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Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)最新文献

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50 to 70 GHz InP/InGaAs HBT amplifier with 20 dB gain 增益20 dB的50 ~ 70 GHz InP/InGaAs HBT放大器
T. Morf, D. Huber, A. Huber, V. Schwarz, H. Jackel
In this paper the design and a complete characterization of an InP/InGaAs single heterojunction bipolar (SHBT) mm-wave amplifier is described. The circuit is designed for the 60 GHz band allocated for wireless LAN and mobile communications. The amplifier achieves a gain of 20 dB from 50 GHz to 70 GHz. Beside S-parameter noise and gain compression measurements are presented. No comparable HBT amplifier at 60 GHz could be found in literature.
本文描述了一种InP/InGaAs单异质结双极毫米波放大器的设计和完整的特性。该电路是为无线局域网和移动通信分配的60 GHz频段设计的。放大器在50 GHz到70 GHz范围内获得20 dB增益。此外,给出了s参数噪声和增益压缩的测量结果。在文献中找不到60 GHz的可比HBT放大器。
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引用次数: 3
Correlation between morphology and island formation on InP surfaces InP表面形态与岛屿形成的关系
C. Carlstrom, S. Anand, E. Niemi, G. Landgren
The influence of the surface morphology on island formation by As/P exchange reaction on the InP surfaces was investigated. It was demonstrated that island formation is extremely sensitive to the physical nature of the surface. Variation in the surface rms. roughness, caused by controlled ion beam etching (shallow) under different conditions, was shown to drastically affect the island size distribution. Further, the determined total island volume increased with the surface roughness, which is consistent with increased surface area available for As/P exchange reaction. Modification of surface morphology is suggested as an alternative route to vary island size distribution.
研究了表面形貌对铟磷表面As/P交换反应形成岛的影响。研究表明,岛屿的形成对地表的物理性质极为敏感。表面均方根的变化。不同条件下受控离子束刻蚀(浅)引起的粗糙度对岛尺寸分布有显著影响。此外,测定的总岛体积随着表面粗糙度的增加而增加,这与可用于As/P交换反应的表面积增加是一致的。表面形态的改变被认为是改变岛屿大小分布的另一种途径。
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引用次数: 0
Carrier capture in self-assembled InAs/InP quantum dots 自组装InAs/InP量子点中的载流子捕获
S. Hinooda, N. Bertru, S. Fréchengues, B. Lambert, S. Loualiche, M. Paillard, X. Marie, T. Amand
Carrier capture of InAs quantum dots structure on InP (311)B substrate has been studied by optical measurements. Photoluminescence measurements shows a clear decrease of the decay time of the two dimensional confining layer at high temperature under lower excitation. A strong decrease of the decay time has also been observed under high incident excitation even at low temperature. These effects are explained, by a very simple model, as a consequence of carrier capture into quantum dots assisted by a thermal activation of carriers and energy relaxation through the Auger process.
通过光学测量研究了InP (311)B衬底上InAs量子点结构的载流子捕获。光致发光测量表明,在较低激发下,二维围合层在高温下的衰变时间明显缩短。在高入射激发下,即使在低温下,衰变时间也明显缩短。这些效应可以用一个非常简单的模型来解释,这是载流子捕获到量子点的结果,通过俄歇过程辅助载流子的热激活和能量松弛。
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引用次数: 0
Improvement of CBE grown InGaAs/InP HBT's using a carbon doped and compositionally graded base 采用碳掺杂和成分梯度基底改进CBE生长InGaAs/InP HBT
J. Benchimol, J. Mba, A.R. Duchenois, P. Berdaguer, B. Sermage, G. Le Roux, S. Blayac, M. Riet, J. Thuret, C. Gonzalez, P. Andre
InGaAs/lnP heterojunction bipolar transistors (HBT) with a carbon doped base are shown to have lower gain than those with Be doped base, partly because of lower electron lifetime. In order to keep advantage of the low diffusivity of carbon dopant, a composition graduality is introduced in the base, which significantly improves the current gain of HBT's. This graduality also leads to some advantageous side effects such as higher doping levels, low base sheet resistance and constant gain over a four-decade current range, without degrading the lifetime of the device. Such structures were processed as single HBT devices with high frequency performances (f/sub t/=168 GHz), digital circuits (2:1 MUX) operating at 46 Gbit/s and phototransistors with 35 dB optical gain and 62 GHz optical cut-off frequency.
