首页 > 最新文献

Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)最新文献

英文 中文
Improved luminescence from InGaAsP/InP MQW active regions using a wafer fused superlattice barrier 利用晶圆融合超晶格势垒改善InGaAsP/InP MQW有源区的发光
K. A. Black, P. Abraham, A. Karim, J. Bowers, E. Hu
This paper investigates the luminescence properties of InP/InGaAsP multiple quantum well (MQW) laser active regions. Room temperature photoluminescence studies were performed on doped and undoped active regions before fusion, after fusion, after thermal cycling, and after rapid thermal annealing. It is shown that quantum well luminescence intensity degrades considerably after wafer fusion. The introduction of a superlattice defect blocking layer at the fusing surface of the MQW active region not only prevents degradation of the luminescence, but actually improves the luminescence of the MQW active region through the fusion process by a factor of four.
研究了InP/InGaAsP多量子阱(MQW)激光有源区的发光特性。在熔合前、熔合后、热循环后和快速热退火后对掺杂和未掺杂的活性区进行了室温光致发光研究。结果表明,晶圆融合后量子阱的发光强度明显降低。在MQW有源区的融合表面引入超晶格缺陷阻挡层,不仅防止了发光性能的退化,而且通过融合过程将MQW有源区的发光性能提高了4倍。
{"title":"Improved luminescence from InGaAsP/InP MQW active regions using a wafer fused superlattice barrier","authors":"K. A. Black, P. Abraham, A. Karim, J. Bowers, E. Hu","doi":"10.1109/ICIPRM.1999.773708","DOIUrl":"https://doi.org/10.1109/ICIPRM.1999.773708","url":null,"abstract":"This paper investigates the luminescence properties of InP/InGaAsP multiple quantum well (MQW) laser active regions. Room temperature photoluminescence studies were performed on doped and undoped active regions before fusion, after fusion, after thermal cycling, and after rapid thermal annealing. It is shown that quantum well luminescence intensity degrades considerably after wafer fusion. The introduction of a superlattice defect blocking layer at the fusing surface of the MQW active region not only prevents degradation of the luminescence, but actually improves the luminescence of the MQW active region through the fusion process by a factor of four.","PeriodicalId":213868,"journal":{"name":"Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123691063","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 20
Narrow-stripe selective MOVPE technology for high-quality strained InGaAsP MQW structures 用于高质量应变InGaAsP MQW结构的窄条纹选择性MOVPE技术
Y. Sakata, K. Komatsu
Selective MOVPE technology is widely used for realizing advanced photonic integrated devices. Especially, narrow-stripe selective (NS) MOVPE which performs in less than 2 /spl mu/m-wide open-stripe region can achieve not only in-plane bandgap control but also direct waveguide formation without any semiconductor etching process. Therefore, NS-MOVPE is the powerful method for achieving highly uniform device characteristics. However, the growth mechanism of NS-MOVPE is very complicated due to the surface migration effect on both a dielectric mask and a semiconductor. This paper shows the recent progress in the study of the surface migration effect for understanding the mechanism of NS-MOVPE and introduce the novel pulse-mode NS-MOVPE for achieving an excellent crystal-quality of strained InGaAsP MQW structures.
选择性MOVPE技术被广泛用于实现先进的光子集成器件。特别是窄带选择性(NS) MOVPE,它可以在小于2 /spl μ m /m宽的开放条带区域内工作,不仅可以实现面内带隙控制,而且可以直接形成波导,而无需任何半导体刻蚀过程。因此,NS-MOVPE是实现高度均匀器件特性的有力方法。然而,NS-MOVPE的生长机制非常复杂,因为在介质掩膜和半导体上都存在表面迁移效应。本文介绍了表面迁移效应研究的最新进展,为理解NS-MOVPE的机理提供了理论基础,并介绍了一种新型脉冲模式NS-MOVPE,用于实现应变InGaAsP MQW结构优异的晶体质量。
{"title":"Narrow-stripe selective MOVPE technology for high-quality strained InGaAsP MQW structures","authors":"Y. Sakata, K. Komatsu","doi":"10.1109/ICIPRM.1999.773630","DOIUrl":"https://doi.org/10.1109/ICIPRM.1999.773630","url":null,"abstract":"Selective MOVPE technology is widely used for realizing advanced photonic integrated devices. Especially, narrow-stripe selective (NS) MOVPE which performs in less than 2 /spl mu/m-wide open-stripe region can achieve not only in-plane bandgap control but also direct waveguide formation without any semiconductor etching process. Therefore, NS-MOVPE is the powerful method for achieving highly uniform device characteristics. However, the growth mechanism of NS-MOVPE is very complicated due to the surface migration effect on both a dielectric mask and a semiconductor. This paper shows the recent progress in the study of the surface migration effect for understanding the mechanism of NS-MOVPE and introduce the novel pulse-mode NS-MOVPE for achieving an excellent crystal-quality of strained InGaAsP MQW structures.","PeriodicalId":213868,"journal":{"name":"Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)","volume":"107 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125089245","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
LP-HVPE growth of S, Fe and undoped InP S、Fe和未掺杂InP的LP-HVPE生长
D. Jahan, D. Soderstrom, S. Lourdudoss
This study presents the result of low-pressure hydride vapour phase epitaxy of undoped and doped InP carried out in a commercial equipment designed for 3-inch wafers. Specially, InP:Fe growth with ferrocene has been investigated in order to provide high resistive semi-insulating material. Besides, a very good planarisation around mesas has been achieved by selective regrowth. Finally, to validate the equipment, Fabry-Perot lasers with a modulation bandwidth of 15 GHz have been realised by burying mesas with regrown InP:Fe.
