatial data align well with reference instruments, which validates the effectiveness of our approach. By circumventing the need for expensive and bulky FPA and wavelength selection components, our solution shows promise in advancing affordable and accessible NIR hyperspectral imaging technologies, thereby expanding the range of potential applications.</p>","PeriodicalId":18093,"journal":{"name":"Light, science & applications","volume":null,"pages":null},"PeriodicalIF":19.4,"publicationDate":"2024-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11130170/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141158570","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-05-28DOI: 10.1038/s41377-024-01426-0
Han Wu, Bo Hu, Lu Chen, Fei Peng, Zinan Wang, Goëry Genty, Houkun Liang
Ghost imaging in the time domain allows for reconstructing fast temporal objects using a slow photodetector. The technique involves correlating random or pre-programmed probing temporal intensity patterns with the integrated signal measured after modulation by the temporal object. However, the implementation of temporal ghost imaging necessitates ultrafast detectors or modulators for measuring or pre-programming the probing intensity patterns, which are not available in all spectral regions especially in the mid-infrared range. Here, we demonstrate a frequency downconversion temporal ghost imaging scheme that enables to extend the operation regime to arbitrary wavelengths regions where fast modulators and detectors are not available. The approach modulates a signal with temporal intensity patterns in the near-infrared and transfers the patterns to an idler via difference-frequency generation in a nonlinear crystal at a wavelength where the temporal object can be retrieved. As a proof-of-concept, we demonstrate computational temporal ghost imaging in the mid-infrared with operating wavelength that can be tuned from 3.2 to 4.3 μm. The scheme is flexible and can be extended to other regimes. Our results introduce new possibilities for scan-free pump-probe imaging and the study of ultrafast dynamics in spectral regions where ultrafast modulation or detection is challenging such as the mid-infrared and THz regions.
{"title":"Mid-infrared computational temporal ghost imaging.","authors":"Han Wu, Bo Hu, Lu Chen, Fei Peng, Zinan Wang, Goëry Genty, Houkun Liang","doi":"10.1038/s41377-024-01426-0","DOIUrl":"10.1038/s41377-024-01426-0","url":null,"abstract":"<p><p>Ghost imaging in the time domain allows for reconstructing fast temporal objects using a slow photodetector. The technique involves correlating random or pre-programmed probing temporal intensity patterns with the integrated signal measured after modulation by the temporal object. However, the implementation of temporal ghost imaging necessitates ultrafast detectors or modulators for measuring or pre-programming the probing intensity patterns, which are not available in all spectral regions especially in the mid-infrared range. Here, we demonstrate a frequency downconversion temporal ghost imaging scheme that enables to extend the operation regime to arbitrary wavelengths regions where fast modulators and detectors are not available. The approach modulates a signal with temporal intensity patterns in the near-infrared and transfers the patterns to an idler via difference-frequency generation in a nonlinear crystal at a wavelength where the temporal object can be retrieved. As a proof-of-concept, we demonstrate computational temporal ghost imaging in the mid-infrared with operating wavelength that can be tuned from 3.2 to 4.3 μm. The scheme is flexible and can be extended to other regimes. Our results introduce new possibilities for scan-free pump-probe imaging and the study of ultrafast dynamics in spectral regions where ultrafast modulation or detection is challenging such as the mid-infrared and THz regions.</p>","PeriodicalId":18093,"journal":{"name":"Light, science & applications","volume":null,"pages":null},"PeriodicalIF":19.4,"publicationDate":"2024-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11133385/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141162044","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-05-24DOI: 10.1038/s41377-024-01463-9
Wei Ren, Xichuan Ge, Meiqi Li, Jing Sun, Shiyi Li, Shu Gao, Chunyan Shan, Baoxiang Gao, Peng Xi
Mitochondria are crucial organelles closely associated with cellular metabolism and function. Mitochondrial DNA (mtDNA) encodes a variety of transcripts and proteins essential for cellular function. However, the interaction between the inner membrane (IM) and mtDNA remains elusive due to the limitations in spatiotemporal resolution offered by conventional microscopy and the absence of suitable in vivo probes specifically targeting the IM. Here, we have developed a novel fluorescence probe called HBmito Crimson, characterized by exceptional photostability, fluorogenicity within lipid membranes, and low saturation power. We successfully achieved over 500 frames of low-power stimulated emission depletion microscopy (STED) imaging to visualize the IM dynamics, with a spatial resolution of 40 nm. By utilizing dual-color imaging of the IM and mtDNA, it has been uncovered that mtDNA tends to habitat at mitochondrial tips or branch points, exhibiting an overall spatially uniform distribution. Notably, the dynamics of mitochondria are intricately associated with the positioning of mtDNA, and fusion consistently occurs in close proximity to mtDNA to minimize pressure during cristae remodeling. In healthy cells, >66% of the mitochondria are Class III (i.e., mitochondria >5 μm or with >12 cristae), while it dropped to <18% in ferroptosis. Mitochondrial dynamics, orchestrated by cristae remodeling, foster the even distribution of mtDNA. Conversely, in conditions of apoptosis and ferroptosis where the cristae structure is compromised, mtDNA distribution becomes irregular. These findings, achieved with unprecedented spatiotemporal resolution, reveal the intricate interplay between cristae and mtDNA and provide insights into the driving forces behind mtDNA distribution.
