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Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)最新文献

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InP-based thermionic coolers 基于inp的热离子冷却器
A. Shakouri, C. Labounty, P. Abraham, J. Piprek, J. Bowers
Thermoelectric coolers are important elements of many optoelectronic systems. Current commercial coolers are based on non-conventional semiconductors such as BiTe. In this paper we analyze the prospect of InP based material to fabricate coolers that can be integrated with optoelectronic components. Experimental results are shown where thermionic emission current in InGaAs/InGaAsP heterostructures is used to enhance the cooling power of conventional bulk material. About one degree cooling over 1 /spl mu/m thick barrier is observed (i.e. a cooling power of 200-300 W/cm/sup 2/). Calculations for InGaAs/InAlAs superlattices show that single stage cooling by as much as 20-30 degrees should be possible.
热电冷却器是许多光电系统的重要组成部分。目前的商用冷却器是基于非传统的半导体,如BiTe。本文分析了InP基材料用于制造可与光电元件集成的冷却器的前景。实验结果表明,利用InGaAs/InGaAsP异质结构中的热离子发射电流可以提高传统块状材料的冷却能力。在1 /spl mu/m厚的屏障上观察到大约一度的冷却(即冷却功率为200-300 W/cm/sup /)。对InGaAs/InAlAs超晶格的计算表明,单阶段冷却应该可以达到20-30度。
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引用次数: 3
1.3 /spl mu/m emission of TlGaP-LEDs grown on GaAs 在GaAs上生长的tlgap - led的1.3 /spl mu/m发射
A. Hubener, J. Schobel, A. Mallwitz, W. Kowalsky
We investigate the growth of the new III-V semiconductor TlGaP on GaAs substrates. TlGaP is a very interesting material for a wide range of emission wavelengths. X-ray diffraction measurements indicate the growth of lattice-matched TlGaP on GaAs. The photoluminescence spectra show room-temperature emission at wavelengths around 1.3 /spl mu/m, which manifests good crystal quality. The electroluminescence spectrum of the first TlGaP LED is in good agreement with the photoluminescence measurements.
我们研究了新型III-V型半导体TlGaP在GaAs衬底上的生长。TlGaP是一种非常有趣的材料,具有很宽的发射波长范围。x射线衍射测量表明,晶格匹配的TlGaP在GaAs上生长。光致发光光谱显示在1.3 /spl mu/m左右的波长有室温发射,晶体质量良好。第一个TlGaP LED的电致发光光谱与光致发光测量结果吻合良好。
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引用次数: 1
Composite-channel InP HEMT for W-band power amplifiers 用于w波段功率放大器的复合通道InP HEMT
Y.C. Chen, P. Chin, D. Ingram, R. Lai, R. Grundbacher, M. Barsky, T. Block, M. Wojtowicz, L. Tran, V. Medvedev, H. Yen, D. Streit, A. Brown
We have developed composite-channel InP-InGaAs HEMTs for W-band high power amplifier applications. The optimized 0.15 /spl mu/m T-gate device demonstrated state-of-the-art g/sub m/-I/sub max/ combination. It also showed a 1.5 V improvement in on-state and off-state breakdown over the conventional InP HEMT without degrading the RF performance. A two-stage MMIC power amplifier built on this device delivered 25 dBm output power with 17 dB linear gain at 94 GHz as measured on wafer. To our knowledge, this is the first demonstration of composite-channel HEMT at 94 GHz with excellent power performance.