本研究介绍了在3英寸晶圆设计的商用设备上进行的未掺杂和掺杂InP的低压氢化物气相外延的结果。为了提供高阻半绝缘材料,研究了用二茂铁生长InP:Fe的方法。此外,通过选择性再生,在台地周围实现了很好的平面化。最后,为了验证该设备的有效性,利用再生InP:Fe埋置台面实现了调制带宽为15 GHz的Fabry-Perot激光器。
{"title":"LP-HVPE growth of S, Fe and undoped InP","authors":"D. Jahan, D. Soderstrom, S. Lourdudoss","doi":"10.1109/ICIPRM.1999.773650","DOIUrl":"https://doi.org/10.1109/ICIPRM.1999.773650","url":null,"abstract":"This study presents the result of low-pressure hydride vapour phase epitaxy of undoped and doped InP carried out in a commercial equipment designed for 3-inch wafers. Specially, InP:Fe growth with ferrocene has been investigated in order to provide high resistive semi-insulating material. Besides, a very good planarisation around mesas has been achieved by selective regrowth. Finally, to validate the equipment, Fabry-Perot lasers with a modulation bandwidth of 15 GHz have been realised by burying mesas with regrown InP:Fe.","PeriodicalId":213868,"journal":{"name":"Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123733413","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Tuning of electron occupancy in luminescence of single InP/GaInP quantum dot 单个InP/GaInP量子点发光中电子占位的调谐
L. Samuelson, D. Hessman, J. Persson, M. Pistol, C. Pryor, W. Seifert
Summary form only given. Macro- as well as micro-photoluminescence studies of InP/GaInP quantum dots (QDs) fabricated via the Stranski-Krastanow growth mode always show multiple luminescence lines, with an unexpected spectral width even for an individual QD. The origin of this unusual behavior has been debated and until now no clear picture has emerged. We have recently developed a new spectroscopic tool in which we can follow the luminescence of a single QD during the application of an electric field via a transparent Schottky barrier on the surface of the GaInP barrier material. This enables us to follow the evolution of each of the peaks as function of applied bias, with respect to (i) spectral shifts, (ii) intensities and (iii) line-widths. We will present experimental data and computer simulation results which show that during optical illumination with intensities such that luminescence is detected, a condition very close to flat-band is obtained and an open-circuit voltage corresponding to the Schottky-barrier height is detected.