{"title":"Visualization of cristae and mtDNA interactions via STED nanoscopy using a low saturation power probe.","authors":"Wei Ren, Xichuan Ge, Meiqi Li, Jing Sun, Shiyi Li, Shu Gao, Chunyan Shan, Baoxiang Gao, Peng Xi","doi":"10.1038/s41377-024-01463-9","DOIUrl":"10.1038/s41377-024-01463-9","url":null,"abstract":"<p><p>Mitochondria are crucial organelles closely associated with cellular metabolism and function. Mitochondrial DNA (mtDNA) encodes a variety of transcripts and proteins essential for cellular function. However, the interaction between the inner membrane (IM) and mtDNA remains elusive due to the limitations in spatiotemporal resolution offered by conventional microscopy and the absence of suitable in vivo probes specifically targeting the IM. Here, we have developed a novel fluorescence probe called HBmito Crimson, characterized by exceptional photostability, fluorogenicity within lipid membranes, and low saturation power. We successfully achieved over 500 frames of low-power stimulated emission depletion microscopy (STED) imaging to visualize the IM dynamics, with a spatial resolution of 40 nm. By utilizing dual-color imaging of the IM and mtDNA, it has been uncovered that mtDNA tends to habitat at mitochondrial tips or branch points, exhibiting an overall spatially uniform distribution. Notably, the dynamics of mitochondria are intricately associated with the positioning of mtDNA, and fusion consistently occurs in close proximity to mtDNA to minimize pressure during cristae remodeling. In healthy cells, >66% of the mitochondria are Class III (i.e., mitochondria >5 μm or with >12 cristae), while it dropped to <18% in ferroptosis. Mitochondrial dynamics, orchestrated by cristae remodeling, foster the even distribution of mtDNA. Conversely, in conditions of apoptosis and ferroptosis where the cristae structure is compromised, mtDNA distribution becomes irregular. These findings, achieved with unprecedented spatiotemporal resolution, reveal the intricate interplay between cristae and mtDNA and provide insights into the driving forces behind mtDNA distribution.</p>","PeriodicalId":18093,"journal":{"name":"Light, science & applications","volume":null,"pages":null},"PeriodicalIF":19.4,"publicationDate":"2024-05-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11116397/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141087109","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-05-24DOI: 10.1038/s41377-024-01465-7
Zhiyuan Liu, Yi Lu, Haicheng Cao, Glen Isaac Maciel Garcia, Tingang Liu, Xiao Tang, Na Xiao, Raul Aguileta Vazquez, Mingtao Nong, Xiaohang Li
The traditional plasma etching process for defining micro-LED pixels could lead to significant sidewall damage. Defects near sidewall regions act as non-radiative recombination centers and paths for current leakage, significantly deteriorating device performance. In this study, we demonstrated a novel selective thermal oxidation (STO) method that allowed pixel definition without undergoing plasma damage and subsequent dielectric passivation. Thermal annealing in ambient air oxidized and reshaped the LED structure, such as p-layers and InGaN/GaN multiple quantum wells. Simultaneously, the pixel areas beneath the pre-deposited SiO2 layer were selectively and effectively protected. It was demonstrated that prolonged thermal annealing time enhanced the insulating properties of the oxide, significantly reducing LED leakage current. Furthermore, applying a thicker SiO2 protective layer minimized device resistance and boosted device efficiency effectively. Utilizing the STO method, InGaN green micro-LED arrays with 50-, 30-, and 10-µm pixel sizes were manufactured and