我们开发了用于w波段高功率放大器的复合通道InP-InGaAs hemt。优化后的0.15 /spl mu/m t栅器件实现了最先进的g/sub - m/ i /sub - max/组合。与传统的InP HEMT相比,在不降低射频性能的情况下,它的导通和关断击穿性能提高了1.5 V。基于该器件的两级MMIC功率放大器可提供25dbm输出功率和17db线性增益,测量频率为94 GHz。据我们所知,这是94 GHz复合信道HEMT的首次演示,具有出色的功率性能。
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引用次数: 9
High reliable, low threshold 1.3 /spl mu/m SL-QW PACIS (p-substrate Al-oxide Confined Inner Stripe) laser array 高可靠、低阈值1.3 /spl mu/m SL-QW PACIS (p-substrate Al-oxide limited Inner Stripe)激光阵列
N. Iwai, T. Mukaihara, N. Yamanaka, M. Itoh, S. Arakawa, H. Shimizu, A. Kasukawa
A 1.3 /spl mu/m Al-oxide confined inner stripe laser on p-InP substrate (PACIS) has been demonstrated for low cost laser array application. First, we have investigated the oxidation rate of Al/sub x/In/sub 1-x/As layer grown on InP substrate. The optimum conditions were found to be oxidation temperature=500/spl deg/C, layer thickness=100 nm, and Al-contents=0.48 (lattice-match) taking oxidation rate and surface morphology into account. The 50 nm-thick Al/sub 0.48/In/sub 0.52/As-oxide layer provides good current blocking for laser applications. Based on the above investigations, the fabricated PACIS laser shows a low threshold current of 4.0 mA and a high slope efficiency of 0.6 W/A. We have also confirmed high reliability under driving time over 3,000 hours at 85/spl deg/C, 5 mW. A 22-channel laser array consisted of PACIS structure have the average threshold current of 3.98 mA and the standard deviation of 0.42 mA.
在p-InP衬底上制备了一种1.3 /spl μ m Al-oxide密闭内条形激光器(PACIS),用于低成本激光阵列。首先,我们研究了在InP衬底上生长的Al/sub x/In/sub 1-x/As层的氧化速率。考虑氧化速率和表面形貌,最佳条件为氧化温度=500/spl℃,层厚=100 nm, al含量=0.48(晶格匹配)。50 nm厚的Al/sub 0.48/In/sub 0.52/ as -氧化物层为激光应用提供了良好的电流阻挡。基于上述研究,所制备的PACIS激光器具有4.0 mA的低阈值电流和0.6 W/ a的高斜率效率。我们还证实,在85/spl度/C、5 mW的条件下,在超过3000小时的行驶时间内,该系统具有很高的可靠性。由PACIS结构组成的22通道激光阵列的平均阈值电流为3.98 mA,标准差为0.42 mA。
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引用次数: 1
InP-based microcavity light emitting diodes emitting at 1.3 /spl mu/m and 1.55 /spl mu/m 基于inp的微腔发光二极管的发光速率分别为1.3 /spl μ m和1.55 /spl μ m
B. Depreter, S. Verstuyft, I. Moerman, R. Baets, P. van Daele
We present MOCVD-grown InP-based microcavity light emitting diodes emitting at 1300 nm and 1550 nm. They contain 3 InGaAsP quantum wells sandwiched in a /spl lambda/ cavity defined by an InP/InGaAsP distributed Bragg reflector and a 200 nm evaporated Au mirror. Enhanced spectral purity is demonstrated and we observe a total external quantum efficiency of at least 5%. This represents a substantial increase compared to the maximum efficiency that can be extracted from a single facet of a Lambertian source. To the authors' knowledge these are the highest values ever reported for this kind of device.
我们提出了mocvd生长的inp基微腔发光二极管,发光波长分别为1300 nm和1550 nm。它们包含3个InGaAsP量子阱,夹在由InP/InGaAsP分布式Bragg反射器和200 nm蒸发Au反射镜定义的/spl λ /腔中。提高了光谱纯度,我们观察到总外量子效率至少为5%。与从朗伯源的单个面提取的最大效率相比,这代表了一个实质性的提高。据作者所知,这些是有史以来报道的这种设备的最高值。
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引用次数: 2
Thermal behavior of atomic hydrogen passivated acceptors in p-InP p-InP中原子氢钝化受体的热行为
E. Rao, B. Theys, Y. Gottesman, H. Bissessnr
The Zn and Be doped (1 to 2/spl times/10/sup 18/ cm/sup -3/) p-InP samples are first hydrogenated by exposing to a deuterium (D) plasma to passivate (or neutralize) acceptors through dopant-H interactions. Later on, subsequent to 10 min isochronal anneals up to 450/spl deg/C, the reactivation of holes is monitored to determine activation energies, /spl sim/0.7 eV for Zn and 1.08 eV for Be. These values clearly imply a good thermal stability of acceptor passivation and open a way for the implementation of hydrogenation in the photon device technology.