只提供摘要形式。通过Stranski-Krastanow生长模式制备的InP/GaInP量子点(QDs)的宏观和微观光致发光研究总是显示出多条发光线,即使对于单个量子点也具有意想不到的光谱宽度。这种不寻常行为的起源一直存在争议,直到现在还没有清晰的图像出现。我们最近开发了一种新的光谱工具,通过GaInP势垒材料表面的透明肖特基势垒,我们可以在电场作用期间跟踪单个量子点的发光。这使我们能够跟踪每个峰的演变,作为应用偏置的函数,相对于(i)光谱位移,(ii)强度和(iii)线宽。我们将提供的实验数据和计算机模拟结果表明,在光学照明强度下,可以检测到发光,获得非常接近平带的条件,并检测到与肖特基势垒高度相对应的开路电压。
{"title":"Tuning of electron occupancy in luminescence of single InP/GaInP quantum dot","authors":"L. Samuelson, D. Hessman, J. Persson, M. Pistol, C. Pryor, W. Seifert","doi":"10.1109/ICIPRM.1999.773770","DOIUrl":"https://doi.org/10.1109/ICIPRM.1999.773770","url":null,"abstract":"Summary form only given. Macro- as well as micro-photoluminescence studies of InP/GaInP quantum dots (QDs) fabricated via the Stranski-Krastanow growth mode always show multiple luminescence lines, with an unexpected spectral width even for an individual QD. The origin of this unusual behavior has been debated and until now no clear picture has emerged. We have recently developed a new spectroscopic tool in which we can follow the luminescence of a single QD during the application of an electric field via a transparent Schottky barrier on the surface of the GaInP barrier material. This enables us to follow the evolution of each of the peaks as function of applied bias, with respect to (i) spectral shifts, (ii) intensities and (iii) line-widths. We will present experimental data and computer simulation results which show that during optical illumination with intensities such that luminescence is detected, a condition very close to flat-band is obtained and an open-circuit voltage corresponding to the Schottky-barrier height is detected.","PeriodicalId":213868,"journal":{"name":"Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127609986","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dynamic measurements on narrow linewidth complex coupled 1.55 /spl mu/m DFB lasers with gain and index grating in antiphase 带增益和折射率光栅的窄线宽复耦合1.55 /spl mu/m DFB激光器的动态测量
R. Schreiner, M. Mulot, J. Wiedmann, W. Coenning, J. Porsche, J. Gentner, M. Berroth, F. Scholz, H. Schwizer
We report on dynamic measurements on antiphase complex coupled 1.55 /spl mu/m DFB lasers. The antiphase complex coupling mechanism is realized by periodically etching the active layer and quarternary InGaAsP overgrowth. This new fabrication approach results in very narrow linewidths measured on devices with rather short resonator lengths. The minimum linewidth for a 375 /spl mu/m long ridge waveguide laser was only 250 kHz at an optical output power of 4 mW. The RC-limited 3dB-bandwidth for those devices was /spl sim/6 GHz. Using circuit model corrections, the intrinsic bandwidth limitation of those lasers was found to be 17.4 GHz.
报道了反相位络合物耦合1.55 /spl mu/m DFB激光器的动态测量。通过周期性蚀刻活性层和四季InGaAsP过生长,实现了反相络合物耦合机制。这种新的制造方法导致在具有相当短的谐振器长度的设备上测量非常窄的线宽。在光输出功率为4 mW时,375 /spl μ m长脊波导激光器的最小线宽仅为250 kHz。这些设备的rc限制的3db带宽为/spl sim/6 GHz。通过修正电路模型,发现这些激光器的固有带宽限制为17.4 GHz。
{"title":"Dynamic measurements on narrow linewidth complex coupled 1.55 /spl mu/m DFB lasers with gain and index grating in antiphase","authors":"R. Schreiner, M. Mulot, J. Wiedmann, W. Coenning, J. Porsche, J. Gentner, M. Berroth, F. Scholz, H. Schwizer","doi":"10.1109/ICIPRM.1999.773626","DOIUrl":"https://doi.org/10.1109/ICIPRM.1999.773626","url":null,"abstract":"We report on dynamic measurements on antiphase complex coupled 1.55 /spl mu/m DFB lasers. The antiphase complex coupling mechanism is realized by periodically etching the active layer and quarternary InGaAsP overgrowth. This new fabrication approach results in very narrow linewidths measured on devices with rather short resonator lengths. The minimum linewidth for a 375 /spl mu/m long ridge waveguide laser was only 250 kHz at an optical output power of 4 mW. The RC-limited 3dB-bandwidth for those devices was /spl sim/6 GHz. Using circuit model corrections, the intrinsic bandwidth limitation of those lasers was found to be 17.4 GHz.","PeriodicalId":213868,"journal":{"name":"Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124499726","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Minority carrier lifetime in MOCVD-grown C- and Zn-doped InGaAs mocvd生长的C和zn掺杂InGaAs的少数载流子寿命
C. Chellic, D. Cui, S. Hubbard, A. Eisenbach, D. Pavlidis, S. Krawczyk, B. Sermage
Heavily C-doped p-type InGaAs has been successfully grown by metalorganic chemical vapor deposition using CBr/sub 4/ as a C precursor. A doping concentration as high as 2/spl times/10/sup 19/ cm/sup -3/ has been reached for as-grown (non-annealed) samples. Photoluminescence measurements have been employed to obtain and compare the non-radiative lifetimes in C- and Zn-doped InGaAs. The minority carrier lifetime of as-grown InGaAs:C samples is significantly lower than for as-grown InGaAs:Zn for the same doping concentration. Carrier lifetimes range from 373 ps (p=6.6/spl times/10/sup 16/ cm/sup -3/) to 1.5 ps (p=2.3/spl times/10/sup 19/ cm/sup -3/) in as-grown InGaAs:C, and from 6.8 ns (p=5.0/spl times/10/sup 16/ cm/sup -3/) to 16.8 ps (p=2.1/spl times/10/sup 19/ cm/sup -3/) in InGaAs:Zn, respectively. InGaAs:Zn grown at the same low temperature (450/spl deg/C) as InGaAs:C has a higher minority carrier lifetime. The minority carrier lifetime difference between InGaAs:Zn and InGaAs:C samples is attributed to lower V/III ratio and hydrogen passivation, as well as, lower growth temperatures for the carbon doped InGaAs samples.