掺杂碳基的InGaAs/lnP异质结双极晶体管(HBT)的增益比掺杂Be基的低,部分原因是其电子寿命较低。为了保持碳掺杂物低扩散率的优势,在基体中引入成分渐变,显著提高了HBT的电流增益。这种渐进性也导致了一些有利的副作用,如更高的掺杂水平,低基片电阻和超过40年电流范围的恒定增益,而不会降低器件的使用寿命。这些结构被加工成具有高频性能(f/sub /=168 GHz)的单HBT器件,工作速度为46 Gbit/s的数字电路(2:1 MUX)和光增益为35 dB、光截止频率为62 GHz的光电晶体管。
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引用次数: 6
Photonic integration technology without semiconductor etching 无半导体蚀刻的光子集成技术
D. Jahan, P. Legay, F. Alexandre
Monolithic device integration is more and more essential for the realisation of micro and optoelectronic circuits, which can fulfil complex functions with higher performances. The most prevalent approach in the fabrication of photonic integrated circuits (PICs) is the butt-coupling. This can be done in one step by Selective Area Growth (SAG) carried out by Metalorganic Vapour Phase Epitaxy (MOVPE) or by localised selective regrowth by Chemical Beam Epitaxy (CBE). The former technique inconvenient is that the structures of the devices cannot be quite different, especially, if one of them should be doped, the others will be doped as well. The latter method needs one epitaxial step for each integrated structure and requires several etching steps, which can deteriorate the performances of the regrown devices. This study proposes a new procedure to integrate several devices without any etching step.
单片器件集成对于实现微光电电路越来越重要,它可以以更高的性能完成复杂的功能。在光子集成电路(PICs)的制造中,最普遍的方法是对接耦合。这可以通过金属有机气相外延(MOVPE)进行的选择性区域生长(SAG)或化学束外延(CBE)进行的局部选择性再生一步完成。前一种技术的不便之处在于器件的结构不能有很大的不同,特别是如果要掺杂其中一种器件,则其他器件也要掺杂。后一种方法对于每个集成结构需要一个外延步骤,并且需要几个蚀刻步骤,这可能会降低再生器件的性能。本研究提出了一种无需蚀刻步骤即可集成多个器件的新工艺。
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引用次数: 0
Contacting of buried InP-based layers by epitaxial overgrowth over patterned tungsten features 通过外延过度生长在图案钨特征上的埋藏inp基层的接触
L. Wernersson, L. Jarlskog, A. Lofgren, N. Nilsson, L. Samuelson, W. Seifert, M. Suhara
Features of tungsten have been embedded in InP, with the aim of forming contacts to buried InP-based layers. The conditions for overgrowing W are investigated for various orientations using a ring-structure. The highest lateral growth rate is observed for angles of 30/spl deg/ and 60/spl deg/ from the [110]-direction and wires oriented in these directions may be completely overgrown without the formation of voids above the metal. A specific contact resistance of 4 10/sup -5/ 1/2 cm/sup 2/ has been measured between buried contacts and the n-type InP. Finally, we have studied the dependence of the intrinsic metal resistance on the overgrowth process. The data show that the metal resistance is reduced and values of about 30 1/2 /Sq for 30-nm-thick features are obtained.
钨的特征被嵌入到InP中,目的是与埋藏的InP基层形成接触。利用环状结构研究了不同取向下W的过生长条件。在与[110]方向形成30/spl度和60/spl度的角度时,观察到最高的横向生长速率,并且在这些方向上取向的导线可能完全过度生长而不会在金属上方形成空隙。埋设触点与n型InP之间的比接触电阻为4 10/sup -5/ 1/ 2cm /sup 2/。最后,我们研究了金属固有电阻与过生长过程的关系。数据表明,金属电阻降低,30nm厚特征的电阻值约为30 1/2 /Sq。
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引用次数: 0
Distributed waveguide-integrated InGaAs MSM photodetectors for high-efficiency and ultra-wideband operation 高效、超宽带工作的分布式波导集成InGaAs MSM光电探测器
E. H. Bottcher, H. Pfitzenmaier, E. Droge, S. Kollakowski, A. Strittmatter, D. Bimberg, R. Steingruber
A considerable improvement of bandwidth and efficiency of monolithically integrated distributed InGaAs MSM photodetectors is reported. From a thorough modeling, design criteria for the structural parameters of the optical waveguide and absorber as well as the electrical transmission line are derived which permit the optimization of the quantum efficiency for ultrawideband operation (100-200 GHz). Our experimental results are in very good agreement with the model. Distributed detectors incorporating a ridge waveguide structure embedded in regrown InP are additionally demonstrated to significantly reduce the optical loss of previously reported devices.