Zn和Be掺杂(1至2/spl倍/10/sup 18/ cm/sup -3/)的p-InP样品首先通过暴露于氘(D)等离子体通过掺杂物- h相互作用钝化(或中和)受体进行氢化。随后,在高达450/spl度/C的10分钟等时退火后,监测空穴的再激活以确定活化能,Zn为0.7 eV, Be为1.08 eV。这些数值表明受体钝化具有良好的热稳定性,为在光子器件技术中实现氢化开辟了一条道路。
{"title":"Thermal behavior of atomic hydrogen passivated acceptors in p-InP","authors":"E. Rao, B. Theys, Y. Gottesman, H. Bissessnr","doi":"10.1109/ICIPRM.1999.773680","DOIUrl":"https://doi.org/10.1109/ICIPRM.1999.773680","url":null,"abstract":"The Zn and Be doped (1 to 2/spl times/10/sup 18/ cm/sup -3/) p-InP samples are first hydrogenated by exposing to a deuterium (D) plasma to passivate (or neutralize) acceptors through dopant-H interactions. Later on, subsequent to 10 min isochronal anneals up to 450/spl deg/C, the reactivation of holes is monitored to determine activation energies, /spl sim/0.7 eV for Zn and 1.08 eV for Be. These values clearly imply a good thermal stability of acceptor passivation and open a way for the implementation of hydrogenation in the photon device technology.","PeriodicalId":213868,"journal":{"name":"Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)","volume":"63 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117157291","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A 50 mm copper/polymer substrate HBT IC technology for >100 GHz MMICs 50mm铜/聚合物衬底HBT集成电路技术,适用于> 100ghz mmic
J. Guthrie, D. Mensa, T. Mathew, Q. Lee, S. Krishnan, S. Jaganathan, S. Ceran, Y. Betser, M. Rodwell
We report HBT integrated circuits fabricated by substrate transfer on 50 mm diameter copper/polymer substrates. Layout and packaging of complex /spl sim/100 GHz circuits is facilitated by the microstrip wiring environment and the low ground lead inductance it affords. For ICs operating above 100 GHz, the process allows radical scaling of the microstrip dielectric thickness without requiring handling of delicate thinned III-V wafers. The process can provide greatly improved heatsinking. Furthermore, full 50 mm wafers can be processed incorporating transferred substrate HBTs, devices which have obtained >500 GHz f/sub max/.
我们报道了在直径50mm的铜/聚合物衬底上通过衬底转移制备的HBT集成电路。复杂/spl sim/ 100ghz电路的布局和封装是由微带布线环境和它提供的低接地引线电感方便。对于工作在100 GHz以上的ic,该工艺允许微带介电厚度的根本缩放,而无需处理精细的薄III-V晶圆。该工艺可以大大改善散热。此外,完整的50毫米晶圆可以加工包含转移基板HBTs的晶圆,器件获得>500 GHz f/sub max/。
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引用次数: 2
Improved homogeneity of LP-MOVPE grown InP/GaInAsP heterostructure for DBR using an optimized liner and susceptor arrangement 采用优化的衬垫和感受器布置改善了LP-MOVPE生长的InP/GaInAsP异质结构的均匀性
R. Westphalen, G. Landgren, B. Stalnacke, R. Beccard
Growth of distributed Bragg reflectors and strain compensated MQW for 1550 nm VCSEL have been investigated in a AIX 200/4 LP-MOVPE system with a 3/spl times/2" wafer configuration using an improved liner and susceptor configuration. The shift in the stopband wavelength for DBR could be reduced by one order of magnitude down to +0.6% (+9 nm) within 40 mm diameter compared to the standard setup. For 1420 nm quaternary layers used in such DBR the area with a wavelength shift of less the 1 nm can nearly be doubled. In case of strain compensated MQW a similar improvement in wavelength homogeneity was observed, mainly due to reduced thickness variation from /spl plusmn/2.5% to /spl plusmn/0.8%.