以CBr/sub - 4/为碳前驱体,采用金属有机化学气相沉积法制备了重掺C的p型InGaAs。对于生长(未退火)的样品,掺杂浓度高达2/spl倍/10/sup 19/ cm/sup -3/。采用光致发光测量方法获得并比较了C掺杂和zn掺杂InGaAs的非辐射寿命。在相同掺杂浓度下,生长InGaAs:C样品的少数载流子寿命明显低于生长InGaAs:Zn样品。在InGaAs:C中,载流子寿命从373秒(p=6.6/spl倍/10/sup 16/ cm/sup -3/)到1.5秒(p=2.3/spl倍/10/sup 19/ cm/sup -3/),在InGaAs:Zn中,载流子寿命分别从6.8秒(p=5.0/spl倍/10/sup 16/ cm/sup -3/)到16.8秒(p=2.1/spl倍/10/sup 19/ cm/sup -3/)。在与InGaAs:C相同的低温(450/spl℃)下生长的InGaAs:Zn具有更高的少数载流子寿命。InGaAs:Zn和InGaAs:C样品的少数载流子寿命差异归因于较低的V/III比和氢钝化,以及碳掺杂InGaAs样品的较低生长温度。
{"title":"Minority carrier lifetime in MOCVD-grown C- and Zn-doped InGaAs","authors":"C. Chellic, D. Cui, S. Hubbard, A. Eisenbach, D. Pavlidis, S. Krawczyk, B. Sermage","doi":"10.1109/ICIPRM.1999.773651","DOIUrl":"https://doi.org/10.1109/ICIPRM.1999.773651","url":null,"abstract":"Heavily C-doped p-type InGaAs has been successfully grown by metalorganic chemical vapor deposition using CBr/sub 4/ as a C precursor. A doping concentration as high as 2/spl times/10/sup 19/ cm/sup -3/ has been reached for as-grown (non-annealed) samples. Photoluminescence measurements have been employed to obtain and compare the non-radiative lifetimes in C- and Zn-doped InGaAs. The minority carrier lifetime of as-grown InGaAs:C samples is significantly lower than for as-grown InGaAs:Zn for the same doping concentration. Carrier lifetimes range from 373 ps (p=6.6/spl times/10/sup 16/ cm/sup -3/) to 1.5 ps (p=2.3/spl times/10/sup 19/ cm/sup -3/) in as-grown InGaAs:C, and from 6.8 ns (p=5.0/spl times/10/sup 16/ cm/sup -3/) to 16.8 ps (p=2.1/spl times/10/sup 19/ cm/sup -3/) in InGaAs:Zn, respectively. InGaAs:Zn grown at the same low temperature (450/spl deg/C) as InGaAs:C has a higher minority carrier lifetime. The minority carrier lifetime difference between InGaAs:Zn and InGaAs:C samples is attributed to lower V/III ratio and hydrogen passivation, as well as, lower growth temperatures for the carbon doped InGaAs samples.","PeriodicalId":213868,"journal":{"name":"Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)","volume":"102 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122418292","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Applications of resonant-tunneling diodes to high-speed digital ICs 谐振隧道二极管在高速数字集成电路中的应用
T. Akeyoshi, H. Matsuzaki, T. Itoh, T. Waho, J. Osaka, M. Yamamoto
Ultrahigh-speed circuit applications of resonant-tunneling diodes (RTDs) have been developed. The key points are the utilization of the edge-triggered and latching properties arising from the negative differential resistance of the RTD, and the combination of RTDs and high electron mobility transistors (HEMTs). High-speed and low power operation of various flip-flop (FF) circuits monolithically integrating InP-based RTDs and HEMTs have been demonstrated at room temperature, including a delayed flip-flop operation at 35 Gbit/s. By extending the concept of electronic-input circuits to the optical-input circuit, an ultrahigh-speed optoelectronic circuit integrating RTDs and a photodiode has been developed. Using this optoelectronic circuit, we have succeeded in demultiplexing a 80 Gbit/s optical signal into a 40 Gbit/s electrical signal. These results show the potentiality of RTD-based circuits for ultrahigh-speed communications and signal processing circuits.