characterized. The results indicated that after 4 h of air annealing and with a 3.5-μm SiO2 protective layer, the 10-µm pixel array exhibited leakage currents density 1.2 × 10-6 A/cm2 at -10 V voltage and a peak on-wafer external quantum efficiency of ~6.48%. This work suggests that the STO method could become an effective approach for future micro-LED manufacturing to mitigate adverse LED efficiency size effects due to the plasma etching and improve device efficiency. Micro-LEDs fabricated through the STO method can be applied to micro-displays, visible light communication, and optical interconnect-based memories. Almost planar pixel geometry will provide more possibilities for the monolithic integration of driving circuits with micro-LEDs. Moreover, the STO method is not limited to micro-LED fabrication and can be extended to design other III-nitride devices, such as photodetectors, laser diodes, high-electron-mobility transistors, and Schottky barrier diodes.
用于确定微型 LED 像素的传统等离子体蚀刻工艺可能会导致侧壁严重损坏。侧壁附近的缺陷既是非辐射重组中心,也是电流泄漏的途径,会严重降低器件性能。在这项研究中,我们展示了一种新颖的选择性热氧化(STO)方法,这种方法无需经过等离子体损伤和随后的电介质钝化即可实现像素定义。在环境空气中进行热退火可氧化和重塑 LED 结构,如 p 层和 InGaN/GaN 多量子阱。同时,预沉积的二氧化硅层下的像素区域也得到了选择性的有效保护。实验证明,延长热退火时间可增强氧化物的绝缘性能,显著降低 LED 漏电流。此外,应用较厚的二氧化硅保护层可将器件电阻降至最低,并有效提高器件效率。利用 STO 方法,制造出了像素尺寸分别为 50、30 和 10 微米的 InGaN 绿色微型 LED 阵列,并对其进行了表征。结果表明,经过 4 小时的空气退火和 3.5 微米的二氧化硅保护层后,10 微米像素阵列在 -10 V 电压下的漏电流密度为 1.2 × 10-6 A/cm2,晶圆上的外部量子效率峰值约为 6.48%。这项工作表明,STO 方法可以成为未来制造微型 LED 的有效方法,以减轻等离子刻蚀对 LED 效率尺寸的不利影响,并提高器件效率。通过 STO 方法制造的微型 LED 可应用于微型显示器、可见光通信和基于光互连的存储器。近乎平面的像素几何形状将为驱动电路与微型 LED 的单片集成提供更多可能性。此外,STO 方法并不局限于微型 LED 的制造,还可以扩展到其他 III 氮化物器件的设计,如光电探测器、激光二极管、高电子迁移率晶体管和肖特基势垒二极管。
{"title":"Etching-free pixel definition in InGaN green micro-LEDs.","authors":"Zhiyuan Liu, Yi Lu, Haicheng Cao, Glen Isaac Maciel Garcia, Tingang Liu, Xiao Tang, Na Xiao, Raul Aguileta Vazquez, Mingtao Nong, Xiaohang Li","doi":"10.1038/s41377-024-01465-7","DOIUrl":"10.1038/s41377-024-01465-7","url":null,"abstract":"<p><p>The traditional plasma etching process for defining micro-LED pixels could lead to significant sidewall damage. Defects near sidewall regions act as non-radiative recombination centers and paths for current leakage, significantly deteriorating device performance. In this study, we demonstrated a novel selective thermal oxidation (STO) method that allowed pixel definition without undergoing plasma damage and subsequent dielectric passivation. Thermal annealing in ambient air oxidized and reshaped the LED structure, such as p-layers and InGaN/GaN multiple quantum wells. Simultaneously, the pixel areas beneath the pre-deposited SiO<sub>2</sub> layer were selectively and effectively protected. It was demonstrated that prolonged thermal annealing time enhanced the insulating properties of the oxide, significantly reducing LED leakage current. Furthermore, applying a thicker SiO<sub>2</sub> protective layer minimized device resistance and boosted device efficiency effectively. Utilizing the STO method, InGaN green micro-LED arrays with 50-, 30-, and 10-µm pixel sizes were manufactured and characterized. The results indicated that after 4 h of air annealing and with a 3.5-μm SiO<sub>2</sub> protective layer, the 10-µm pixel array exhibited leakage currents density 1.2 × 10<sup>-6</sup> A/cm<sup>2</sup> at -10 V voltage and a peak on-wafer external quantum efficiency of ~6.48%. This work suggests that the STO method could become an effective approach for future micro-LED manufacturing to mitigate adverse LED efficiency size effects due to the plasma etching and improve device efficiency. Micro-LEDs fabricated through the STO method can be applied to micro-displays, visible light communication, and optical interconnect-based memories. Almost planar pixel geometry will provide more possibilities for the monolithic integration of driving circuits with micro-LEDs. Moreover, the STO method is not limited to micro-LED fabrication and can be extended to design other III-nitride devices, such as photodetectors, laser diodes, high-electron-mobility transistors, and Schottky barrier diodes.