报道了单片集成分布式InGaAs MSM光电探测器的带宽和效率的显著提高。通过全面的建模,推导出光波导和吸收器以及电传输线结构参数的设计标准,从而优化超宽带(100-200 GHz)工作的量子效率。我们的实验结果与模型吻合得很好。此外,在再生InP中嵌入脊波导结构的分布式探测器也被证明可以显著降低先前报道的器件的光损耗。
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引用次数: 9
1.55 /spl mu/m high efficiency tapered DFB laser using UV 250 2-in technology process 1.55 /spl mu/m高效锥形DFB激光器采用UV 250 2-in工艺
V. Voiriot, B. Thedrez, J. Gentner, J. Rainsant, V. Colson, C. Duchemin, F. Gaborit, S. Hubert, J. Lafragette, A. Pinquier, L. Roux, B. Fernier
We report on high external efficiency reduced far field divergence DFB laser emitting at 1.55 /spl mu/m. A high spatial resolution lithography is used to define the tapered section of the spot size converter integrated in the device. Thanks to suitable UV-250 contact lithography process, sub-micron patterns, 2-inch homogeneity, and run to run reproducibility is simultaneously achieved. 15/spl deg//spl times/15/spl deg/ front facet divergence is obtained allowing 3.6 dB coupling loss to an AR coated end-cleaved standard optical fibre. Threshold current as low as 11 mA and external efficiency up to 0.42 W/A at 25/spl deg/C have been measured on 500 /spl mu/m long lasers.
我们报道了一种高外效率的低远场散度DFB激光器,发射速度为1.55 /spl mu/m。采用高空间分辨率光刻技术来确定集成在器件中的光斑尺寸转换器的锥形部分。由于采用合适的UV-250接触光刻工艺,可同时实现亚微米图案、2英寸均匀性和运行间再现性。15/spl度//spl倍// 15/spl度/前面散度,允许3.6 dB耦合损耗到AR涂层的端裂标准光纤。在500 /spl μ m长激光器上测量到阈值电流低至11 mA,在25/spl度/C下的外部效率高达0.42 W/A。
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引用次数: 2
Proposal of buried metal heterojunction bipolar transistor and fabrication of HBT with buried tungsten 埋地金属异质结双极晶体管的提出及埋地钨制备HBT
T. Arai, H. Tobita, Y. Harada, M. Suhara, Y. Miyamoto, K. Furuya
We propose a buried metal heterojunction bipolar transistor (BM-HBT), in which buried metal in the collector layer could reduce the total base-collector capacitance. To show the possibility of making a BM-HBT, we fabricated an InP-based HBT with buried tungsten mesh replacing the subcollector layer, where tungsten mesh works as a Schottky collector electrode. A flat heterostructure on the InP collector layer of the buried tungsten mesh was confirmed by a cross-sectional SEM view. A DC current gain of 12 was measured from the common-emitter collector I-V characteristics.
我们提出了一种埋入金属异质结双极晶体管(BM-HBT),其中埋入金属在集电极层可以降低总基极-集电极电容。为了证明制造BM-HBT的可能性,我们制造了一个基于inp的HBT,用埋置钨网代替子集电极层,其中钨网作为肖特基集电极。通过扫描电镜(SEM)的横截面观察,证实了埋置钨网的InP捕集层呈扁平异质结构。从共发射极集电极的I-V特性测得直流电流增益为12。
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引用次数: 8
A 3-channel InP-HEMT with low output conductance 具有低输出电导的3通道InP-HEMT
H. Maher, J. Decobert, A. Falcou, G. Post, A. Scavennec
A triple channel (InGaAs-AlGaInAs-InP) HEMT structure has been investigated for high breakdown voltage applications. This structure takes advantage simultaneously of both the high electron mobility at low field in the InGaAs channel and the low impact ionization coefficient in the InP channel. The transistor actually shows good dynamic performances and high breakdown voltage: for a 0.8 /spl mu/m gate length we obtained: gm=240 mS/mm, Idss=225 mA/mm, Vbrd=6.5 V, f/sub t/=35 GHz, f/sub max/>90 GHz. A specific feature of this HEMT structure is its low output conductance (gm/gd=40 at both low and high frequency) attributed in particular to the fact that the barrier layer is undoped, with the /spl delta/-doping sitting in the middle of the channel. For the 0.8 /spl mu/m gate length devices investigated, the output conductance is much lower than for single or dual channel HEMTs fabricated with similar geometry. This feature is maintained for shorter gate length (at Lg=0.2 /spl mu/m). In this paper an analysis of this output conductance is presented, illustrating the importance of impact ionization and residual traps.
研究了三通道(InGaAs-AlGaInAs-InP) HEMT结构在高击穿电压下的应用。该结构同时利用了InGaAs通道在低场下的高电子迁移率和InP通道的低冲击电离系数。该晶体管实际表现出良好的动态性能和高击穿电压:对于0.8 /spl mu/m栅极长度,我们得到:gm=240 mS/mm, Idss=225 mA/mm, Vbrd=6.5 V, f/sub t/=35 GHz, f/sub max/> = 90 GHz。这种HEMT结构的一个特殊特征是其低输出电导(在低频和高频下均为gm/gd=40),这主要归因于势垒层未掺杂,而/spl δ /掺杂位于通道的中间。对于所研究的栅极长度为0.8 /spl mu/m的器件,输出电导远低于具有相似几何结构的单通道或双通道hemt。当栅极长度较短时(在Lg=0.2 /spl mu/m时),该特性保持不变。本文对该输出电导进行了分析,说明了冲击电离和残留陷阱的重要性。
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引用次数: 1
期刊
Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)
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