在AIX 200/4 LP-MOVPE系统中研究了1550 nm VCSEL的分布式Bragg反射镜和应变补偿MQW的生长,该系统采用改进的衬垫和电纳配置,晶圆配置为3/spl倍/2”。与标准设置相比,DBR阻带波长的位移可以在40 mm直径范围内降低一个数量级,降至+0.6% (+9 nm)。对于1420 nm的四元层,波长位移小于1 nm的面积几乎可以增加一倍。对于应变补偿的MQW,波长均匀性也有类似的改善,主要是由于厚度变化从/spl plusmn/2.5%减小到/spl plusmn/0.8%。
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引用次数: 2
Properties of fully self-aligned InAlAs/InGaAs PNP HBTs with very thin bases 具有极薄基底的全自对准InAlAs/InGaAs PNP HBTs的性质
D. Sawdai, X. Zhang, D. Cui, D. Pavlidis, P. Bhattacharya
For the first time, the effect of base thickness and parasitic collector resistance on InP-based PNP HBTs was determined experimentally. HBTs with 350-/spl Aring/ and 900-/spl Aring/ base layers and self-aligned collector contacts demonstrated DC gain of 21.3 and 5.9, f/sub T/ of 18.6 and 8.5 GHz, and f/sub max/ of 27.3 and 20.8 GHz, respectively. This is the highest f/sub T/ reported for any InP-based PNP HBT. Analysis of these HBTs demonstrated that recombination of holes in the neutral base limited the DC gain, and hole transit across the base was the most significant component of /spl tau//sub ec/. In addition, comparison of HBTs with and without self-aligned collectors demonstrated that collector series resistance had a minor but noticeable impact on f/sub T/ as well as the gain and power-added efficiency at 8 GHz.
首次通过实验确定了基底厚度和寄生集电极电阻对inp基PNP HBTs的影响。具有350-/spl Aring/和900-/spl Aring/基面层和自对准集电极触点的HBTs的直流增益分别为21.3和5.9 GHz, f/sub T/分别为18.6和8.5 GHz, f/sub max/分别为27.3和20.8 GHz。这是任何基于inp的PNP HBT报告的最高f/sub T/。对这些hbt的分析表明,中性基极中空穴的重组限制了直流增益,而穿过基极的空穴迁移是/spl tau//sub ec/的最重要组成部分。此外,对带和不带自校准集电极的hbt进行比较表明,集电极串联电阻对f/sub T/以及8 GHz时的增益和附加功率效率有轻微但明显的影响。
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引用次数: 5
High-speed InP/InGaAs heterojunction phototransistor for millimetre-wave fibre radio communications 毫米波光纤无线电通信用高速InP/InGaAs异质结光电晶体管
J. Thuret, C. Gonzalez, J. Benchimol, M. Riet, P. Berdaguer
We report on the performance of a graded-base InP/InGaAs heterojunction phototransistor (HPT) as a direct photodetector and an optoelectronic up-converter in 30 GHz band, investigated at a wavelength of 1.55 /spl mu/m. HPT performances were improved according to the optimised base contact design in order to obtain a higher optical gain G/sub opt/ up to the millimetre-wave range. It is also shown, by analysis and measurements, that a complete description of HPTs can be made using a three-port network representation, with the optical window as an input port. This approach has several advantages in particular, the extraction of the 'optical' transducer power gain G/sub OT/ of the HPTs, needed for designing optoelectronic integrated circuits, OEIC.
在1.55 /spl mu/m波长下,研究了一种梯度基InP/InGaAs异质结光电晶体管(HPT)在30 GHz波段作为直接光电探测器和光电上转换器的性能。根据优化的基触点设计,提高了HPT的性能,在毫米波范围内获得了更高的光增益G/sub /。通过分析和测量还表明,可以使用三端口网络表示,以光学窗口作为输入端口,对hpt进行完整的描述。这种方法有几个优点,特别是提取hpt的“光学”换能器功率增益G/sub OT/,这是设计光电集成电路(OEIC)所需的。
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引用次数: 20
期刊
Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)
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