</p>","PeriodicalId":18093,"journal":{"name":"Light, science & applications","volume":null,"pages":null},"PeriodicalIF":19.4,"publicationDate":"2024-05-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11116531/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141087062","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-05-22DOI: 10.1038/s41377-024-01470-w
Seungmin Nam, Wontae Jung, Jun Hyuk Shin, Su Seok Choi
Wavelength-tunable structural colors using stimuli-responsive materials, such as chiral liquid crystals (CLCs), have attracted increasing attention owing to their high functionality in various tunable photonic applications. Ideally, on-demand omnidirectional wavelength control is highly desirable from the perspective of wavelength-tuning freedom. However, despite numerous previous research efforts on tunable CLC structural colors, only mono-directional wavelength tuning toward shorter wavelengths has been employed in most studies to date. In this study, we report the ideally desired omnidirectional wavelength control toward longer and shorter wavelengths with significantly improved tunability over a broadband wavelength range. By using areal expanding and contractive strain control of dielectric elastomer actuators (DEAs) with chiral liquid crystal elastomers (CLCEs), simultaneous and omnidirectional structural color-tuning control was achieved. This breakthrough in omnidirectional wavelength control enhances the achievable tuning freedom and versatility, making it applicable to a broad range of high-functional photonic applications.
{"title":"Omnidirectional color wavelength tuning of stretchable chiral liquid crystal elastomers.","authors":"Seungmin Nam, Wontae Jung, Jun Hyuk Shin, Su Seok Choi","doi":"10.1038/s41377-024-01470-w","DOIUrl":"10.1038/s41377-024-01470-w","url":null,"abstract":"<p><p>Wavelength-tunable structural colors using stimuli-responsive materials, such as chiral liquid crystals (CLCs), have attracted increasing attention owing to their high functionality in various tunable photonic applications. Ideally, on-demand omnidirectional wavelength control is highly desirable from the perspective of wavelength-tuning freedom. However, despite numerous previous research efforts on tunable CLC structural colors, only mono-directional wavelength tuning toward shorter wavelengths has been employed in most studies to date. In this study, we report the ideally desired omnidirectional wavelength control toward longer and shorter wavelengths with significantly improved tunability over a broadband wavelength range. By using areal expanding and contractive strain control of dielectric elastomer actuators (DEAs) with chiral liquid crystal elastomers (CLCEs), simultaneous and omnidirectional structural color-tuning control was achieved. This breakthrough in omnidirectional wavelength control enhances the achievable tuning freedom and versatility, making it applicable to a broad range of high-functional photonic applications.</p>","PeriodicalId":18093,"journal":{"name":"Light, science & applications","volume":null,"pages":null},"PeriodicalIF":19.4,"publicationDate":"2024-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11109264/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141074665","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}