谐振隧道二极管(rtd)在超高速电路中的应用得到了发展。关键是利用RTD的负差分电阻产生的边缘触发和锁存特性,以及RTD与高电子迁移率晶体管(hemt)的结合。各种触发器(FF)电路单片集成基于inp的rtd和hemt的高速低功耗工作已经在室温下进行了演示,包括35 Gbit/s的延迟触发器操作。将电子输入电路的概念扩展到光输入电路,开发了一种集成rtd和光电二极管的超高速光电电路。利用这种光电电路,我们成功地将80 Gbit/s的光信号解复用为40 Gbit/s的电信号。这些结果显示了基于rtd的电路在超高速通信和信号处理电路中的潜力。
{"title":"Applications of resonant-tunneling diodes to high-speed digital ICs","authors":"T. Akeyoshi, H. Matsuzaki, T. Itoh, T. Waho, J. Osaka, M. Yamamoto","doi":"10.1109/ICIPRM.1999.773719","DOIUrl":"https://doi.org/10.1109/ICIPRM.1999.773719","url":null,"abstract":"Ultrahigh-speed circuit applications of resonant-tunneling diodes (RTDs) have been developed. The key points are the utilization of the edge-triggered and latching properties arising from the negative differential resistance of the RTD, and the combination of RTDs and high electron mobility transistors (HEMTs). High-speed and low power operation of various flip-flop (FF) circuits monolithically integrating InP-based RTDs and HEMTs have been demonstrated at room temperature, including a delayed flip-flop operation at 35 Gbit/s. By extending the concept of electronic-input circuits to the optical-input circuit, an ultrahigh-speed optoelectronic circuit integrating RTDs and a photodiode has been developed. Using this optoelectronic circuit, we have succeeded in demultiplexing a 80 Gbit/s optical signal into a 40 Gbit/s electrical signal. These results show the potentiality of RTD-based circuits for ultrahigh-speed communications and signal processing circuits.","PeriodicalId":213868,"journal":{"name":"Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131400962","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 22
LP-MOVPE grown GaAs- and InP-based HBTs using all-liquid alternative sources LP-MOVPE使用全液体替代源培养GaAs和inp基hbt
P. Veiling, M. Agethen, E. Herenda, W. Prost, W. Stolz, F. Tegude
The liquid alternative group-V precursors TBAs/TBP and CBr/sub 4//DitBuSi as group-IV dopant sources are used to grow GaAs- and InP-based HBT layer stacks. The LP-MOVPE growth of III-V semiconductors using all-liquid sources exhibit a reduced hazard potential and allow a reduced growth temperature which fits to the needs of carbon doping in HBT layer stacks. State-of-the-art InGaP/GaAs HBTs are grown at constant growth temperature (T/sub gt/=60/spl deg/C) and nearly constant V/III-ratio (10
采用液体替代v族前体TBAs/TBP和CBr/sub //DitBuSi作为iv族掺杂源,生长GaAs和inp基HBT层。使用全液体源的III-V型半导体的LP-MOVPE生长具有较低的危险电位,并且允许较低的生长温度,这符合碳掺杂在HBT层堆中的需要。最先进的InGaP/GaAs HBTs在恒定生长温度(T/sub gt/=60/spl℃)和几乎恒定的V/III比(10
{"title":"LP-MOVPE grown GaAs- and InP-based HBTs using all-liquid alternative sources","authors":"P. Veiling, M. Agethen, E. Herenda, W. Prost, W. Stolz, F. Tegude","doi":"10.1109/ICIPRM.1999.773734","DOIUrl":"https://doi.org/10.1109/ICIPRM.1999.773734","url":null,"abstract":"The liquid alternative group-V precursors TBAs/TBP and CBr/sub 4//DitBuSi as group-IV dopant sources are used to grow GaAs- and InP-based HBT layer stacks. The LP-MOVPE growth of III-V semiconductors using all-liquid sources exhibit a reduced hazard potential and allow a reduced growth temperature which fits to the needs of carbon doping in HBT layer stacks. State-of-the-art InGaP/GaAs HBTs are grown at constant growth temperature (T/sub gt/=60/spl deg/C) and nearly constant V/III-ratio (10<V/III<15) enabling a simplified MOVPE process control. The process control for InGaAs/InP-HBTs is also simplified compared to the use of standard precursors. The InP-HBT structures are grown in between 500/spl deg/C<T/sub pr/<600/spl deg/C temperature and 5<V/III<30 V/III-ratio range.","PeriodicalId":213868,"journal":{"name":"Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)","volume":"70 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132938378","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A method of incorporating wet-oxidized III-V semiconductor layers into indium phosphide based lasers and amplifiers 一种将湿氧化III-V半导体层纳入磷化铟基激光器和放大器的方法
B. Koley, F. Johnson, S. Saini, M. Dagenais
We have demonstrated a method of efficient wet oxidation for use in device fabrication using material system lattice-matched to indium phosphide. It was found that the oxidation of a strain compensated InAs/AlAs super-lattice grown on InP proceeded much faster than lattice matched InAlAs. This method has been used for current confinement in InP based edge emitting stripe lasers. The same wet oxidation process is also well suited for long wavelength VCSEL application.
我们已经证明了一种有效的湿氧化方法,用于器件制造,使用材料系统晶格匹配的磷化铟。结果表明,在InP上生长的应变补偿InAs/AlAs超晶格的氧化速度比匹配的InAlAs晶格快得多。该方法已用于基于InP的边缘发射条纹激光器的电流约束。同样的湿式氧化工艺也非常适合长波长的VCSEL应用。
{"title":"A method of incorporating wet-oxidized III-V semiconductor layers into indium phosphide based lasers and amplifiers","authors":"B. Koley, F. Johnson, S. Saini, M. Dagenais","doi":"10.1109/ICIPRM.1999.773771","DOIUrl":"https://doi.org/10.1109/ICIPRM.1999.773771","url":null,"abstract":"We have demonstrated a method of efficient wet oxidation for use in device fabrication using material system lattice-matched to indium phosphide. It was found that the oxidation of a strain compensated InAs/AlAs super-lattice grown on InP proceeded much faster than lattice matched InAlAs. This method has been used for current confinement in InP based edge emitting stripe lasers. The same wet oxidation process is also well suited for long wavelength VCSEL application.","PeriodicalId":213868,"journal":{"name":"Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)","volume":"127 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132197462","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Long wavelength vertical cavity lasers 长波长垂直腔激光器
K. A. Black, P. Abraham, A. Keating, Y. Chiu, E. Hu, J. Bowers
The need for low cost, high speed telecommunication sources demands the maturation of long wavelength vertical cavity lasers (VCLs). Both long haul fiber optic systems and gigabit ethernet links are potential markets for 1.3 and 1.55 micron VCLs. This past year has seen much progress to this end, but the emerging technology has yet to be determined. This paper overviews critical issues in long wavelength VCL design, and discusses the most recent technological advances in the field.
对低成本、高速通信源的需求要求长波长垂直腔激光器(vcl)的成熟。长距离光纤系统和千兆以太网链路都是1.3微米和1.55微米vcl的潜在市场。在过去的一年里,我们在这方面取得了很大进展,但新兴技术尚未确定。本文概述了长波长VCL设计中的关键问题,并讨论了该领域的最新技术进展。
{"title":"Long wavelength vertical cavity lasers","authors":"K. A. Black, P. Abraham, A. Keating, Y. Chiu, E. Hu, J. Bowers","doi":"10.1109/ICIPRM.1999.773687","DOIUrl":"https://doi.org/10.1109/ICIPRM.1999.773687","url":null,"abstract":"The need for low cost, high speed telecommunication sources demands the maturation of long wavelength vertical cavity lasers (VCLs). Both long haul fiber optic systems and gigabit ethernet links are potential markets for 1.3 and 1.55 micron VCLs. This past year has seen much progress to this end, but the emerging technology has yet to be determined. This paper overviews critical issues in long wavelength VCL design, and discusses the most recent technological advances in the field.","PeriodicalId":213868,"journal":{"name":"Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115185946","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
期刊
Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1